We Claim
1. A continuous closed loop liquid circulation system for anti-reflection coating
(ARC) applications comprising:
a primary reservoir system comprising a first vessel (102) housing an ARC liquid
5 and a second vessel (104) housing a solvent;
a plurality of mixer distribution tanks (106, 108, 110) configured to mix the ARC
liquid and solvent uniformly, wherein each tank (106,108,110) is equipped with
axial stirring structures and one of the said mixer distribution tanks remains
empty to act as a backup reservoir;
10 a network of manifold distributor (122) and delivery lines (126) for supplying the
mixed liquid to a coating roller (112) above the conveyor belt (114) at a
predefined flow rate;
a filtration unit (116) positioned downstream of the said coating roller (112)
above the conveyor belt 114 for filtering excess liquid returned from the said
15 coating roller (112) above the conveyor belt (114) and redirecting it to one of the
mixer distribution tanks, ensuring continuous circulation and reuse of the coating
solution;
a plurality of peristaltic pumps (118,120) configured to direct a precisely defined
liquid batch into one of the mixer distribution tanks (106,108,110) to coating
20 roller (112) above the conveyor belt (114); and
a tank switching mechanism configured to enable seamless transition between
the mixer distribution tanks (106,108,110) based on liquid level thresholds,
ensuring continuous liquid supply to the coating roller (112) above the conveyor
belt (114).
25 2. The system of claim 1, wherein the plurality of mixer distribution tanks (106,
108, 110) are at least three, wherein one of the said mixer distribution tanks
remains empty to serve as a backup reservoir for preparing fresh coating liquid.
3. The system of claim 1, wherein the solvent is Isopropyl Alcohol (IPA).
4. The system of claim 1, wherein a plurality of fins or meniscus structures in the
mixer distribution tanks (106, 108, 110) are configured to fac