WE CLAIM:
Claim 1. A dust removing device (10, 10A to 10K) configured to eject compressed fluid from a jet nozzle (16) into a hole (14) of an object (12) and suction dust adhering to the hole (14) and the compressed fluid by using a suction nozzle (18) enclosing the jet nozzle (16), in a state that the jet nozzle (16) is inserted into the hole (14) and the hole (14) is closed by the suction nozzle (18), the dust removing device comprising:
a hollow nozzle body (20) to which the jet nozzle (16) and the suction nozzle (18) are connected and through which the dust and the compressed fluid suctioned by the suction nozzle (18) are discharged to an outside;
an ejection volume adjustment part (66) configured to adjust a flow rate of the compressed fluid ejected from the jet nozzle (16); and
a suction volume adjustment part (28, 38) configured to adjust an amount of the dust and an amount of the compressed fluid suctioned by the suction nozzle (18), wherein:
the nozzle body (20) includes a first fluid supply route (80) along which part of the compressed fluid supplied from the outside is supplied as first compressed fluid to the jet nozzle (16), the part of the compressed fluid being ejected from the jet nozzle, and a second fluid supply route (84) along which another part of the compressed fluid supplied from the outside is discharged as second compressed fluid toward a downstream side in a discharge direction along which the dust and the first compressed fluid are discharged in the nozzle body (20);
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the discharging of the second compressed fluid toward the downstream side in the discharge direction causes the dust and the first compressed fluid to be discharged to the outside via the suction nozzle (18) and the nozzle body 5 (20);
the ejection volume adjustment part (66) adjusts a flow channel area of the first fluid supply route (80) to thereby adjust a flow rate of the first compressed fluid ejected from the jet nozzle (16); and
10 the suction volume adjustment part (28, 38) adjusts a
flow channel area of the second fluid supply route (84) to thereby adjust a flow rate of the second compressed fluid discharged on the downstream side in the discharge direction, whereby the amount of the dust and the amount of
15 the compressed fluid suctioned by the suction nozzle (18) are adjusted.
Claim 2. The dust removing device (10, 10A to 10K)
according to claim 1, wherein:
20 a base end portion (40) of the jet nozzle (16) is
secured to the suction nozzle (18);
the suction nozzle (18) is attached to an inner
circumferential surface (26) of the nozzle body (20) so as
to be movable in an axial direction of the nozzle body (20);
25 the second fluid supply route (84) is a gap (82) formed
between a base end portion (34) of the suction nozzle (18) and the inner circumferential surface (26) of the nozzle body (20); and
the suction volume adjustment part (28, 38) adjusts an 30 opening degree of the gap (82) by moving the suction nozzle
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(18) in the axial direction relative to the inner circumferential surface (26) of the nozzle body (20) to thereby adjust the flow rate of the second compressed fluid.
5 Claim 3. The dust removing device (10, 10A to 10K)
according to claim 2, wherein:
the ejection volume adjustment part (66) is a needle screw provided on the nozzle body (20) to narrow down the first fluid supply route (80); and
10 the suction volume adjustment part (28, 38) comprises
an adjustment thread formed in an outer circumferential surface (36) of the suction nozzle (18) and an adjustment thread formed in the inner circumferential surface (26) of the nozzle body (20), the adjustment threads being
15 configured to be screw-engaged with each other.
Claim 4. The dust removing device (10A, 10K) according to claim 1, wherein:
an ejection port (48) through which the first 20 compressed fluid is ejected is formed in an outer
circumferential surface and/or a distal end surface of a tip portion (42) of the jet nozzle (16); and
the tip portion (42) of the jet nozzle (16) is replaceable. 25
Claim 5. The dust removing device (10A, 10K) according to claim 4, wherein the ejection port (48) extends in an axial direction of the jet nozzle (16) or in a radial direction of the jet nozzle (16), and/or is inclined at a 30 predetermined angle with respect to the radial direction.
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Claim 6. The dust removing device (10A) according to claim 5, wherein:
the tip portion (42) of the jet nozzle (16) includes an 5 inner cylindrical part (42a) connected to the jet nozzle
(16) and an outer cylindrical part (42b) attached onto the inner cylindrical part (42a) so as to be rotatable about a central axis (30) of the jet nozzle (16);
the inner cylindrical part (42a) has an inner ejection 10 port (48a) extending in the radial direction; and
the outer cylindrical part (42b) has an outer ejection port (48b) inclined at a predetermined angle with respect to the radial direction.
15 Claim 7. The dust removing device (10B) according to
claim 1, wherein:
the suction nozzle (18) includes a tubular mounting portion (18a) attached to the nozzle body (20), and a tubular attachment portion (18b) detachable from the 20 mounting portion (18a) and to which a base end portion (40) of the jet nozzle (16) is attached;
a protrusion (112) is formed on an outer circumferential surface of the attachment portion (18b); and the mounting portion (18a) is provided with a locking 25 part (120) protruding inward of the mounting portion (18a) to lock the protrusion (112).
Claim 8. The dust removing device (10C) according to
claim 1, further comprising:
30 a first tubular body (122) attached to a distal end
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portion (32) of the suction nozzle (18) so as to be movable along an outer circumferential surface (36) of the suction nozzle (18);
a first spring member (124) interposed between the 5 nozzle body (20) and the first tubular body (122); and
a first plunger (126) provided on the nozzle body (20) and extending in an axial direction of the nozzle body (20) toward the first tubular body (122); wherein:
the nozzle body (20) further includes an inlet channel 10 (56) through which the compressed fluid supplied from the
outside is supplied to the first fluid supply route (80) and the second fluid supply route (84);
a first seal body (132) configured to open and close the inlet channel (56) is attached to a base end portion of 15 the first plunger (126);
when the first tubular body (122) comes into contact with the object (12) and the nozzle body (20) moves toward the object (12) against an elastic force of the first spring member (124) to thereby bring the first plunger (126) into 20 abutment on the first tubular body (122), the first seal
body (132) opens the inlet channel (56) due to displacement of the first plunger (126) in the axial direction as the nozzle body (20) moves toward the object (12); and
when the first tubular body (122) is separated from the 25 object (12) and the nozzle body (20) is relatively separated from the first tubular body (122) by the elastic force of the first spring member (124), the first seal body (132) closes the inlet channel (56) due to displacement of the first plunger (126) in the axial direction.
30
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Claim 9. The dust removing device (10D) according to claim 1, wherein:
a tip of the jet nozzle (16) is provided with a valve
element (138) configured to close an ejection port (48); and
5 the jet nozzle (16) is inserted into the hole (14) and
the valve element (138) comes into contact with a bottom portion (90) of the hole (14) to thereby displace the valve element (138) in an axial direction of the jet nozzle (16), whereby the ejection port (48) is opened, and the first 10 compressed fluid is ejected from the ejection port (48).
Claim 10. The dust removing device (10E) according to claim 1, further comprising:
a second tubular body (146) attached to a distal end 15 portion (32) of the suction nozzle (18) so as to be movable along an outer circumferential surface (36) of the suction nozzle (18);
a second spring member (148) interposed between the
nozzle body (20) and the second tubular body (146); and
20 a second plunger (150) provided on the nozzle body (20)
and extending in an axial direction of the nozzle body (20) toward the second tubular body (146); wherein:
a second seal body (156) configured to open and close the first fluid supply route (80) is attached to a base end 25 portion of the second plunger (150);
when the second tubular body (146) comes into contact with the object (12) and the nozzle body (20) moves toward the object (12) against an elastic force of the second spring member (148) to thereby bring the second plunger 30 (150) into abutment on the second tubular body (146), the
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second seal body (156) opens the first fluid supply route
(80) due to displacement of the second plunger (150) in the
axial direction as the nozzle body (20) moves toward the
object (12); and
5 when the second tubular body (146) is separated from
the object (12) and the nozzle body (20) is relatively separated from the second tubular body (146) by the elastic force of the second spring member (148), the second seal body (156) closes the first fluid supply route (80) due to 10 displacement of the second plunger (150) in the axial direction.
Claim 11. The dust removing device (10F, 10K) according to claim 1, further comprising:
15 a tubular portion (161) protruding from the nozzle body
(20) and/or the suction nozzle (18) toward the object (12) and configured to come into contact with a surface (88) of the object (12) before the jet nozzle (16) comes into contact with a bottom portion (90) of the hole (14) when the
20 jet nozzle (16) is inserted into the hole (14).
Claim 12. The dust removing device (10F, 10K) according to claim 11, wherein, when the tubular portion (161) is separated from the object (12), the tubular portion 25 (161) returns to a position prior to the contact with the object (12), by a spring-back function.
Claim 13. The dust removing device (10G) according to
claim 1, further comprising:
30 a dust detecting unit (170) configured to detect
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passage of the dust inside the nozzle body (20).
Claim 14. The dust removing device (101) according to claim 1, further comprising:
a blocking member (192) replaceably attached to the suction nozzle (18) and configured to block up an area around the hole (14) on a surface (88) of the object (12) when the jet nozzle (16) is inserted into the hole (14).
Claim 15. A dust removing system (184H to 184K) comprising:
a plurality of the dust removing devices (10H to 10K) according to claim 1; and
a compressed fluid supply block (180) configured to connect and secure the dust removing devices (10H to 10K) and to supply the compressed fluid to the dust removing devices (10H to 10K).
Claim 16. The dust removing systems (184H to 184K) according to claim 15, wherein the dust removing devices (10H to 10K) are secured at predetermined intervals in a longitudinal direction of the compressed fluid supply block (180) so that the jet nozzles (16) extend in a same direction as each other.
Claim 17. The dust removing system (184J) according to claim 15, wherein, in the compressed fluid supply block (180), each of the dust removing devices (10J) is provided with an attachment position adjustment mechanism (194) configured to adjust an attachment position of the
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corresponding dust removing device (10J)
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