0001]The present invention is an indoor environment, primarily for an environment in which electrical and electronic equipment is installed, to corrosive environment monitoring apparatus for measuring the corrosion degree by corrosive gases present in said environment.
BACKGROUND
[0002]Electrical in an electronic device, for the purpose of operating the target device stably, reliability is required over time. Also for speed and space saving, electric and electronic parts made of high-density packaging structure is adopted fine wiring structure and thin plated structures are mounted a number. Since slight corrosion damage in these electric and electronic components cause a failure or malfunction at varying electric or magnetic properties, it has been mentioned challenges the reliability of the electrical and electronic devices to suppress the corrosion damage there. To reflect the design and maintenance of corrosion protection according to the degree of corrosive environments, it is required to corrosive installation environment of electrical and electronic devices continues to evaluate easily accurately in a short period of time. In the electrical and electronic devices it has been demanded a device also small and light to diagnose corrosive environment for space saving.
[0003]
　As a method for evaluating the contrast corrosive installation environment of electrical and electronic devices, copper certain period exposure in ISO11844-1 standard, silver, aluminum, iron, a method of evaluating the corrosion degree of zinc normally used. Copper, silver, aluminum, iron, zinc, influence degree is different SO 2 , NO 2 , H 2 is known to corrode in any corrosive gas S. In the ISO standard, quantified gravimetrically corrosion degree of metal exposure for one year, or the corrosion products exposed metal in an electrochemical measurement.
[0004]
　In addition, as another method of evaluating the corrosion resistance of the installation environment, ASHRAE guidelines from (ASHRAE) to evaluate the corrosion resistance of the data center installation environment (ASHRAE TC9.9,2011 Gaseous and Particulate Contamination Guidelines For Data Centers) There has been reported. The ASHRAE guidelines, to quantify the corrosion degree of 1 month exposed metal in an electrochemical measurement.
[0005]
　As further background art of this technical field, Patent Documents 1 and 2, as a method for measuring the type and concentration of the corrosive gases present in "environmental atmosphere, made of copper, silver, aluminum, iron and 52 Alloy five of the metal strip is previously obtained a calibration curve of the X-ray microanalyzer showing the correlation between the X-ray intensity of the corrosion product generated by standing concentration and a predetermined period of corrosive gases, the research environment atmosphere the five metal pieces was left over a predetermined period, after estimating the type of corrosive gas from the corrosion state, obtains the X-ray intensity of the corrosive gas components the corrosion products by X-ray microanalyzer , it is described that an atmosphere Methodology ", characterized by determining the concentration of the comparison to the gas and the calibration curve.
[0006]
　Further, in Patent Document 3 as quantified by corrosive corrosion thickness of the metal environment, "metal or an alloy, or a thin film of single insulator composed of two or more different materials comprising a compound thereof sequentially formed on a substrate, has a physical or / and chemical properties of each of the thin film is different, sensing the gas components in a plurality of environments with a difference in physical or / and chemical properties possessed by the thin film a detection element configured physically or / and environment evaluation, characterized in that performing the environmental evaluation by detecting the change in the chemical properties schemes and environmental evaluation device using the same material of the device "and It has been described to be.
[0007]
　Further, Patent Document 4 corrosive environment as quantified by corrosion thickness of the metal, "a passage structure with one opening, diffusing direction parallel passages corrosive substances from the opening part of the wall of the structure is formed of a transparent substrate, comprising a first and second corrosive environment monitoring device composed of a metal thin film formed on the transparent substrate, said first and second corrosive environment monitoring device, the shape dimension of the region of the color tone was changed by corrosion products of the metal thin film was left in the measurement environment over a given period can be measured through the transparent substrate, a metal of the first corrosive environment monitoring device film is composed of a predetermined material, and a metal thin film of said second corrosion environment monitoring apparatus is composed of a material different from the material of the metal thin film of the first corrosive environment monitoring device It is described that a corrosive environment monitoring device ", characterized in that.
CITATION
Patent Document
[0008]
Patent Document 1: JP 63-305232 Patent Publication
Patent Document 2: JP-A 6-117976 Patent Publication
Patent Document 3: JP 2003-294606 Patent Publication
Patent Document 4: Japanese Patent No. 5798955
Summary of the Invention
Problems that the Invention is to Solve
[0009]
　As described above, the method of evaluating the corrosive installation environment of electrical and electronic devices, various proposals have been made, for example, in the atmosphere survey method of Patent Documents 1 and 2, during installation environment atmosphere electric and electronic devices After left for a predetermined period of time, lifting way home to recover the metal plate, adsorbed gas on the surface of the metal plate is analyzed using an analytical device such as a fluorescent X warfare analyzer. Thus, in situ installation environment of electrical and electronic devices, to analyze the metal plate there is a problem that it is difficult to quantitatively diagnose the corrosive environment. There is also a problem that it is difficult in these atmospheres survey device for installation in electrical and electronic devices that are high-density mounting.
[0010]
　In addition, for example environment evaluation apparatus environmental evaluation method and using the same Patent Document 3, the light reflectance of the thin film device, the light transmittance, in order to convert the change in electrical resistance element to the detected electrical signal to drive the electrical circuit the power supply is required. If you want to use in the customer environment, not ready to power the customer's convenience, there is a problem that it is difficult to use the environment measurement device.
[0011]
　In addition, for example corrosive environment monitoring device of Patent Document 4 has a passage structure with one of the openings, part of the wall surface of the diffusion direction parallel passage structure of corrosive substances from the opening is formed in the transparent substrate, wherein a corrosive environment monitoring device composed of a metal thin film formed on a transparent substrate, can be converted into the corrosion thickness when exposed to the metal plate from the length of the color change region of the metal thin film. The relatively clean environment such as a data center, because it is short and has a length slightly discolored region of the metal thin film on exposure 1 month specified in ASHRAE guidelines, evaluate the corrosion degree of the metal in the ASHRAE guidelines (acceptable silver corrosion thickness 20nm or less to be, there is a problem that it is difficult to less corrosion thickness 30nm copper).
[0012]
　When using the set to a relatively clean environments in Patent Document 4 corrosive environment monitoring device in a relatively contaminated environment, in order to change color all the metal thin film is exposed for one year specified in ISO11844-1 standard there is a problem that it is difficult to measure the corrosion degree.
[0013]
　As the problem common to Patent Documents 1, 2, 3 and 4 thereof, be any corrosive environment monitoring device has one of the sensing unit only, that it is difficult correction of large corrosion data variation there is a problem.
[0014]
　In the present invention from the above, in situ without the need for special analytical instruments, in place of narrow electronic equipment enclosure to be diagnosed, unnecessary power such as a commercial power source or a battery, long-term and short-term and its object is to provide a corrosive environment monitoring apparatus capable of measuring the corrosion degree of the metal over.
Means for Solving the Problems
[0015]
　In order to solve the above problems, the present invention is closed the one end of the box-shaped and the other end of the passageway structure that is an opening, the metal thin film 2 on a part surface of the upper and lower surfaces or side with respect to the opening was placed, a corrosive environment monitoring device comprising a sensor portion which is formed over the metal thin film with a transparent substrate, corrosive environmental monitoring apparatus includes a plurality of corrosive environment monitoring unit in which an opening is disposed adjacent a corrosive environment monitoring apparatus characterized by corrosion detection condition of the metal thin film is to be differences in multiple corrosive environment monitoring unit.
Effect of the invention
[0016]
　According to the present invention, in situ without the need for special analytical instruments, in narrow places of the electronic device housing to be diagnosed, unnecessary power such as a commercial power source or a battery, short-term over the long term metal corrosion degree can be measured.
[0017]
　For example, according to an embodiment of the present invention, the corrosion resistance at relatively clean environment at 1 month of short-term exposure to diagnose accordance with the ASHRAE guidelines were further relatively contaminated with prolonged exposure of 1 year the corrosive environment can be diagnosed accordance with the ISO11844-1 standard.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018]
[1] a perspective view of a corrosive environment monitoring device of the first embodiment.
[2] a top view of the corrosive environment monitoring device of the first embodiment.
[Figure 3] A-A cross-sectional view of the corrosive environment monitoring device of FIG.
[Figure 4] B-B sectional view of the corrosive environment monitoring device of FIG.
[5] a top view showing a corrosion condition of the metal thin film after exposure corrosive environment monitoring device of the first embodiment.
[FIG 6] A-A cross-sectional view of the corrosive environment monitoring device of FIG.
[Figure 7] B-B sectional view of the corrosive environment monitoring device of FIG.
[8] in the wide sensor and a narrow width sensor, showing the relationship between the length and the corrosion thickness of discolored region of the metal thin film FIG.
[9] in a corrosive environment monitoring device of the embodiment, showing the relationship between the corrosion length ratio of discolored area of narrow metal thin film to the length of the color change region of the wide metal thin thickness Fig.
[10] a perspective view of a conventional corrosive environment monitoring device.
[11] a top view of a conventional corrosive environment monitoring device.
[Figure 12] B-B sectional view of the corrosive environment monitoring device of FIG. 11.
[13] a top view showing a corrosion condition of the metal thin film after exposure conventional corrosive environment monitoring device.
[Figure 14] B-B sectional view of FIG. 11 showing the corrosion status of the metal thin film after exposure conventional corrosive environment monitoring device.
In [15] Conventional corrosion environment monitoring apparatus, showing an example of the relationship between length and corrosion thickness discoloration region of the metal thin film FIG.
[16] a perspective view of a corrosive environment monitoring apparatus according to the second embodiment.
[17] a top view of the corrosive environment monitoring device of the second embodiment.
[18] a top view showing a corrosion condition of the metal thin film after exposure corrosive environment monitoring device of the second embodiment.
[19] shows the relationship between the length and the corrosion thickness of discolored region of the metal thin film in Example 2.
Shows the FIG. 20 length ratio and corrosion thickness of discoloration area of the high opening to the length of the discoloration area of the lower opening in the second embodiment relationship.
Perspective view of the corrosive environment monitoring device according to FIG. 21 Example 3.
[22] a perspective view of a corrosive environment monitoring apparatus according to the fourth embodiment.
DESCRIPTION OF THE INVENTION
[0019]
　Hereinafter will be described with reference to the accompanying drawings embodiments of the present invention. In this embodiment, an example of a corrosive environment monitoring apparatus for measuring the primary corrosion degree by corrosive substances present in the installation environment of electrical and electronic devices.
[0020]
　In describing the embodiments of the present invention, to understand the features of this structure, to carry out the described in comparison with the structure in the conventional advantageous. Therefore in the following description, first, the configuration of a conventional corrosive environment monitoring apparatus will be explained.
[0021]
　First described by showing an example of the configuration of a conventional in corrosive environmental monitoring apparatus in FIGS. 10-12. Figure 10 is a perspective view of a conventional corrosive environment monitoring apparatus, FIG. 11 is a top view of a conventional corrosive environment monitoring apparatus, FIG. 12 is a sectional view taken along line B-B in FIG. 11.
[0022]
　Corrosive environment monitoring apparatus 1 as shown in the perspective view of FIG. 10, one end to the central portion of the box-shape is closed, the other end forms a passage structure 4 which is an opening 5. Further aspects, the upper and lower surfaces constituting the channel structure 4, of the inner surface to form a top surface of a metal thin film 2, and covers more metal thin film 2 a transparent substrate 3. Corrosion degree of the metal thin film 2 is a visible from above the corrosive environment monitoring device 1 thereby.
[0023]
　According to this structure, the metal thin film 2 constitute a sensor section, a portion of the wall surface in the passage structure 4 having an opening 5 (in the case of FIG. 10 is a top) is attached to. In the film forming surface channel structure 4 side of the metal thin film 2, so that the transparent substrate 3 to ambient atmosphere side, namely the metal thin film 2 through the transparent substrate 3 As can be observed from the ambient atmosphere side (in FIG. 10 upper) It is attached. The metal thin film 2 is copper used in corrosive environmental monitoring of electrical and electronic apparatus installation environment, in addition to silver, it is possible to use aluminum, iron, and zinc, the color tone is different from the metal of the metal and the corrosion products.
[0024]
　When conventional corrosion environment monitoring device 1 is exposed to the environment, corrosive materials 6 present in the environment from entering from the opening 5 of the channel structure 4, corrode metal thin film 2. The channel structure 4 when is responsible for controlling the corrosion rate of the metal thin-film portion 2 is a sensor unit according to corrosive materials 6 present in the environment. Channel structure 4, the opening 5 is one (left channel structure in FIGS. 11 and 12), on the right side of the channel structure being cut off from the surrounding environment rather than opening. Here corrosive substances, corrosive gases, airborne sea salt, there are dust, below describes the corrosive gas as a representative.
[0025]
　According to the top view of FIG. 11, whereas in order to end closure channel structure 4 by being (right side in the figure) is not a ventilation passage, corrosive gas 6 present in the environment opening of the passage structure 4 5 come gradually penetrated with the elapsed time from. In FIG. 6 'represents a corrosive gas 6 enters the channel structure 4, corrosive substances 6 was internal entry according to FIG. 12 showing a section B-B' of FIG. 11 is the opening portion 5 side contacting the metallic thin film 2.
[0026]
　Then, by a conventional corrosive environment monitoring device 1 penetrates the passage structure 4 describes a method of quantifying the corrosive gas 6 'of the opening 5 near diffused.
[0027]
　In corrosive environment monitoring device 1 of FIG. 10, by limiting the diffusion of the corrosive gas 6 'in the direction of the plane of the paper left, and controls the corrosion on the corrosion environment monitoring device 1. Since the concentration flux of corrosive gas 6 'as the distance from the opening 5 is close is large, the metal thin film 2, the left side as the amount of corrosion increases close to the opening 5. This behavior, for example, "estimated silver corrosion rate of sulfur gas environment" material and environmental Vol. 56, are described in p265-271 (2007). In this literature that the corrosion rate decreases with increasing distance from the source of corrosive gases 6 'are determined by experiment and analysis by the metal plate. Using this technique, it is possible to analyze the corrosion behavior of the corrosive environment monitoring device.
[0028]
　Here due to the use of the thin metal film 2, stops the progression of corrosion in the region corrosion thickness becomes the same as the thickness of the metal thin film 2 (regions where the metal thin film 2 was corroded to the interface between the transparent substrate 3). The region of the metal thin film 2, when observed from the transparent substrate 3 side, it can be confirmed that the change in the color tone of the corrosion products from metallic tone metal thin film 2.
[0029]
　Corrosion condition of the metal thin film 2 after exposure corrosive environment monitoring apparatus 1 shown in section B-B view of a top view and FIG. 14 in FIG. 13. According to FIG 13, in the region corrosion thickness becomes equal to the film thickness by the progress of corrosion of the metal thin film 2 (area metal thin film is corroded to the interface between the substrate), corrosion more does not proceed. Corrosive gas 6 present in the environment further corrodes the right of the metal thin film continues to diffuse from the left side close to the opening 5. As shown in the top view and sectional view taken along line B-B of FIG. 14 in FIG. 13, (the distance from the left edge in the figure to point B) region 7 of metal thin film 2 all the thickness direction is corrosion, with the passage of exposure time spread on the right side.
[0030]
　The ASHRAE guidelines for diagnosing the corrosive environment by the thickness of one month exposure to corrosion products of the metal. The thickness of the corrosion products exposed metal, the film thickness direction all corrosive environment monitoring device by the prior art can be converted from the length of the region 7 of metal thin film corrosion. Elongation rate of the length of the region 7 of the metal thin film all thickness direction is corrosion, depends on the height of the metal film thickness and opening. Its extension rate is, the more the metal thin film is thin, sooner opening is higher.
[0031]
　An example of the thickness of the relationship between the length and exposed the corrosion products of the metal plate of the corrosive environment monitoring device 1 region 7 of metal thin film 2 all the thickness direction is corroded in FIG 15. Figure 15 takes the length of the region 7 discolored on the horizontal axis, and shows the thickness of the corrosion products exposed metal plate on the vertical axis, the thin silver film thickness in particular 20 nm, the passage height is 2 mm, the passage width 5 mm, shows the characteristics when the passage length 20 mm.
[0032]
　According to this characteristic, the slope of the curve is relatively large, the thickness of the corrosion products of the metal plate the length of the region 7 of the corroded metal thin film is exposed even slightly extended greatly increases the (measurement accuracy low) it can be seen. The thickness of the corrosion products exposed metal plate in order to accurately obtain the slopes of the curves small (of the corrosion products of the metal plate exposed even extend a large length of the region 7 of the corroded metal thin film thickness is slightly increased) it is necessary corrosive environment monitoring device.
[0033]
　Note the ASHRAE guidelines by the thickness of one month exposure to corrosion products of the metal, also in ISO11844-1 standard for diagnosing the environmental corrosive by the thickness of the corrosion products of the metal exposed for one year.
[0034]
　Therefore, both corrosive environment monitoring apparatus that can be applied to standards are needed.
Example 1
[0035]
　Above, since the structure and problems of the corrosive environment monitoring device of the prior art has become clear, the configuration of the corrosive environment monitoring device of the present invention will be described below. The operation and configuration example of a corrosive environment monitoring apparatus according to a first embodiment of the present invention shown in FIGS. 1 to 7. Figure 1 is a perspective view showing the overall configuration of a corrosive environment monitoring apparatus according to a first embodiment of the present invention, FIG. 2 is a top view thereof, FIG. 3 is a sectional view taken along A-A of FIG. 2, FIG. 4 of FIG. 2 B- B is a cross-sectional view. The 5, 6, 7 is a top view showing the corrosion status of the metal thin film after exposure corrosive environment monitoring device of Example 1, A-A sectional view of the corrosive environment monitoring device of FIG. 5, FIG. 5 it represents B-B cross-sectional view of the corrosive environment monitoring apparatus, respectively.
[0036]
　Of the corrosive environment monitoring apparatus 1 according to the first embodiment of the present invention as compared to conventional corrosion environment monitoring device 1 in FIG. 10 as apparent from FIG. 1, the corrosive environment monitoring device 1 in the corrosive environment monitoring unit of Example 1 a plurality of sets (in FIG. 1 two pairs) are provided. And corrosion detection conditions in a corrosive environment monitoring unit is assumed to differ. In Embodiment 1 of FIG. 1, the metal thin film 2 is a sensor portion, the first metal thin film 2 under the same conditions as FIG. 10 (the entire top surface of the channel structure 4 covered with a metal thin film), different conditions (channel structure 4 part of the upper surface of the is provided with a second metal thin film 2 'for placing the metal thin film) in the depth direction. Still other conditions (Structure of gout structure 4, such as corrosive gases 6) are the same.
[0037]
　More specifically described. The corrosive environment monitoring apparatus 1, there is a sensor unit consisting of a metal thin film 2 and 2 'which is attached on the transparent substrate 3. The metal thin film 2 is the same width as the channel structure 4, the metal thin film 2 'is narrower than the passage structure 4.
[0038]
　Diffusion in the case of the configuration of the first embodiment, as shown in the top view of FIG. 2, corrosive gas 6 'flow of corrosive gas 6 in the channel structure of the metal thin film 2' in a direction parallel to the channel structure whereas the reaction with the metal thin film is, 'corrosive gas 6 in the channel structure of' the metal thin film 2 is spread with a direction parallel to the channel structure in the vertical direction (the diffusion from the side surface of the metal thin film 2).
[0039]
　Therefore, as shown in FIG. 5 showing the corrosion status of the metal thin film after exposure corrosive environment monitoring device of the first embodiment, be a metal thin film of the same thickness, the area of ​​discoloration of the metal thin film 2 'length ( more from the left end in FIG. 5 of the distance) to the point a, the length of the color change region of the metal thin film 2 (corrosion results in longer than the distance) from the left end of FIG. 5 until point B is obtained. This will be described in more detail.
[0040]
　Figure 8 shows an example of the thickness of the relationship similarly corrosive environment monitoring device 1 corrosion products of the metal plate all thickness direction is exposed and the length of the region 7 of the corroded metal thin film 2 in the Figure 15 Figure although shows by comparison the difference in characteristics in narrow sensor and wide sensor (thin metal film 2) (metal thin film 2 ').
[0041]
　Examples of 8, the narrow metal thin film 2 ', the silver thin width 1 mm, and a silver thin film thickness 20 nm, the passage height 2 mm, passage width 20 mm, a passage length 20 mm, the wider the metal thin film 2, the thin silver film width 5mm , silver thin film thickness 20 nm, the passage height 2 mm, passage width 5 mm, shows the result of measurement as a path length 20 mm. In this way to adopt a different metal film width, determine the thickness of the corrosion products of 1 month exposed metal to ASHRAE guidelines for a narrow width of the metal thin film 2 ', with the wide metal thin film 2 ISO11844-1 standard in can be obtained the thickness of the corrosion products of the metal exposed for one year.
[0042]
　From the relationship of FIG. 8, when the metal thin film 2 and the narrower width than the passage structure 4, narrow metal thin film 2 'is preferably made 1/5 or less of the width than the wide metal thin film 2. This makes it possible to both measure the corrosion degree of metal that were exposed for one year in one month exposure and ISO11844-1 standards in the ASHRAE guidelines.
[0043]
　In corrosive environment monitoring apparatus 1 according to the present invention in this way, two due to the use of the metal thin film 2 and 2 ', it is possible to obtain an average value seeking thickness of corrosion products in two ways . Further calculates a length ratio of the discoloration area of ​​narrow metal thin film to the length of the color change region of the wide metal thin film, it is possible to determine the thickness of the corrosion products from this value. Further, in the corrosive environment monitoring device 1 of the present invention, by averaging determined the thickness of the corrosion products in three different ways, to estimate the thickness of accurately corrosion products.
[0044]
　Here, a method for determining the thickness of the corrosion products from the ratio of the length of the color change region 7 of the narrow metal thin film 2 'for the length of the color change region 7 of the wide metal thin film 2. Relationship between the length and the corrosion thickness of discolored region of the metal thin film, as shown in FIG. 8, the linearity in accordance with the width of the metal thin film is narrower than the width of the channel structure, the width of the channel structure on the opposite It was found to show nonlinearity when the width of the metal thin film is equal. By utilizing this difference in linearity, it is possible to determine the thickness of the corrosion products from the length ratio of the area of ​​discoloration of the narrow metal thin film to the length of the color change region of the wide metal thin film.
[0045]
　An example of length ratio and corrosion thickness relationship discoloration area of ​​narrow metal thin film to the length of the color change region of the wide metal thin film obtained from FIG. 8, shown in FIG. 9. In absolute amount is small range of corrosion thickness, the ratio of the length and the corrosion thickness of discolored area has a good linear relationship. This method, the thickness of the corrosion products is a preferred way to accurately estimate.
Example 2
[0046]
　A configuration example of a corrosive environment monitoring apparatus according to a second embodiment of the present invention shown in FIGS. 16-17. Figure 16 is a perspective view, FIG. 17 is a top view.
[0047]
　The corrosive environment monitoring apparatus 1 according to the second embodiment of the present invention As is apparent from the comparison with the corrosive environment monitoring device 1 of the first embodiment of FIG. 1 in FIG. 16, a plurality of sets of metal thin film having the same configuration (in FIG. 16 common in that two pairs) are provided, but passage structure 4, thus the size of the opening 5 is assumed to differ as corrosion detection conditions in a corrosive environment monitoring unit.
[0048]
　More specifically described. Corrosion The environmental monitoring apparatus 1, the sensor unit comprising two pairs of the metal thin film 2 which is attached on the transparent substrate 3 is placed. The metal thin film 2 are both the same width as the channel structure 4. However, the height of the opening 5 of the channel structure 4 5 'are different structures.
[0049]
　In this case, showing the corrosion status of the metal thin film after exposure corrosive environment monitoring device 1 in the top view of FIG. 18. To the passage of the opening 5 'at the passage of corrosive gases 6 opening 5' opening 5 diffuses to the inside only passage is wide min. Therefore, even the metal thin film 2 of the same thickness, more of the length of the color change region of the opening 5 '(the distance from the left edge of FIG. 18 to point A), the length of the color change region of the opening 5 (in FIG. 18 measurement result that longer than the distance) from the left end to the point B is obtained.
[0050]
　It shows an example of the relationship between the length and the corrosion thickness of discolored region of the metal thin film in FIG. 19. This means that for high channel structure, the thin silver film thickness of 20nm, the passage height 10 mm, the passage width 5 mm, a passage length 20 mm, low passage structure thin silver film thickness of 20nm for passage height 2 mm, passage width 5 mm, path length that is the result of measurement as is 20mm. In this way to adopt a different opening heights, determine the thickness of one month exposure to corrosion product metal for ASHRAE guidelines high opening 5 ', the lower opening 5 in ISO11844-1 standard 1 the thickness of the corrosion products annually exposed metal can be obtained.
[0051]
　In corrosive environment monitoring apparatus 1 of Example 2, 2 for the type of using the opening, it is possible to find the average value seeking thickness of corrosion products in two ways. Furthermore due to the use of two types of metal thin film, to calculate the length ratio of the area of ​​discoloration of the high opening to the length of the discoloration area of ​​the lower opening (wide aperture) (narrow aperture), the value it can be obtained the thickness of the corrosion products from. Further, in the corrosive environment monitoring apparatus 1 of Example 2, by averaging determined the thickness of the corrosion products in three different ways, to estimate the thickness of accurately corrosion products.
[0052]
　Here, explaining the method of obtaining the thickness of the corrosion products from the ratio of the length of the discoloration area of ​​the lower opening to the length of the color change region of the high opening, wide metal thin film This is because the narrow metal thin film mentioned above is the same as that of the way. Relationship between the length and the corrosion thickness of discolored region of the metal thin film, as shown in FIG. 19, the linearity in accordance with the opening is increased, it was found to exhibit non-linearity when the opening is reduced in the opposite. By utilizing this difference in linearity, it is possible to determine the thickness of the corrosion products from the ratio of the length of the color change region of the high opening to the length of the discoloration area of ​​the lower opening.
[0053]
　Further examples of the relationship between the length ratio between the corrosion thickness of discoloration area of ​​the metal thin film of high opening to the length of the color change region of the metal thin film of the low opening determined from FIG. 19, shown in FIG. 20. According to this, the absolute amount is small range of corrosion thickness, the ratio of the length and the corrosion thickness of discolored area has a good linear relationship. This method, the thickness of the corrosion products is a preferred way to accurately estimate.
Example 3
[0054]
　A configuration example of a corrosive environment monitoring apparatus according to a third embodiment of the present invention shown in FIG. 21. 21, the relationship between the wide and narrow width metal thin film of Example 1, a combination scheme the relation height opening of Example 2.
[0055]
　Here, by combining a metal thin film of different widths and different heights channel structure of the opening of the second embodiment, a sensing unit annexed the narrow metal thin film in the path of the high opening wide the passage of the low opening configuring a device having a sensing unit that attaching a thin metal film.
[0056]
　Thus, after to maintain the length ratio between corrosion thickness good linear relationship discoloration area of ​​the sensing portion that attaching a wide metal thin film in the path of the lower opening for one month exposure to for ASHRAE Guidelines metal corrosion It determined the thickness of the product, in ISO11844-1 standards sensing unit annexed a wide metal thin film in the path of the lower opening can be obtained the thickness of the corrosion products of the metal exposed for one year.
Example 4
[0057]
　A configuration example of a corrosive environment monitoring apparatus according to a fourth embodiment of the present invention shown in FIG. 22. 22, the relationship between the wide and narrow width metal thin film of Example 1, a combination scheme the relation height opening of Example 2.
[0058]
　In Example 4, the corrosive environment monitoring apparatus 1, there is a sensor unit consisting of a metal thin film 2 and 2 'which is attached on the transparent substrate 3. The metal thin film 2 is the same width as the channel structure 4, the metal thin film 2 'is narrower than the passage structure 4. Wherein the metal thin film 2 'is attached in contact with the side wall surface of the opening.
[0059]
　Thus, compared to the structure of attaching a thin metal film 2 in the middle of the opening, the effect equivalent to the structure having substantially twice the width by attached in contact with the side wall surface is obtained, et al., Space-saving environmental monitoring device It can contribute to the reduction.
DESCRIPTION OF SYMBOLS
[0060]
1: Corrosion Environment monitoring device, 2, 2 ': metal thin film, 3: transparent substrate, 4: passage structure, 5: opening, 6,6': corrosive gas, 7: metal thin film all thickness direction is corroded area of

WE CLAIM

Is closed the one end of the box-shaped, and the other end of the passageways structure and opening, placing a metal thin film 2 on a part surface of the upper and lower surfaces or side with respect to the opening, covering the metal thin film of a transparent substrate a corrosive environment monitoring device comprising a sensor part formed Te,
　corrosive environmental monitoring apparatus includes a plurality of corrosive environment monitoring unit in which the opening is arranged adjacent the metal in a plurality of corrosive environmental monitoring unit corrosive environment monitoring apparatus characterized by corrosion detection condition of the thin film is to be different.
[Requested item 2]
　A corrosive environment monitoring apparatus according to claim 1,
　and characterized in that in order to different corrosion detection condition of the metal thin film, the width of the metal thin film for the depth direction of the channel structure is so different corrosive environment monitoring device that.
[Requested item 3]
　A corrosive environment monitoring apparatus according to claim 1,
　in order to differ corrosion detection condition of the metal thin film, corrosive environment monitoring apparatus characterized by opening area of said passage structure is adapted to different .
[Requested item 4]
　A corrosive environment monitoring apparatus according to claim 1,
　in order to differ corrosion detection condition of the metal thin film, with a width of the metal thin film for the depth direction of the passage structure is such that differences, said passage corrosive environment monitoring apparatus characterized by opening area of the structure is to be different.
[Requested item 5]
　A corrosive environment monitoring apparatus according to claim 2,
　the width of the metal thin film in the corrosive environment monitoring unit, corrosive environment monitoring apparatus characterized by the ratio is composed of 1/5 of the metal thin film .
[Requested item 6]
　A corrosive environment monitoring apparatus according to claim 3,
　opening area of the passage structure in the corrosive environment monitoring unit, corrosive environments, characterized in that the ratio is the opening area of 1/5 or less monitoring device.
[Requested item 7]
　A corrosive environment monitoring device according to any one of claims 1 to 6,
　the material of the metal thin film, copper, silver, gold-plated, iron, iron-nickel alloys, among aluminum or zinc least corrosive environment monitoring apparatus characterized by includes one.
[Requested item 8]
　In a passage structure with one of the openings, part of the wall surface of the diffusion direction parallel passage structure of corrosive substances from the opening is formed by a transparent substrate, a metal thin film formed on the transparent substrate comprising a first and second corrosive environment monitoring unit configured,
　the first and second corrosive environment monitoring unit is changed by corrosion products of the metal thin film was left in the measurement environment over a given period of time for and geometry of the color tone of the area, the measurable through the transparent substrate,
　the first corrosive environment monitoring unit and the second corrosive environment monitoring unit has a height different channel structure of each of the openings or of each, corrosive environment monitoring apparatus, wherein the width is composed of a metal thin film of different predetermined materials.
[Requested item 9]
　In a passage structure with one of the openings, part of the wall surface of the diffusion direction parallel passage structure of corrosive substances from the opening is formed by a transparent substrate, a metal thin film formed on the transparent substrate comprising a first and second corrosive environment monitoring unit configured,
　the first and second corrosive environment monitoring unit is changed by corrosion products of the metal thin film was left in the measurement environment over a given period of time for and geometry of the color tone of the area can be measured through the transparent substrate,
　the first corrosive environment monitoring unit is composed of a metal thin film having the same width as the opening in the predetermined material, and said second corrosion environment monitoring unit corrosive environment monitoring apparatus characterized by being composed of a metal thin film narrower than the opening of the same material as the material of the metal thin film of the first corrosive environment monitoring unit.
[Requested item 10]
　In a passage structure with one of the openings, part of the wall surface of the diffusion direction parallel passage structure of corrosive substances from the opening is formed by a transparent substrate, a metal thin film formed on the transparent substrate comprising a first and second corrosive environment monitoring unit configured,
the first and second corrosive environment monitoring unit is changed by corrosion products of the metal thin film was left in the measurement environment over a given period of time for and geometry of the color tone of the area can be measured through the transparent substrate,
　wherein said second corrosion environment monitoring unit and the first corrosive environment monitoring unit is made of a metal thin film of the same material, the high of the opening corrosive environment monitoring apparatus, wherein a has a different structure of.