Description:A SAMPLE MOUNTING AND ROTATING FIXTURE FOR OBSERVATION UNDER SCANNING ELECTRON MICROSCOPE

FIELD OF THE INVENTION
[0001] The present subject matter described herein relates to structure used in the context of scanning electron microscopy (SEM). More specifically, the present invention relates to a sample mounting and rotating fixture over which a sample could be mounted and the mounted sample could be rotated for putting it for scanning electron microscope (SEM) observation.
BACKGROUND OF THE INVENTION
[0002] Background description includes information that may be useful in understanding the present invention. It is not an admission that any of the information provided herein is prior art or relevant to the presently claimed invention, or that any publication specifically or implicitly referenced is prior art.
[0003] Scanning electron microscopy (SEM) is a technique which is used for viewing any sample at very high magnifications. SEM can reach to magnification of 250,000X. At this high magnification very important details and very critical aspects of any sample could be revealed. SEM is considered as a very important tool for metallurgical examination of samples and is highly used in root cause analysis for failure and other works. The samples which are examined under the SEM often need to rotate to get a better picture and better understanding about the sample. But the rotation of sample in SEM is very complex and the electron beam which is falling over the sample is rotated which is very difficult procedure and also time taking and requires a very highly skilled operator to perform the task. Also there is a limitation up to which the beam could be tilted and tilting at any angle is not possible.
[0004] Therefore, a small fixture over which sample could be mounted and rotated as per the requirement is proposed with the help of which sample analysis at any angle of choice could be done.
[0005] In another conventional arts, light microscope light beam is used for viewing the sample. Light microscopes can go up to a maximum magnification of 2000 X. When the samples are required to be viewed at higher magnification then SEM is the obvious choice. However, SEM samples holder need to be put inside a vacuum chamber. Precaution is required be taken to avoid any damage to the SEM system. There should not be any loose powder/parts in the sample/sample hoIder otherwise they may get sucked into the vacuum and might damage the machine.
[0006] Therefore, the said technical problem has also been well considered while developing the present sample mounting and rotating fixture and there is no loose or hanging parts in the current fixture.
[0007] Now, reference may be made to the following patents.
[0008] The patent number JP2002025490A, titled "Sample holder, sample table and sample table fixture for electron microscope" deals with the sample holder for a transmission electron microscope (TEM). In the TEM, the electron beam incidence direction is Z direction. The sample table and the examination sample, is fixed to it, are rotatable by a motor in the range of 0 deg.-360 deg. about an axis in Y direction, which is a direction different from the electron beam incidence direction. Thereby, the electron beam enters from many directions of the examination sample and the examination sample can be examined from many directions.
[0009] Further, the Patent number US6407850B, "Auto tilt stage", deals with semiconductor integrated circuit (IC) manufacturing, and more specifically, to an apparatus for automatically tilting a sample to a desired angle for processing, measurement, or inspection.
[0010] Further, in some other existing arts, Agar Scientific, a UK based scientific instrument company makes fixtures that could rotate the sample for viewing under a scanning electron microscope (SEM), however the cost of the fixture is approximately 400 British pounds, while the cost of the sample rotating fixture for which the current patent is applied is around much lower cost i.e. around 200 Indian Rupees.
[0011] None of the above can fulfill the requirements of invention, for which it is designed. Due to the above reasons, the requirement is to propose cost effective sample mounting anf rotating fixture over which a sample could be mounted and the mounted sample could be rotated for putting it for SEM observation.
[0012] It is thus required to provide a solution to the above problem.

OBJECTS OF THE DISCLOSURE
[0013] It is therefore the object of the present disclosure to overcome the aforementioned and other drawbacks in prior arts.
[0014] It is a primary object of the present disclosure to design a fixture over which a sample could be mounted and the mounted sample could be rotated for putting it for SEM observation.
[0015] It is another object of the present invention to provide the low cost, user friendly and easy to operate fixture for mounting the sample over the platform.
[0016] It is another object of the present invention to provide the fixture to prevent loose or hanging parts, thereby minimizing the risk of foreign particles being introduced into the SEM vacuum chamber during sample loading and unloading.
[0017] These and other objects and advantages of the present subject matter will be apparent to a person skilled in the art after consideration of the following detailed description taken into consideration with accompanying drawings in which preferred embodiments of the present subject matter are illustrated.
SUMMARY OF THE INVENTION
[0018] One or more drawbacks of conventional systems and process are overcome, and additional advantages are provided through the apparatus/composition and a method as claimed in the present disclosure. Additional features and advantages are realized through the technicalities of the present disclosure. Other embodiments and aspects of the disclosure are described in detail herein and are considered to be part of the claimed disclosure.
[0019] Solution to one or more drawbacks of existing technology and additional advantages are provided through the present disclosure. Additional features and advantages are realized through the technicalities of the present disclosure. Other embodiments and aspects of the disclosure are described in detail herein and are considered to be a part of the claimed disclosure.
[0020] Scanning electron microscope is a great metallurgical tool for microscopic example of different samples. Its capability to reach magnifications as high as 250000X and resolution of the order of 1nm makes it a unique characterization tool. Coupled with SEM’s ability to add different detectors such as EDX. WDX and Auger microscopy makes SEM the foremost choice for microscopic examination of any sample. However, one limiting factor of SEM is the use of electron beam as the probe which makes the instrument delicate and require a high degree of skill for operation. Also, the sample is kept under vacuum while observing under SEM. These factors bring the complexity of tilting the sample while under SEM observation.
[0021] The present disclosure relates to a low cost, user friendly and easy to operate fixture designed for mounting sample over a platform which can be rotated along an axis perpendicular to the direction of the electron beam.
[0022] The present disclosure discloses a sample mounting and rotation fixture for use in scanning electron microscopy (SEM). The a sample mounting and rotation fixture comprises an outer cylindrical frame having a plurality of holes, a rotating pin to perform rotation, a platform for securely mounting a sample for SEM observation. The platform is directly attached to the rotating pin, and the rotation of the mounted sample is achieved by manually rotating the pin connected to the platform to adjust the angle at which SEM imaging is conducted.
[0023] In an aspect of the invention, the platform attached to the rotating pin is being mounted on an axis perpendicular to the direction of the electron beam.
[0024] In a further aspect of the invention, the two ends of the pin are rotatably attached to the holes of the outer cylindrical frame of the fixture.
[0025] In an aspect of the invention, the fixture is constructed using a nonmagnetic material to prevent interference with magnetic fields generated by electron beam deflecting magnets commonly used in SEM systems.
[0026] In an aspect of the invention, wherein the platform designated for mounting the sample is of dimensions 20 mm x 20 mm.
[0027] In an aspect of the invention, the outer diameter of the outer cylindrical frame of the fixture measures 1.5 inches.
[0028] In an aspect of the invention, a method for mounting and rotating a sample for SEM observation comprises the following steps:
a. Securing a sample on the platform of the sample mounting and rotation fixture;
b. Rotating the pin attached to the platform to set the desired angle for SEM imaging;
c. Inserting the sample, along with the fixture, into the vacuum chamber of the SEM system;
d. Conducting SEM imaging of the sample as per the instructions of the SEM system.
e. Unloading the sample from the vacuum chamber following SEM imaging, and optionally, adjusting the angle by rotating the pin for subsequent SEM imaging.
[0029] The foregoing summary is illustrative only and is not intended to be in any way limiting. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features will become apparent by reference to the drawings and the following detailed description.
[0030] Various objects, features, aspects, and advantages of the inventive subject matter will become more apparent from the following detailed description of preferred embodiments, along with the accompanying drawing figures in which like numerals represent like components.
[0031] It is to be understood that the aspects and embodiments of the disclosure described above may be used in any combination with each other. Several of the aspects and embodiments may be combined to form a further embodiment of the disclosure.
[0032] The foregoing summary is illustrative only and is not intended to be in any way limiting. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features will become apparent by reference to the drawings and the following detailed description.

BRIEF DESCRIPTION OF THE ACCOMPANYING DRAWINGS
[0033] The illustrated embodiments of the subject matter will be best understood by reference to the drawings, wherein like parts are designated by like numerals throughout. The following description is intended only by way of example, and simply illustrates certain selected embodiments of devices, systems, and processes that are consistent with the subject matter as claimed herein, wherein:-
[0034] It is to be noted, however, that the appended drawings illustrate only typical embodiments of the present subject matter and are therefore not to be considered for limiting of its scope, for the present disclosure may admit to other equally effective embodiments. The detailed description is described with reference to the accompanying figures. In the figures, a reference number identifies the figure in which the reference number first appears. The same numbers are used throughout the figures to reference like features and components. Some embodiments of system or methods or structure in accordance with embodiments of the present subject matter are now described, by way of example, and with reference to the accompanying figures, in which:
[0035] Fig. 1 illustrates the isometric view of the sample mounting and rotating fixture, in accordance with the prior art;
[0036] Fig. 2 illustrates another view of the sample mounting and rotating fixture, in accordance with the prior art;
[0037] Fig. 3 illustrates the top view of the sample mounting and rotating fixture in accordance with present invention;
[0038] Fig. 4 illustrates the front view of the sample mounting and rotating fixture in accordance with present invention;
[0039] A person skilled in the art will easily recognize from the following description that alternative embodiments of the structures and methods illustrated herein may be employed without departing from the principles of the disclosure described herein.
[0040] The figures depict embodiments of the disclosure for purposes of illustration only. One skilled in the art will readily recognize from the following description that alternative embodiments of the structures and methods illustrated herein may be employed without departing from the principles of the disclosure described herein.

DETAIL DESCRIPTION OF INVENTION WITH REFERENCE TO THE ACCOMPANYING DRAWINGS OF THE PREFERRED EMBODIMENTS:
[0041] While the embodiments of the disclosure are subject to various modifications and alternative forms, a specific embodiment thereof has been shown by way of example in the figures and will be described below. It should be understood, however, that it is not intended to limit the disclosure to the particular forms disclosed, but on the contrary, the disclosure is to cover all modifications, equivalents, and alternatives falling within the scope of the disclosure.
[0042] The terms “comprises”, “comprising”, or any other variations thereof used in the disclosure, are intended to cover a non-exclusive inclusion, such that a device, system, assembly that comprises a list of components does not include only those components but may include other components not expressly listed or inherent to such system, or assembly, or device. In other words, one or more elements in a system or device proceeded by “comprises… a” does not, without more constraints, preclude the existence of other elements or additional elements in the system or device.

[0043] Referring to Fig. 1 and Fig 2, which shows the isometric view and another view of the sample mounting and rotaing fixture (100) respectively. The sample mounting and rotating fixture (100) disclosed in the present invention is an apparatus designed to hold or secure the sample being prepared for SEM observation. It is an essential component to ensure the stability and positioning of the sample during the imaging process. The present sample mounting and rotating fixture (100) comprises an outer cylindrical frame (102). The outer cylindrical frame (102) is provided with a plurality of holes (102a, 102b) at the walls of the outer cylindrical frame (102). Further, the fixture (100) is provided with a rotating pin (104). The rotating pin (104) has two ends (104a, 104b). The two ends (104a, 104b) of the rotating pin (104) have been rotatably attached to the holes (102a, 102b) provided at the wall of outer cylindrical frame (102). Further, the fixture (100) discloses a platform (106). The platfiorm is a flat surface that securely mounting a sample intended for SEM observation. The platform (106) is directly attached to the rotating pin (104). The rotation of the mounted sample is achieved by manually rotating the pin (104) connected to the platform (106) to adjust the angle at which SEM imaging is conducted.
[0044] Referring to Fig. 3, it shows top view of the sample mounting and rotating fixture (100) wherein the platform (106) is being rotationally mounted on an axis perpendicular to the direction of the electron beam.
[0045] Referring to Fig. 4, it shows front view of the fixture. The rotaing pin (104) for rotating the platform (106) is designed adequately tight that it will not rotate on its own when the sample holder is inserted inside the vacuum chamber. The outer diameter of the outer cylindrical frame (102) of the fixture (100) is atleast 1.5 inches. Further, the platform (106) for mounting the sample is atleast of dimention 20 mm x 20 mm. The fixture (100) is made up of material including Aluminum metal which is nonmagnetic so as not to interfere with any magnetic field of any magnets used for deflecting the electron beam.
[0046] The material and dimension above are given as example without restricting scope of the invention to the same.Thus, other maerials and dimensiuon readily apparent to a person skilled in the art are understood to be within perview of the invention.
WORKING OF INVENTION
[0047] Referring to the first step, this step comprises securing a sample on the platform (106) of the sample mounting and rotation fixture (100). This step involves preparing the sample for SEM observation. The sample is placed onto the platform of the fixture, which is the part of the apparatus designed for holding and stabilizing the sample during the imaging process. The sample is securely attached or mounted onto this platform as shown in fig. 1. This step ensures that the sample is in the correct position for SEM imaging.
[0048] The second step discloses, rotating the pin attached to the platform to set the desired angle for SEM imaging. After securing the sample on the platform, the pin attached to the platform is manually rotated. This rotation of the pin allows for the adjustment of the angle at which the SEM imaging will be conducted. By changing the angle, different aspects of the sample's surface can be examined, providing a more comprehensive view.
[0049] The third step discloses, inserting the sample, along with the fixture, into the vacuum chamber of the SEM system. Once the sample is secured on the platform, and the desired imaging angle is set, the entire fixture, along with the sample, is introduced into the vacuum chamber of the SEM system. SEM imaging requires a vacuum environment to prevent electron scattering and interference, so this step is essential for capturing high-quality images.
[0050] The fourth step provides, conducting SEM imaging of the sample as per the instructions of the SEM system. With the sample and fixture inside the SEM system's vacuum chamber, the SEM imaging process is initiated following the instructions provided by the SEM system. The electron beam is directed towards the sample, and the resulting interactions are recorded to generate detailed images and data about the sample's surface at the selected angle.
[0051] The fifth step provides unloading the sample from the vacuum chamber following SEM imaging, and optionally, adjusting the angle by rotating the pin for subsequent SEM imaging: After completing the SEM imaging process, the sample, along with the fixture, is removed from the SEM system's vacuum chamber. If further analysis or imaging from a different angle is required, the pin attached to the platform can be rotated to adjust the angle, as needed, for subsequent SEM imaging sessions. This step allows for flexibility in examining different aspects of the sample without the need for extensive repositioning or repreparation.
TECHNICAL ADVANTAGES
[0052] With the help of the solution as proposed herein in the context of the present disclosure, a fixture has been proposed over which a sample could be mounted and the mounted sample could be rotated for putting it for SEM observation.
[0053] The present disclosre provides a low cost, user friendly and easy to operate sample mounting and rotating fixture.
[0054] The present disclosre provides the fixture to prevent loose or hanging parts, thereby minimizing the risk of foreign particles being introduced into the SEM vacuum chamber during sample loading and unloading.
[0055] The present disclosre provides, the rotation of the mounted sample at the required angle by any angle measurement tool for setting.
TEST RESULT
[0056] It will be understood by those within the art that, in general, terms used herein, and especially in the appended claims (e.g., bodies of the appended claims) are generally intended as “open” terms (e.g., the term “including” should be interpreted as “including but not limited to,” the term “having” should be interpreted as “having at least,” the term “includes” should be interpreted as “includes but is not limited to,” etc.). It will be further understood by those within the art that if a specific number of an introduced claim recitation is intended, such an intent will be explicitly recited in the claim, and in the absence of such recitation, no such intent is present. For example, as an aid to understanding, the following appended claims may contain usage of the introductory phrases “at least one” and “one or more” to introduce claim recitations. However, the use of such phrases should not be construed to imply that the introduction of a claim recitation by the indefinite articles “a” or “an” limits any particular claim containing such introduced claim recitation to disclosures containing only one such recitation, even when the same claim includes the introductory phrases “one or more” or “at least one” and indefinite articles such as “a” or “an” (e.g., “a” and/or “an” should typically be interpreted to mean “at least one” or “one or more”); the same holds true for the use of definite articles used to introduce claim recitations. Also, even if a specific number of an introduced claim recitation is explicitly recited, those skilled in the art will recognize that such recitation should typically be interpreted to mean at least the recited number (e.g., the bare recitation of “two recitations,” without other modifiers, typically means at least two recitations or two or more recitations). Furthermore, in those instances where a convention analogous to “at least one of A, B, and C, etc.” is used, in general, such construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B, and C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). In those instances, where a convention analogous to “at least one of A, B, or C, etc.” is used, in general, such construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B, or C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). It will be further understood by those within the art that virtually any disjunctive word and/or phrase presenting two or more alternative terms, whether in the description, claims, or drawings, should be understood to contemplate the possibilities of including one of the terms, either of the terms or both terms. For example, the phrase “A or B” will be understood to include the possibilities of “A” or “B” or “A and B.”
[0057] It will be further appreciated that functions or structures of a plurality of components or steps may be combined into a single component or step, or the functions or structures of one-step or component may be split among plural steps or components. The present disclosure contemplates all of these combinations. Unless stated otherwise, dimensions and geometries of the various structures depicted herein are not intended to be restrictive of the disclosure, and other dimensions or geometries are possible. Also, while a feature of the present disclosure may have been described in the context of only one of the illustrated embodiments, such feature may be combined with one or more other features of other embodiments, for any given application. It will also be appreciated from the above that the fabrication of the unique structures herein and the operation thereof also constitute methods in accordance with the present disclosure. The present disclosure also encompasses intermediate and end products resulting from the practice of the methods herein. The use of “comprising” or “including” also contemplates embodiments that “consist essentially of” or “consist of” the recited feature.
[0058] Each of the appended claims defines a separate invention, which for infringement purposes is recognized as including equivalents to the various elements or limitations specified in the claims. Depending on the context, all references below to the "invention" may in some cases refer to certain specific embodiments only. In other cases, it will be recognized that references to the "invention" will refer to subject matter recited in one or more, but not necessarily all, of the claims.
[0059] Groupings of alternative elements or embodiments of the invention disclosed herein are not to be construed as limitations. Each group member can be referred to and claimed individually or in any combination with other members of the group or other elements found herein. One or more members of a group can be included in, or deleted from, a group for reasons of convenience and/or patentability. When any such inclusion or deletion occurs, the specification is herein deemed to contain the group as modified thus fulfilling the written description of all groups used in the appended claims.
[0060] It will be understood by those within the art that, in general, terms used herein, and especially in the appended claims (e.g., bodies of the appended claims) are generally intended as “open” terms (e.g., the term “including” should be interpreted as “including but not limited to,” the term “having” should be interpreted as “having at least,” the term “includes” should be interpreted as “includes but is not limited to,” etc.). It will be further understood by those within the art that if a specific number of an introduced claim recitation is intended, such an intent will be explicitly recited in the claim, and in the absence of such recitation no such intent is present. For example, as an aid to understanding, the following appended claims may contain usage of the introductory phrases “at least one” and “one or more” to introduce claim recitations. However, the use of such phrases should not be construed to imply that the introduction of a claim recitation by the indefinite articles “a” or “an” limits any particulars claim containing such introduced claim recitation to inventions containing only one such recitation, even when the same claim includes the introductory phrases “one or more” or “at least one” and indefinite articles such as “a” or “an” (e.g., “a” and/or “an” should typically be interpreted to mean “at least one” or “one or more”); the same holds true for the use of definite articles used to introduce claim recitations. In addition, even if a specific number of an introduced claim recitation is explicitly recited, those skilled in the art will recognize that such recitation should typically be interpreted to mean at least the recited number (e.g., the bare recitation of “two recitations,” without other modifiers, typically means at least two recitations, or two or more recitations). Furthermore, in those instances where a convention analogues to “at least one of A, B and C, etc.” is used, in general such a construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B and C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). In those instances where a convention analogous to “at least one of A, B, or C, etc.” is used, in general such a construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B, or C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). It will be further understood by those within the art that virtually any disjunctive word and/or phrase presenting two or more alternative terms, whether in the description, claims, or drawings, should be understood to contemplate the possibilities of including one of the terms, either of the terms, or both terms. For example, the phrase “A or B” will be understood to include the possibilities of “A” or “B” or “A and B”.
[0061] The above description does not provide specific details of manufacture or design of the various components. Those of skill in the art are familiar with such details, and unless departures from those techniques are set out, techniques, known, related art or later developed designs and materials should be employed. Those in the art are capable of choosing suitable manufacturing and design details.
[0062] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present disclosure. It will be appreciated that several of the above-disclosed and other features and functions, or alternatives thereof, may be combined into other systems or applications. Various presently unforeseen or unanticipated alternatives, modifications, variations, or improvements therein may subsequently be made by those skilled in the art without departing from the scope of the present disclosure as encompassed by the following claims.
[0063] The claims, as originally presented and as they may be amended, encompass variations, alternatives, modifications, improvements, equivalents, and substantial equivalents of the embodiments and teachings disclosed herein, including those that are presently unforeseen or unappreciated, and that, for example, may arise from applicants/patentees and others.
[0064] While various aspects and embodiments have been disclosed herein, other aspects and embodiments will be apparent to those skilled in the art. The various aspects and embodiments disclosed herein are for purposes of illustration and are not intended to be limiting, with the true scope and spirit being indicated by the following claims.
, Claims:WE CLAIM:
1. A sample mounting and rotation fixture (100), for use in scanning electron microscopy (SEM) comprising,
an outer cylindrical frame (102) having a plurality of holes (102a, 102b);
a rotating pin (104);
a platform (106) for securely mounting a sample for SEM observation;
wherein the platform is attached to the rotating pin (104); and
the rotation of the mounted sample perfomed by rotating the pin (104) attached to the platform (106) to adjust the angle at which SEM imaging is conducted.

2. The sample mounting and rotation fixture (100), as claimed in claim 1, wherein the platform (106) attached to the rotating pin (104) is being mounted on an axis perpendicular to the direction of the electron beam.

3. The sample mounting and rotation fixture (100), as claimed in claim 1 or 2, wherein the two ends of the pin (104a, 104b) has been rotatably attached to the holes (102a 102b) of outer cylindrical frame (102) of the fixture (100).

4. The sample mounting and rotation fixture (100) as claimed in claims 1-3, wherein the fixture 100 utilizes a nonmagnetic material to avoid interference with magnetic fields generated by electron beam deflecting magnets used in SEM systems.

5. A method for mounting and rotating a sample for SEM observation, comprising the following steps:
a. Securing a sample on the platform of the sample mounting and rotation fixture as claimed in claims 1-4.
b. Rotating the pin attached to the platform to set the desired angle for SEM imaging,
c. Inserting the sample, along with the fixture, into the vacuum chamber of the SEM system,
d. Conducting SEM imaging of the sample as per the instructions of the SEM system,
e. Unloading the sample from the vacuum chamber following SEM imaging,

f. adjusting the angle by rotating the pin for subsequent SEM imaging.