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A system for spray-CVD intended for vapour phase deposition of material on substrates such as oxide thin/thick films and to a process for carrying out such spray CVD using such a system. The system involves a novel technique spray-CVD deposition of oxide thin/thick films. In particular the system includes spray gun adapted to generate regulated atomized droplets of the spraying material; a substrate positioned above said spray gun and importantly means to regulate the temperature profile of the atomized droplets during its traverse from the spray gun nozzle up to said substrate for deposition, such that the said droplets strike the substrate in vapour form for uniform deposition on said substrate substantially free of any micro porosity. The system can be used in particular for producing high quality oxide films by way of cost-effective process for various applications such as gate oxide in MOS capacitor and MOSEFTs, as oxide barrier in tunnel diodes, development of ceramic oxide sensors, anti-reflection coating on solar cells and oxide coating on mechanical cutting tools.
Notices, Deadlines & Correspondence
Patent Information
Applicants
INDIAN INSTITUTE OF TECHNOLOGY
Inventors
1. BASU DR.SUKUMAR
2. ROY SOMENATH
3. SINGH SAROJ KR
Specification
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 512-cal-2001-granted-specification.pdf | 2011-10-06 |
| 2 | 512-cal-2001-granted-reply to examination report.pdf | 2011-10-06 |
| 3 | 512-cal-2001-granted-pa.pdf | 2011-10-06 |
| 4 | 512-cal-2001-granted-letter patent.pdf | 2011-10-06 |
| 5 | 512-cal-2001-granted-form 3.pdf | 2011-10-06 |
| 6 | 512-cal-2001-granted-form 2.pdf | 2011-10-06 |
| 7 | 512-cal-2001-granted-form 18.pdf | 2011-10-06 |
| 8 | 512-cal-2001-granted-form 1.pdf | 2011-10-06 |
| 9 | 512-cal-2001-granted-examination report.pdf | 2011-10-06 |
| 10 | 512-cal-2001-granted-drawings.pdf | 2011-10-06 |
| 11 | 512-cal-2001-granted-description (complete).pdf | 2011-10-06 |
| 12 | 512-cal-2001-granted-correspondence.pdf | 2011-10-06 |
| 13 | 512-cal-2001-granted-claims.pdf | 2011-10-06 |
| 14 | 512-cal-2001-granted-abstract.pdf | 2011-10-06 |
| 15 | 00512-cal-2001 p.a.pdf | 2011-10-06 |
| 16 | 00512-cal-2001 form-3.pdf | 2011-10-06 |
| 17 | 00512-cal-2001 form-2.pdf | 2011-10-06 |
| 18 | 00512-cal-2001 form-18.pdf | 2011-10-06 |
| 19 | 00512-cal-2001 form-1.pdf | 2011-10-06 |
| 20 | 00512-cal-2001 drawings.pdf | 2011-10-06 |
| 21 | 00512-cal-2001 description(complete).pdf | 2011-10-06 |
| 22 | 00512-cal-2001 correspondence.pdf | 2011-10-06 |
| 23 | 00512-cal-2001 claims.pdf | 2011-10-06 |
| 24 | 00512-cal-2001 abstract.pdf | 2011-10-06 |