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Field Effect Transistor, Method For Manufacturing Same, Wireless Communication Device Using Same, And Product Tag

Abstract: The field-effect transistor is provided with at least: a substrate; a source electrode, a drain electrode and a gate electrode; a semiconductor layer that contacts the source electrode and the drain electrode; and a gate insulating layer that insulates the semiconductor layer from the gate electrode. The semiconductor layer contains carbon nanotubes, and the gate insulating layer contains a polymer in which inorganic particles are bonded. Provided are a field effect-transistor which has reduced leak current and enables uniform coating of a semiconductor solution, and a method for manufacturing the same.

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Notices, Deadlines & Correspondence

Patent Information

Application #
Filing Date
17 February 2020
Publication Number
13/2020
Publication Type
INA
Invention Field
ELECTRONICS
Status
Email
patent@depenning.com
Parent Application
Patent Number
Legal Status
Grant Date
2024-01-31
Renewal Date

Applicants

TORAY INDUSTRIES, INC.
1-1, Nihonbashi-Muromachi 2-chome, Chuo-ku, Tokyo 103-8666

Inventors

1. SAKII, Daisuke
c/o Shiga Plant, Toray Industries, Inc., 1-1, Sonoyama 1-chome, Otsu-shi, Shiga 520-8558
2. MURASE, Seiichiro
c/o Shiga Plant, Toray Industries, Inc., 1-1, Sonoyama 1-chome, Otsu-shi, Shiga 520-8558
3. WAKITA, Junji
c/o Shiga Plant, Toray Industries, Inc., 1-1, Sonoyama 1-chome, Otsu-shi, Shiga 520-8558

Specification

WE CLAIM: -
1. A field-effect transistor, comprising at least:
a substrate; a source electrode;
a drain electrode;
a gate electrode;
a semiconductor layer in contact with said source electrode and with said drain electrode; and
a gate insulating layer insulating between said semiconductor layer and said gate electrode;
wherein said semiconductor layer contains a carbon nanotube, and
wherein said gate insulating layer contains a polymer having inorganic particles bound thereto.
The field-effect transistor according to claim 1, wherein said gate insulating layer has a relative dielectric constant within the range of at least 5 and up to 20.
The field-effect transistor according to claim 1 or 2, wherein said polymer contains a polysiloxane.
The field-effect transistor according to claim 3, wherein said polysiloxane has at least a structural unit represented by the general formula (1):
[Chem. 1]
wherein, in the general formula (1), R1 represents a hydrogen atom, an alkyl group, a cycloalkyl group, a heterocyclic group, an aryl group, a heteroaryl group, or an alkenyl group;

R2 represents a hydrogen atom, an alkyl group, a cycloalkyl group, or a silyl group;
m represents 0 or 1; and
A1 represents an organic group including at least two groups selected from a carboxyl group, a sulfo group, a thiol group, a phenolic hydroxy group, or a derivative of these groups, wherein, when said derivative is a cyclic condensed structure formed by two of said carboxyl group, said sulfo group, said thiol group, and said phenolic hydroxy group, A1 represents an organic group having at least one said cyclic condensed structure.
The field-effect transistor according to any one of claims 1 to 4, wherein said carbon nanotube includes a carbon nanotube composite having a conjugaled polymer attached to at least part of the surface of said carbon nanotube.
The field-effect transistor according to any one of claims 1 to 5, wherein said inorganic particles include a metal oxide.
The field-effect transistor according to any one of claims 1 to 6, wherein said inorganic particles have a number-average partiele size in the range of at least 1 nm and up to 100 nm.
The field-effect transistor according to any one of claims 1 to 7, wherein the inorganic particles in said gate insulating layer have a volume fraction in the range of at least 10 vol% and up to 60 vol%.
The field-effect transistor according to any one of claims 1 to 8, wherein said gate insulating layer has a thickness in the range of at least 10 nm and up to 1000 nm.
The field-effect transistor according to any one of claims 1 to 9, wherein said source electrode and/or said drain electrode include(s) an organic binder and an electric conductive powder.
The field-effect transistor according to any one of claims 1 to 10, wherein said field-effect transistor has an on-current of at least 5 uA and a leak current of up to 50

pA.
12. A method for producing the field-effect transistor according to any one of
claims 1 to 11, the method comprising the steps of:
forming, on a substrate, an electric conductive pattern serving as a gate electrode;
applying a solution including at least a polymer having inorganic particles bound thereto onto said substrate having said electric conductive pattern formed thereon, foliowed by drying said solution, to obtain a doating film; and
forming, on said coating film or a gate insulating layer formed by curing said coating film, a semiconductor layer including a carbon nanotube and an electric conductive pattern serving as a source electrode and a drain electrode, in such a marmer that said semiconductor layer and said electric conductive pattern are in contact with each other.
13. The method for producing the field-effect transistor according to claim 12,
wherein said solution including said polymer having inorganic particles bound
thereto comprises a photosensitive organic component, and wherein said method
further comprises the steps of:
irradiating a film with active actinic light via a photomask, said film being obtained by applying, onto said substrate having said electric conductive pattern formed thereon, said solution including said polymer having inorganic particles bound thereto and said photosensitive organic component, and by drying said film; and forming, on said electric conductive pattern, an insulating pattern having an opening, using an alkali solution; and
heating said insulating pattern to form said gate insulating layer having an opening.
14. A wireless communication device comprising the field-effect transistor
according to any one of claims 1 to 11.


15. A goods tag comprising the wireless communication device according to claim 14.

Documents

Application Documents

# Name Date
1 202047006749.pdf 2020-02-17
2 202047006749-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [17-02-2020(online)].pdf 2020-02-17
3 202047006749-STATEMENT OF UNDERTAKING (FORM 3) [17-02-2020(online)].pdf 2020-02-17
4 202047006749-PROOF OF RIGHT [17-02-2020(online)].pdf 2020-02-17
5 202047006749-PRIORITY DOCUMENTS [17-02-2020(online)].pdf 2020-02-17
6 202047006749-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105) [17-02-2020(online)].pdf 2020-02-17
7 202047006749-FORM 1 [17-02-2020(online)].pdf 2020-02-17
8 202047006749-DRAWINGS [17-02-2020(online)].pdf 2020-02-17
9 202047006749-DECLARATION OF INVENTORSHIP (FORM 5) [17-02-2020(online)].pdf 2020-02-17
10 202047006749-COMPLETE SPECIFICATION [17-02-2020(online)].pdf 2020-02-17
11 202047006749-CLAIMS UNDER RULE 1 (PROVISIO) OF RULE 20 [17-02-2020(online)].pdf 2020-02-17
12 202047006749-FORM-26 [02-03-2020(online)].pdf 2020-03-02
13 202047006749-Form-1_Proof of Right_02-03-2020.pdf 2020-03-02
14 202047006749-Correspondence_02-03-2020.pdf 2020-03-02
15 202047006749-Form26_Power of Attorney_10-03-2020.pdf 2020-03-10
16 202047006749-Correspondence_10-03-2020.pdf 2020-03-10
17 202047006749-FORM 3 [06-04-2020(online)].pdf 2020-04-06
18 202047006749-FORM 3 [20-11-2020(online)].pdf 2020-11-20
19 202047006749-FORM 18 [13-05-2021(online)].pdf 2021-05-13
20 202047006749-FORM 3 [09-06-2021(online)].pdf 2021-06-09
21 202047006749-FORM 3 [18-11-2021(online)].pdf 2021-11-18
22 202047006749-FER.pdf 2022-02-24
23 202047006749-PETITION UNDER RULE 137 [11-04-2022(online)].pdf 2022-04-11
24 202047006749-OTHERS [11-04-2022(online)].pdf 2022-04-11
25 202047006749-Information under section 8(2) [11-04-2022(online)].pdf 2022-04-11
26 202047006749-FORM 3 [11-04-2022(online)].pdf 2022-04-11
27 202047006749-FER_SER_REPLY [11-04-2022(online)].pdf 2022-04-11
28 202047006749-CLAIMS [11-04-2022(online)].pdf 2022-04-11
29 202047006749-certified copy of translation [11-04-2022(online)].pdf 2022-04-11
30 202047006749-ABSTRACT [11-04-2022(online)].pdf 2022-04-11
31 202047006749-FORM 3 [23-06-2023(online)].pdf 2023-06-23
32 202047006749-FORM 3 [14-11-2023(online)].pdf 2023-11-14
33 202047006749-US(14)-HearingNotice-(HearingDate-04-01-2024).pdf 2023-12-21
34 202047006749-FORM-26 [02-01-2024(online)].pdf 2024-01-02
35 202047006749-FORM-26 [02-01-2024(online)]-1.pdf 2024-01-02
36 202047006749-Correspondence to notify the Controller [02-01-2024(online)].pdf 2024-01-02
37 202047006749-Written submissions and relevant documents [18-01-2024(online)].pdf 2024-01-18
38 202047006749-Retyped Pages under Rule 14(1) [18-01-2024(online)].pdf 2024-01-18
39 202047006749-2. Marked Copy under Rule 14(2) [18-01-2024(online)].pdf 2024-01-18
40 202047006749-PatentCertificate31-01-2024.pdf 2024-01-31
41 202047006749-IntimationOfGrant31-01-2024.pdf 2024-01-31

Search Strategy

1 ss202047006749E_24-02-2022.pdf

ERegister / Renewals

3rd: 01 Mar 2024

From 25/09/2020 - To 25/09/2021

4th: 01 Mar 2024

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5th: 01 Mar 2024

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6th: 01 Mar 2024

From 25/09/2023 - To 25/09/2024

7th: 12 Aug 2024

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8th: 08 Aug 2025

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