An Apparatus And A Method For Single Side Etching Or Polishing Of Si

An Apparatus And A Method For Single Side Etching Or Polishing Of Si Wafer

Abstract: Disclosed is an apparatus for single side etching/polishing the large area of Si wafer protecting one face in a chemical bath comprising: a Si wafer (1), a silicone sheet (2), a vacuum channel (3), a venturi pump, six guide pins (6) and a Polytetrafluoroethylene (PTFE) base plate (4). The silicone sheet (2) is placed in between the Si wafer (1) and the polished Polytetrafluoroethylene (PTFE) plate (4) to act as a gasket. The silicone sheet (2) is configured with matching holes (7) to locate exactly over the vacuum channel (3) using the guided pins (6). The Si wafer (1) attached to the PTFE plate (4) is dipped in a tank (8) containing chemical etching or polishing solution for any length of time. It facilitates single side etching or polishing of Si wafer with full protection and also protecting the front active surface from damages.

Patent Information

Application #

Filing Date

24 April 2019

Publication Number

44/2020

Publication Type

INA

Invention Field

ELECTRONICS

Status

Email

kolkatapatent@Lsdavar.in

Parent Application

Applicants

BHARAT HEAVY ELECTRICAL LIMITED

With one of its Regional offices at REGIONAL OPERATIONS DIVISION (ROD), PLOT NO: 9/1, DJ BLOCK 3RD FLOOR, KARUNAMOYEE, SALT LAKE CITY, KOLKATA – 700 091, having its registered offices at BHEL HOUSE, SIRI FORT, NEW DELHI – 110049, INDIA

Inventors

1. DR. A.K. SAXENA

BHARAT HEAVY ELECTRICALS LIMITED, ASSCP, GWALPAHARI, GURGAON, HARYANA, INDIA, PIN-122003

2. SHIVANGI

BHARAT HEAVY ELECTRICALS LIMITED, ASSCP, GWALPAHARI, GURGAON, HARYANA, INDIA, PIN-122003

3. DR BHARAT KUMAR PANT

BHARAT HEAVY ELECTRICALS LIMITED, ASSCP, GWALPAHARI, GURGAON, HARYANA, INDIA, PIN-122003

Specification

Claims:Please find the attached file , Description:Please find the attached file

Documents

Application Documents

#	Name	Date
1	201931016206-STATEMENT OF UNDERTAKING (FORM 3) [24-04-2019(online)].pdf	2019-04-24
2	201931016206-PROOF OF RIGHT [24-04-2019(online)].pdf	2019-04-24
3	201931016206-POWER OF AUTHORITY [24-04-2019(online)].pdf	2019-04-24
4	201931016206-FORM 1 [24-04-2019(online)].pdf	2019-04-24
5	201931016206-FIGURE OF ABSTRACT [24-04-2019(online)].pdf	2019-04-24
6	201931016206-DRAWINGS [24-04-2019(online)].pdf	2019-04-24
7	201931016206-DECLARATION OF INVENTORSHIP (FORM 5) [24-04-2019(online)].pdf	2019-04-24
8	201931016206-COMPLETE SPECIFICATION [24-04-2019(online)].pdf	2019-04-24
9	201931016206-Proof of Right (MANDATORY) [09-05-2019(online)].pdf	2019-05-09
10	201931016206-FORM 18 [04-06-2019(online)].pdf	2019-06-04
11	201931016206-FORM-26 [12-04-2021(online)].pdf	2021-04-12
12	201931016206-FORM 3 [12-04-2021(online)].pdf	2021-04-12
13	201931016206-FER_SER_REPLY [12-04-2021(online)].pdf	2021-04-12
14	201931016206-FER.pdf	2021-10-18
15	201931016206-US(14)-HearingNotice-(HearingDate-29-08-2023).pdf	2023-08-03
16	201931016206-FORM-26 [17-08-2023(online)].pdf	2023-08-17
17	201931016206-Correspondence to notify the Controller [17-08-2023(online)].pdf	2023-08-17
18	201931016206-Correspondence to notify the Controller [12-09-2023(online)].pdf	2023-09-12

Search Strategy

1	SearchHistoryAE_17-08-2021.pdf
2	2020-12-0916-10-22E_09-12-2020.pdf