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"Composition For Sealing Semiconductor, Semiconductor Device, And Process For Producing Semiconductor Device"
Abstract: The invention provides a composition for sealing a semiconductor, the composition being able to form a thin resin layer, suppress the diffusion of a metal component to a porous interlayer dielectric layer, and exhibit superior adherence with respect to an interconnection material. The composition for sealing a semiconductor contains a resin having two or more cationic functional groups and a weight-average molecular weight of from 2,000 to 100,000; contains sodium and potassium each in an amount based on element content of not more than 10 ppb by weight; and has a volume average particle diameter, measured by a dynamic light scattering method, of not more than 10 nm.
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
31 May 2011
Publication Number
14/2012
Publication Type
INA
Invention Field
ELECTRICAL
Status
Email
Parent Application
Patent Number
Legal Status
Grant Date
2018-03-29
Renewal Date
Applicants
MITSUI CHEMICAL, INC.
5-2, HIGASHI-SHIMBASHI, 1-CHOME, MINATO-KU, TOKYO 105-7117, JAPAN
Inventors
1. SHOKO ONO
C/O MITSUI CHEMICALS, INC., 580-32, NAGAURA, SODEGAURA-SHI, CHIBA 299-0265, JAPAN
2. KAZUO KOHMURA
C/O MITSUI CHEMICALS, INC., 580-32, NAGAURA, SODEGAURA-SHI, CHIBA 299-0265, JAPAN
Specification
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 4063-DELNP-2011-FORM-26 [04-01-2021(online)].pdf | 2021-01-04 |
| 1 | 4063-delnp-2011-Form-3-(29-11-2011).pdf | 2011-11-29 |
| 2 | 4063-delnp-2011-Correspondence-Others-(29-11-2011).pdf | 2011-11-29 |
| 2 | 4063-DELNP-2011-RELEVANT DOCUMENTS [19-03-2020(online)].pdf | 2020-03-19 |
| 3 | 4063-DELNP-2011-RELEVANT DOCUMENTS [14-03-2019(online)].pdf | 2019-03-14 |
| 3 | 4063-delnp-2011-GPA.pdf | 2012-02-15 |
| 4 | 4063-DELNP-2011-Response to office action (Mandatory) [16-04-2018(online)].pdf | 2018-04-16 |
| 4 | 4063-delnp-2011-Form-5.pdf | 2012-02-15 |
| 5 | 4063-DELNP-2011-IntimationOfGrant29-03-2018.pdf | 2018-03-29 |
| 5 | 4063-delnp-2011-Form-3.pdf | 2012-02-15 |
| 6 | 4063-DELNP-2011-PatentCertificate29-03-2018.pdf | 2018-03-29 |
| 6 | 4063-delnp-2011-Form-2.pdf | 2012-02-15 |
| 7 | 4063-delnp-2011-Form-18.pdf | 2012-02-15 |
| 7 | 4063-DELNP-2011-Correspondence-140717.pdf | 2017-07-24 |
| 8 | 4063-DELNP-2011-OTHERS-140717.pdf | 2017-07-24 |
| 8 | 4063-delnp-2011-Form-1.pdf | 2012-02-15 |
| 9 | 4063-delnp-2011-Description (Complete).pdf | 2012-02-15 |
| 9 | 4063-DELNP-2011-Power of Attorney-140717.pdf | 2017-07-24 |
| 10 | 4063-DELNP-2011-ABSTRACT [12-07-2017(online)].pdf | 2017-07-12 |
| 10 | 4063-delnp-2011-Correspondence-others.pdf | 2012-02-15 |
| 11 | 4063-DELNP-2011-CLAIMS [12-07-2017(online)].pdf | 2017-07-12 |
| 11 | 4063-delnp-2011-Claims.pdf | 2012-02-15 |
| 12 | 4063-delnp-2011-Abstract.pdf | 2012-02-15 |
| 12 | 4063-DELNP-2011-COMPLETE SPECIFICATION [12-07-2017(online)].pdf | 2017-07-12 |
| 13 | 4063-DELNP-2011-CORRESPONDENCE [12-07-2017(online)].pdf | 2017-07-12 |
| 13 | 4063-delnp-2011-Form-3-(13-07-2014).pdf | 2014-07-13 |
| 14 | 4063-delnp-2011-Correspondence Other-(13-07-2015).pdf | 2015-07-13 |
| 14 | 4063-DELNP-2011-FER_SER_REPLY [12-07-2017(online)].pdf | 2017-07-12 |
| 15 | 4063-DELNP-2011-FER.pdf | 2017-03-31 |
| 15 | 4063-DELNP-2011-OTHERS [12-07-2017(online)].pdf | 2017-07-12 |
| 16 | Other Patent Document [11-05-2017(online)].pdf | 2017-05-11 |
| 16 | Petition Under Rule 137 [12-07-2017(online)].pdf | 2017-07-12 |
| 17 | Petition Under Rule 137 [12-07-2017(online)].pdf_231.pdf | 2017-07-12 |
| 17 | 4063-DELNP-2011-OTHERS-120517.pdf | 2017-05-16 |
| 18 | 4063-DELNP-2011-Correspondence-120517.pdf | 2017-05-16 |
| 19 | 4063-DELNP-2011-OTHERS-120517.pdf | 2017-05-16 |
| 19 | Petition Under Rule 137 [12-07-2017(online)].pdf_231.pdf | 2017-07-12 |
| 20 | Other Patent Document [11-05-2017(online)].pdf | 2017-05-11 |
| 20 | Petition Under Rule 137 [12-07-2017(online)].pdf | 2017-07-12 |
| 21 | 4063-DELNP-2011-FER.pdf | 2017-03-31 |
| 21 | 4063-DELNP-2011-OTHERS [12-07-2017(online)].pdf | 2017-07-12 |
| 22 | 4063-delnp-2011-Correspondence Other-(13-07-2015).pdf | 2015-07-13 |
| 22 | 4063-DELNP-2011-FER_SER_REPLY [12-07-2017(online)].pdf | 2017-07-12 |
| 23 | 4063-DELNP-2011-CORRESPONDENCE [12-07-2017(online)].pdf | 2017-07-12 |
| 23 | 4063-delnp-2011-Form-3-(13-07-2014).pdf | 2014-07-13 |
| 24 | 4063-DELNP-2011-COMPLETE SPECIFICATION [12-07-2017(online)].pdf | 2017-07-12 |
| 24 | 4063-delnp-2011-Abstract.pdf | 2012-02-15 |
| 25 | 4063-DELNP-2011-CLAIMS [12-07-2017(online)].pdf | 2017-07-12 |
| 25 | 4063-delnp-2011-Claims.pdf | 2012-02-15 |
| 26 | 4063-DELNP-2011-ABSTRACT [12-07-2017(online)].pdf | 2017-07-12 |
| 26 | 4063-delnp-2011-Correspondence-others.pdf | 2012-02-15 |
| 27 | 4063-delnp-2011-Description (Complete).pdf | 2012-02-15 |
| 27 | 4063-DELNP-2011-Power of Attorney-140717.pdf | 2017-07-24 |
| 28 | 4063-delnp-2011-Form-1.pdf | 2012-02-15 |
| 28 | 4063-DELNP-2011-OTHERS-140717.pdf | 2017-07-24 |
| 29 | 4063-DELNP-2011-Correspondence-140717.pdf | 2017-07-24 |
| 29 | 4063-delnp-2011-Form-18.pdf | 2012-02-15 |
| 30 | 4063-delnp-2011-Form-2.pdf | 2012-02-15 |
| 30 | 4063-DELNP-2011-PatentCertificate29-03-2018.pdf | 2018-03-29 |
| 31 | 4063-DELNP-2011-IntimationOfGrant29-03-2018.pdf | 2018-03-29 |
| 31 | 4063-delnp-2011-Form-3.pdf | 2012-02-15 |
| 32 | 4063-DELNP-2011-Response to office action (Mandatory) [16-04-2018(online)].pdf | 2018-04-16 |
| 32 | 4063-delnp-2011-Form-5.pdf | 2012-02-15 |
| 33 | 4063-DELNP-2011-RELEVANT DOCUMENTS [14-03-2019(online)].pdf | 2019-03-14 |
| 33 | 4063-delnp-2011-GPA.pdf | 2012-02-15 |
| 34 | 4063-DELNP-2011-RELEVANT DOCUMENTS [19-03-2020(online)].pdf | 2020-03-19 |
| 34 | 4063-delnp-2011-Correspondence-Others-(29-11-2011).pdf | 2011-11-29 |
| 35 | 4063-delnp-2011-Form-3-(29-11-2011).pdf | 2011-11-29 |
| 35 | 4063-DELNP-2011-FORM-26 [04-01-2021(online)].pdf | 2021-01-04 |
Search Strategy
| 1 | searchstrategy_07-02-2017.pdf |