Treatment Liquid And Method For Treating Object To Be Treated

Abstract: The present invention addresses the problem of providing: a treatment solution for semiconductor devices, the treatment solution having an excellent ability to suppress surface roughness of a metal film containing cobalt; and a method for treating an object to be treated in which the treatment solution is used. The treatment solution of the present invention is to be used for semiconductor devices and comprises: water; a first component that is an alicyclic-type heterocyclic compound containing a nitrogen atom as a ring member atom; and a second component that is an alicyclic-type heterocyclic compound different from the first component and having a hydroxyl group.

Patent Information

Application #

Filing Date

17 October 2025

Publication Number

49/2025

Publication Type

INA

Invention Field

ELECTRONICS

Status

Email

Parent Application

Applicants

FUJIFILM CORPORATION

26-30, Nishiazabu 2-chome, Minato-ku, Tokyo 1068620

Inventors

1. MIZUTANI Atsushi

c/o FUJIFILM Corporation, 4000, Kawashiri, Yoshida-cho, Haibara-gun, Shizuoka 4210396

2. SUGISHIMA Yasuo

c/o FUJIFILM Corporation, 4000, Kawashiri, Yoshida-cho, Haibara-gun, Shizuoka 4210396

3. TAKAHASHI Tomonori

c/o FUJIFILM Corporation, 4000, Kawashiri, Yoshida-cho, Haibara-gun, Shizuoka 4210396

Specification

Documents

Application Documents

#	Name	Date
1	202517100747-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [17-10-2025(online)].pdf	2025-10-17
2	202517100747-STATEMENT OF UNDERTAKING (FORM 3) [17-10-2025(online)].pdf	2025-10-17
3	202517100747-REQUEST FOR EXAMINATION (FORM-18) [17-10-2025(online)].pdf	2025-10-17
4	202517100747-PROOF OF RIGHT [17-10-2025(online)].pdf	2025-10-17
5	202517100747-POWER OF AUTHORITY [17-10-2025(online)].pdf	2025-10-17
6	202517100747-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105-PCT Pamphlet) [17-10-2025(online)].pdf	2025-10-17
7	202517100747-FORM 18 [17-10-2025(online)].pdf	2025-10-17
8	202517100747-FORM 1 [17-10-2025(online)].pdf	2025-10-17
9	202517100747-DECLARATION OF INVENTORSHIP (FORM 5) [17-10-2025(online)].pdf	2025-10-17
10	202517100747-COMPLETE SPECIFICATION [17-10-2025(online)].pdf	2025-10-17
11	202517100747-FORM 3 [13-11-2025(online)].pdf	2025-11-13