spacers having the second material composition;
a fifth set of spacers laterally adjacent to sidewalls of each of the fourth set of spacers, the fifth set of spacers having the first material composition;
a sixth set of spacers along inner sidewalls of each of the first set of spacers and along sidewalls of each of the fifth set of spacers, the sixth set of spacers having the second material composition; and
a final feature in each opening between adjacent pairs of spacers of the sixth set of spacers.
The target structure of claim 50, wherein the first set of spacers, the second set of spacers, the third set of spacers, the fourth set of spacers, the fifth set of spacers, the sixth set of spacers, and the final features are substantially co-planar with one another.
The target structure of claim 50, wherein each final feature has a lateral width greater than a lateral width of each spacers from the first set of spacers, the second set of spacers, the third set of spacers, the fourth set of spacers, the fifth set of spacers, and the sixth set of spacers.
The target structure of claim 52, wherein the lateral width of each final feature is in the range of 6-12 nanometers.
The target structure of claim 50, wherein each final feature has a seam approximately centered within the final feature.
The target structure of claim 50, wherein each final feature comprises the third material composition.