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A Process For I Line Resist Dissolution Modulation Using Hydroxy Styrene Based Ter Polymer
Abstract: The present invention relates to a positive i-line resist composition comprising hydroxystyrene based terpolymer as the dissolution modulator. The composition of the present invention helps in controlling dissolution of resist film surface, particularly when PACs of low degree of esterification are used as one of the ingredients, during pattern development. The composition has potential to pattern low dimension sub-micron features with sharp wall profile as required by the industries. The composition of the present invention shows high resolution, required sensitivity and sharp wall profile, and is suitable for fabrication of semiconductor devices, magnetic bubble memory devices and integrated circuits.
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
23 February 2021
Publication Number
09/2021
Publication Type
INA
Invention Field
PHYSICS
Status
Email
ip.bangalore@foxmandal.in
Parent Application
Patent Number
Legal Status
Grant Date
2022-03-09
Renewal Date
Applicants
1. Indian Space Research Organisation
Department of Space, Antariksh Bhavan, New BEL Road, Bangalore – 560231, India
2. Indian institute of Technology Mandi
Kamand - 175005, Himachal Pradesh, India
Inventors
1. Santu Nandi
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
2. Lalit khillare
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
3. M. Yogesh
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
4. Suman Dolai
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
5. Chullikkattil P. Pradeep
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
6. Satinder K. Sharma
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
7. Anvesh Bogavelly
C/o Indian Space Research Organisation, Department of Space, Antariksh Bhavan, New BEL Road, Bangalore - 560231, India
8. Deep Narayan Tiwari
C/o Indian Space Research Organisation, Department of Space, Antariksh Bhavan, New BEL Road, Bangalore - 560231, India
9. Paritosh Jain
C/o Indian Space Research Organisation, Department of Space, Antariksh Bhavan, New BEL Road, Bangalore - 560231, India
10. Subrata Ghosh
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
11. Kenneth E. Gonsalves
C/o Indian institute of Technology Mandi, Kamand - 175005, Himachal Pradesh, India
12. Surinder Singh
C/o Indian Space Research Organisation, Department of Space, Antariksh Bhavan, New BEL Road, Bangalore - 560231, India
Specification
Claims:Please see the attachments. , Description:Please see the attachments.
Documents
Orders
| Section | Controller | Decision Date |
|---|---|---|
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 202141007495-RELEVANT DOCUMENTS [28-09-2023(online)].pdf | 2023-09-28 |
| 1 | 202141007495-STATEMENT OF UNDERTAKING (FORM 3) [23-02-2021(online)].pdf | 2021-02-23 |
| 2 | 202141007495-IntimationOfGrant09-03-2022.pdf | 2022-03-09 |
| 2 | 202141007495-REQUEST FOR EARLY PUBLICATION(FORM-9) [23-02-2021(online)].pdf | 2021-02-23 |
| 3 | 202141007495-PROOF OF RIGHT [23-02-2021(online)].pdf | 2021-02-23 |
| 3 | 202141007495-PatentCertificate09-03-2022.pdf | 2022-03-09 |
| 4 | 202141007495-FORM-9 [23-02-2021(online)].pdf | 2021-02-23 |
| 4 | 202141007495-2. Marked Copy under Rule 14(2) [08-03-2022(online)].pdf | 2022-03-08 |
| 5 | 202141007495-Retyped Pages under Rule 14(1) [08-03-2022(online)].pdf | 2022-03-08 |
| 5 | 202141007495-FORM-8 [23-02-2021(online)].pdf | 2021-02-23 |
| 6 | 202141007495-FORM 18A [23-02-2021(online)].pdf | 2021-02-23 |
| 6 | 202141007495-AMMENDED DOCUMENTS [11-02-2022(online)].pdf | 2022-02-11 |
| 7 | 202141007495-FORM 1 [23-02-2021(online)].pdf | 2021-02-23 |
| 7 | 202141007495-Annexure [11-02-2022(online)].pdf | 2022-02-11 |
| 8 | 202141007495-FORM 13 [11-02-2022(online)].pdf | 2022-02-11 |
| 8 | 202141007495-EVIDENCE OF ELIGIBILTY RULE 24C1e [23-02-2021(online)].pdf | 2021-02-23 |
| 9 | 202141007495-COMPLETE SPECIFICATION [23-02-2021(online)].pdf | 2021-02-23 |
| 9 | 202141007495-MARKED COPIES OF AMENDEMENTS [11-02-2022(online)].pdf | 2022-02-11 |
| 10 | 202141007495-POA [05-03-2021(online)].pdf | 2021-03-05 |
| 10 | 202141007495-Written submissions and relevant documents [11-02-2022(online)].pdf | 2022-02-11 |
| 11 | 202141007495-Correspondence to notify the Controller [25-01-2022(online)].pdf | 2022-01-25 |
| 11 | 202141007495-FORM 13 [05-03-2021(online)].pdf | 2021-03-05 |
| 12 | 202141007495-FORM-26 [08-03-2021(online)].pdf | 2021-03-08 |
| 12 | 202141007495-FORM-26 [29-12-2021(online)].pdf | 2021-12-29 |
| 13 | 202141007495-Retyped Pages under Rule 14(1) [15-04-2021(online)].pdf | 2021-04-15 |
| 13 | 202141007495-US(14)-HearingNotice-(HearingDate-28-01-2022).pdf | 2021-12-28 |
| 14 | 202141007495-2. Marked Copy under Rule 14(2) [15-04-2021(online)].pdf | 2021-04-15 |
| 14 | 202141007495-AMMENDED DOCUMENTS [21-12-2021(online)].pdf | 2021-12-21 |
| 15 | 202141007495-CLAIMS [21-12-2021(online)].pdf | 2021-12-21 |
| 15 | 202141007495-FER.pdf | 2021-10-18 |
| 16 | 202141007495-ENDORSEMENT BY INVENTORS [21-12-2021(online)].pdf | 2021-12-21 |
| 16 | 202141007495-OTHERS [21-12-2021(online)].pdf | 2021-12-21 |
| 17 | 202141007495-MARKED COPIES OF AMENDEMENTS [21-12-2021(online)].pdf | 2021-12-21 |
| 17 | 202141007495-FER_SER_REPLY [21-12-2021(online)].pdf | 2021-12-21 |
| 18 | 202141007495-FORM 13 [21-12-2021(online)].pdf | 2021-12-21 |
| 18 | 202141007495-FORM 3 [21-12-2021(online)].pdf | 2021-12-21 |
| 19 | 202141007495-FORM 13 [21-12-2021(online)].pdf | 2021-12-21 |
| 19 | 202141007495-FORM 3 [21-12-2021(online)].pdf | 2021-12-21 |
| 20 | 202141007495-FER_SER_REPLY [21-12-2021(online)].pdf | 2021-12-21 |
| 20 | 202141007495-MARKED COPIES OF AMENDEMENTS [21-12-2021(online)].pdf | 2021-12-21 |
| 21 | 202141007495-ENDORSEMENT BY INVENTORS [21-12-2021(online)].pdf | 2021-12-21 |
| 21 | 202141007495-OTHERS [21-12-2021(online)].pdf | 2021-12-21 |
| 22 | 202141007495-CLAIMS [21-12-2021(online)].pdf | 2021-12-21 |
| 22 | 202141007495-FER.pdf | 2021-10-18 |
| 23 | 202141007495-AMMENDED DOCUMENTS [21-12-2021(online)].pdf | 2021-12-21 |
| 23 | 202141007495-2. Marked Copy under Rule 14(2) [15-04-2021(online)].pdf | 2021-04-15 |
| 24 | 202141007495-Retyped Pages under Rule 14(1) [15-04-2021(online)].pdf | 2021-04-15 |
| 24 | 202141007495-US(14)-HearingNotice-(HearingDate-28-01-2022).pdf | 2021-12-28 |
| 25 | 202141007495-FORM-26 [08-03-2021(online)].pdf | 2021-03-08 |
| 25 | 202141007495-FORM-26 [29-12-2021(online)].pdf | 2021-12-29 |
| 26 | 202141007495-Correspondence to notify the Controller [25-01-2022(online)].pdf | 2022-01-25 |
| 26 | 202141007495-FORM 13 [05-03-2021(online)].pdf | 2021-03-05 |
| 27 | 202141007495-POA [05-03-2021(online)].pdf | 2021-03-05 |
| 27 | 202141007495-Written submissions and relevant documents [11-02-2022(online)].pdf | 2022-02-11 |
| 28 | 202141007495-COMPLETE SPECIFICATION [23-02-2021(online)].pdf | 2021-02-23 |
| 28 | 202141007495-MARKED COPIES OF AMENDEMENTS [11-02-2022(online)].pdf | 2022-02-11 |
| 29 | 202141007495-EVIDENCE OF ELIGIBILTY RULE 24C1e [23-02-2021(online)].pdf | 2021-02-23 |
| 29 | 202141007495-FORM 13 [11-02-2022(online)].pdf | 2022-02-11 |
| 30 | 202141007495-FORM 1 [23-02-2021(online)].pdf | 2021-02-23 |
| 30 | 202141007495-Annexure [11-02-2022(online)].pdf | 2022-02-11 |
| 31 | 202141007495-FORM 18A [23-02-2021(online)].pdf | 2021-02-23 |
| 31 | 202141007495-AMMENDED DOCUMENTS [11-02-2022(online)].pdf | 2022-02-11 |
| 32 | 202141007495-Retyped Pages under Rule 14(1) [08-03-2022(online)].pdf | 2022-03-08 |
| 32 | 202141007495-FORM-8 [23-02-2021(online)].pdf | 2021-02-23 |
| 33 | 202141007495-FORM-9 [23-02-2021(online)].pdf | 2021-02-23 |
| 33 | 202141007495-2. Marked Copy under Rule 14(2) [08-03-2022(online)].pdf | 2022-03-08 |
| 34 | 202141007495-PROOF OF RIGHT [23-02-2021(online)].pdf | 2021-02-23 |
| 34 | 202141007495-PatentCertificate09-03-2022.pdf | 2022-03-09 |
| 35 | 202141007495-REQUEST FOR EARLY PUBLICATION(FORM-9) [23-02-2021(online)].pdf | 2021-02-23 |
| 35 | 202141007495-IntimationOfGrant09-03-2022.pdf | 2022-03-09 |
| 36 | 202141007495-RELEVANT DOCUMENTS [28-09-2023(online)].pdf | 2023-09-28 |
| 36 | 202141007495-STATEMENT OF UNDERTAKING (FORM 3) [23-02-2021(online)].pdf | 2021-02-23 |
Search Strategy
| 1 | search202141007495E_17-06-2021.pdf |