Abstract: The present invention provides a process for etching silicon to form pillarsy, especially for use as the active anode material in Li-ion batteries, the process is simple to operate on a commercial scale since it uses an etching bath containing only a small number of ingredients whose concentration needs to be controlled and it can be cheaper to operate than previous processes. The etching solution comprising: 5 to 10M, e.g. 6 to 8M HF 0.01 to 0.1M Ag+ ions 0.02 to 0.2M NO3- ions, and optionally SiF6 2- ions alkali metal or ammonium ions, and incidental additions and impurities Further NO3- ions, e.g. in the form of an alkali metal or ammonium nitrate salt, are added during the etching process to maintain the concentration of nitrate ions within the above range.
NA
| # | Name | Date |
|---|---|---|
| 1 | 2787-DELNP-2011-AbandonedLetter.pdf | 2019-10-14 |
| 1 | 2787-delnp-2011-GPA-(23-06-2011).pdf | 2011-06-23 |
| 2 | 2787-delnp-2011-Correspondence Others-(23-06-2011).pdf | 2011-06-23 |
| 2 | 2787-DELNP-2011-FER.pdf | 2018-07-25 |
| 3 | 2787-DELNP-2011-Form-2-(28-06-2011).pdf | 2011-06-28 |
| 3 | 2787-delnp-2011-Correspondence-Others-(31-01-2014).pdf | 2014-01-31 |
| 4 | 2787-DELNP-2011-Form-1-(28-06-2011).pdf | 2011-06-28 |
| 4 | 2787-delnp-2011-Claims-(10-10-2012).pdf | 2012-10-10 |
| 5 | 2787-delnp-2011-Correspondence-Others-(10-10-2012).pdf | 2012-10-10 |
| 5 | 2787-DELNP-2011-Correspondence Others-(28-06-2011).pdf | 2011-06-28 |
| 6 | 2787-delnp-2011-GPA-(30-09-2011).pdf | 2011-09-30 |
| 7 | 2787-delnp-2011-Form-3-(30-09-2011).pdf | 2011-09-30 |
| 7 | 2787-delnp-2011-Correspondence Others-(11-09-2012).pdf | 2012-09-11 |
| 8 | 2787-delnp-2011-Form-18-(11-09-2012).pdf | 2012-09-11 |
| 8 | 2787-delnp-2011-Correspondence-Others-(30-09-2011).pdf | 2011-09-30 |
| 9 | 2787-delnp-2011-Abstract.pdf | 2011-12-20 |
| 9 | Abstract.jpg | 2011-12-20 |
| 10 | 2787-delnp-2011-Claims.pdf | 2011-12-20 |
| 10 | 2787-delnp-2011-Form-5.pdf | 2011-12-20 |
| 11 | 2787-delnp-2011-Correspondence Others.pdf | 2011-12-20 |
| 11 | 2787-delnp-2011-Form-3.pdf | 2011-12-20 |
| 12 | 2787-delnp-2011-Description (Complete).pdf | 2011-12-20 |
| 12 | 2787-delnp-2011-Form-2.pdf | 2011-12-20 |
| 13 | 2787-delnp-2011-Drawings.pdf | 2011-12-20 |
| 13 | 2787-delnp-2011-Form-13.pdf | 2011-12-20 |
| 14 | 2787-delnp-2011-Form-1.pdf | 2011-12-20 |
| 15 | 2787-delnp-2011-Drawings.pdf | 2011-12-20 |
| 15 | 2787-delnp-2011-Form-13.pdf | 2011-12-20 |
| 16 | 2787-delnp-2011-Description (Complete).pdf | 2011-12-20 |
| 16 | 2787-delnp-2011-Form-2.pdf | 2011-12-20 |
| 17 | 2787-delnp-2011-Form-3.pdf | 2011-12-20 |
| 17 | 2787-delnp-2011-Correspondence Others.pdf | 2011-12-20 |
| 18 | 2787-delnp-2011-Claims.pdf | 2011-12-20 |
| 18 | 2787-delnp-2011-Form-5.pdf | 2011-12-20 |
| 19 | 2787-delnp-2011-Abstract.pdf | 2011-12-20 |
| 19 | Abstract.jpg | 2011-12-20 |
| 20 | 2787-delnp-2011-Correspondence-Others-(30-09-2011).pdf | 2011-09-30 |
| 20 | 2787-delnp-2011-Form-18-(11-09-2012).pdf | 2012-09-11 |
| 21 | 2787-delnp-2011-Correspondence Others-(11-09-2012).pdf | 2012-09-11 |
| 21 | 2787-delnp-2011-Form-3-(30-09-2011).pdf | 2011-09-30 |
| 22 | 2787-delnp-2011-GPA-(30-09-2011).pdf | 2011-09-30 |
| 23 | 2787-DELNP-2011-Correspondence Others-(28-06-2011).pdf | 2011-06-28 |
| 23 | 2787-delnp-2011-Correspondence-Others-(10-10-2012).pdf | 2012-10-10 |
| 24 | 2787-delnp-2011-Claims-(10-10-2012).pdf | 2012-10-10 |
| 24 | 2787-DELNP-2011-Form-1-(28-06-2011).pdf | 2011-06-28 |
| 25 | 2787-DELNP-2011-Form-2-(28-06-2011).pdf | 2011-06-28 |
| 25 | 2787-delnp-2011-Correspondence-Others-(31-01-2014).pdf | 2014-01-31 |
| 26 | 2787-DELNP-2011-FER.pdf | 2018-07-25 |
| 26 | 2787-delnp-2011-Correspondence Others-(23-06-2011).pdf | 2011-06-23 |
| 27 | 2787-delnp-2011-GPA-(23-06-2011).pdf | 2011-06-23 |
| 27 | 2787-DELNP-2011-AbandonedLetter.pdf | 2019-10-14 |
| 1 | 2787delnp2011_24-07-2018.pdf |