1. A device for monitoring corrosive environment comprising: a sensor unit; 5 at least one passage structure each of which is formed together with the sensor unit so as to control intrusion of a corrosive substance present in an atmosphere; and a metal film included in the sensor unit and disposed inside the at least one passage structure, wherein an electric resistance value of the metal film varies depending on expansion of 10 a corroded region of the metal film generated by the corrosive substance intruding from an opening of the passage structure; and the device for monitoring corrosive environment is configured to measure the electric resistance value of the metal film. 15 2. The device for monitoring corrosive environment according to claim 1, wherein the passage structure includes the single opening and the metal film disposed on an insulating substrate and placed inside the passage structure and; the corroded region of the metal film expands in a diffusing direction of the corrosive substance intruding from the opening into the passage structure; and 2 0 the device for monitoring corrosive environment is configured to measure the electric resistance value which increases depending on the expansion of the corroded region.

3. The device for monitoring corrosive environment according to claim 1, wherein 25 the metal film is comprised of an exposed portion exposed in the atmosphere and an unexposed portion unexposed in the atmosphere; the unexposed portion electrically is connected to the exposed portion; and the device for monitoring corrosive environment is configured to measure a sum of electric resistance values by adding an electric resistance value of the exposed 30 portion and an electric resistance value of the unexposed portion.

4. The device for monitoring corrosive environment according to claim 3, wherein the electric resistance value of the unexposed portion increases depending on the expansion of the corroded region. 5 5. The device for monitoring corrosive environment according to claim 3, wherein the unexposed portion includes a coated portion formed by coating a part of the metal film so that the coated portion is not exposed in the atmosphere.

6. The device for monitoring corrosive environment according to claim 2, wherein 10 the metal film is comprised of a first metal film which corrodes by the corrosive substance present in the atmosphere and a second metal film which does not corrode by the corrosive substance present in the atmosphere, wherein the device for monitoring corrosive environment is configured to measure a sum of electric resistance values by adding an electric resistance value of the first 15 metal film and an electric resistance value of the second metal film.

7. The device for monitoring corrosive environment according to claim 6, wherein the electric resistance value of the second metal film increases depending on the expansion of the corroded region. 2 0

8. The device for monitoring corrosive environment according to claim 1, wherein the passage structure includes the at least one opening and the metal film comprised of a first metal film and a second metal film, the second metal film not corroding by the corrosive substance present in the atmosphere, being formed in a zigzag shape consisting of a single line or a plurality of lines, disposed on an insulating substrate, and placed inside the passage structure, and the first metal film being superimposedly disposed on the second metal film; and 30 the device for monitoring corrosive environment is configured to measure electric resistance values of the first and second metal films, the electric resistance values varying depending on the expansion of the corroded region of the first metal film generated by the corrosive substance intruding from the opening of the passage structure. 5 9. The device for monitoring corrosive environment according to claim 6, wherein a material of the second metal film is selected from at least one member of titanium, chromium, gold, palladium, and silver-palladium alloy.

10. The device for monitoring corrosive environment according to claim 1, wherein a 10 material of the metal film is selected from at least one member of titanium, chromium, gold, palladium, and silver-palladium alloy.

11. The device for monitoring corrosive environment according to claim 2, wherein a transparent substrate is used for the insulating substrate. 15

12. A method for monitoring corrosive environment based on a corrosion level of a metal film disposed inside at least one passage structure that is configured to control intrusion of a corrosive substance present in the environment into the at least one passage structure, 20 the method comprising the steps of: measuring an electric resistance value of the metal film, wherein the electric resistance value varies depending on expansion of a corroded region of the metal film generated by the corrosive substance intruding from an opening of the passage structure; and 2 5 quantifying the corrosion level of the environment based on the electric resistance value thus measured.

13. The device for monitoring corrosive environment according to claim 6, wherein a slit is formed in the first metal film in a longitudinal direction thereof to which the 30 corrosive substance diffuses.

14. The device for monitoring corrosive environment according to claim 13, wherein the electric resistance value of the second metal film increases depending on the expansion of the corroded region. 5 15. The device for monitoring corrosive environment according to claim 6, wherein the sensor unit is fixed as a side wall of the passage structure; the second metal film is disposed on an undersurface of the first metal film that is exposed inside the passage structure, in the sensor unit; and the first metal film has a broader width than the second metal film, in the 10 sensor unit.

16. The device for monitoring corrosive environment according to claim 15, wherein a material of the first metal film is silver, and a material of the second metal film is chromium. 15

17. The device for monitoring corrosive environment according to claim 15, further comprising a temperature compensating sensor unit.

DEVICE AND METHOD FOR MONITORING CORROSIVE ENVIRONMENT
BACKGROUND OF THE INVENTION
5 1. Field of the Invention
The present invention relates to a device for monitoring corrosive environment
and a method for monitoring corrosive environment, both targeting an indoor
environment, mainly an environment installed with electric and electronic
apparatuses. A level of corrosion generated by a corrosive gas present in the
10 environment is measured by the device and method for monitoring corrosive
environment.
2. Related Art
Japanese Unexamined Patent Application Publication No. 2003-294606 (i.e.,
15 Patent Document 1) discloses background art of the invention. That is, the
environment evaluation apparatus of Patent Document 1 basically includes 1) an
element unit for reacting with gas components in an environment, 2) a unit for
detecting a change in the element unit and converting the detected change into an
electric signal, and 3) a storage unit for storing the detected data. Specifically, the
20 element unit is formed by using a plurality of metal films, for example, a metal film
with a thickness of 0.1 pm made of silver, copper, iron, and stainless steel. Herein,
evaluating a material in an environment is performed by measuring a time course of
at least one property selected from the light reflection, light transparency and electric
resistance of the metal film, thereby detecting gas components in the environment.
25 When the time course of the electric resistance value is measured, a change in
the electric resistance vqlue caused by the change in the whole metal film (e.g., entire
surface corrosion) may be measured. This measurement allows a thickness of the
corroded metal film to be calculated, thereby to easily afford a corrosive rate thereof.
Note that a gas detection system detects a change in an element, and converts
30 the detected change into an electric signal. The gas detection system includes a gas
introduction unit and a gas detection element (i.e., corresponding to the sensor unit of
the present invention). Those gas components are guided to the gas detection
element by a suction pump of the gas introduction unit. As mentioned above, under
circumstances as the global environment changes, it is advantageous to provide a
measuring apparatus greatly useful for evaluating various materials located in such
5 environment.
Here, long term reliability is required for electric and electronic apparatuses in
order to stably operate target equipment. Further, a lot of electric and electronic
components, which include a fine wiring structure and a film plating structure both
applied with a high density mounting structure, are mounted on the target equipment
10 to achieve high speed operation and space-saving arrangement. In those electric and
electronic components, even slightly corroded damage may change the electric
property or magnetic property of the components to cause a failure or malfunction.
Therefore, suppression of the corroded damage is an important issue to improve the
reliability of the electric and electronic apparatuses. Eventually, continuous
15 evaluation in easy, a short period and high accuracy of corrosive environment
installed with electric and electronic apparatuses is demanded to reflect anti-corrosion
measures associated with a corrosion level of the environment onto the design and
maintenance of those apparatuses
Meanwhile, according to the IS011844-1 standard, a method for evaluating a
20 corrosion level of copper, silver, aluminum, iron and zinc which are exposed for a
predetermined period under an corrosive environment is generally utilized as a tool
for evaluating corrosiveness of the environment installed with electric and electronic
apparatuses. It has been well known that copper, silver, aluminum, iron and zinc
corrode by such corrosive gases as SOa, Nos, Has, although a corroded degree of each
25 metal is different each other.
However, the method for evaluating environment and the device using the
method in the above conventional technique have the following problems. That is, if
an evaluation target is the environment with "a middle level of corrosivenessn in
which a failure in electric and electronic apparatuses may occur due to the
30 corrosiveness degree described in the IS011844-1 standard and a silver film with a
thichness of 0.1 pm (i.e., 100 nm) is used for measuring the time course of the electric
resistance value, a detection sensor using such a silver film is merely applicable to the
measurement only for about one month. Herein, according to the IS011844-1
standard, the above middle level of corrosiveness is the environment where a corrosive
rate of the exposed silver falls in the range from 105 to 410 nmlyear.
5 Further, if an evaluation target is the environment with "a high level of
corrosiveness or "an extremely high level of corrosiveness", a measurable period of the
detection sensor becomes shorter than one month. Herein, the environment with the
"high level of corrosiveness" is the environment where probability of causing corrosion
to influence the reliability of the devices is high, and improvement of the environment
10 is essential, more specifically, where a corrosive rate of the exposed silver falls in the
range from 410 to 1050 nmlyear. The environment with the "extremely high level of
corrosiveness" is the environment where a corrosive rate of the exposed silver falls in
the range from 1050 to 2620 nmlyear. Accordingly, the above type of detection
sensor is not suitable for the long term measurement.
15 In the meantime, if a thickness of the silver film is elongated, a detection
sensor using the elongated film may have a long measurable period. However, this
procedure has a drawback that ununiformness of the thickness of the film becomes
larger as the thickness thereof becomes thicker, which results in deterioration of the
measuring accuracy.
20 Moreover, the method for evaluating environment and the device using the
method in the above conventional technique have additional problems. That is, if
local corrosion occurs in the sensor unit, more specifically, if dust or salts adheres to
the sensor unit and corrosion occurs in the vicinity of the adhering portion, the
corrosion makes a measurable period of the sensor unit turn to shorter than the
25 original period essentially provided for the sensor unit.
Furthermore, if a sensor unit (i.e., gas detection element) is directly exposed to
the target environment, a corrosive rate varies depending on a flow rate of the
corrosive gas present in the target environment, leading to another problem.
3 0 SUMMARY OF THE INVENTION
For solving the above problems, an object of the present invention is to provide
a device and method for monitoring corrosive environment. The device for
monitoring corrosive environment includes at least one passage structure for
controlling intrusion of a corrosive substance present in an atmosphere into each
passage structure, and a metal film disposed inside each passage structure. Herein,
5 a corroded region of the metal film expands as the corrosive substance intrudes into
the device from an opening of the passage structure. The expansion of the corroded
region of the metal film changes an electric resistance value of the metal film.
Hence, the method for monitoring corrosive environment includes measuring the
electric resistance value changed depending on the expansion of the corroded region of
10 the metal film.
According to the present invention, it is possible to accurately determine a
corrosion amount of the metal film which corrodes from the opening of the passage
structure. Further, it is also possible to suppress fluctuation of the corrosion amount
of the metal film, and occurrence of local corrosion in the sensor unit (e.g., corrosion
15 caused near a portion to which dust and/or salts adhere in the sensor unit), or a
thickness of the metal film. Herein, it should be noted that the corrosion amount
varies depending on a flow rate of a corrosive substance present in the target
environment.
Eventually, the above feature of the present invention allows a corrosion level
20 of the environment to be quantified in a more accurate manner.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a top view of a device for monitoring corrosive environment in an
embodiment of the present invention.
25 FIG. 2 is a side view of the device for monitoring corrosive environment in FIG.
1.
FIG. 3 is a front view of the device for monitoring corrosive environment in
FIG. 1.
FIG. 4 shows a corrosion state of a metal film measured at Time A after
30 exposing the device for monitoring corrosive environment of FIG. 1.
FIG. 5 shows electric resistance of the metal film measured at Time A after
exposing the device for monitoring corrosive environment in FIG. 4.
FIG. 6 shows a front view of the device for monitoring corrosive environment
in FIG. 4.
FIG. 7 shows a corrosion state of the metal film measured at Time B after
5 exposing the device for monitoring corrosive environment of FIG. 1 under the
corrosive environment.
FIG. 8 shows electric resistance of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 1 under the
corrosive environment.
10 FIG. 9 shows a front view of the device for monitoring corrosive environment
in FIG. 7.
FIG. 10 shows dimensions of the device for monitoring corrosive environment
in the present embodiment.
FIG. 11 shows a relationship between the electric resistance which is an
15 output of the device for monitoring corrosive environment (i.e., sensor unit) and a
length of the corroded region 9 where the entire film in the thickness direction has
been corroded in the metal film of the device for monitoring corrosive environment 6.e.
sensor unit).
FIG. 12 shows a relationship between a length of the corroded region 9 where
20 the entire film in the thickness direction has been corroded in the metal film of the
device for monitoring corrosive environment (i.e., sensor unit) and a corrosion
thickness of the conventional metal film (i.e., silver film).
FIG. 13 is a top view of a device for monitoring corrosive environment in
another embodiment of the present invention.
25 FIG. 14 is a side view of the device for monitoring corrosive environment in
FIG. 13.
FIG. 15 shows a corrosion state of a metal film measured at Time A after
exposing the device for monitoring corrosive environment of FIG. 13 under the
corrosive environment.
30 FIG. 16 shows electric resistance of the metal film measured at Time A after
exposing the device for monitoring corrosive environment of FIG. 13 under the
corrosive environment.
FIG. 17 shows a corrosion state of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 13 under the
corrosive environment.
5 FIG. 18 shows electric resistance of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 13 under the
corrosive environment.
FIG. 19 is a top view of a device for monitoring corrosive environment in
another embodiment of the present invention.
10 FIG. 20 is a side view of the device for monitoring corrosive environment of
FIG. 19.
FIG. 21 shows a corrosion state of the metal film measured at Time A after
exposing the device for monitoring corrosive environment of FIG. 19 under the
corrosive environment.
15 FIG. 22 shows electric resistance of the metal film measured at Time A after
exposing the device for monitoring corrosive environment of FIG. 19 under the
corrosive environment.
FIG. 23 shows a corrosion state of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 19 under the
20 corrosive environment.
FIG. 24 shows electric resistance of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 19 under the
corrosive environment.
FIG. 25 is a top view of a device for monitoring corrosive environment in still
25 another embodiment of the present invention.
FIG. 26 is a side view of the device for monitoring corrosive environment in
FIG. 25.
FIG. 27 is a front view of the device for monitoring corrosive environment in
FIG. 25.
30 FIG. 28 shows a corrosion state of the metal film measured at Time A after
exposing the device for monitoring corrosive environment of FIG. 25 under corrosive
environment.
FIG. 29 shows electric resistance of the metal film measured at Time A after
exposing the device for monitoring corrosive environment of FIG. 25 under the
corrosive environment.
5 FIG. 30 shows a corrosion state of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 25 under the
corrosive environment.
FIG. 31 shows electric resistance of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 25 under the
10 corrosive environment.
FIG. 32 is a top view of a device for monitoring corrosive environment in still
another embodiment of the present invention.
FIG. 33 is a side view of the device for monitoring corrosive environment in
FIG. 32.
15 FIG. 34 is a top view of a device for monitoring corrosive environment in still
another embodiment of the present invention.
FIG. 35 is a side view of the device for monitoring corrosive environment in
FIG. 34.
FIG. 36 is a top view of a device for monitoring corrosive environment in still
20 another embodiment of the present invention.
FIG. 37 is a side view of the device for monitoring corrosive environment in
FIG. 36.
FIG. 38 is a top view showing a corrosion state of the metal film measured at
Time A after exposing the device for monitoring corrosive environment of FIG. 36
25 under corrosive environment.
FIG. 39 shows electric resistance of the metal film measured at Tirne A after
exposing the device for monitoring corrosive environment of FIG. 25 under the
corrosive environment.
FIG. 40 is a top view showing a corrosion state of the metal film measured at
30 Time B after exposing the device for monitoring corrosive environment of FIG. 36
under corrosive environment.
FIG. 41 shows electric resistance of the metal film measured at Time B after
exposing the device for monitoring corrosive environment of FIG. 36 under the
corrosive environment.
FIG. 42 is a top view of a device for monitoring corrosive environment in still
5 another embodiment of the present invention.
FIG. 43 is a side view of the device for monitoring corrosive environment in
FIG. 42.
FIG. 44 is a top view showing an initial state of two metal films respectively
made of chromium and silver in the device for monitoring corrosive environment of
lo FIG. 42.
FIG. 45 is a top view showing a corrosion state of the two metal films
respectively made of chromium and silver in the sensor unit of the device for
monitoring corrosive environment of FIG. 42 after exposing the two films under the
corrosive environment.
15 FIG. 46 is a top view of the sensor unit of FIG. 42.
FIG. 47 is a top view of the sensor unit of FIG. 42.
FIG. 48 is a diagram showing electric resistance of the metal films of FIG. 44.
FIG. 49 is a diagram showing electric resistance of the metal films of FIG. 45.
FIG. 50 shows resistivities and temperature coefficients of resistance (TCR) of
20 the metal films.
DETAILED DESCRIPTION OF THE PRESENT INVENTION
Hereinafter, embodiments for carrying out the present invention will be
described in detail referring to the attached drawings.
25 Next, a device for monitoring corrosive environment which measures a level of
corrosion generated by a corrosive substance present in the environment where an
electric and electronic apparatus is installed will be described. Further, a method for
monitoring corrosive environment will be also described.
FIGS. 1 to 3 are schematic diagrams showing a device for monitoring corrosive
30 environment in an embodiment of the present invention. FIG. 1 is a top view of the
device, FIG. 2 is a side view thereof, and FIG. 3 is a front view thereof.
The device for monitoring corrosive environment 1 includes a sensor unit
having a metal film 2 that is disposed on an insulating substrate 3 and placed inside a
passage structure 4. The sensor unit is fixed as a part of a side wall of the passage
structure 4 having an opening 5. The metal film 2 includes a metal film portion 2a
5 exposed inside the passage structure 4 (hereinafter also referred to as exposed
portion), and a metal film portion 2b which is extended outside the passage structure
4 to be unexposed inside the passage structure 4 (hereinafter also referred to as
unexposed portion). Further, a pair of terminals 8 for measuring an electric
resistance value are disposed at the respective ends of the metal film 2. A material of
10 the metal film portions is a metallic material of which electric resistance is different
from that of a corroded product of the intact metal such as copper and silver used for
corrosion monitoring in the environment installed with an electronic apparatus as
well as aluminum, iron, and zinc or the like.
When the device for monitoring corrosive environment 1 is inserted in the
15 target environment, a corrosive substance intrudes into a passage structure 4 from an
opening 5 thereof, thereby to corrode the metal film 2. ' The passage structure 4 has a
function to control a corrosive rate of the metal film 2 which is a sensing element for
the corrosive substance present in the target environment. More specifically, the
passage structure 4 has one opening 5 placed at the left side of the passage structure 4
20 in FIG. 1. The right side of the passage structure 4 has no opening and is shielded
from the surrounding environment. Thus, a flow 6 of the corrosive substance in the
surrounding atmosphere can not intrude into the inside of the passage structure 4
through the opening 5, even though the corrosive substance approaches the opening 5.
On the contrary, in a conventional device for monitoring corrosive environment,
25 a metal film directly contacts with a flow of the surrounding atmosphere. Therefore,
a corrosion quantity of the metal film becomes larger as the flow of the surrounding
atmosphere becomes faster in the prior art. However, according to the present
invention, a corrosive substance located in the vicinity of the opening 5 of the passage
structure 4 may intrude through the opening 5 in the diffusing direction 7 of the
30 corrosive substance (i.e., arrow 7 in FIG. 3). In other words, only the diffusion
phenomenon allows the corrosive substance to intrude inside the passage structure 4.
Accordingly, the device for monitoring corrosive environment 1 of the present
invention is capable of measuring a corrosion level of the corrosive substance without
being influenced by the flow of the surrounding atmosphere.
As mentioned above, in the present invention, the direction to which the metal
5 film corrodes is fixed, allowing fluctuation of the measured values to be decreased.
Here, it should be noted that the corrosive substance includes a corrosive gas, flying
sea salt and dust or the like but hereinafter a corrosive gas represents the corrosive
substance in the following descriptions.
Next, a method for quantifying a corrosive gas diffused inside the passage
10 structure 4 to be located in the vicinity of the opening 5 will be described in detail.
As shown in FIG. 1, a diffusing direction of the corrosive gas is restricted in
the way from the left to right side of paper in the drawing so as to control corrosion of
the sensor unit of the device for monitoring corrosive environment 1. Since the flux
density of the corrosive gas becomes larger as the distance between the gas and the
15 opening 5 becomes shorter, a corrosion quantity of the metal film 2 becomes larger as
the location becomes closer to the left side of the film 2. This phenomenon is
described in a reference: Zairyo To Kankyo (Material and Environment), vol. 56,
pp.265-271 (2007), "Assumption of Corrosive Rate of Silver in Sulfur Gas
Environment". In the reference, the authors observe that a corrosive rate of a
20 metallic plate becomes smaller as the distance of the metallic plate from the
generation source of the corrosive gas becomes longer via conducting experiments
using metallic plates and analysis of the experimental results. The above procedure
allows analysis on the corrosion phenomenon of the device for monitoring corrosive
environment.
25 Next, FIGS. 4 to 9 respectively show a corroded status of the metal film after
the device for monitoring corrosive environment has been exposed in the corrosive
environment. As shown in FIGS. 4 and 5, the region already corroded with a
corrosion thickness equal to the thickness of the metal film not corroded. Herein,
the above region means an area where the metal film has been corroded downward to
30 the interface between the substrate and the metal film. The corrosive gas 6 present
in the environment continuously diffuses from the left side of the metal film proximal
to the opening 5, thereby to corrode the metal film toward the right side thereof. As
shown in FIG. 4 and 7, the region 9 where the metal film has been entirely corroded in
the thickness direction more expands at Time B (i.e., length Lb) than at Time A (i.e.,
length La). In the metal film portion 2a exposed inside the passage structure 4, the
5 region 9 which has been entirely corroded in the thickness direction is formed, while
the metal film portion 2b unexposed inside the passage structure 4 remains intact.
As a result, a region where a cross-sectional area of the metal film 2 locally decreases
between the terminals 8 is formed (see FIG. 6).
As shown in FIGS. 5 and 8, the electric resistance value between the terminals
10 8 is represented as 2Ra + Rm at Time A, and 2Rb + Rm at Time B. This is calculated
by adding the electric resistance value Ra of the region where the cross-sectional area
of the metal film 2 locally decreases to the electric resistance value Rm of the metal
film 2. Herein, since there are relationships that Rm << Ra, and Rm << Rb, Rm at
Time A is assumed to be equal to Rm at Time B. Further, as shown in FIGS. 6 and 9,
15 in the metal film 2, a surface side of the metal film 2 inside the passage structure 4 is
partially corroded in addition to the region 9 of the metal film 2 entirely corroded.
However, to make the description simpler, the partial corrosion of the surface side of
the metal film 2 will not be taken into consideration, hereinafter.
Next, analytical results of the device for monitoring corrosive environment
20 having such dimensions as shown in FIG. 10 will be described. Here, as the metal
film of a sensor unit, a silver film of 100 nm with specific resistance of 1.593.5 Rm is
used. FIG. 11 shows a relationship between an electric resistance value (i.e., output)
of the device for monitoring corrosive environment of the present embodiment and a
corrosion length of the region 9 where the entire metal film has been corroded in the
25 thickness direction in the device for monitoring corrosive environment. Further, FIG.
12 shows a relationship between a corrosion length of a region 9 where the entire
metal film is corroded in the thickness direction thereof and a corrosion thickness of
the metal film (i.e., silver film) used in the conventional process.
As mentioned above, the device for monitoring corrosive environment is
30 exposed in the target environment. Then, the electric resistance value of the sensor
unit is measured, and a corrosion thickness of the metal film is calculated based on
the measured value. Associated with the corrosion thickness, a corrosion level of the
surrounding atmosphere is classified complying with the IEC654-4 standard,
IS011811-4 standard, IS09223 standard, and ISA71.04. Note that the region 9 of
the metal film, where the entire film has been corroded in the thickness direction, may
5 be visually observed by applying a transparent substrate to the insulating substrate 3.
This arrangement allows a life-time of the sensor unit to be determined on the spot.
In short, the higher the concentration of the corrosive gas in the evaluating
environment becomes, the more the corrosive rate of the metal film increases, and the
more the electric resistance value of the sensor unit increases.
10 FIGS. 13 and 14 are schematic diagrams showing another embodiment of the
device for monitoring environment device. FIG. 13 is a top view of the device and
FIG. 14 is a side view thereof. The device for monitoring environment device 1 is
provided with a sensor unit including a metal film 2 disposed on an insulating
substrate 3. The sensor unit is fixed as a part of a side wall of a passage structure 4
15 having an opening 5. The metal film 2 includes a metal film portion 2a exposed
inside the passage structure 4 and a metal film portion 2c (hereinafter referred to as
uncoated portion) covered by a coating 10 to be unexposed inside the passage
structure 4. At both ends of the metal film 2, a pair of terminals 8 are respectively
disposed to measure the electric resistance value.
2 0 A corrosive gas 6 present in the corrosive environment is continuously
diffusing from the left side near the opening 5, and further corrodes the right side of
the metal film 2. As shown in FIGS. 15 and 17, a region 9 of the metal film 2, where
the entire film has been corroded in the thickness direction, more expands to the right
side thereof at Time B (i.e., length Lb) than at Time A (length La). Accordingly, the
25 region 9 is formed in the metal film portion 2a, via being exposed inside the passage
structure 4 to be corroded in the entire thickness direction thereof, and the metal film
portion 2c remains intact which is covered by a coating 10 and unexposed inside the
passage structure 4.
As shown in FIGS. 16 and 18, the electric resistance value between the pair of
30 terminals 8 is represented as 2Ra + Rm at Time A and 2Rb + Rm at Time B
respectively, by adding the electric resistance value Ra or Rb in the region where the
cross-sectional area of the metal film locally decreases, to the electric resistance value
Rm of the metal film 2. This configuration enables the metal film portion 2c
unexposed by the coating 10 to exert the same effect as in the metal film portion 2b
unexposed inside the passage structure 4 of the embodiment in FIG. 1.
5 FIGS. 19 and 20 are schematic diagrams showing still another embodiment of
the device for monitoring corrosive environment 1. FIG. 19 is a top view of the device
and FIG. 20 is a side view thereof. The device for monitoring corrosive environment
1 is provided with a sensor unit including a metal film disposed on an insulating
substrate 3, and fixed as a part of a side wall of a passage structure 4 having an
10 opening 5. The metal film includes a first metal film 2 exposed inside the passage
structure 4, and a second metal film 11 arranged at the periphery of the first metal
film 2 exposed inside the passage structure 4. The second metal film 11 is made of a
material which never corrodes in the target environment including, for example,
titanium, chromium, gold, palladium, and silver-palladium alloy.
15 As shown in FIGS. 21 and 23, the region 9 of the metal film, which is corroded
in the entire thickness direction of the metal film, more expands to the right side at
Time B (i.e., length Lb) than at Time A (length La). That is, the region 9 is formed,
which is a part of the metal film 2 to be corroded in the entire thickness thereof
exposed inside the passage structure 4, while only the second metal film 11 not
20 corroding in the target environment remains intact alone among the conduction
portions. As shown in FIGS. 22 and 24, the electric resistance value between the
pair of terminals 8 is represented as 2Ra1 + Rm at Time A and 2Rb1 + Rm at Time B
respectively, by adding the electric resistance value Ral or Rbl of the second metal
film 11 in the region where only the second metal film 11 not corroding in the target
25 environment remains intact alone, to the electric resistance value Rm of the first
metal film 2.
Herein, the electric resistance value Rox of the region 9 corroded in the entire
thichness direction thereof decreases time-dependently as the region expands.
However, the influence of the electric resistance value Rox is negligible due to the
30 relationship of Ra1 < Rox at the initial stage. The second metal film 11 not corroding
in the target environment is provided in order to exert the same effect as of the metal
film portion 2b unexposed inside the passage structure 4 in FIG. 1 and the metal film
portion 2c unexposed inside the passage structure 4 by the coating 10 in FIG. 14.
In the device for measuring corrosive environment of the present embodiment,
measured is the resistance of the sensor unit, more specifically, the electric resistance
5 value of the second metal film 11 in the region where only the second metal film 11 not
corroding in the target environment remains intact. Therefore, if a metallic material
with large specific resistance is selected for the second metal film I1 of the sensor unit,
it is possible to increase the sensitivity of the sensor unit. For example, the specific
resistance value of titanium (i.e., 4.273-7 am) is 25 times larger than that of silver
10 (i.e., 1.593-8 am) which is used as the metal film of the sensor unit. Further, the
sensitivity of the sensor unit becomes 250 times higher by making the thickness of the
titanium film 10 times thinner than that of the silver film (here, lpm).
Meanwhile, if the electric resistance value Rox decreases to fulfill a
relationship of Ral > Rox as the region 9 corroded in the entire thickness direction of
15 the metal film more expands, the electric resistance value between the pair of
terminals 8 does not become proportional to the expansion of the region 9 thus
corroded. Accordingly, when the configuration of the device in the present
embodiment is applied, it is necessary to take care of the relationship between the
electric resistance value Ral and the electric resistance value Rox.
20 Next, FIGS. 36 and 37 are schematic diagrams showing still another
embodiment of the device for monitoring corrosive environment. A feature of the
device in this embodiment is that a slit 20 is formed in the first metal film 2 in the
device of FIGS. 19 and 20, in a longitudinal direction of the first metal film 2 to which
a corrosive gas diffuses. As shown in FIGS. 38 to 41, this configuration allows the
25 relationship of Rox > Rm to be always kept. As a result, although the electric
resistance value Rox decreases time-dependently as the region 9 mote expands, the
relat,ionship of Ral < Rox is kept the same as in the initial stage. Thus, the electric
resistance value between the pair of terminals 8 is proportional to the expansion of
the region 9 thus corroded.
30 FIGS. 25 to 27 are schematic diagrams showing still another embodiment of
the device for monitoring corrosive environment. FIG. 25 is a top view of the device,
FIG. 26 is a side view thereof, and FIG. 27 is a front view thereof. The device for
monitoring corrosive environment 1 is provided with a sensor unit including
two-layered metal film disposed on an insulating substrate 3. The sensor unit is
fixed as a part of a side wall of a passage structure 4 having an opening 5. The metal
5 film include a first metal film 2 exposed inside a passage structure 4, and a second
metal film 11 disposed on the undersurface of the first metal film 2 exposed inside the
passage structure 4. The second metal film 11 is made of a metallic material not
corroding in the target environment, including, for example, titanium, chromium, gold,
palladium, silver-palladium alloy. Herein, even when the first metal film 2 and the
10 second metal film 11 are formed as zigzag electrodes, the device for monitoring
corrosive environment in the present embodiment exerts the same effect as of the
devices shown in FIGS. 1, 13 and 19.
As shown in FIGS. 28 and 30, the region 9 which is corroded in the entire
thickness direction of the first metal film 2 more expands to the right side at Time B
15 (length Lsl) than at Time A (length Ls). Since the region 9 of the first metal film 2
exposed inside the passage structure 4 is corroded in the entire thickness direction of
the film, only the second metal film 11 not corroding in the target environment
remains alone intact among the conduction portions. As shown in FIGS 29 and 31,
the electric resistance value of one line of the zigzag electrodes including the first
20 metal film 2 and the second metal film 11 is represented as Ra2 + Rml a t Time A and
Rb2 + Rml at Time B respectively, by adding the resistance value Ra2 or Rb2 of the
second metal film 11 in the region where only the second metal film 11 not corroding
in the target environment remains alone intact, to the electric resistance value Rml of
the first metal film 2. Since the zigzag electrodes are formed of a plurality of lines
25 arranged in series, the electric resistance value between the pair of terminals 8 is
equal to a value calculated via multiplying the electric resistance value per one line as
mentioned above by the number of the total lines arranged in the zigzag electrodes.
Meanwhile, in the device for monitoring corrosive environment shown in FIG.
19, the sensitivity of the sensor unit is improved by using the second metal film 11
30 having large specific resistance and a thin film thickness. In the present
embodiment of FIG. 25, it is possible to further improve the measurement sensitivity
of the sensor unit by elongating the total length of the electrodes via applying zigzag
electrodes to the sensor unit, in addition to by using the second metal film 11 having
large specific resistance and a thin film thickness. Note that the zigzag electrode
may be formed as only one line as shown in FIGS. 32 and 33.
5 Next, FIGS. 42 and 43 are schematic diagrams showing still another
embodiment of the device for monitoring corrosive environment. FIG. 42 is a top
view of the device and FIG. 43 is a side view thereof. The device for monitoring
corrosive environment 1 is provided with a sensor unit including two metal films
disposed on an insulation substrate 3. The sensor unit is fixed as a part of a side wall
10 of a passage structure 4 having an opening 5. The metal films include a first metal
film 2 exposed inside a passage structure 4, and a second metal film 11 disposed on
the undersurface of the first metal film 2 exposed inside the passage structure 4. The
second metal film 11 is made of a metallic material not corroding in the target
environment, including, for example, titanium, chromium, gold, palladium,
15 silver-palladium alloy. Herein, the feature of the sensor unit is that the first metal
film 2 has a broader width than the second metal film 11.
As shown in FIG. 50, the measured resistivity of the first metal film 2 (i.e.,
silver film) is 20 times smaller than t h a t of the second metal film 11 (i.e., chromium
film). On the contrary, the temperature coefficient of resistance (TCR) of the silver
20 film is 100 times larger than that of the chromium film. As shown in FIGS. 48 and
49, the electric resistance value between the pair of terminals 8 depends on the
electric resistance value of the silver film at the initial stage of the monitoring period
and does not depend on the electric resistance value of the chromium film. As the
corrosion proceeds, in the region 9 where the silver film is corroded (i.e., changed to
25 AgzS) in the entire thickness direction of the silver film, the electric resistance value
between the pair of terminals 8 depends on the electric resistance value of the
chromium film located in the corroded region 9. Further, in the region where the
silver film is not corroded, the electric resistance value between the pair of terminals 8
depends on the electric resistance value of the silver film located in the non-corroded
30 (i.e., intact) region.
In the meantime, the device for monitoring corrosive environment in the
present invention may be set in the environment where a temperature therein
fluctuates. Herein, a material having a small temperature coefficient of resistance
(TCR) is preferable for configuring a sensor unit. As described above, the TCR of the
chromium film is small, while the TCR of the silver film is 100 times larger than that
5 of the chromium film. Therefore, in the present embodiment, preferably the device
for monitoring corrosive environment may have a sensor unit configured to minimize
the fluctuation of the electric resistance value of the silver film.
As shown in FIG. 44, in the present invention, a width of the silver film (i.e.,
WA~i)s made longer than that of the chromium film (i.e., Wc,). If the electric
10 resistance value of the silver film becomes smaller, the fluctuation of the electric
resistance value between the pair of terminals 8 becomes smaller. Further, the
devices in FIGS. 1, 13, and 19 have the same effect as in the present embodiment.
Herein, when a transparent insulating substrate 3 is used, it is possible to assume a
corrosion level of the environment based on a length of the corroded region which is
15 checked through the substrate side. Moreover, the first metal film 2 and the second
metal film 11 may be formed as zigzag electrodes, for example, in the case of FIGS. 36
and 37.
Next, FIGS. 34 and 35 are schematic diagrams showing still another
embodiment of the device for monitoring corrosive environment. FIG. 34 is a top
20 view of the device and FIG. 35 is a side view thereof. The device for monitoring
corrosive environment 1 is provided with a sensor unit including a two-layered metal
film disposed on an insulation substrate 3. The sensor unit is fixed as a part of a side
wall of a passage structure 4 having two openings 5 respectively at the left and right
sides of the passage structure 4. The two-layered metal film is composed of a first
25 metal film 2 exposed inside the passage structure 4, and a second metal film 11
disposed on the undersurface of the first metal film 2 exposed inside the passage
structure 4. The second metal film 11 is made of a metallic material not corroding in
the target environment, including, for example, titanium, chromium, gold, palladium,
silver-palladium alloy. As mentioned above, the arrangement of the openings 5 at
30 the left and right sides of the passage structure 4 enables the influence of an air flow
in the surrounding corrosive environment caused by a corrosive gas to be evaluated.
The device for monitoring corrosive environment of the present invention may
independently have a measurement system. Further, the device for monitoring
corrosive environment may be configured to use a measurement system formed on a
printed circuit board in advance via mounting the measurement system thereon.
5 Mounting of the measurement system on the printed circuit board allows the
electronic apparatus to perform self-diagnosis.
Hereinbefore, the device for monitoring corrosive environment including a
sensor unit provided with a metal film has been described in the previous
embodiments. That is, in those embodiments, a corrosive gas present in the target
10 environment intrudes from the outside into a gas introduction passage (i.e., passage
structure) and successively corrodes the metal film from an opening side of the device.
A corroded region of the metal film generated by the corrosive gas successively
expands time-dependently. Under this condition, the device for monitoring corrosive
environment measures the electric resistance value of the metal film, in which the
15 electric resistance value increases corresponding to the increase in the corroded region
of the metal film. Measurement of the electric resistance value of the sensor unit
quantitatively determines a corrosion level of the target environment.
Here, note that the method, in which a metal film successively corrodes from
an opening side generated by a corrosive gas intruding from the outside into a gas
20 introduction passage, may be applicable to a quartz oscillator microbalance analysis.
Further, in order to suppress the fluctuation of the electric resistance value between
the pair of terminals 8 caused by temperature fluctuation, it is effective to arrange a
temperature compensating sensor unit in the device for monitoring corrosive
environment.
2 5 In the present invention, the device for monitoring corrosive environment is
not needed to include a large sized structure such as a gas introduction unit using a
suction pump, which performs measurement in the environment with a constant flow
rate. Thus, the device for monitoring corrosive environment of the present invention
is configured to consume less electricity and easily monitor the corrosive environment.
30 Further, the device for monitoring corrosive environment of the present invention is
configured to include the opening in a part of the passage structure, and the metal
film covered by the passage structure. Thus, this configuration allows the device for
monitoring corrosive environment to accurately determine the corroded quantity of
the metal film thus corroded from the opening, and suppress the local corrosion of the
sensor unit or suppress the fluctuation of the corroded quantity that varies depending
5 on the thickness of the metal film. Herein, the local corrosion of the sensor unit
described above means the corrosion caused by dust and salts in the vicinity of the
portion to which the dust and salts are attached.

We claim:
1. A device for monitoring corrosive environment comprising:
a sensor unit;
5 at least one passage structure each of which is formed together with the sensor
unit so as to control intrusion of a corrosive substance present in an atmosphere; and
a metal film included in the sensor unit and disposed inside the at least one
passage structure, wherein
an electric resistance value of the metal film varies depending on expansion of
10 a corroded region of the metal film generated by the corrosive substance intruding
from an opening of the passage structure; and
the device for monitoring corrosive environment is configured to measure the
electric resistance value of the metal film.
15 2. The device for monitoring corrosive environment according to claim 1, wherein
the passage structure includes the single opening and the metal film disposed
on an insulating substrate and placed inside the passage structure and;
the corroded region of the metal film expands in a diffusing direction of the
corrosive substance intruding from the opening into the passage structure; and
2 0 the device for monitoring corrosive environment is configured to measure the
electric resistance value which increases depending on the expansion of the corroded
region.
3. The device for monitoring corrosive environment according to claim 1, wherein
25 the metal film is comprised of an exposed portion exposed in the atmosphere
and an unexposed portion unexposed in the atmosphere;
the unexposed portion electrically is connected to the exposed portion; and
the device for monitoring corrosive environment is configured to measure a
sum of electric resistance values by adding an electric resistance value of the exposed
30 portion and an electric resistance value of the unexposed portion.
4. The device for monitoring corrosive environment according to claim 3, wherein
the electric resistance value of the unexposed portion increases depending on the
expansion of the corroded region.
5 5. The device for monitoring corrosive environment according to claim 3, wherein
the unexposed portion includes a coated portion formed by coating a part of the metal
film so that the coated portion is not exposed in the atmosphere.
6. The device for monitoring corrosive environment according to claim 2, wherein
10 the metal film is comprised of a first metal film which corrodes by the corrosive
substance present in the atmosphere and a second metal film which does not corrode
by the corrosive substance present in the atmosphere, wherein
the device for monitoring corrosive environment is configured to measure a
sum of electric resistance values by adding an electric resistance value of the first
15 metal film and an electric resistance value of the second metal film.
7. The device for monitoring corrosive environment according to claim 6, wherein
the electric resistance value of the second metal film increases depending on the
expansion of the corroded region.
2 0
8. The device for monitoring corrosive environment according to claim 1, wherein
the passage structure includes the at least one opening and the metal film
comprised of a first metal film and a second metal film,
the second metal film not corroding by the corrosive substance present
in the atmosphere, being formed in a zigzag shape consisting of a single line
or a plurality of lines, disposed on an insulating substrate, and placed
inside the passage structure, and
the first metal film being superimposedly disposed on the second metal
film; and
30 the device for monitoring corrosive environment is configured to measure
electric resistance values of the first and second metal films,
the electric resistance values varying depending on the expansion of
the corroded region of the first metal film generated by the corrosive
substance intruding from the opening of the passage structure.
5 9. The device for monitoring corrosive environment according to claim 6, wherein a
material of the second metal film is selected from at least one member of titanium,
chromium, gold, palladium, and silver-palladium alloy.
10. The device for monitoring corrosive environment according to claim 1, wherein a
10 material of the metal film is selected from at least one member of titanium, chromium,
gold, palladium, and silver-palladium alloy.
11. The device for monitoring corrosive environment according to claim 2, wherein a
transparent substrate is used for the insulating substrate.
15
12. A method for monitoring corrosive environment based on a corrosion level of a
metal film disposed inside at least one passage structure that is configured to control
intrusion of a corrosive substance present in the environment into the at least one
passage structure,
20 the method comprising the steps of:
measuring an electric resistance value of the metal film, wherein the electric
resistance value varies depending on expansion of a corroded region of the metal film
generated by the corrosive substance intruding from an opening of the passage
structure; and
2 5 quantifying the corrosion level of the environment based on the electric
resistance value thus measured.
13. The device for monitoring corrosive environment according to claim 6, wherein a
slit is formed in the first metal film in a longitudinal direction thereof to which the
30 corrosive substance diffuses.
14. The device for monitoring corrosive environment according to claim 13, wherein
the electric resistance value of the second metal film increases depending on the
expansion of the corroded region.
5 15. The device for monitoring corrosive environment according to claim 6, wherein
the sensor unit is fixed as a side wall of the passage structure;
the second metal film is disposed on an undersurface of the first metal film
that is exposed inside the passage structure, in the sensor unit; and
the first metal film has a broader width than the second metal film, in the
10 sensor unit.
16. The device for monitoring corrosive environment according to claim 15, wherein
a material of the first metal film is silver, and a material of the second metal film is
chromium.
15
17. The device for monitoring corrosive environment according to claim 15, further
comprising a temperature compensating sensor unit.