Abstract: A structure with high-aspect ratio and coated with hard ceramic coatings, the structure having a layer of a transition metal, a graded interlayer with a variable composition of carbide or nitride of a transition metal is provided. A top layer of structure is provided with a composite of transition metal carbide and an amorphous carbon or a transition metal carbide and a non-reactive metal or a transition metal nitride and a non-reactive metal, where the top layer is with a low coefficient of friction (μ) and an enhanced toughness. The present invention also provides an apparatus and process to deposit hard ceramic coatings of transition metal nitride and carbide, on high-aspect-ratio structures with conformal hard ceramic coatings with a high throughput.
Claims: , Description:
| # | Name | Date |
|---|---|---|
| 1 | Form 5 [09-03-2016(online)].pdf | 2016-03-09 |
| 2 | Form 3 [09-03-2016(online)].pdf | 2016-03-09 |
| 4 | Drawing [09-03-2016(online)].pdf | 2016-03-09 |
| 5 | Description(Complete) [09-03-2016(online)].pdf | 2016-03-09 |
| 6 | Form 18 [15-07-2016(online)].pdf | 2016-07-15 |
| 7 | 201641008129-Form 1-280616.pdf | 2016-07-26 |
| 8 | 201641008129-Correspondence-F1-280616.pdf | 2016-07-26 |
| 9 | 201641008129-FER.pdf | 2020-04-30 |
| 10 | 201641008129-OTHERS [18-10-2020(online)].pdf | 2020-10-18 |
| 11 | 201641008129-FER_SER_REPLY [18-10-2020(online)].pdf | 2020-10-18 |
| 12 | 201641008129-DRAWING [18-10-2020(online)].pdf | 2020-10-18 |
| 13 | 201641008129-CORRESPONDENCE [18-10-2020(online)].pdf | 2020-10-18 |
| 14 | 201641008129-COMPLETE SPECIFICATION [18-10-2020(online)].pdf | 2020-10-18 |
| 15 | 201641008129-POA [13-12-2021(online)].pdf | 2021-12-13 |
| 16 | 201641008129-FORM 13 [13-12-2021(online)].pdf | 2021-12-13 |
| 17 | 201641008129-EVIDENCE FOR REGISTRATION UNDER SSI [13-12-2021(online)].pdf | 2021-12-13 |
| 18 | 201641008129-EDUCATIONAL INSTITUTION(S) [13-12-2021(online)].pdf | 2021-12-13 |
| 19 | 201641008129-AMENDED DOCUMENTS [13-12-2021(online)].pdf | 2021-12-13 |
| 20 | 201641008129-US(14)-HearingNotice-(HearingDate-14-02-2024).pdf | 2023-12-11 |
| 21 | 201641008129-Correspondence to notify the Controller [08-02-2024(online)].pdf | 2024-02-08 |
| 22 | 201641008129-Written submissions and relevant documents [29-02-2024(online)].pdf | 2024-02-29 |
| 23 | 201641008129-PETITION UNDER RULE 137 [29-02-2024(online)].pdf | 2024-02-29 |
| 24 | 201641008129-FORM-26 [29-02-2024(online)].pdf | 2024-02-29 |
| 25 | 201641008129-PatentCertificate01-03-2024.pdf | 2024-03-01 |
| 26 | 201641008129-IntimationOfGrant01-03-2024.pdf | 2024-03-01 |
| 1 | 2020-02-1413-03-29_14-02-2020.pdf |