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Electronic Assembly Comprising Solderable Thermal Interface And Methods Of Manufacture.

Abstract: To accommodate high power densities associated with high performance integrated circuits, heat is dissipated from a surface of a die through a solderable thermal interface to a lid or integrated heat spreader. In one embodiment, the die (50) is mounted on an organic substrate (54) using a C4 and land grid array arrangement. In order to maximize thermal dissipation from the die (50) while minimizing warpage of the package when subjected to heat, due to the difference in thermal coefficients of expansion between the die (50) and the organic substrate (54), a thermal interface (60) is used that has a relatively low melting point in addition to a relatively high thermal conductivity. Methods of fabrication, as well as application of the package to an electronic assembly, an electronic system, and a data processing system, are also described.

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Patent Information

Application #
Filing Date
15 January 2003
Publication Number
08/05
Publication Type
INA
Invention Field
ELECTRONICS
Status
Email
Parent Application
Patent Number
Legal Status
Grant Date
2007-02-16
Renewal Date

Applicants

INTEL CORPORATION
2200 MISSION COLLEGE BOULEVARD ,SANTA CLARA CA 95052,

Inventors

1. WORKMAN THOMAS
1430 CHERRYDALE DRIVE SAN JOSE CA 95125
2. SUR BISWAJIT
6915 ROCKTON AVENUE SAN JOSE CA 95119
3. VODRAHALLI NAGESH K
20276 PINNTAGE PARKWAY CA 95125 CUPERTINO ,

Specification

Electronic Assembly Comprising Solderable Thermal Interface and Methods of
Manufacture
Technical Field of the Invention
The present invention relates generally to electronics packaging. More
particularly, the present invention relates ro an electronic assembly that includes an
integrated circuit package comprising a solderable thermal interface between the
integrated circuit and a heat spreader to dissipate heat generated in a high speed integrated
circuit, and to manufacturing methods related thereto.
Background of the Invention
Integrated circuits (ICs) are typically assembled into packages by physically and
electrically coupling them to a substrate made of organic or ceramic material. One or
more IC packages can be physically and electrically coupled to a printed circuit board
(PCB) to form an ''electronic assembly". The "electronic assembly" can be part of an
"electronic system". An "electronic system" is broadly defined herein as any product
comprising an "electronic assembly". Examples of electronic systems include computers
(e.g., desktop, laptop, handheld, server, etc.), wireless communications devices (e.g.,
cellular phones, cordless phones, pagers, etc.), computerrelated peripherals (e.g., printers,
scanners, monitors, etc.), entertainment devices (e.g., televisions, radios, stereos, tape and
compact disc players, video cassette recorders, MP3 (Motion Picture Experts Group,
Audio Layer 3) players, etc.), and the like.
In the Field of electronic systems there is an incessant competitive pressure among
manufacturers to drive the performance of their equipment up while driving down
production costs. This is particularly true regarding the packaging of ICs on substrates,
where each new generation of packaging must provide increased performance while
generally being smaller or more compact in size. As the power demands of high
performance IC processors approach and even exceed 100 watts per chip, with localized
power densities exceeding 200 watts/square centimeter, the heat dissipating capability of
the IC package must correspondingly increase.
An IC substrate may comprise a number of metal layers selectively patterned to
provide metal interconnect lines (referred to herein as "traces"), and one or more
electronic components mounted on one or more surfaces of the substrate. The electronic
component or components are functionally connected to other elements of an electronic
system through a hierarchy of electrically conductive paths that include the substrate
traces. The substrate traces typically carry signals that are transmitted between the
electronic components, such as ICs, of the system. Some ICs have a relatively large
number of input/output (I/O) terminals, as well as a large number of power and ground
terminals.
One of the conventional methods for mounting an IC on a substrate is called
"controlled collapse chip connect" (C4). In fabricating a C4 package, the electrically
conductive terminations or lands (generally referred to as "electrical contacts") of an IC
component are soldered directly to corresponding lands on the surface of the substrate
using reflowable solder bumps or balls. The C4 process is widely used because of its
robustness and simplicity.
As the internal circuitry of ICs. such as processors, operates at higher and higher
clock frequencies, and as ICs operate at higher and higher power levels, the amount of
heat generated by such ICs can increase to unacceptable levels.
For the reasons stated above, and for other reasons stated below which will become
apparent to those skilled in the art upon reading and understanding the present
specification, there is a significant need in the art for a method and apparatus for
packaging an IC on a substrate that minimizes heat dissipation problems associated with
high clock frequencies and high power densities.
Brief Description of the Accompanying Drawings
FIG. 1 is a block diagram of an electronic system incorporating at least one
electronic assembly with a solderable thermal interface in accordance with one
embodiment of the invention;
FIG. 2 illustrates a cross-sectional representation of an integrated circuit package,
in accordance with one embodiment of the invention;
FIG. 3 illustrates a cross-sectional representation of a solderable thermal interface
between a die and a lid or integrated heat spreader, in accordance with one embodiment of
the invention; and
FIG. 4 is a flow diagram of a method of packaging a die, in accordance with one
embodiment of the invention.
Detailed Description of Embodiments of the Invention
In the following detailed description of embodiments of the invention, reference is
made to the accompanying drawings which form a part hereof, and in which is shown by
way of illustration specific preferred embodiments in which the inventions may be
practiced. These embodiments are described in sufficient detail to enable those skilled in
the art to practice the invention, and it is to be understood that other embodiments may be
utilized and that logical, mechanical, and electrical changes may be made without
departing from the spirit and scope of the present inventions. The following detailed
description is, therefore, not to be taken in a limiting sense, and the scope of the present
invention is defined only by the appended claims.
The present invention provides a solution to thermal dissipation problems that are
associated with prior art packaging of integrated circuits that operate at high clock speeds
and high power levels by employing a highly conductive solder material as a thermal
interface between an IC die and a heat spreader. Various embodiments are illustrated and
described herein.
In one embodiment, an IC die is mounted to an organic land grid array (OLGA)
substrate using C4 technology. An integrated heat spreader is attached to the back surface
of the die using a highly conductive solderable thermal interface material after suitable
preparation of the die and heat spreader surfaces. A solderable thermal interface material
is selected that has a relatively low melting point, in order to minimize thermal stresses in
the package that can be generated, because the silicon die has a relatively low thermal
coefficient of expansion (TCE) compared to the TCE of the OLGA substrate. By reducing
thermal stresses, the package is less likely to experience warpage when it is subjected to
heat, for example during solder reflow.
The solderable thermal interface material also has excellent thermal conductive
properties. The integrated heat spreader can also be coupled to the OLGA substrate
around the die periphery with a suitable sealant in order to provide mechanical strength.
In addition to the foregoing advantages, the use of a low melting point solder as a
thermal interface material avoids many problems associated with the use of polymeric
thermal interface materials (e.g. those containing silver or aluminum), such as resin
separation, out-gassing, delamination, pump-out, and so forth.
FIG. 1 is a block diagram of an electronic system 1 incorporating at least one
electronic assembly 4 with a solderable thermal interface in accordance with one
embodiment of the invention. Electronic system 1 is merely one example of an electronic
system in which the present invention can be used. In this example, electronic system 1
comprises a data processing system that includes a system bus 2 to couple the various
components of the system. System bus 2 provides communications links among the
various components of the electronic system 1 and can be implemented as a single bus, as
a combination of busses, or in any other suitable manner.
Electronic assembly 4 is coupled to system bus 2. Electronic assembly 4 can
include any circuit or combination of circuits. In one embodiment, electronic assembly 4
includes a processor 6 which can be of any type. As used herein, "processor" means any
type of computational circuit, such as but not limited to a microprocessor, a
microcontroller, a complex instruction set computing (CISC) microprocessor, a reduced
instruction set computing (RISC) microprocessor, a very long instruction word (VLIW)
microprocessor, a graphics processor, a digital signal processor (DSP), or any other type
of processor or processing circuit.
Other types of circuits that can be included in electronic assembly 4 are a custom
circuit, an application-specific integrated circuit (ASIC), or the like, such as, for example,
one or more circuits (such as a communications circuit 7) for use in wireless devices like
cellular telephones, pagers, portable computers, two-way radios, and similar electronic
systems. The IC can perform any other type of function.
Electronic system 1 can also include an external memory 10, which in turn can
include one or more memory elements suitable to the particular application, such as a mail
memory 12 in the form of random access memory (RAM), one or more hard drives 14,
and/or one or more drives that handle removable media 16 such as floppy diskettes,
compact disks (CDs), digital video disk (DVD), and the like.
Electronic system I can also include a display device 8, a speaker 9, and a
keyboard and/or controller 20, which can include a mouse, trackball, game controller,
voice-recognition device, or any other device that permits a system user to input
information into and receive information from the electronic system 1.
FIG. 2 illustrates a cross-sectional representation of an integrated circuit (IC)
package, in accordance with one embodiment of the invention. The IC package comprises
a die 50 mounted on an organic land grid array (OLGA) substrate 54, and a lid or
integrated head spreader (IHS) 52. While an OLGA substrate is shown, the present
invention is notSlimited to use with an OLGA substrate, and any other type of substrate cai
be employed
The IC package illustrated in FIG. 2 can form part of electronic assembly 4 shown
in FIG./1- Die 50 can be of any type. In one embodiment, die 50 is a processor.
In FIG. 2, die 50 comprises a plurality of signal conductors (not shown) that
terminate in pads on the bottom surface of die 50 (not shown). These pads can be coupled
to corresponding lands 68 representing signal, power, or ground nodes on OLGA substrate
54 by appropriate connections such as C4 solder bumps 66. A suitable underfill 62, such
as an epoxy material, can be used to surround C4 solder bumps 66 to provide mechanical
stability and strength.
Still referring to FIG. 2, lid or IHS 52 forms a cover over die 50. IHS 52 is
thermally coupled to a surface of die 50 through a suitable solderable thermal interface 60.
Die 50 can thus dissipate a substantial amount of heat through thermal interface 60 to IHS
52. The solderable thermal interface 60 comprises a material that is capable of conducting
heat at a relatively high rate, and that has a relatively low melting point to minimize
thermal stresses in the package when it is subjected to heat, for example during solder
refiow.
IHS 52 can be mechanically supported by coupling its wall or support member 53
to the surface of OLGA substrate 54 through a suitable sealant 64. In one embodiment,
the wall or support member 53 is located at the periphery of IHS 52. However, in other
embodiments IHS 52 can extend beyond the support member 53. For example, a heat
spreader of any shape can be formed as part of or attached to IHS 52, in order to increase
the rate of heat dissipation from die 50.
OLGA substrate 54 can be of any type, including a multi-layer substrate. OLGA
substrate 54 can be mounted to an additional substrate 70, such as a printed circuit board
(PCB) or card. OLGA substrate 54 can comprise, for example, a plurality of lands 57 that
can be mechanically and electrically coupled to corresponding lands 59 of substrate 70 by
suitable connectors such as ball grid array (BGA) solder balls 58.
While a BGA arrangement 56 is illustrated in FIG. 2 for coupling OLGA substrate
54 to substrate 70, the present invention is not limited to use with a BGA arrangement, and
it can be used with any other type of packaging technology, e.g. land grid array (LGA),
chip scale package (CSP), or the like. Further, the present invention is not to be construed
as limited to use in C4 packages, and it can be used with any other type of IC package
where the herein-described features of the present invention provide an advantage.
The fabrication of an IC package comprising a solderable thermal interface 60 will
now be described.
Fabrication
In order to successfully fabricate an IC package with the advantages described
above, it is important to have a die surface that is readily solderable. It is also important to
have an IHS that is readily solderable. In addition, it is important to use a suitable solder
material. Further, it is important to utilize a suitable process for forming a reliable
thermal interface between the die and the IHS. Each of the above-mentioned factors will
now be described in sufficient detail to enable one of ordinary skill in the art to understand
and practice the invention.
FIG. 3 illustrates a cross-sectional representation of a thermal interface (also
referred to herein as a thermally conductive element) 60 between a die 50 and a lid or
integrated heat spreader (IHS) 52, in accordance with one embodiment of the invention.
For good solderability of the thermal interface 60 to the die 50, according to one
embodiment of the invention, one or more metal layers 82, 84, and 86 are deposited on the
die surface that is to be coupled via thermal interface 60 to the IHS 52. Before deposition
of the one or more metal layers 82, 84, and/or 86, the wafer surface can be prepared with a
sputter etch, if desired, to improve the adhesion of the adhesion layer 82 to the die surface;
however, a sputter etch is not essential. Nor is the condition of the wafer surface essential.
The wafer surface can be in unpolished, polished, or back-ground form.
Next, an adhesion layer 82 of a metal that adheres well to silicon, silicon oxide, or
silicon nitride, such as titanium (Tij, is deposited onto the etched surface. In one
embodiment, a 500 Angstrom layer of titanium is sputtered onto the etched surface.
Chromium (Cr), vanadium (V), and possibly zirconium (Zr) could be substituted for Ti.
Next, a second metal layer 84, such as nickel-vanadium (NiV), is deposited. In
one embodiment, a 3500 Angstrom layer of NiV is sputtered onto the Ti layer. A purpose
of layer 84 is to serve as a diffusion barrier to prevent any reaction of solder in the thermal
interface 60 with the adhesion layer 82, which could result in possible delamination of the
thermal interface 60 from the die 50. Layer 84 is not necessarily required, depending upon
the composition of the adhesion layer 82, the solder material in the thermal interface 60.
and the thermal treatment during the reflow operation.
Next, a third metal layer 86, such as gold (Au), is deposited. In one embodiment, a
600 Angstrom layer of Au is sputtered onto the NiV layer. Any metal that "wets" the
chosen solder material in the thermal interface 60 could be substituted for gold. Nickel is
one example.
For good solderability of the thermal interface 60 to the lid or IHS 52, one or more
metal or solderable organic layers 88 are deposited onto the appropriate surface of the IHS
52. In one embodiment, IHS 52 comprises copper (Cu); in another embodiment IHS 52
comprises aluminum-silicon-carbide (AlSiC). For an IHS 52 comprising either Cu or
AlSiC, a 2-5 micron thick layer 88 of Ni is deposited on the lower surface of IHS 52.
Electroless Ni plating is carried out in a Niklad 767 bath using a medium force solution.
Any metal that "wets" the chosen solder material in the thermal interface 60 could be
substituted for nickel. Gold is one example. A combination of metals or alloys could also
be substituted for the single layer 88 shown in FIG. 3.
For a suitable solder material, any of the solder alloys, or a combination thereof,
listed in Table 1 would be effective. All are commercially available from Indium
Corporation of America, Utica, NY under the corresponding Indailoy( No. In one
embodiment, the solder can be integrated with a no-clean flux vehicle to form a solder
paste with an 89% loading of the selected solder alloy.
A suitable process for forming a reliable solderable thermal interface between the
die and the IHS will now be described. Solder paste is first applied to the back side of the
die. Alternatively, the solder paste could be applied to the surface of IHS 52 that faces
the back side of the die. Then a suitable sealant (64, FIG. 2) is applied to the OLGA
substrate 54 where the periphery or boundary of IHS 52 will make contact when it is
positioned over the die 50. Next, the IHS 52 is placed, and an appropriate force can be
applied, for example using a spring, to hold IHS 52 in position. The package is then put
into a suitable heating environment, such as a flow furnace, for solder reflow. In one
embodiment of the method, during solder reflow, the maximum zone temperature in the
furnace is maintained at liquidus of the solder material + 30(C, and the time above
liquidus is approximately 60 seconds. Following solder join of the thermal interface, the
sealant at the IHS boundary is cured in a conventional oven.
The above-described choice of materials, geometry, number of layers, etching,
deposition, and assembly can all be varied by one of ordinary skill in the art to optimize
the thermal performance of the package. However, an unoptimized embodiment of the
present invention has been demonstrated to provide a substantial thermal margin for IC's
operating at high clock frequencies and high power levels, and without any adverse impact
on package reliability.
Any suitable method, or combination of different methods, for depositing the metal
layers can be used, such as sputtering, vapor, electrical, screening, stenciling, chemical
including chemical vapor deposition (CVD), vacuum, and so forth.
The particular implementation of the IC package is very flexible in terms of the
orientation, size, number, and composition of its constituent elements. Various
embodiments of the invention can be implemented using various combinations of substrate
technology, IHS technology, thermal interface material, and sealant to achieve the
advantages of the present invention. The structure, including types of materials used,
dimensions, layout, geometry, and so forth, of the IC package can be built in a wide
variety of embodiments, depending upon the requirements of the electronic assembly of
which it forms a part.
FIGS. 2 and 3 are merely representational and are not drawn to scale. Certain
proportions thereof may be exaggerated, while others may be minimized. FIGS. 2 and 3
are intended to illustrate various implementations of the invention that can be understood
and appropriately carried out by those of ordinary skill in the art.
FIG. 4 is a flow diagram of a method of packaging a die, in accordance with one
embodiment of the invention. The method begins at 100.
In 101, at least one metal layer is formed on a surface of a die. In one
embodiment, as described above, individual layers of titanium, nickel-vanadium, and gold
are successively deposited on the upper surface of die 50 (FIG. 3). One or more alloys of
these metals could also be used.
In 103, at least one metal layer is formed on a surface of the lid. In one
embodiment, as described above, a layer of nickel is deposited on the lower surface of lid
or IHS 52 (FIG. 3).
In 105, the die is mounted on a substrate. In one embodiment, as described above,
the substrate is an organic substrate, and the die is C4 mounted using a land grid array
(LGA) arrangement. It is to be noted that substrates comprising one or more organic
materials, such as epoxies, acrylates, polyimides, polyurethanes, polysulfides, resin-glass
weave (e.g. FR-4), nylons, and other similar materials, have a relatively high thermal
coefficient of expansion compared with that of the die.
In 107, solder material having a relatively high thermal conductivity and a
relatively low melting point is applied to the at least one metal layer of the die. In
securing the IHS to the die, it is desirable to employ a solder material having a relatively
low melting point to minimize warpage problems when the package is subjected to heat.
In one embodiment, as described above, the solder material is any of those listed in Table
1; however, other solder materials besides those listed in Table 1 could be used, provided
that they have the qualities previously mentioned. Alternatively, the solder material could
be applied to the at least one metal layer on the surface of the lid. The solder material can
be applied at any suitable stage in the fabrication process.
In 109, a suitable sealant is applied to the surface of the substrate where the
support member 53 (FIG. 2) of IHS 52 will contact it.
In 111, the IHS is placed and aligned so that the inner surface of the IHS contacts
the layer of solder materia/ and, concurrently, the support member 53 oflHS 52 contacts
the sealant. A spring (not shown) is also placed to secure the assembly with respect to an
assembly carrier (not shown).
In 113, the solder material is melted or reflowed by heating so that, when it has
cooled, the IHS 52 is physically and thermally coupled to the upper surface of the top
metal layer 86 (FIG. 3) on die 50.
In 115, the sealant is cured, for example, by heating, to provide mechanical
coupling of the assembly. Post cure, the securing spring is removed from the assembly
carrier. The method ends in 120.
The operations described above with respect to the methods illustrated in FIG. 4
can be performed in a different order from those described herein. For example, it will be
understood by those of ordinary skill that 103 could be carried out prior to 101, that 107
could be carried out prior to 105. and 109 could be carried out prior to 107.
Conclusion
The present invention provides for an electronic assembly and methods of
manufacture thereof that minimize thermal dissipation problems associated with high
power delivery. An electronic system and/or data processing system that incorporates one
or more electronic assemblies that utilize the present invention can handle the relatively
high power densities associated with high performance integrated circuits, and such
systems are therefore more commercially attractive.
As shown herein, the present invention can be implemented in a number of
different embodiments, including an assembly for a die, an integrated circuit package, an
electronic assembly, an electronic system, a data processing system, and a method for
packaging an integrated circuit. Other embodiments will be readily apparent to those of
ordinary skill in the art. The elements, materials, geometries, dimensions, and sequence of
operations can all be varied to suit particular packaging requirements.
Although specific embodiments have been illustrated and described herein, it will
be appreciated by those of ordinary skill in the art that any arrangement that is calculated
to achieve the same purpose may be substituted for the specific embodiment shown. This
application is intended to cover any adaptations or variations of the present invention.
Therefore, it is manifestly intended that this invention be limited only by the claims and
the equivalents thereof.
CLAIMS
What is claimed is :
1. An assembly comprising:
a die having a surface;
an adhesion layer of metal coupled to the surface;
a solder-wettable layer coupled to the adhesion layer;
a lid; and
a solderable thermally conductive element to couple the lid to the solder-wettable
layer.
2. The assembly as claimed in claim 1 wherein the lid comprises material
from the group consisting of copper and aluminum-silicon-carbide.
3. The assembly as claimed in claim 1 wherein the solderable thermally
conductive element comprises material, having one or more alloys, from the
group consisting of tin, bismuth, silver, indium, and lead.
4. The assembly as claimed in claim 1 wherein the lid comprises at least one
metal or organic layer to which the thermally conductive element can be coupled.
5. The assembly as claimed in claim 4 wherein the at least one metal or
organic layer comprises nickel or gold.
6. The assembly as claimed in claim 1 comprising:
a diffusion layer between the adhesion layer and the solder-wettable layer.
7. The assembly as claimed in claim 6 wherein the layers comprise material,
having one or more alloys, from the group consisting of titanium, chromium,
zirconium, nickel, vanadium, and gold.
8. The assembly as claimed in claim 6 wherein the diffusion layer comprises
material, having one or more alloys, from the group consisting of titanium,
chromium, zirconium, nickel, vanadium, and gold.
9. The assembly as claimed in claim 6 wherein the diffusion layer comprises
nickek-vanadium.
10. The assembly as claimed in claim 1 wherein the solderable thermally
conductive element has a liquidus temperature of 150 degrees Centigrade or
less.
11. The assembly as claimed in claim 1 wherein the solderable thermally
conductive element has a liquidus temperature of 140 degrees Centigrade or
less.
12. The assembly as claimed in claim 1 wherein the solderable thermally
conductive element has a liquidus temperature in the range of 138 to 157
degrees Centigrade.
13. The assembly as claimed in claim 1 wherein the adhesion layer comprises
material, having one or more alloys, from the group consisting of titanium,
chromium, zirconium, nickel, vanadium, and gold.
14. The assembly as claimed in claim 1 wherein the adhesion layer comprises
titanium.
15. The assembly as claimed in claim 1 wherein the solder-wettable layer
comprises material, having one or more alloys, from the group consisting of
titanium, chromium, zirconium, nickel, vanadium, and gold.
16. The assembly as claimed in claim 1 wherein the solder-wettable layer
comprises one of nickel and gold.
17. An integrated circuit package comprising:
a substrate;
a die positioned on a surface of the substrate, the die having a back
surface;
an adhesion layer of metal formed on the back surface;
a solder-wettable layer formed on the adhesion layer;
a lid positioned over the die; and
a solderable thermally conductive element coupling the solder-wettable
layer and the lid.
18. The integrated circuit package as claimed in claim 17 wherein the lid
comprises a support member coupled to the substrate.
19. The integrated circuit package as claimed in claim 17 wherein the lid
comprises material from the group consisting of copper and aluminum-silicon-
carbide.
20. The integrated circuit package as claimed in claim 17 wherein the lid
comprises at least one metal or organic layer to which the thermally conductive
element is coupled.
21. The integrated circuit package as claimed in claim 20 wherein the at least
one metal or organic layer comprises nickel or gold.
22. The integrated circuit package recited in claim 17 wherein the solderable
thermally conductive element comprises material, having one or more alloys,
from the group consisting of tin, bismuth, silver, indium, and lead.
23. The integrated circuit package as claimed in claim 17 wherein the
substrate is an organic substrate and wherein the die is coupled to the substrate
through a land grid array.
24. The integrated circuit package as claimed in claim 17 comprising:
a diffusion layer between the adhesion layer and the solder-wettable layer.
25. The integrated circuit package as claimed in claim 24 wherein the layers
comprise material, having one or more alloys, from the group consisting of
titanium, chromium, zirconium, nickel, vanadium, and gold.
26. The integrated circuit package as claimed in claim 17 wherein the
solderable thermally conductive element has a liquidus temperature in the range
of 138 to 157 degrees Centigrade.
27. An electronic assembly comprising:
at least one integrated circuit package comprising:
a substrate;
a die positioned on a surface of the substrate, the die having a back
surface
an adhesion layer of metal formed on the back surface;
a solder-wettable layer formed on the adhesion layer;
a lid positioned over the die; and
a solderable thermally conductive element coupling the solder-wettable
layer and the lid.
28. The electronic assembly as claimed in claim 27 wherein the lid comprises
a support member coupled to the substrate.
29. The electronic assembly as claimed in claim 27 wherein the solderable
thermally conductive element comprises material, having one or more alloys,
from the group consisting of tin, bismuth, silver, indium, and lead.
30. The electronic assembly as claimed in claim 27 wherein the substrate is
an organic substrate and wherein the die is coupled to the substrate through a
land grid array.
31. The electronic assembly as claimed in claim 27 comprising:
a diffusion layer between the adhesion layer and the solder-wettable layer.
32. The electronic assembly as claimed in claim 31 wherein the layers
comprise material, having one or more alloys, from the group consisting of
titanium, chromium, zirconium, nickel, vanadium, and gold.
33. An electronic system comprising at least one electronic assembly with a
solderable thermal interface, such as herein described, wherein there is provided
at least one integrated circuit package comprising :
a substrate;
a die positioned on a surface of the substrate, the die having a back
surface;
an adhesion layer of metal formed on the back surface;
a solder-wettable layer formed on the adhesion layer;
a lid positioned over the die; and
a solderable thermally conductive element coupling the solder-wettable
layer and the lid.
34. The electronic system as claimed in claim 33 wherein the solderable
thermally conductive element comprises material, having one or more alloys,
from the group consisting of tin, bismuth, silver, indium, and lead.
35. The electronic system as claimed in claim 33 wherein the substrate is an
organic substrate, wherein the die is coupled to the substrate through a land grid
array, and wherein the lid comprises a support member coupled to the substrate.
36. The electronic system as claimed in claim 33 comprising:
a diffusion layer between the adhesion layer and the solder-wettable layer.
37. The electronic system as claimed in claim 36 wherein the layers comprise
material, having one or more alloys, from the group consisting of titanium,
chromium, zirconium, nickel, vanadium, and gold.
38. An assembly comprising:
a die having a surface;
an adhesion layer of metal formed on the surface; and
a solder-wettable layer formed on the adhesion layer to receive a
solderable thermally conductive element.
39. The assembly as claimed in claim 38 wherein the adhesion layer
comprises material, having one or more alloys, from the group consisting of
titanium, chromium, zirconium, nickel, vanadium, and gold.
40. The assembly as claimed in claim 38 wherein the adhesion layer
comprises titanium.
41. The assembly as claimed in claim 38 wherein the solder-wettable layer
comprises material, having one or more alloys, from the group consisting of
titanium, chromium, zirconium, nickel, vanadium, and gold.
42. The assembly as claimed in claim 38 wherein the solder-wettable layer
comprises one of nickel and gold.
43. The assembly as claimed in claim 38 wherein the solderable thermally
conductive element comprises material, having one or more alloys, from the
group consisting of tin, bismuth, silver, indium, and lead.
44. The assembly as claimed in claim 38 wherein the solderable thermally
conductive element has a liquidus temperature in the range of 138 to 157
degrees Centigrade.
45. The assembly as claimed in claim 38 comprising:
a diffusion layer formed between the adhesion layer and the solder-
wettable layer.
46. The assembly as claimed in claim 45 wherein the diffusion layer
comprises material, having one or more alloys, from the group consisting of
titanium, chromium, zirconium, nickel, vanadium, and gold.
47. The assembly as claimed in claim 45 wherein the diffusion layer
comprises nickel-vanadium.
48. An assembly comprising:
a die having a surface;
an adhesion layer of metal coupled to the surface;
a solder-wettable layer coupled to the adhesion layer;
a lid; and
a thermal interface of solder material to couple the lid to the solder-
wettable layer.
49. The assembly as claimed in claim 48 wherein the solder material
comprises material, having one or more alloys, from the group consisting of tin,
bismuth, silver, indium, and lead.
50. The assembly as claimed in claim 48 wherein the solder material has a
liquidus temperature of 150 degrees Centigrade or less.
51. The assembly as claimed in claim 48 wherein the solder material has a
liquidus temperature of 140 degrees Centigrade or less.
52. The assembly as claimed in claim 48 wherein the solder material has a
liquidus temperature in the range of 138 to 157 degrees Centigrade.
53. A data processing system of an electronic system comprising:
a bus coupling components in the said data processing system;
a display coupled to the bus;
external memory coupled to the bus; and
a processor coupled to the bus and comprising at least one electronic
assembly wherein there is provided at least one integrated circuit package
comprising:
a substrate;
a die positioned on a surface of the substrate, the die having a
surface;
an adhesion layer of metal formed on the surface;
a solder-wettable layer formed on the adhesion layer;
a lid positioned over the die; and
a solderable thermally conductive element coupling the solder-
wettable layer and the lid.
54. The data processing system as claimed in claim 53 wherein the
solderable thermally conductive element comprises material, having one or more
alloys, from the group consisting of tin, bismuth, silver, indium, and lead.
55. The data processing system as claimed in claim 53 wherein the substrate
is an organic substrate and wherein the die is coupled to the substrate through a
land grid array.
56. A method comprising:
forming at least one metal layer on a surface of a die;
mounting the die on a substrate;
applying solder material to the at least one metal layer;
positioning a surface of a lid adjacent the solder material; and
melting the solder material to physically couple the lid to the die.
57. The method as claimed in claim 56 wherein, in applying the solder
material, the solder material has a relatively high thermal conductivity and a
relatively low melting point.
58. The method as claimed in claim 56 wherein, in mounting the die on the
substrate, the substrate comprises organic material having a relatively high
thermal coefficient of expansion relative to that of the die.
59. The method as claimed in claim 56 comprising forming at least one metal
or organic layer on the surface of the lid prior to positioning the surface of the lid.
60. A method comprising:
forming an adhesion layer of metal on a back surface of a die;
forming a solder-wettable layer on the adhesion layer;
mounting another surface of the die on a substrate; and
applying solder material to the solder-wettable layer.
61. The method as claimed in claim 60 wherein, in forming the adhesion
layer, the adhesion layer comprises material, having one or more alloys, from the
group consisting of titanium, chromium, zirconium, nickel, vanadium, and gold.
62. The method as claimed in claim 60 wherein, in forming the solder-wettable
layer, the solder-wettable layer comprises one of nickel and gold.
63. The method as claimed in claim 60 wherein, in applying the solder
material, the solder material comprises material, having one or more alloys, from
the group consisting of tin, bismuth, silver, indium, and lead.
64. The method as claimed in claim 60 comprising:
forming a diffusion layer between the adhesion layer and the solder-
wettable layer.
65. The method as claimed in claim 64 wherein, in forming the diffusion layer,
the diffusion layer comprises material, having one or more alloys, from the group
consisting of titanium, chromium, zirconium, nickel, vanadium, and gold.
66. A method comprising:
forming an adhesion layer of metal on a surface of a die; and
forming a solder-wettable layer on the adhesion layer.
67. The method as claimed in claim 66 wherein, in forming the adhesion
layer, the adhesion layer comprises material, having one or more alloys, from the
group consisting of titanium, chromium, zirconium, nickel, vanadium, and gold.
68. The method as claimed in claim 66 wherein, in forming the solder-wettable
layer, the solder-wettable layer comprises one of nickel and gold.
69. The method as claimed in claim 66 comprising:
forming a diffusion layer between the adhesion layer and the solder-
wettable layer.
70. The method as claimed in claim 28 wherein, in forming the diffusion layer,
the diffusion layer comprises material, having one or more alloys, from the group
consisting of titanium, chromium, zirconium, nickel, vanadium, and gold.

To accommodate high power densities associated with high performance
integrated circuits, heat is dissipated from a surface of a die through a solderable thermal
interface to a lid or integrated heat spreader. In one embodiment, the die (50) is mounted
on an organic substrate (54) using a C4 and land grid array arrangement. In order to
maximize thermal dissipation from the die (50) while minimizing warpage of the package
when subjected to heat, due to the difference in thermal coefficients of expansion
between the die (50) and the organic substrate (54), a thermal interface (60) is used that
has a relatively low melting point in addition to a relatively high thermal conductivity.
Methods of fabrication, as well as application of the package to an electronic assembly,
an electronic system, and a data processing system, are also described.

Documents

Application Documents

# Name Date
1 48-KOLNP-2003-11-01-2023-ALL DOCUMENTS.pdf 2023-01-11
1 48-KOLNP-2003-LETTER OF PATENT CERTIFICATE-[16-02-2007].pdf 2007-02-16
2 48-KOLNP-2003-(01-04-2015)-FORM-27.pdf 2015-04-01
2 48-kolnp-2003-granted-specification.pdf 2011-10-06
3 48-kolnp-2003-granted-drawings.pdf 2011-10-06
3 48-KOLNP-2003-(26-03-2013)-FORM-27.pdf 2013-03-26
4 48-kolnp-2003-granted-description (complete).pdf 2011-10-06
4 48-KOLNP-2003-(25-03-2013)-FORM-27.pdf 2013-03-25
5 48-kolnp-2003-granted-claims.pdf 2011-10-06
5 48-KOLNP-2003-FORM-27.pdf 2012-07-12
6 48-kolnp-2003-granted-abstract.pdf 2011-10-06
6 48-KOLNP-2003-(06-07-2012)-FORM-27.pdf 2012-07-06
7 00048-kolnp-2003-letters patent.pdf 2011-10-06
7 00048-kolnp-2003-abstract.pdf 2011-10-06
8 00048-kolnp-2003-g.p.a.pdf 2011-10-06
8 00048-kolnp-2003-assignment.pdf 2011-10-06
9 00048-kolnp-2003-claims.pdf 2011-10-06
9 00048-kolnp-2003-form-5.pdf 2011-10-06
10 00048-kolnp-2003-correspondence.pdf 2011-10-06
10 00048-kolnp-2003-form-3.pdf 2011-10-06
11 00048-kolnp-2003-description(complete).pdf 2011-10-06
11 00048-kolnp-2003-form-18.pdf 2011-10-06
12 00048-kolnp-2003-drawings.pdf 2011-10-06
12 00048-kolnp-2003-form-13.pdf 2011-10-06
13 00048-kolnp-2003-form-1.pdf 2011-10-06
14 00048-kolnp-2003-drawings.pdf 2011-10-06
14 00048-kolnp-2003-form-13.pdf 2011-10-06
15 00048-kolnp-2003-description(complete).pdf 2011-10-06
15 00048-kolnp-2003-form-18.pdf 2011-10-06
16 00048-kolnp-2003-correspondence.pdf 2011-10-06
16 00048-kolnp-2003-form-3.pdf 2011-10-06
17 00048-kolnp-2003-form-5.pdf 2011-10-06
17 00048-kolnp-2003-claims.pdf 2011-10-06
18 00048-kolnp-2003-assignment.pdf 2011-10-06
18 00048-kolnp-2003-g.p.a.pdf 2011-10-06
19 00048-kolnp-2003-letters patent.pdf 2011-10-06
19 00048-kolnp-2003-abstract.pdf 2011-10-06
20 48-kolnp-2003-granted-abstract.pdf 2011-10-06
20 48-KOLNP-2003-(06-07-2012)-FORM-27.pdf 2012-07-06
21 48-kolnp-2003-granted-claims.pdf 2011-10-06
21 48-KOLNP-2003-FORM-27.pdf 2012-07-12
22 48-kolnp-2003-granted-description (complete).pdf 2011-10-06
22 48-KOLNP-2003-(25-03-2013)-FORM-27.pdf 2013-03-25
23 48-kolnp-2003-granted-drawings.pdf 2011-10-06
23 48-KOLNP-2003-(26-03-2013)-FORM-27.pdf 2013-03-26
24 48-kolnp-2003-granted-specification.pdf 2011-10-06
24 48-KOLNP-2003-(01-04-2015)-FORM-27.pdf 2015-04-01
25 48-KOLNP-2003-11-01-2023-ALL DOCUMENTS.pdf 2023-01-11
25 48-KOLNP-2003-LETTER OF PATENT CERTIFICATE-[16-02-2007].pdf 2007-02-16

ERegister / Renewals

3rd: 14 Jun 2007

From 29/08/2003 - To 29/08/2004

4th: 14 Jun 2007

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5th: 14 Jun 2007

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6th: 14 Jun 2007

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7th: 14 Jun 2007

From 29/08/2007 - To 29/08/2008

8th: 12 Aug 2008

From 29/08/2008 - To 29/08/2009

9th: 04 Aug 2009

From 29/08/2009 - To 29/08/2010

10th: 12 Aug 2010

From 29/08/2010 - To 29/08/2011

11th: 08 Aug 2011

From 29/08/2011 - To 29/08/2012

12th: 25 Oct 2012

From 29/08/2012 - To 29/08/2013

13th: 18 Jul 2013

From 29/08/2013 - To 29/08/2014

14th: 17 Jul 2014

From 29/08/2014 - To 29/08/2015