DESC:TECHNICAL FIELD
The present disclosure relates to the field of semiconductor equipment handling devices. More particularly, the disclosure relates to a device and system for cassette adaptor in automation for loading and unloading semiconductor wafers.
BACKGROUND
Semiconductor manufacturing is a complex and precise industry that depends on careful handling of wafers, which are the basic building blocks for electronic components. These wafers, usually made from silicon (Si) or silicon carbide (SiC), are crucial for creating integrated circuits and other semiconductor devices. The quality and reliability of semiconductor devices largely depend on how accurately the wafers are handled during the manufacturing process.
Wafers, especially those made from silicon (Si) and silicon carbide (SiC), are larger and more fragile than other materials. Because of this, wafers require specialized equipment capable of accommodating their size, weight, and material characteristics. Ensuring these wafers are handled without contamination, damage, or misalignment is a major challenge in semiconductor manufacturing. Even a small mistake in positioning can lead to defects, which can negatively impact the performance and yield of the final electronic products.
Traditional wafer handling methods, which often involve manual labor, are time -consuming and prone to human error. These methods can lead to inefficiencies such as slower production rates, a higher risk of wafer damage, and increased production costs. As semiconductor manufacturing advances, there is a rising need for more advanced and automated systems that can improve the efficiency, accuracy, and safety of wafer handling processes.
Therefore, there is a need for technology that to address the limitations of prior art by introducing an advanced automation system specifically designed for the loading and unloading of wafers. This innovation aims to improve the overall semiconductor manufacturing process by ensuring greater accuracy, reducing manual intervention, and minimizing the risks associated with wafer handling.
SUMMARY
In one aspect of the present disclosure, a cassette adaptor system is provided.
The cassette adaptor system includes a L-shaped adaptor that is adapted to hold a detachable cassette tray such that the L-shaped adaptor further includes a first plate and a second plate, which are positioned at right angle to each other and further the detachable cassette tray is adopted to hold the cassette wafers and a actuator that is adapted to receive one or more signal from a controller and facilitate rotation of a rotation shaft. The rotation shaft is attached to the actuator such that the circumference of the rotation shaft is fixed on the base of the second plate of the L-shaped base plate adaptor. Furthermore, one or more sensors are provided, that is facilitated to send and receive one or more signal to a controller and the controller that is adapted to send and receive one or more signal.
In some aspect of the present disclosure, a handle is provided to handle the operation that is attached to the first plate of the L-shaped adaptor to open and close the cassette adaptor system.
In some aspect of the present disclosure, the rotation shaft is attached to the second plate of the L-shaped adaptor and is facilitated to rotate the L-shaped adaptor based on one or more signals received from the controller.
In some aspect of the present disclosure, the detachable cassette tray is facilitated to provide multiple racks to hold the wafers.
In some aspect of present disclosure, the L-shaped adaptor provided one or more dampers where in a first dampers are provided to prevent the transmission of shock during operation of the second plate of the L-shaped adaptor.
In some aspect of the present disclosure, the first plate of the L-shaped adaptor is provided with one or more holders to hold the base of the detachable cassette tray.
In some aspect of the present disclosure, a second damper is provided to prevent the transmission of shock during operation of the first plate of the L-shaped adaptor.
In some aspect of the present disclosure, the rotation shaft passes through one or more bearings that is fixed on a base plate.
In some aspect of the present disclosure, one or more sensors are provided that facilitate to stop the operation of the L-shaped adaptor if any object comes under the handle.
BRIEF DESCRIPTION OF DRAWINGS
The accompanying drawings, which are incorporated in and constitute a part of this specification, show certain aspects of the subject matter disclosed herein and together with the description, help explain some of the principles associated with the disclosed implementations. In the drawing,
Figure 1 illustrates an isometric view of a cassette adaptor system, in accordance with an aspect of the present disclosure;
Figure 2 illustrates an isometric view of the cassette adaptor system with a detachable cassette tray, in accordance with an aspect of the present disclosure;
Figure 3 illustrates a back view of the cassette adaptor system, in accordance with an aspect of the present disclosure;
Figure 4 illustrates a tilting position of L-shaped adaptor within the cassette adaptor system, in accordance with an aspect of the present disclosure; and
Figure 5 illustrates a fully tilted position of L-shaped adaptor of the cassette adaptor system, in accordance with an aspect of the present disclosure.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Various embodiments of the disclosure are discussed in detail below. While specific implementations are discussed, it should be understood that this is done for illustration purposes only. A person skilled in the relevant art will recognize that other components and configurations may be used without parting from the spirit and scope of the disclosure. Thus, the following description and drawings are illustrative and are not to be construed as limiting. Numerous specific details are described to provide a thorough understanding of the disclosure. However, in certain instances, known details are not described in order to avoid obscuring the description.
References to one or an embodiment in the present disclosure can be references to the same embodiment or any embodiment; and such references mean at least one of the embodiments.
Reference to "one embodiment", "an embodiment", “one aspect”, “some aspects”, “an aspect” means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the disclosure. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Moreover, various features are described which may be exhibited by some embodiments and not by others.
The terms used in this specification generally have their ordinary meanings in the art, within the context of the disclosure, and in the specific context where each term is used. Alternative language and synonyms may be used for any one or more of the terms discussed herein, and no special significance should be placed upon whether or not a term is elaborated or discussed herein. In some cases, synonyms for certain terms are provided.
A recital of one or more synonyms does not exclude the use of other synonyms.
The use of examples anywhere in this specification including examples of any terms discussed herein is illustrative only and is not intended to further limit the scope and meaning of the disclosure or of any example term. Likewise, the disclosure is not limited to various embodiments given in this specification. Without intent to limit the scope of the disclosure, examples of instruments, apparatus, methods and their related results according to the embodiments of the present disclosure are given below. Note that titles or subtitles may be used in the examples for convenience of a reader, which in no way should limit the scope of the disclosure. Unless otherwise defined, technical and scientific terms used herein have the meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. In the case of conflict, the present document, including definitions will control.
Additional features and advantages of the disclosure will be set forth in the description which follows, and in part will be obvious from the description, or can be learned by practice of the herein disclosed principles. The features and advantages of the disclosure can be realized and obtained by means of the instruments and combinations particularly pointed out in the appended claims. These and other features of the disclosure will become more fully apparent from the following description and appended claims or can be learned by the practice of the principles set forth herein.
The term “cassette adaptor system 100” and “system 100” are interchangeably used across the context.
As mentioned before, there is a need for technology that overcomes these drawbacks, by introducing an advanced automation system specifically designed for the loading and unloading of wafers. The present disclosure aims to improve the overall semiconductor manufacturing process by ensuring greater accuracy, reducing manual intervention, and minimizing the risks associated with wafer handling.
The cassette adaptor system includes a L-shaped adaptor that is adapted to hold a detachable cassette tray such that the L-shaped adaptor further includes a first plate and a second plate, which are positioned at right angle to each other and further the detachable cassette tray is adopted to hold the cassette wafers and a actuator that is adapted to receive one or more signal from a controller and facilitate rotation of a rotation shaft. The rotation shaft is attached to the actuator such that the circumference of the rotation shaft is fixed on the base of the second plate of the L-shaped base plate adaptor. Furthermore, one or more sensors are provided, that is facilitated to send and receive one or more signal to a controller and the controller is adapted to send and receive one or more signal.
Figure 1 illustrates an isometric view of a cassette adaptor system, in accordance with an aspect of the present disclosure. Herein after the cassette adaptor system 100 referred as a system 100. The system 100 includes a L-shaped adaptor 102, a detachable cassette tray 104, a handle 106, an actuator 110, one or more sensors 114A-N, a base plate 122, and one or more holders 124A-N.
In one aspects of the present disclosure, the system 100 includes the L-shaped adaptor which is a pivotal structural component. The L-shaped adaptor 102 further includes a first plate 102A and a second plate 102B, that are positioned at right angle to each other. This unique geometry provides a robust framework upon which the entire system is built. Further the L-shaped adaptor 102 that is adapted to hold the detachable cassette tray 104 (shown in fig 3). The detachable tray 104 is designed to adapt 150mm or 200mm wafers. The system 100 allows for a quick changeover from 300mm to 150mm or 200mm, ensuring efficient adaptability to varying sizes. Furthermore, the actuator 110 is configured to receive one or more signals from a controller (not shown) that facilitate to rotation of a rotation shaft 112.
In one aspects of the present disclosure, the actuator 110 plays a pivotal role in the system 100 operation that is receiving signals from the unspecified controller. The rotation shaft 112 is attached to the actuator 110 such that the circumference of the rotation shaft 112 is fixed on the base of the second plate 102B of the L-shaped adaptor 102. This arrangement ensures precise and controlled movements of the system 100. The actuator 110 may be either one of the pneumatic actuator, hydraulic actuator, electric actuator, magnetic actuator, thermal actuator or mechanical actuators.
In one aspects of the present disclosure, one or more sensors 114 A-N are provided, that is facilitated to send and receive one or more signals to the controller (not shown). One or more sensors 114 A-N are strategically incorporated into the system 100 to ensure the responsiveness and feedback loop of the system 100. One or more sensors 114 A-N sensors are designed to both send and receive signals to and from the controller (not shown), allowing for real-time monitoring and adjustments in response to changing conditions.
In one aspects of the present disclosure, the controller (not shown) that is configured to send and receive one or more signals from one or more sensors 114 A-N. The controller (not shown) serves as the central hub for the system 100 operation. Further, the controller is responsible for sending and receiving signals, effectively coordinating the functions of various components of the system 100. This central control mechanism ensures that the system 100 operates smoothly and in accordance with predefined parameters.
In some aspect of the present disclosure, the first plate 102A of the L-shaped adaptor 102 is equipped with one or more holders 124 A-N to secure the detachable cassette tray 104 in place. One or more holders 124 A-N are designed to firmly hold the base of the detachable cassette tray 104, ensuring that it remains in the desired position during the system 100 operation. One or more holders 124 A-N added stability is essential for the reliable handling of a cassette wafers 116A-N (shown in fig 2).
In some aspect of the present disclosure, a handle 106 is provided, which is a user - interface component attached to the first plate 102A of the L-shaped adaptor 102. The handle 106 serves a practical purpose in the system 100. The handle 106 allows operators or users to easily open and close the system 100. The handle 106 is user - friendly feature adds convenience and accessibility to the system 100 operation, making it easier for users to interact with the cassette handling process.
Figure 2 illustrates an isometric view of the cassette adaptor system with a detachable cassette tray, in accordance with an aspect of the present disclosure. The system 100 includes the detachable cassette tray 104 that is mounted on the first plate 102A of the L-shaped adaptor 102, such that the base of the detachable cassette tray 104 is held by one or more holders 124A-N. Based on instruction fed to the actuator 110 from the controller, the rotation shaft 112 attached to the second plate 102B shall facilitate to tilt the L-shaped adaptor 102. The tilting action stops by stopping the rotation of the actuator 110. Once the signal stops to send the controller by one or more sensors 114A-N, the tilting action stop.
In some aspect of the present disclosure, the detachable cassette tray 104 is a central element in the system 100. The detachable cassette tray 104 is specially designed to hold one or more cassette wafers 116A-N. The term "detachable" implies that it can be easily removed or replaced. This detachable feature allows for flexibility in loading and unloading one or more cassette wafers 116A-N, making maintenance and workflow adjustments more efficient in industrial settings.
In some aspect of the present disclosure, integrated within the L-shaped adaptor 102 is the detachable cassette tray 104 specially designed to securely hold one or more cassette wafers 116A-N during the system 100 operation. The detachable cassette tray 104 serves as the foundation for the safe and reliable handling of delicate materials.
Figure 3 illustrates a back view of the cassette adaptor system, in accordance with an aspect of the present disclosure. The rotation shaft 112 that is securely attached to the actuator 110. The rotation shaft 112 is a unique feature, that its circumference is firmly fixed to the base of the second plate 102B of the L-shaped adaptor 102. This design enables controlled tilting and positioning of the cassette wafers, enhancing the system's 100 precision.
In some aspect of the present disclosure, the rotation shaft 112 is attached to the second plate 102B of the L-shaped adaptor 102 is facilitated to rotate the L-shaped adaptor 102 based on the one or more signals received from the controller (not shown).
In some aspect of the present disclosure, the rotation shaft 112 is a key component in the system 100 operation. The rotation shaft 112 receives signals from the actuator 110, the rotation shaft 112 engages in controlled rotational movements. This controlled rotation is pivotal for the precise positioning and handling of the one or more cassette wafers 116A-N held within the detachable cassette tray 104. It ensures that the wafers can be tilted or manipulated as needed, facilitating various industrial processes such as semiconductor manufacturing, where precise wafer handling is essential.
In some aspect of the present disclosure, the detachable cassette tray 104 is facilitated to provide one or more racks 108A-N to hold the one or more wafers 116A-N.
In some aspect of the present disclosure, the L-shaped adaptor 102 provided one or more dampers where in a first dampers 118A and 118B are provided to prevent the transmission of shock during operation of the second plate 102B of the L-shaped adaptor 102. Further a rigid stopper 118D is provided to facilitate tilting angle adjustment.
In some aspect of the present disclosure, the L-shaped adaptor 102 is equipped with one or more dampers. Specifically, a second damper 118C is incorporated to prevent the transmission of shock during the operation of the first plate 102A of the L-shaped adaptor 102. This is crucial in ensuring that any sudden impacts or vibrations do not negatively affect the precise handling of the cassette wafers, which is vital in industries requiring high levels of precision.
In some aspect of the present disclosure, the rigid stopper 118D is provided to facilitate tilting angle adjustment of the L-shaped adaptor 102 during operation.
In some aspect of the present disclosure, the first dampers 118A and 118B are also included in the system 100. This first dampers 118A and 118B are strategically positioned to prevent the transmission of shock during the operation of the second plate 102B of the L-shaped adaptor 102. Like the first dampers 118A and 118B, it contributes to the overall stability and protection of the system 100 components, ensuring smooth and reliable operation even in challenging environmental conditions.
In some aspect of the present disclosure, the rotation shaft 112 is passing through one or more bearings 120A-N that are securely fixed on a base plate 122. Bearings are specialized components designed to provide a low-friction, smooth surface for rotating elements like the rotation shaft. They consist of inner and outer rings with rolling elements (such as balls or rollers) between them. These rolling elements reduce friction and enable the rod to rotate with minimal resistance.
In some aspect of the present disclosure, the rotation shaft 112, as it carries out its controlled rotational movements, passes through one or more bearings 120A-N fixed on the base plate 122. These bearings are critical for providing stability and smooth motion during the rotation of the rotation shaft 112. They minimize friction and ensure that the tilting motion is precise and predictable.
In some aspect of the present disclosure, the first plate 102A of the L-shaped adaptor 102 is provided with one or more holders 124 A-N facilitates to hold the base of the detachable cassette tray 104.
In some aspect of the present disclosure, one or more sensors 114A-N are provided that facilitates to stop the operation of L-shaped adaptor 102 if any object comes under the handle 106.
In some aspect of the present disclosure, one or more sensors 114A-N are provided as safety is a paramount concern in industrial settings, and the system 100 addresses this by incorporating one or more sensors 114A-N in the design. One or more sensors 114A-N are responsible for detecting any objects that may obstruct the path of the handle 106. In such cases, one or more sensors 114A-N are facilitating an immediate stoppage of the L-shaped adaptor 102 to prevent any potential accidents or damage. This safety feature enhances the usability and reliability of the system 100 in industrial environments where safety is a top priority.
Figure 4 illustrates a tilting position of L-shaped adaptor within the cassette adaptor system, in accordance with an aspect of the present disclosure. In this configuration, the L-shaped adaptor 102 is shown transitioning to a tilted orientation to facilitate the precise handling and positioning of one or more cassette wafers 116A-N held within the detachable cassette tray 104.
In some aspect of the present disclosure, the process begins when the controller (not shown in the figure) transmits signals to one or more sensors 114A-N, instructing the system 100 to initiate the tilting operation. Upon receiving these signals, one or more sensors 114A-N trigger the actuator 110. The actuator 110, in turn, activates the rotation shaft 112, which is responsible for the controlled rotational movement of the L-shaped adaptor 102. The rotational movement is critical as it ensures that the L-shaped adaptor tilts at a precise angle, enabling the optimal positioning of the cassette wafers 116A-N.
Figure 5 illustrates a fully tilted position of L-shaped adaptor of the cassette adaptor system, in accordance with an aspect of the present disclosure. This fig.5 represents the culmination of the tilting process, where the L-shaped adaptor 102 has reached its maximum tilt angle, ensuring the optimal positioning and handling of the cassette wafers held within the detachable cassette tray 104.
In some aspect of the present disclosure, the tilting process initiates when the controller (not shown) sends precise signals to one or more sensors 114A-N. These one or more sensors 114A-N play a critical role in monitoring the system's 100 status and ensuring the correct sequence of operations. Upon receiving the signals from the controller, the one or more sensors 114A-N trigger the actuator 110 to begin the tilting process. The actuator 110 is responsible for converting the signals into mechanical motion, which is crucial for tilting the L-shaped adaptor 102.
In some aspect of the present disclosure, the actuator 110, once activated, transmits signals to the rotation shaft 112. The rotation shaft 112 is a key component in this system 100, responsible for executing the controlled rotational movements necessary for tilting the L-shaped adaptor 102. As the rotation shaft 112 engages, it rotates the L-shaped adaptor 102 in a controlled manner, gradually increasing the tilt angle until the adaptor reaches the fully tilted position shown in Fig. 5. The controlled rotation of the shaft ensures that the L-shaped adaptor tilts smoothly and precisely, preventing any damage or misalignment of the cassette wafers during the process.
Advantages:
• The present disclosure provides to quick change over from 300mm to 150mm/200mm open cassette Foup adaptor,
• The present disclosure provides automated tilting facility and provisions to handle cassette with AGV.
• The present disclosure provides provision for wafer mapping.
• The present disclosure makes a placement and presence sensors feedback mechanism for proper positioning of cassette.
• In the present disclosures, rotary damper and shock absorber provision for end position.
The implementation set forth in the foregoing description does not represent all implementations consistent with the subject matter described herein. Instead, they are merely some examples consistent with aspects related to the described subject matter. Although a few variations have been described in detail above, other modifications or additions are possible. In particular, further features and/or variations can be provided in addition to those set forth herein. For example, the implementation described can be directed to various combinations and sub combinations of the disclosed features and/or combinations and sub combinations of the several further features disclosed above. In addition, the logic flows depicted in the accompanying figures and/or described herein do not necessarily require the particular order shown, or sequential order, to achieve desirable results. Other implementations may be within the scope of the following claims.
,CLAIMS:1. A system (100), comprising:
an L-shaped adaptor (102) comprising:
a first plate (102A); and
a second plate (102B) positioned at a right angle to the first plate (102A);
a detachable cassette tray (104) configured to be held by the L-shaped
adaptor (102) and adapted to hold a plurality of cassette wafers (116A-N);
an actuator (110) configured to receive one or more signals from a
controller and to facilitate the rotation of a rotation shaft (112); and
one or more sensors (114A-N) configured to monitor the position of the L-
shaped adaptor (102) and send signals to the actuator (110);
wherein the rotation shaft (112) is configured to tilt the L-shaped adaptor
(102) upon receiving signals from the actuator (110).
2. The system (100) as claimed in claim 1, wherein the detachable cassette tray (104) is provided with multiple racks (108A-N) configured to hold the cassette wafers (116A-N) securely during the operation of the system (100).
3. The system (100) as claimed in claim 1, wherein the detachable cassette tray (104) further includes one or more holders (124A-N) on the first plate (102A) to secure the base of the detachable cassette tray (104) during operation.
4. The system (100) as claimed in claim 1, wherein the actuator (110) further includes a feedback mechanism that adjusts the rotational speed of the rotation shaft (112) based on signals received from the one or more sensors (114A-N).
5. The system (100) as claimed in claim 1, wherein the L-shaped adaptor (102) includes one or more dampers (118A-C) to absorb shock and vibrations during operation, enhancing stability and precision.
6. The system (100) as claimed in claim 1, wherein the rotation shaft (112) passes through one or more bearings (120A-N) fixed on a base plate (122) to ensure smooth and stable rotational movement.
7. The system (100) as claimed in claim 1, wherein a rigid stopper (118D) adjusting the tilting angle based on signals from the actuator.
8. The system (100) as claimed in claim 1, wherein one or more sensors (114A-N) are configured to send and receive signals to and from the controller, wherein the sensors (114A-N) are adapted to monitor and control the operation of the system (100).
9. The system (100) as claimed in claim 1, wherein the L-shaped adaptor (102) and detachable cassette tray (104) are configured to provide precise alignment and positioning of the cassette wafers (116A-N) during handling to ensure accuracy in semiconductor manufacturing processes.
10. The system (100) as claimed in claim 1, wherein the detachable tray (104) is designed to adapt 150mm or 200mm wafers.