Defect Detecting Device, And Defect Detecting Method

Abstract: This defect detecting device comprises: an illuminating machine for shining light onto a surface of an object under inspection; a two-dimensional imaging machine which has a visual axis in a normal line direction of the surface of the object under inspection, has a two-dimensional region defined by a first axis in a direction corresponding to a movement direction of the surface of the object under inspection and a second axis in a direction corresponding to a direction perpendicular to the visual axis and the first axis, and generates a plurality of captured images; and a defect detecting machine for detecting a defect on the surface of the object under inspection on the basis of the captured images. The defect detecting machine executes: processing (#5) for setting, in each captured image, a plurality of acquisition regions which are disposed in mutually different positions in the first axis direction and each of which extends in the second axis direction; processing (#10) for linking, for each acquisition region, images included in each acquisition region of the captured images that are generated sequentially in conjunction with the movement of the surface of the object under inspection, to generate a plurality of linked images corresponding to the plurality of acquisition regions; and processing (#15) for detecting a pixel group corresponding to a defect from the plurality of linked images.

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