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Impurity Diffusing Composition And Method For Producing Semiconductor Element
Abstract: 16 15 121 61 62 102 66 152341 61 62 102 6Provided is an impurity diffusing composition comprising (A) a polysiloxane represented by general formula (1) and (B) an impurity diffusing component. (In the formula R is a Caryl group and each of multiple R can be the same or different. R is either a hydroxyl group C alkyl group C alkoxy group C alkenyl group C acyl group or C aryl group and each of multiple R can be the same or different. R and R are each a hydroxyl group C alkyl group C alkoxy group C alkenyl group or C acyl group and can be the same or different. n:m = 95:5 to 25:75.) The impurity diffusing composition has excellent printability and impurity diffusing capability on a semiconductor substrate and resists cracking during the calcining and diffusing steps to form a calcined film having after calcining sufficient masking performance against other impurity diffusing agents.
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
01 February 2016
Publication Number
27/2016
Publication Type
INA
Invention Field
ELECTRICAL
Status
Email
patent@depenning.com
Parent Application
Patent Number
Legal Status
Grant Date
2020-11-27
Renewal Date
Applicants
TORAY INDUSTRIES INC.
1 1 Nihonbashi Muromachi 2 chome Chuo ku Tokyo
1038666
Inventors
1. INABA Sachio
c/o Shiga Plant Toray Industries Inc. 1 1 Sonoyama 1 chome Otsu shi Shiga
5208558
2. MURASE Seiichiro
c/o Shiga Plant Toray Industries Inc. 1 1 Sonoyama 1 chome Otsu shi Shiga
5208558
3. SHIMIZU Hiroji
c/o Shiga Plant Toray Industries Inc. 1 1 Sonoyama 1 chome Otsu shi Shiga
5208558
4. DAN Kouichi
c/o Shiga Plant Toray Industries Inc. 1 1 Sonoyama 1 chome Otsu shi Shiga
5208558
5. SUWA Mitsuhito
c/o Shiga Plant Toray Industries Inc. 1 1 Sonoyama 1 chome Otsu shi Shiga
5208558
Specification
SOFT COPY ATTACHED IN PDF
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 201647003432-RELEVANT DOCUMENTS [30-09-2023(online)].pdf | 2023-09-30 |
| 1 | Power of Attorney [01-02-2016(online)].pdf | 2016-02-01 |
| 2 | 201647003432-RELEVANT DOCUMENTS [23-09-2022(online)].pdf | 2022-09-23 |
| 2 | Form 5 [01-02-2016(online)].pdf | 2016-02-01 |
| 3 | Form 3 [01-02-2016(online)].pdf | 2016-02-01 |
| 3 | 201647003432-IntimationOfGrant27-11-2020.pdf | 2020-11-27 |
| 4 | Form 1 [01-02-2016(online)].pdf | 2016-02-01 |
| 4 | 201647003432-PatentCertificate27-11-2020.pdf | 2020-11-27 |
| 5 | Drawing [01-02-2016(online)].pdf | 2016-02-01 |
| 5 | 201647003432-FORM 3 [26-11-2020(online)].pdf | 2020-11-26 |
| 6 | Description(Complete) [01-02-2016(online)].pdf | 2016-02-01 |
| 6 | 201647003432-certified copy of translation [27-07-2020(online)].pdf | 2020-07-27 |
| 7 | 201647003432.pdf | 2016-06-08 |
| 7 | 201647003432-CLAIMS [27-07-2020(online)].pdf | 2020-07-27 |
| 8 | 201647003432-DRAWING [27-07-2020(online)].pdf | 2020-07-27 |
| 8 | 201647003432-Correspondence-F1-190216.pdf | 2016-06-30 |
| 9 | 201647003432-FER_SER_REPLY [27-07-2020(online)].pdf | 2020-07-27 |
| 9 | Form 3 [12-07-2016(online)].pdf | 2016-07-12 |
| 10 | 201647003432-FORM 3 [27-07-2020(online)].pdf | 2020-07-27 |
| 10 | Other Document [02-06-2017(online)].pdf | 2017-06-02 |
| 11 | 201647003432-FORM-26 [27-07-2020(online)].pdf | 2020-07-27 |
| 11 | Marked Copy [02-06-2017(online)].pdf | 2017-06-02 |
| 12 | 201647003432-Information under section 8(2) [27-07-2020(online)].pdf | 2020-07-27 |
| 12 | Form 18 [02-06-2017(online)].pdf | 2017-06-02 |
| 13 | 201647003432-OTHERS [27-07-2020(online)].pdf | 2020-07-27 |
| 13 | Form 13 [02-06-2017(online)].pdf | 2017-06-02 |
| 14 | 201647003432-FER.pdf | 2020-01-28 |
| 14 | Description(Complete) [02-06-2017(online)].pdf_246.pdf | 2017-06-02 |
| 15 | 201647003432-FORM 3 [28-05-2018(online)].pdf | 2018-05-28 |
| 15 | Description(Complete) [02-06-2017(online)].pdf | 2017-06-02 |
| 16 | 201647003432-FORM 3 [28-05-2018(online)].pdf | 2018-05-28 |
| 16 | Description(Complete) [02-06-2017(online)].pdf | 2017-06-02 |
| 17 | Description(Complete) [02-06-2017(online)].pdf_246.pdf | 2017-06-02 |
| 17 | 201647003432-FER.pdf | 2020-01-28 |
| 18 | 201647003432-OTHERS [27-07-2020(online)].pdf | 2020-07-27 |
| 18 | Form 13 [02-06-2017(online)].pdf | 2017-06-02 |
| 19 | 201647003432-Information under section 8(2) [27-07-2020(online)].pdf | 2020-07-27 |
| 19 | Form 18 [02-06-2017(online)].pdf | 2017-06-02 |
| 20 | 201647003432-FORM-26 [27-07-2020(online)].pdf | 2020-07-27 |
| 20 | Marked Copy [02-06-2017(online)].pdf | 2017-06-02 |
| 21 | 201647003432-FORM 3 [27-07-2020(online)].pdf | 2020-07-27 |
| 21 | Other Document [02-06-2017(online)].pdf | 2017-06-02 |
| 22 | 201647003432-FER_SER_REPLY [27-07-2020(online)].pdf | 2020-07-27 |
| 22 | Form 3 [12-07-2016(online)].pdf | 2016-07-12 |
| 23 | 201647003432-Correspondence-F1-190216.pdf | 2016-06-30 |
| 23 | 201647003432-DRAWING [27-07-2020(online)].pdf | 2020-07-27 |
| 24 | 201647003432.pdf | 2016-06-08 |
| 24 | 201647003432-CLAIMS [27-07-2020(online)].pdf | 2020-07-27 |
| 25 | Description(Complete) [01-02-2016(online)].pdf | 2016-02-01 |
| 25 | 201647003432-certified copy of translation [27-07-2020(online)].pdf | 2020-07-27 |
| 26 | Drawing [01-02-2016(online)].pdf | 2016-02-01 |
| 26 | 201647003432-FORM 3 [26-11-2020(online)].pdf | 2020-11-26 |
| 27 | Form 1 [01-02-2016(online)].pdf | 2016-02-01 |
| 27 | 201647003432-PatentCertificate27-11-2020.pdf | 2020-11-27 |
| 28 | Form 3 [01-02-2016(online)].pdf | 2016-02-01 |
| 28 | 201647003432-IntimationOfGrant27-11-2020.pdf | 2020-11-27 |
| 29 | Form 5 [01-02-2016(online)].pdf | 2016-02-01 |
| 29 | 201647003432-RELEVANT DOCUMENTS [23-09-2022(online)].pdf | 2022-09-23 |
| 30 | Power of Attorney [01-02-2016(online)].pdf | 2016-02-01 |
| 30 | 201647003432-RELEVANT DOCUMENTS [30-09-2023(online)].pdf | 2023-09-30 |
Search Strategy
| 1 | SearchTPO_23-08-2019.pdf |