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An Apparatus And A Method For Single Side Etching Or Polishing Of Si Wafer
Abstract: Disclosed is an apparatus for single side etching/polishing the large area of Si wafer protecting one face in a chemical bath comprising: a Si wafer (1), a silicone sheet (2), a vacuum channel (3), a venturi pump, six guide pins (6) and a Polytetrafluoroethylene (PTFE) base plate (4). The silicone sheet (2) is placed in between the Si wafer (1) and the polished Polytetrafluoroethylene (PTFE) plate (4) to act as a gasket. The silicone sheet (2) is configured with matching holes (7) to locate exactly over the vacuum channel (3) using the guided pins (6). The Si wafer (1) attached to the PTFE plate (4) is dipped in a tank (8) containing chemical etching or polishing solution for any length of time. It facilitates single side etching or polishing of Si wafer with full protection and also protecting the front active surface from damages.
Notices, Deadlines & Correspondence
Patent Information
Applicants
BHARAT HEAVY ELECTRICAL LIMITED
Inventors
1. DR. A.K. SAXENA
2. SHIVANGI
3. DR BHARAT KUMAR PANT
Specification
Claims:Please find the attached file , Description:Please find the attached file
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 201931016206-Correspondence to notify the Controller [12-09-2023(online)].pdf | 2023-09-12 |
| 1 | 201931016206-STATEMENT OF UNDERTAKING (FORM 3) [24-04-2019(online)].pdf | 2019-04-24 |
| 2 | 201931016206-Correspondence to notify the Controller [17-08-2023(online)].pdf | 2023-08-17 |
| 2 | 201931016206-PROOF OF RIGHT [24-04-2019(online)].pdf | 2019-04-24 |
| 3 | 201931016206-POWER OF AUTHORITY [24-04-2019(online)].pdf | 2019-04-24 |
| 3 | 201931016206-FORM-26 [17-08-2023(online)].pdf | 2023-08-17 |
| 4 | 201931016206-US(14)-HearingNotice-(HearingDate-29-08-2023).pdf | 2023-08-03 |
| 4 | 201931016206-FORM 1 [24-04-2019(online)].pdf | 2019-04-24 |
| 5 | 201931016206-FIGURE OF ABSTRACT [24-04-2019(online)].pdf | 2019-04-24 |
| 5 | 201931016206-FER.pdf | 2021-10-18 |
| 6 | 201931016206-FER_SER_REPLY [12-04-2021(online)].pdf | 2021-04-12 |
| 6 | 201931016206-DRAWINGS [24-04-2019(online)].pdf | 2019-04-24 |
| 7 | 201931016206-FORM 3 [12-04-2021(online)].pdf | 2021-04-12 |
| 7 | 201931016206-DECLARATION OF INVENTORSHIP (FORM 5) [24-04-2019(online)].pdf | 2019-04-24 |
| 8 | 201931016206-FORM-26 [12-04-2021(online)].pdf | 2021-04-12 |
| 8 | 201931016206-COMPLETE SPECIFICATION [24-04-2019(online)].pdf | 2019-04-24 |
| 9 | 201931016206-FORM 18 [04-06-2019(online)].pdf | 2019-06-04 |
| 9 | 201931016206-Proof of Right (MANDATORY) [09-05-2019(online)].pdf | 2019-05-09 |
| 10 | 201931016206-Proof of Right (MANDATORY) [09-05-2019(online)].pdf | 2019-05-09 |
| 10 | 201931016206-FORM 18 [04-06-2019(online)].pdf | 2019-06-04 |
| 11 | 201931016206-FORM-26 [12-04-2021(online)].pdf | 2021-04-12 |
| 11 | 201931016206-COMPLETE SPECIFICATION [24-04-2019(online)].pdf | 2019-04-24 |
| 12 | 201931016206-FORM 3 [12-04-2021(online)].pdf | 2021-04-12 |
| 12 | 201931016206-DECLARATION OF INVENTORSHIP (FORM 5) [24-04-2019(online)].pdf | 2019-04-24 |
| 13 | 201931016206-FER_SER_REPLY [12-04-2021(online)].pdf | 2021-04-12 |
| 13 | 201931016206-DRAWINGS [24-04-2019(online)].pdf | 2019-04-24 |
| 14 | 201931016206-FIGURE OF ABSTRACT [24-04-2019(online)].pdf | 2019-04-24 |
| 14 | 201931016206-FER.pdf | 2021-10-18 |
| 15 | 201931016206-US(14)-HearingNotice-(HearingDate-29-08-2023).pdf | 2023-08-03 |
| 15 | 201931016206-FORM 1 [24-04-2019(online)].pdf | 2019-04-24 |
| 16 | 201931016206-POWER OF AUTHORITY [24-04-2019(online)].pdf | 2019-04-24 |
| 16 | 201931016206-FORM-26 [17-08-2023(online)].pdf | 2023-08-17 |
| 17 | 201931016206-Correspondence to notify the Controller [17-08-2023(online)].pdf | 2023-08-17 |
| 18 | 201931016206-Correspondence to notify the Controller [12-09-2023(online)].pdf | 2023-09-12 |
Search Strategy
| 1 | SearchHistoryAE_17-08-2021.pdf |
| 2 | 2020-12-0916-10-22E_09-12-2020.pdf |