Active Nullification Of Stray Charges On Floating Electrodes In Micro Or Nano Electromechanical Resonator Systems

Abstract: ACTIVE NULLIFICATION OF STRAY CHARGES ON FLOATING ELECTRODES IN MICRO OR NANO ELECTROMECHANICAL RESONATOR SYSTEMS The present disclosure relates to methods and system that enable a real time and active compensation for the effects of accumulated/dissipated stray charges/or accumulated/dissipation stray charges on an electrically floating electrode that couples electrostatically with a resonator by means of application of suitably controlled voltage on another electrode, for e.g., a compensating electrode, that is capacitively coupled with the electrically floating electrode. The control signal for the compensating electrode can be obtained using a feedback circuit that measures the voltage generated by stray charges on the electrically floating electrode using suitable signal conditioning electronics. The present subject matter provides methods to compensate feedthrough signal linking from an input electrode to the output electrode. [Fig. 4]

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