Composition, And Production Method For Semiconductor Element

Abstract: The present invention addresses the problem of providing: a composition that has excellent residue removal performance and excellent anti-corrosion properties of a tungsten-containing film even when used after a predetermined period of time has passed since the production thereof, and is capable of inhibiting deterioration in electrical characteristics of a tungsten-containing film; and a method for producing the semiconductor element. The composition according to the present invention contains: an amine-containing compound that is at least one selected from the group consisting of sorbic acid, citric acid, ammonia, organic amines, quaternary ammonium compounds, and salts thereof; a specific compound having at least one group selected from the group consisting of a phosphono group and a phosphate group; and water. The composition has a pH of 4.0-9.0 at 25°C.

Patent Information

Application #

Filing Date

19 September 2024

Publication Number

05/2025

Publication Type

INA

Invention Field

ELECTRONICS

Status

Email

Parent Application

Applicants

FUJIFILM CORPORATION

26-30, Nishiazabu 2-chome, Minato-ku, Tokyo 1068620

Inventors

1. MURO Naotsugu

c/o FUJIFILM Corporation, 4000, Kawashiri, Yoshida-cho, Haibara-gun, Shizuoka 4210396

2. INABA Tadashi

c/o FUJIFILM Corporation, 4000, Kawashiri, Yoshida-cho, Haibara-gun, Shizuoka 4210396

3. KAMIMURA Tetsuya

c/o FUJIFILM Corporation, 4000, Kawashiri, Yoshida-cho, Haibara-gun, Shizuoka 4210396

Specification

Documents

Application Documents

#	Name	Date
1	202447070817-STATEMENT OF UNDERTAKING (FORM 3) [19-09-2024(online)].pdf	2024-09-19
2	202447070817-REQUEST FOR EXAMINATION (FORM-18) [19-09-2024(online)].pdf	2024-09-19
3	202447070817-PROOF OF RIGHT [19-09-2024(online)].pdf	2024-09-19
4	202447070817-PRIORITY DOCUMENTS [19-09-2024(online)].pdf	2024-09-19
5	202447070817-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105-PCT Pamphlet) [19-09-2024(online)].pdf	2024-09-19
6	202447070817-FORM 18 [19-09-2024(online)].pdf	2024-09-19
7	202447070817-FORM 1 [19-09-2024(online)].pdf	2024-09-19
8	202447070817-DECLARATION OF INVENTORSHIP (FORM 5) [19-09-2024(online)].pdf	2024-09-19
9	202447070817-COMPLETE SPECIFICATION [19-09-2024(online)].pdf	2024-09-19
10	202447070817-FORM-26 [20-09-2024(online)].pdf	2024-09-20
11	202447070817-FORM 3 [22-02-2025(online)].pdf	2025-02-22