Surface Inspection Device And Surface Inspection Method

Abstract: In this surface inspection device 10, a scratch identifying unit identifies a scratch imaged in an inspection image for each inspection image based on a captured image. A second direction addition processing unit adds up, in a direction corresponding to a second direction that crosses a first direction in the inspection image, pixel values of the scratches identified by the scratch identifying unit, in the direction corresponding to the second direction for the plurality of inspection images. A first direction addition processing unit adds up, in a direction corresponding to the first direction in the inspection image, pixel values of the scratches identified by the scratch identifying unit, in the direction corresponding to the first direction for the plurality of inspection images. A continuous scratch determining unit determines whether separate scratches that occur occasionally on the surface of a target or continuous scratches that occur continuously on the surface of a target are occurring on the basis of the addition result of the second direction addition processing unit and the addition result of the first direction addition processing unit.

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