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Substrate Processing Apparatus And Substrate Processing System
Abstract: This substrate processing apparatus for processing a substrate comprises: a processing chamber; and a support member arranged in the processing chamber and having a tray support surface for supporting a tray on an upper surface. The tray is formed with a recess for accommodating the substrate on the upper surface thereof. The support member includes a lift pin for lifting the tray at an upper part of the support member. A through hole through which the lift pin is inserted is formed in the support member. The through hole is formed at a position that does not overlap with the tray in a plan view when the tray is arranged on the support member.
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
20 March 2026
Publication Number
17/2026
Publication Type
INA
Invention Field
ELECTRONICS
Status
Email
Parent Application
Applicants
TOKYO ELECTRON LIMITED
3-1, Akasaka 5-chome, Minato-ku, Tokyo
1076325
Inventors
1. MATSUMOTO, Naoki
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
2. AMIKURA, Norihiko
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
3. TERUUCHI, Satoru
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
4. KITAGAWA, Dai
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
5. ITO, Koei
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
6. NAGASEKI, Kazuya
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
7. SATO, Naoki
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
8. SEGUCHI, Taisei
c/o Tokyo Electron Miyagi Limited, 1 Techno Hills, Taiwa-cho, Kurokawa-gun, Miyagi
9813629
Specification
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 202617034143-TRANSLATION OF PRIORITY DOCUMENTS ETC. [20-03-2026(online)].pdf | 2026-03-20 |
| 2 | 202617034143-STATEMENT OF UNDERTAKING (FORM 3) [20-03-2026(online)].pdf | 2026-03-20 |
| 3 | 202617034143-FORM 18 [20-03-2026(online)].pdf | 2026-03-20 |
| 4 | 202617034143-FORM 1 [20-03-2026(online)].pdf | 2026-03-20 |
| 5 | 202617034143-DRAWINGS [20-03-2026(online)].pdf | 2026-03-20 |
| 6 | 202617034143-DECLARATION OF INVENTORSHIP (FORM 5) [20-03-2026(online)].pdf | 2026-03-20 |
| 7 | 202617034143-COMPLETE SPECIFICATION [20-03-2026(online)].pdf | 2026-03-20 |
| 8 | 202617034143-FORM-26 [30-03-2026(online)].pdf | 2026-03-30 |
| 9 | 202617034143-Proof of Right [02-04-2026(online)].pdf | 2026-04-02 |
| 10 | 202617034143-WIPO_PCT_DOC.pdf | 2026-04-09 |
| 11 | 202617034143-PATENT_APPLICATION_PUBLICATION.pdf | 2026-05-02 |