Temperature Adjustment Device

Abstract: [Problem] To provide a temperature adjustment device that, for adjusting the temperature of a load to a target temperature, can gradually change the temperature of the load to the target temperature while adjusting the temperature even in the middle of the adjustment. [Solution] At each of a plurality of predetermined timings (elapsed times) within a target reach time td, a temperature-set-at-elapsed-time Tn of a load W is calculated from a target temperature gradient Sa (S3), and also the temperature-set-at-elapsed-time Tn is compared with a temperature-measured-at-elapsed-time Tm input from a measurement input unit 50 (S5). A control output unit (53) controls a heating unit 3 and a cooling unit 4, on the basis of the result of the comparison between the temperature-set-at-elapsed-time Tn and the temperature-measured-at-elapsed-time Tm.

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