Inspection System

Abstract: This inspection system comprises: a semiconductor substrate on which a first inspection circuit and a second inspection circuit are formed; a measurement unit that measures a predetermined characteristic in each of the first inspection circuit and the second inspection circuit; and an estimation unit that, on the basis of a first measurement result of measurement of the first inspection circuit performed by the measurement unit and a second measurement result of measurement of the second inspection circuit performed by the measurement unit, estimates process variation when the first inspection circuit and the second inspection circuit are formed on the semiconductor substrate. The magnitude of variation of the characteristic with respect to the process variation in the second inspection circuit differs from the magnitude of variation of the characteristic with respect to the process variation in the first inspection circuit.

Patent Information

Application #

Filing Date

15 July 2025

Publication Number

30/2025

Publication Type

INA

Invention Field

ELECTRONICS

Status

Email

Parent Application

Applicants

TOKYO ELECTRON LIMITED

3-1, Akasaka 5-chome, Minato-ku, Tokyo 1076325

Inventors

1. MORITA, Shingo

c/o Tokyo Electron Limited, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 1076325

2. FUJISAWA, Yoshinori

c/o Tokyo Electron Limited, 1-1 Fukuhara, Koshi City, Kumamoto 8611116

3. SHIMIZU, Yoichi

c/o Tokyo Electron America, Inc., 2400 Grove Blvd., Austin, Texas 78741

Specification

Documents

Application Documents

#	Name	Date
1	202517067485-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [15-07-2025(online)].pdf	2025-07-15
2	202517067485-STATEMENT OF UNDERTAKING (FORM 3) [15-07-2025(online)].pdf	2025-07-15
3	202517067485-REQUEST FOR EXAMINATION (FORM-18) [15-07-2025(online)].pdf	2025-07-15
4	202517067485-PROOF OF RIGHT [15-07-2025(online)].pdf	2025-07-15
5	202517067485-POWER OF AUTHORITY [15-07-2025(online)].pdf	2025-07-15
6	202517067485-FORM 18 [15-07-2025(online)].pdf	2025-07-15
7	202517067485-FORM 1 [15-07-2025(online)].pdf	2025-07-15
8	202517067485-DRAWINGS [15-07-2025(online)].pdf	2025-07-15
9	202517067485-DECLARATION OF INVENTORSHIP (FORM 5) [15-07-2025(online)].pdf	2025-07-15
10	202517067485-COMPLETE SPECIFICATION [15-07-2025(online)].pdf	2025-07-15
11	202517067485-MARKED COPIES OF AMENDEMENTS [22-08-2025(online)].pdf	2025-08-22
12	202517067485-FORM 13 [22-08-2025(online)].pdf	2025-08-22
13	202517067485-Annexure [22-08-2025(online)].pdf	2025-08-22
14	202517067485-AMMENDED DOCUMENTS [22-08-2025(online)].pdf	2025-08-22