1
F O R M 2
THE PATENTS ACT, 1970
(39 of 1970)
COMPLETE SPECIFICATION
(See section 10 and rule 13)
1. TITLE OF THE INVENTION
DUST-CONTAINING GAS TREATMENT APPARATUS
2. APPLICANT(S)
(a) NAME
(b) NATIONALITY
(c) ADDRESS
CLEAN TECHNOLOGY CO., LTD.
JAPANESE Company
3209-1, HINENO,
IZUMISANO-SHI,
OSAKA 5980021,
JAPAN
3. PREAMBLE TO THE DESCRIPTION
PROVISIONAL
The following specification describes
invention
COMPLETE (√)
The following specification particularly describes
the invention and the manner in which it is to be
performed
4. DESCRIPTION (Description shall start from next page)
5. CLAIMS (not applicable for provisional specification. Claims should start with the
preamble – “I/We claim” on separate page)
6. DATE AND SIGNATURE ( to be given on the last page of specification)
7. ABSTRACT OF THE INVENTION (to be given along with complete specification on the
separate page)
Note:
* Repeat boxes in case of more than one entry
* To be signed by the applicant(s)or the authorized registered patent agent
* Name of the applicant should be given in full, family name in the beginning
* Complete address of the applicant should be given stating with postal index no. / code,
state and country
* Strike out the column which is/are not applicable
*This form is digitally signed.
2
[Technical field]
This invention concerns a dust-containing gas treatment apparatus to remove dust
from gas containing dust.
[Background art]
As the dust-containing gas treatment to remove dust from gas, various dry and wet
apparatuses have been proposed (for example, see patent literatures 1~2).
In many cases, such conventional dust-containing gas treatment apparatuses have
the purpose of treating gas containing dust of low concentration such exhaust gas
discharged from semiconductor manufacturing equipment, and a problem has been
that they cannot smoothly treat when they are applied for treating gas containing
dust of relatively high concentration.
[Literature of prior art]
[Patent literature]
[Patent literature 1] Journal of Tokkai No.2000-140546
[Patent literature 2] Journal Jitsu-Kaihei No. 4-65114
[Outline of invention]
[Problems to be solved by the invention]
In consideration of the problems of the conventional dust-containing gas treatment
apparatuses, this invention has the purpose of providing a dust-containing gas
treatment apparatus which can smoothly treat gas of high concentration.
3
[Means to solve the problems]
In order to achieve the above purpose, the dust-containing gas treatment apparatus
of this invention is characterized in that it is equipped with a cylindrical treatment
room to introduce the dust-containing gas and remove the dust from the gas, a
catcher consisting of brush with hair planted on the support to catch the dust
contained in the gas, installed in the treatment room, liquid spraying mechanism
installed in the treatment room, storage portion of the liquid dropping through the
treatment room, rotary driving mechanism to rotate the catcher, gas introducing
portion to introduce the dust-containing gas into the treatment room, gas
discharging portion to discharge the gas dust removed, from the treatment room,
and liquid discharging portion to discharge the liquid containing the dust removed
from the gas.
In this case, it is possible to arrange a switching mechanism to change the
aforementioned gas introducing and discharging portions to upper direction or
lower direction of the treatment room.
It is also possible to arrange the liquid discharging portion at an upper position from
the inner bottom face of the aforementioned liquid storage portion and the gas
introducing and gas discharging portions at a higher position than that.
It is also possible to arrange the aforementioned liquid spraying mechanism at an
intermediate position of the treatment room and use hydrophobic material for the
hair of the catcher consisting of the brush at a higher position than that and
hydrophilic material for the hair of the catcher consisting of the brush at a lower
position.
It is also possible to install a stirrer for the aforementioned liquid storage portion and
a rotary driving mechanism to rotate the stirrer.
4
The aforementioned treatment room can be divided into higher and lower portions.
The aforementioned liquid storage portion and liquid discharging portion can be
shared by multiple dust-containing gas apparatuses.
The liquid recovered in the aforementioned liquid storage portion can be circulated
to the liquid spraying mechanism.
[Effect of the invention]
According to the dust-containing gas treatment apparatus, it is equipped with a
cylindrical treatment room to introduce dust-containing gas and remove the dust
from the gas, a catcher consisting of hair planted on the support to catch the dust
contained in the gas, arranged in the treatment room, liquid spraying mechanism
installed in the treatment room, storage portion of the liquid dropping through the
treatment room, rotary driving mechanism to rotate the catcher, gas introducing
portion to introduce dust-containing gas into the treatment room, gas discharging
portion to discharge the gas dust-removed, and liquid discharging portion to
discharge the liquid containing dust removed from the gas, so that the dust caught
by the catcher is washed down by the liquid sprayed from the spraying mechanism
and recovered in the storage portion of the liquid dropping through the treatment
room, and the liquid containing dust is sequentially discharged via the liquid
discharging portion from the liquid storage portion, thereby making it possible to
treat the gas containing dust of high concentration, maintenance-free and smoothly
without using a lot of liquid under low-load environment with less pressure loss.
In addition to the removal of the dust contained in the gas, it is simultaneously
possible to make harmless the harmful gas contained in the gas by means of the
liquid sprayed from the spraying mechanism.
5
By installing a switching mechanism to switch the aforementioned gas introducing
and gas discharging portions to upper or lower direction of the treatment room, it is
possible to securely treat the gas containing dust to be treated by switching the gas
introducing portion and gas discharging portion in accordance with properties of
the gas containing the dust to be treated.
By arranging the liquid discharging portion at a higher position than the inner
bottom face of aforementioned liquid storage portion and the gas introducing and
gas discharging portions at a higher position than that, it is possible to sequentially
and safely discharge the liquid containing dust from the liquid storage portion.
By arranging the aforementioned liquid spraying mechanism at the intermediate
position of the treatment room and using hydrophobic material for the hair of the
catcher consisting of the brush at a higher position than that and hydrophilic
material for the hair of the catcher consisting of the brush at a lower position, it is
possible to discharge dry the gas discharged from the gas discharging portion and at
the same to improve the dust removing efficiency of the catcher.
By installing a stirrer for the aforementioned liquid storage portion and installing a
rotary driving mechanism to rotate the stirrer, it is possible to sequentially and
securely discharge the liquid containing dust from the liquid storage portion via the
liquid discharging portion, thus making it possible to treat more smoothly the gas
containing dust of high concentration without using a lot of liquid.
By dividing the aforementioned treatment room into upper and lower portions, it is
possible to conduct multiple treatments with a compact apparatus, such as dust
removal and making harmful gas harmless.
By sharing the aforementioned liquid storage portion and liquid discharging portion
with multiple dust-containing gas treatment apparatuses, it is possible to simplify
the apparatus composition.
6
By circulating the liquid recovered in the aforementioned liquid storage portion to
the liquid spraying mechanism, it is possible to reduce the liquid use and discharge
quantities.
[Brief description of drawings]
[Drawing 1] Explanatory drawing to show Embodiment 1 of dust-containing gas
treatment apparatus of this invention
[Drawing 2] Explanatory drawing to show Embodiment 2 of dust-containing gas
treatment apparatus of this invention
[Drawing 3] Explanatory drawing to show Embodiment 3 of dust-containing gas
treatment apparatus of this invention
[Drawing 4] Explanatory drawing to show Embodiment 4 of dust-containing gas
treatment apparatus of this invention
[Drawing 5] Explanatory drawing to show the dust-removing performance of
various types of equipment including the dust-containing gas
treatment apparatus of this invention
[Detailed description of the preferred embodiments]
The following explains the preferred embodiments of the dust-containing gas
treatment apparatus of this invention in accordance with the drawings.
Drawing 1 shows Embodiment 1 of the dust-containing gas treatment apparatus of
this invention.
7
This dust-containing gas treatment apparatus is to remove dust from gas containing
dust, and is equipped with a tubular, preferably a cylindrical treatment room 1 to
introduce the gas containing dust and remove the dust from the gas, catcher 2
consisting brush with hair 22 planted on support 21 to catch the dust contained in
the gas, arranged in the treatment room 1, liquid spraying mechanism 3 installed in
the treatment room 1, liquid storage portion 5 equipped with stirrer 4 formed at the
lower part of the treatment room 1, rotary driving mechanism 6 to rotate the catcher
2 and stirrer 4, gas introducing portion 7 to introduce dust-containing gas into the
treatment 1, gas discharging portion 8 to discharge the gas with the dust removed
from the treatment room 1, and liquid discharging portion 9 to discharge the liquid
containing the dust removed from the gas.
The brush with hair 22 planted in support 21 to form the catcher 2 includes a brush
with hair 22 locally planted in the catcher 21 and brush with hair 22 planted
diversely almost all the support 21.
As the brush with the hair 22 planted locally in a concentrated way, a spiral brush
(this embodiment), disk brush, etc. are included.
The brush to form the catcher 2 is preferable that the end of the hair 22 planted in the
support 21 is set in contact with the inside periphery of the cylindrical room 1.
This makes it possible that the inside periphery of the treatment room 1 is always
kept clean by the brush forming the catcher 2.
The materials of the brush support 21 and hair 22 are not particularly limited, but
considering the treatment temperature, if the treatment temperature is relatively
low, such as ordinary temperature or room temperature to about 110℃, it is possible
to use various types of synthetic resins such as polyethylene phthalate resin and
polyamide resin of relatively low heat resistance or conductive synthetic resin mixed
8
with conductive powder such as metal. If the treatment temperature is higher,
synthetic resin of high heat resistance, conductive synthetic resin of high heat
resistance mixed with conductive powder such as metal or metal is used. When the
treatment temperature is raised, materials especially high in heat conductivity,
metals such as copper, aluminum, iron and stainless steel or ceramic wool, or fiber
formed by mixture of metal and ceramic is selected, thereby making it possible for
the catcher to efficiently absorb the heat in the treatment room, and it a means to
heat the catcher is provided, the heating of the heating means can be conveyed
efficiently to the surface of the catcher, so that the treating capacity of the apparatus
when starting can be sharply raised and the chemical treatment on the surface of the
catcher is actively advanced, thus making it possible for the catcher to easily and
efficiently catch solids produced through the chemical treatment.
The liquid spraying mechanism 3 installed in the treatment room 1 has nozzle 31
installed to a higher portion of the treatment room 1, preferably to the ceiling surface
so that the liquid can be uniformly sprayed in the treatment room.
The installation position of the nozzle 31 is not limited to such a place, but it can be
provided on the inside periphery surface or the support 21 of the brush to form the
catcher 2.
For the liquid to be sprayed from the liquid spraying mechanism 3,it is possible to
use water or liquid in accordance with the properties of the gas with dust to be
removed, or chemical treatment conducted in the treatment room 1, specifically
oxidizing, reducing, decomposing, or neutralizing.
The liquid storage portion 5 equipped with the stirrer 4 formed at the lower part of
the treatment room 1 temporarily recovers and stores the liquid containing the dust
caught by the catcher 2 and washed down by the liquid sprayed from the spraying
mechanism 3, and sequentially discharges it via the liquid discharging mechanism 9.
9
The stirrer 4 is not limited in shape, so long as it can stir the liquid containing dust
stored in the storage portion 5 and discharge it uniformed in concentration, and it is
possible to adopt a rod shape, screw shape, or propeller shape.
Since this makes it possible to discharge the dust-containing liquid of the
concentration uniformed, it is possible to smoothly treat the gas containing the dust
of high concentration without using a lot of liquid.
The stirrer 4 can be omitted depending on the properties of the gas containing the
dust to be removed and the content of treatment.
The liquid storage portion 5 can be formed integral at the lower part of the treatment
room 1 or removable in the treatment room 1 for the purposes of maintenance and
treatment of large quantity of dust.
The rotary driving mechanism 6 to rotate the catcher 2 and stirrer 4 rotates them so
as to enhance the catching effect of the dust to be caught by the catcher 2 and the
effect of uniforming the concentration of the dust containing dust stored in the liquid
storage portion 5 by means of the stirrer 4.
In this embodiment, the rotating shaft of the catcher 2 (brush support 21) and that of
the stirrer 4 are made same and the rotary driving mechanism 6 is made common,
but individual driving mechanisms can also be adopted.
For the rotating shaft (brush support 21) of the catcher 2 and that of the stirrer 4,
bearing is provided at both ends so that high-speed rotation of 1000rpm, for
example, is made possible, but it is possible to provide the bearing only at the upper
end.
10
The number of revolutions of the catcher 2 is 100~2000rpm, preferably 500~1800
rpm, more preferably 800~1500rpm.
The gas introducing portion 7 and gas discharging portion 8 are connected so as to
be able to change to the upper or lower part of the treatment room 1 via the
switching mechanism 10 consisting of change-over valves 11, 12 and connecting
pipings 13, 14.
The gas discharging 8 is equipped with the discharge pump 81.
This makes it possible to switch the gas introducing portion 7 or gas discharging
portion 8 in accordance with the properties of the gas containing dust to be removed,
and for example, gas containing dust with small specific gravity is introduced to the
upper part of the treatment room 1 or gas containing dust with large specific gravity
to the lower part of the treatment room 1, thus preventing the short pass of air flow,
thus securing the treatment of dust-containing gas.
In this case, the liquid discharging portion 9 is installed at a higher position than the
inside bottom surface of the liquid storage portion 5 and the connecting pipings 13,
14 of the gas introducing portion 7 and gas discharging portion 8 are installed at a
position higher than that.
With this dust-containing gas treatment apparatus, the dust caught by the catcher 2
is washed down by the liquid sprayed from the spraying mechanism 3 and the
liquid is temporarily recovered in the liquid storage portion 5 equipped with the
stirrer 4 formed at the lower part of the treatment room 1 and the liquid containing
dust is subsequently discharged via the liquid discharging portion 9 from the liquid
storage portion 5, thus making it possible to achieve the treatment of the gas
containing dust of high concentration, maintenance-free smoothly under low load
environment with less pressure loss, without using a lot of liquid.
11
Simultaneously with the removal of dust contained in the gas, the harmful gas
contained in the gas can be made harmless by the liquid sprayed from the spraying
mechanism 3.
With the dust-containing gas treatment apparatus of the above Embodiment 1, the
liquid can be uniformly sprayed through the treatment room 1 by installing the
nozzle 31 of the liquid spraying mechanism 3 at the ceiling surface of the treatment
room 1, but the nozzle 31 of the liquid spraying mechanism 3 can also be installed at
the intermediate position of the treatment room 3 as the No. 2 embodiment of the
dust-containing gas treat apparatus of this invention shown on Drawing 2.
In this case, it is preferable to use hydrophobic (hydrofuge) material such as
synthetic resin such as polyolefine resin such as polypropylene, polyethylene
phthalate resin or metal for the hair of the catcher 2 consisting of the brush at a
higher position Z2 than it and hydrophilic material such as polyamide resin
nylon, polyvinyl chlorideresin, polyvinylidene chloride resin, etc. for the hair of the
catcher 2 consisting of the brush at the lower position Z1.
This makes it possible to discharge dry the gas discharged from the gas discharging
portion 8 by dropping the liquid with the catcher 2 consisting of the brush of the hair
formed with the hydrophobic (hydrofuge) material at the higher position Z2 than
the installation position of the nozzle 31 of the liquid spraying mechanism 3, and at
the same time the dust is caught by the catcher 2 consisting of the brush of the hair
formed with the hydrophilic material at the lower position Z1 than the lower
position than the installation position of the nozzle 31 of the liquid spraying
mechanism 3, thereby improving the dust removing efficiency.
In the dust-containing gas treatment apparatuses of the above Embodiment 1 and
Embodiment 2, the treatment room 1 is made one room, but as the Embodiment 3 of
the dust-containing gas treatment apparatus of this invention shown on Drawing 2,
the treatment room can be divided into upper part and lower part.
12
Here the two treatment rooms 1A and 1B are basically equipped with the same
mechanism as for the dust-containing gas treatment apparatuses of the above
Embodiment 1 and Embodiment 2, and the rotating shaft of the catcher 2 (brush
support 21) and that of the stirrer 4 can be made same and the rotary driving
mechanism 6 can be made common.
This makes it possible for an apparatus made compact to conduct multiple different
treatments such as dust removal and making harmless the harmful gas contained in
the gas.
Like Embodiment 4 of the dust-containing gas treatment apparatus of this invention
shown on Drawing 4, the liquid storage portion 5 and liquid discharging portion 9
can be shared by multiple dust-containing gas apparatuses (in this case, the liquid
storage portion 5 and liquid discharging portion 9 can be omitted or simplified from
the dust-containing gas treatment apparatus) thereby simplifying the apparatus
composition.
In this case, the liquid storage portion 5 can be equipped with the stirrer 4 and the
rotary driving mechanism 6 to rotate the stirrer 4 can be provided.
The liquid recovered in the liquid storage portion 5 can be circulated to the liquid
spraying mechanism 3 thereby reducing the liquid consumption and discharge
quantity.
In this case, the liquid circulating passage 32 can be provided, as required, with filter
33, pump 34 and selector valve 35.
In the dust-containing gas treatment apparatus equipped with the treatment room 1
of 200mm in diameter, the liquid of several L/min to hundreds of L/min, preferably
tens of L/min is normally sprayed from the liquid spraying mechanism 3, but
13
through the circulated use of the liquid, the liquid consumption and discharge
quantity can be reduced to 1/10 or less of the liquid sprayed.
As aforementioned, the dust-containing gas treatment apparatuses described in the
above Embodiment 1 to Embodiment 4 can achieve the treatment of the gas
containing dust of high concentration under a low load environment with less
pressure loss, maintenance-free and smoothly, without using a lot of liquid, and the
dust removing performance of each apparatus is shown on Drawing 5.
As clear from Drawing 5, it was confirmed that the dust-containing gas treatment
apparatus of this invention demonstrated superior dust removing performance for
dust of particle diameter in a wide range among various known apparatuses.
We have explained the dust-containing gas treatment apparatus of this invention in
accordance with multiple embodiments, but this invention is not limited to the
compositions described in the above embodiments and it is possible to change the
composition as required within the range not deviating from the purpose such as
combining the components described in the embodiments.
[Industrial applicability]
Since the dust-containing gas treatment apparatus of this invention has
characteristics to smoothly achieve the treatment of gas containing dust of high
concentration, it can be used suitably for the applications of the dust-containing gas
treatment application for treating the gas containing dust of high concentration in
semiconductor industry, automobile industry, plastic industry, resource industry,
ceramic industry, powder metallurgy, detergent industry, catalyst industry, ferrite
industry, color material industry, agricultural chemical industry, pharmaceutical
industry feed industry, food industry, waste disposal industry, biological industry,
cosmetic industry, etc. and in addition, it can be widely used as dust-containing gas
14
treatment apparatus to treat gas containing dust of high concentration at building
and civil-engineering work sites and for such applications as gas cleaning, air
cleaning, disinfection, deodorizing, etc. because it can remove very small substances
contained in gas.
15
[Explanation of codes]
1 Treatment room
1A Treatment room
1B Treatment room
2 Catcher (brush)
21 Support
22 Hair
3 Liquid spraying mechanism
31 Nozzle
32 Liquid circulating passage
33 Filter
34 Pump ﾟ
35 Selector valve
4 Stirrer
5 Liquid storage portion
6 Rotary driving mechanism
6’ Rotary driving mechanism
7 Gas introducing portion
8 Gas discharging portion
9 Liquid discharging portion
10 Switching mechanism
11 Selector valve
12 Selector valve
13 Connecting piping
14 Connecting piping
WE CLAIM :
1. The dust-containing gas treatment apparatus to remove the dust contained
in gas is equipped with a cylindrical treatment room (1) to introduce gas
containing dust and remove the dust from the gas, catcher (2) consisting
brush with hair (22) planted in the support (21) installed in the treatment
room (1) and catch the dust contained in the gas, liquid spraying mechanism
(3) installed in the treatment room (1), storage portion (5) of the liquid
flowing down through the treatment room (1), rotary driving mechanism (6)
to rotate the catcher (2), gas introducing portion (7) the gas containing dust
into the treatment room (1), gas discharging portion (8) to discharge the gas
with the dust removed from the treatment room (1), and liquid discharging
portion (9) to discharge the liquid containing the dust removed from the gas,
and characterized in that it is provided with a switching mechanism (10) to
be able to switch the aforementioned gas introducing portion (7) and gas
discharging portion (8) to the upper or lower direction of the treatment room
(1).
2. The dust-containing gas treatment apparatus as claimed in claim 1 wherein
the liquid discharging portion (9) is arranged at a position higher than the
inner bottom surface of the aforementioned liquid storage portion (5) and
the gas introducing and discharging portions (7,8) are arranged at a higher
position than that.
3. The dust-containing gas treatment apparatus as claimed in claim 1 or 2
wherein catcher (2) consisting of the hair (22) of the brush arranged at a
lower position than the aforementioned liquid spraying mechanism (3).
17
4. The dust-containing gas treatment apparatus as claimed in claim 1 to 3
wherein the aforementioned liquid storage portion (5) is equipped with a
stirrer (4) and rotary driving mechanism (6,6’) to rotate the stirrer (4).
5. The dust-containing gas treatment apparatus as claimed in claim 1 to 4
wherein the aforementioned treatment room (1) is divided into upper and
lower parts (1A,1B).
6. The dust-containing gas treatment apparatus as claimed in claim 1 to 5
wherein the aforementioned liquid storage portion (5) and liquid
discharging portion (9) can be shared by multiple treatment rooms (1).
7. The dust-containing gas treatment apparatus as claimed in claim 1 to 6
wherein the liquid recovered in the aforementioned liquid storage portion
(5) is circulated to the liquid spraying mechanism (3).
8. The dust-containing gas treatment apparatus as claimed in claim 1 to 7
wherein the brush of the aforementioned catcher (2) is composed of spiral
brush.
9. The dust-containing gas treatment apparatus as claimed in claim 1 to 8
wherein the number of revolutions of the rotation shaft of the aforementioned
catcher (2) is set in the range of 800to1500rpm.