Technical Field
[0001] The present invention relates to an irradiation device for heating, and more particularly, to an irradiation device for heating configured to irradiate a substance with a high-frequency wave to heat the substance.
Background Art
[0002] There are known a chemical reactor and a chemical reaction method for conducting thermal treatment or other treatment with a method of internally heating a substance with use of a high-frequency wave. Researches and developments for putting industrial applications into practical use have been actively conducted (see, for example, Patent Literature 1).
Citation List Patent Literature [0003] [PTL 1] JP 5603134 B2
Summary of Invention Technical Problem
[0004] In this type of related-art chemical reactor, for high-frequency wave irradiation, there is a demand to promote

heating or a chemical reaction by varying an irradiation distribution or by efficient local irradiation in accordance with a reaction of the substance or heating conditions.
[0005] An electron-tube oscillator represented as a magnetron used for a microwave is well known as a high-frequency wave generation device to be used for the chemical reactor using the high-frequency wave. The electron-tube oscillator can output high power. The electron-tube oscillator has, however, features in that a frequency of an oscillating high-frequency wave has a range and a temporal fluctuation in output characteristics is large. Therefore, when a plurality of electron-tube oscillators are synthetized, there is a problem in that a synthesis loss is large and therefore efficiency is conversely lowered.
[0006] The present invention has been made to solve the problem described above, and has an object to provide an irradiation device for heating, which is capable of reducing a synthesis loss to perform an efficient irradiation when a plurality of high-frequency waves are synthesized to be used.
Solution to Problem
[0007] According to one embodiment of the present invention, there is provided an irradiation device for heating including: an electromagnetic wave generator, which is configured to generate electromagnetic waves for heating; a plurality of antennas, which are configured to irradiate an object to be heated with the

electromagnetic waves for heating generated in the electromagnetic wave generator; and a reaction furnace, which has a convex portion having a curved surface as a part of an upper surface, the curved convex portion having a surface onto which an irradiation port of each of the plurality of antennas is mounted, and an internal space for accommodating the object to be heated therein, wherein the plurality of antennas are arranged on the surface of the convex portion of the reaction furnace in a curved fashion so that a direction of irradiation from each of the plurality of antenna is oriented toward a specific point on the object to be heated.
Advantageous Effects of Invention
[0008] According to the irradiation device for heating of the present invention, by synthesizing the plurality of high-frequency waves, the high-frequency waves can be efficiently radiated onto the object to be heated in the reaction furnace being a closed space to enable a reaction and heating within a short period of time. Further, an effect of achieving improvement of energy efficiency along therewith can also be obtained.
Brief Description of Drawings
[0009] FIG. 1 is a configuration view for illustrating a configuration of an irradiation device for heating according to a first embodiment of the present invention.
FIG. 2A is a view of a comparative example for illustrating

effects obtained by the irradiation device for heating according to the first embodiment of the present invention.
FIG. 2B is an explanatory view for illustrating the effects obtained by the irradiation device for heating according to the first embodiment of the present invention.
FIG. 2C is an explanatory view for illustrating the effects obtained by the irradiation device for heating according to the first embodiment of the present invention.
FIG. 2D is a graph for showing the effects obtained by the irradiation device for heating according to the first embodiment of the present invention.
FIG. 3 is a configuration diagram for illustrating a configuration of an irradiation device for heating according to a second embodiment of the present invention.
FIG. 4A is a view of a comparative example for illustrating effects obtained by the irradiation device for heating according to the second embodiment of the present invention.
FIG. 4B is an explanatory view for illustrating the effects obtained by the irradiation device for heating according to the second embodiment of the present invention.
FIG. 4C is an explanatory view for illustrating the effects obtained by the irradiation device for heating according to the second embodiment of the present invention.
FIG. 4D is an explanatory view of a comparative example for illustrating the effects obtained by the irradiation device for

heating according to the second embodiment of the present invention.
FIG. 4E is a graph for showing the effects obtained by the irradiation device for heating according to the second embodiment of the present invention.
FIG. 5 is a configuration view for illustrating a configuration of an irradiation device for heating according to a third embodiment of the present invention.
FIG. 6 is a configuration view for illustrating a configuration of an irradiation device for heating according to a fourth embodiment of the present invention.
FIG. 7 is a configuration view for illustrating a configuration of an irradiation device for heating according to a fifth embodiment of the present invention.
FIG. 8 is a configuration view for illustrating a configuration of an irradiation device for heating according to a sixth embodiment of the present invention.
Description of Embodiments [0010] First Embodiment
FIG. 1 is a configuration diagram for illustrating a configuration of an irradiation device for heating according to a first embodiment of the present invention. As illustrated in FIG. 1, the irradiation device for heating includes a high-frequency wave generator 1, high-frequency wave supply paths 2, antennas 3, and a reaction furnace 4.

[0011] The irradiation device for heating according to the first embodiment accommodates an ob j ect to be heated 5 in an internal space of the reaction furnace 4, and radiates high-frequency waves generated in the high-frequency wave generator 1 to the object to be heated 5 from the antennas 3 to heat the object to be heated 5. The object to be heated 5 may be in any form including a gas, a liquid, and a solid. Although the object to be heated 5 is illustrated as having a rectangular shape fitted to a shape of the internal space of the reaction furnace 4 in FIG. 1, the shape of the object to be heated 5 may be a suitable one.
[0012] The high-frequency wave generator 1 generates electromagnetic waves for heating being high-frequency waves
(hereinafter referred to simply as "high-frequency waves") to be radiated onto the object to be heated 5 inside the reaction furnace 4. The high-frequency wave generator 1 is made up of a frequency-variable electromagnetic wave generator configured to generate a high-frequency wave having a variable frequency. In this case, it is assumed that a microwave is used as the high-frequency wave to be generated in the high-frequency wave generator 1. The microwave corresponds to one region of the electromagnetic wave. In commonly-used radio-wave categorization, the electromagnetic wave having a frequency falling within a range of from 0.3 GHz to 30 GHz and a wavelength falling within a range of from 1 cm to 1 m is referred to as "microwave". However, the electromagnetic waves generated by the high-frequency wave

generator 1 in the first embodiment is not limited to the microwave, and a suitable frequency and a suitable wavelength may be appropriately selected. The high-frequency wave generator 1 is disposed outside of the reaction furnace 4. Any type of high-frequency wave generator may be appropriately selected as the high-frequency wave generator 1 as long as a phase coherence is high. Further, although the single high-frequency wave generator 1 is disposed for the plurality of antennas 3 in FIG. 1, one high-frequency wave generator 1 may be connected to each of the antennas 3.
[0013] The high-frequency wave supply paths 2 are coupled to the high-frequency wave generator 1 and the antennas 3. The high-frequency wave supply paths 2 transmit the high-frequency waves generated by the high-frequency wave generator 1 to the antennas 3 to supply the high-frequency waves to the antennas 3. As the high-frequency wave supply paths 2, any member capable of efficiently transmitting the high-frequency waves, such as coaxial cables and waveguides, may be appropriately selected.
[0014] Each of the antennas 3 radiates the high-frequency wave from an irradiation port to the object to be heated 5 installed in the reaction furnace 4 . The plurality of antennas 3 are disposed. Although the number of disposed antennas 3 is five in FIG. 1, the number of antennas 3 may be appropriately selected. Although, for example, a waveguide may be directly used as each of the antennas 3, a device capable of efficiently radiating the high-frequency

wave to the space, such as a horn antenna or a patch antenna, may be appropriately selected. Vectors of the high-frequency waves radiated from the respective antennas 3 are all oriented toward a preset specific point 6. The specific point 6 is only required to be suitably set inside the reaction furnace 4, and a position thereof is not particularly limited. In many cases, however, the specific point 6 is set in a central portion inside the reaction furnace 4 . The reason is that the object to be heated 5 is generally placed in the central portion inside the reaction furnace 4 in many cases. Further, the specific point 6 is not required to be a point, and may have an area having a circular shape or a band-like region. The antennas 3 are arranged on a curved surface 7 in a curved fashion so that the high-frequency waves are efficiently concentrated on the specific point 6 on the object to be heated 5 . The curved surface 7 is made up of a spherical surface having the specific point 6 on the object to be heated 5 as its center, as illustrated in FIG. 1. Intervals at which the antennas 3 are arranged are equal. It is desired that each of the intervals, at which the antennas 3 are arranged, be set to one wavelength or shorter of the high-frequency wave radiated from each of the antennas 3. Further, it is desired that a distance between the irradiation port of each of the antennas 3 and a surface of the object to be heated 5 be set to five wavelengths or shorter of the high-frequency wave radiated from each of the antennas 3. Although the antennas 3 arranged one-dimensionally along one arc on the surface of the curved surface 7 are illustrated

in FIG. 1, the arrangement of the antennas 3 is not limited thereto. The antennas 3 may be arranged two-dimensionally or three-dimensionally along the curved surface 7 depending on a size of the reaction furnace 4.
[0015] The reaction furnace 4 has the internal space, which accommodates the object to be heated 5 therein. Inside the internal space, the object to be heated 5 is heated or reacted with the high-frequency waves. A material of the reaction furnace 4 may be appropriately selected as long as the high-frequency waves are prevented from leaking externally. Alternatively, only the internal space of the reaction furnace 4 may be surrounded by a member capable of blocking the high-frequency waves, for example, a metal wall. In this case, the material of the reaction furnace
4 itself is not required to block the high-frequency wave, and
therefore a suitable material can be selected therefor. A shape
of the reaction furnace 4 may be appropriately selected depending
on a form (for example, a gas, a liquid, or a solid) and
characteristics of the obj ect to be heated 5 to be reacted. Further,
the reaction furnace 4 generally has a feed/discharge port for
feeding or discharging the object to be heated 5. When the object
to be heated 5 is a solid, a conveying apparatus configured to carry
the object to be heated 5, for example, a belt conveyor, may be
disposed to the reaction furnace 4. When the object to be heated
5 is a gas or a liquid, an agitator configured to agitate the object
to be heated 5 may be disposed in the reaction furnace 4. Further,

a catalyst or other substances may be contained in the object to be heated 5 so as to efficiently heat or react the object to be heated 5. The feed/discharge port, the agitator, the belt conveyor, the catalyst, and other components are considered as general components of the chemical reactor, and do not limit an internal structure of the reaction furnace 4 . The internal structure of the reaction furnace 4 may be appropriately selected without being limited.
In the first embodiment, a part of an upper surface of the reaction furnace 4 is formed as a convex portion made up of a part of the curved surface 7. The irradiation ports of the antennas 3 are mounted onto a surface of the convex portion. [0016] Next, an operation of the irradiation device for heating according to the first embodiment is described. [0017] First, the high-frequency waves generated in the high-frequency wave generator 1 are fed to the antennas 3 via the high-frequency wave supply paths 2. The antennas 3 radiate the supplied high-frequency waves from the irradiation ports. In this manner, the object to be heated 5 inside the reaction furnace 4 is irradiated with the high-frequency waves radiated from the antennas 3 . The plurality of antennas 3 are arranged on the curved surface 7 being the spherical surface having the specific point 6 on the object to be heated 5 as the center so as to efficiently concentrate the high-frequency waves onto the specific point 6 on the object to be heated. Therefore, the vectors of directions of

irradiation of the high-frequency waves from the antennas 3 are all oriented toward the specific point 6 on the object to be heated 5. When a phase coherence of the high-frequency waves generated in the high-frequency wave generator 1 is high, the plurality of high-frequency waves from the antennas 3 can be spatially synthesized. Therefore, efficient heating can be performed for the specific point 6 on the object to be heated. At this time, it is desired that the intervals at which the antennas 3 are arranged be one wavelength or shorter of the high-frequency wave as described above. The reason is that, when the intervals of arrangement are large, regions in which irradiation areas of the object to be heated 5 from the respective antennas 3 overlap each other are reduced. Further, it is desired that the distance between the irradiation port of each of the antennas 3 and the surface of the object to be heated 5 be one-fifth of the high-frequency wave or shorter, as described above. The reason is now described. The high-frequency waves radiated from the respective antennas 3 expand as the distance from the antenna 3 increases. Therefore, when the distance from the object to be heated 5 is large, the high-frequency waves are reflected at a portion inside the reaction furnace 4 in which the object to be heated 5 is absent to cause a disturbance in an irradiation distribution with respect to the object to be heated 5 to result in generation of a loss in the synthesis of the high-frequency waves. To achieve efficient spatial synthesis, output phases of the high-frequency waves radiated from the

respective antennas 3 are required to be matched. In the first embodiment, the matching of the output phases of the high-frequency waves radiated from the antennas 3 is achieved by appropriately adjusting lengths of the high-frequency wave supply paths 2. [0018] FIG. 2A to FIG. 2D are illustrations for verification of effects of the first embodiment. FIG. 2A to FIG. 2D are illustrations of efficiency of irradiation power for the specific point 6 on the object to be heated 5 inside the reaction furnace 4 with respect to input power. In the verification illustrated in FIG. 2A to FIG. 2D, the specific point 6 is set in the central portion inside the reaction furnace 4. The specific points 6 are illustrated as specific points 6A, 6B, and 6C in FIG. 2A, FIG. 2B, and FIG. 2C, respectively, so as to be distinguishable from each other. FIG. 2A is an illustration of a related-art method with an electron-tube oscillator capable of performing high output and one antenna. FIG. 2B and FIG. 2C are illustrations of the irradiation device for heating according to the first embodiment of the present invention illustrated in FIG. 1. In FIG. 2B and FIG. 2C, the highly phase-coherent high-frequency wave generator 1 and the five antennas 3 are provided. FIG. 2B is an illustration of a case in which the power is concentrated onto the specific point 6 on the object to be heated 5 by adjusting the lengths of the high-frequency wave supply paths 2 to set the phases. Meanwhile, FIG. 2C is an illustration of a case in which the lengths of the high-frequency wave supply paths 2 are adjusted to set the phases so that the same

amount of power as that in FIG. 2A in which only one antenna is disposed is concentrated on the specific point 6. In FIG. 2A to FIG. 2C, the antennas 3 are each a rectangular waveguide, a center distance thereof is 0.6 wavelength, and a height of the antenna in the center is 1. 7 wavelengths . In FIG. 2A to FIG. 2C, total power of the high-frequency waves radiated into the reaction furnace 4 is the same.
[0019] At this time, in FIG. 2A to FIG. 2C, efficiency of the irradiation power to the specific point 6 on the object to be heated inside the reaction furnace 4 with respect to the input power was measured. The result thereof is shown in FIG. 2D. On the horizontal axis of FIG. 2D, the specific points 6A, 6B, and 6C are indicated. On the vertical axis, power efficiency to the specific point on the object to be heated is indicated. It is understood from the bar graph of FIG. 2D that the power efficiency in the vicinity of the specific point 6 on the object to be heated 5 in FIG. 2B is larger than that in FIG. 2A and the efficiency is improved by three times or more. In contrast, in FIG. 2C, it is understood that the same power efficiency as that in FIG. 2A is achieved. As described above, the desired power efficiency can be achieved by adjusting the lengths of the high-frequency wave supply paths 2 in the first embodiment. Further, a set value of the phase is only required to be appropriately selected depending on the form (for example, a gas, a liquid, or a solid) of the object to be heated 5 and the characteristics of the object to be heated 5.

[0020] As described above, the irradiation device for heating according to the first embodiment includes the high-frequency wave generator 1 serving as an electromagnetic wave generator configured to generate the electromagnetic waves for heating, the plurality of antennas 3 configured to irradiate the object to be heated 5 with the electromagnetic waves (high-frequency waves) for heating generated in the high-frequency wave generator 1, and the reaction furnace 4, which has the curved convex portion as the part of the upper surface, the convex portion having the surface onto which the irradiation port of each of the antennas 3 are mounted, and the internal space for accommodating the object to be heated 5 therein, in which the antennas 3 are arranged on the surface of the convex portion of the reaction furnace 4 in the curved fashion so that the direction of irradiation from each of the antennas 3 is oriented toward the specific point 6 on the object to be heated 5. In this case, the curved surface 7 of the convex portion is made up of the part of the spherical surface having the specific point 6 as the center.
As described above, according to the first embodiment, the high-frequency waves from the plurality of antennas 3 arranged in the curved fashion are spatially synthesized inside the reaction furnace 4 by using the high-frequency wave generator 1 having the high phase coherence. As a result, as compared to the related-art method using the electron-tube oscillator, the object to be heated 5 can be efficiently heated.

[0021] Second Embodiment
FIG. 3 is a view for illustrating a configuration of an irradiation device for heating according to a second embodiment of the present invention. The same or corresponding portions as those of the irradiation device for heating according to the first embodiment illustrated in FIG. 1 are denoted by the same reference symbols in FIG. 3, and the description thereof is herein omitted. [0022] Differences between the first embodiment and the second embodiment are now described.
First, a first difference is described. In the first embodiment, the antennas 3 are arranged on the surface of the curved surface 7 in the curved fashion. Meanwhile, in the second embodiment, an upper surface of the reaction furnace 4 is formed as a flat plane, and the irradiation ports of the antennas 3 are arranged on the plane in a planar fashion. Therefore, in the second embodiment, the antennas 3 are arranged linearly as illustrated in the sectional view of FIG. 3.
Next, a second difference is described. In the first embodiment, the number of antennas 3 is a suitable plural number. Meanwhile, in the second embodiment, the number of antennas 3 is limited to three.
The remaining configuration is the same as that of the first embodiment, and therefore the description thereof is herein omitted. [0023] In the second embodiment, the vector of the direction

of irradiation from one of the antennas 3 is oriented toward the specific point 6 on the object to be heated 5. Further, the other two antennas 3 are arranged on both sides of the antenna 3. Intervals at which the antennas 3 are arranged are equal. It is desired that the intervals at which the antennas 3 are arranged be set to one wavelength or shorter of the high-frequency wave radiated from each of the antennas 3 . Further, it is desired that the distance between each of the irradiation ports of the antennas
3 and the surface of the object to be heated 5 be set to 5 wavelengths
or shorter of the high-frequency wave radiated from each of the
antennas 3.
[0024] When the antennas 3 are arranged linearly as illustrated in FIG. 3, three is effective as the number of antennas 3. If another antenna 3 is arranged on each side of the three antennas 3 illustrated in FIG. 3 to dispose five antennas in total, the regions in which the irradiation areas from the antennas 3 to the object to be heated 5 overlap each other are reduced. Thus, an increase in efficiency, which is proportional to the number of antennas 3, is not expected.
[0025] FIG. 4A to FIG. 4E are illustrations for verification of effects of the second embodiment. FIG. 4A to FIG. 4E are illustrations of efficiency of irradiation power to the specific point 6 on the object to be heated 5 inside the reaction furnace
4 with respect to the input power. Also in the verification
illustrated in FIG. 4A to FIG. 4E, the specific point 6 is set in

the central portion inside the reaction furnace 4 as in the case of the first embodiment. In FIG. 4A, FIG. 4B, FIG. 4C, and FIG. 4D, the specific points 6 are illustrated as specific points 6D, 6E, 6F, and 6G, respectively, so as to be distinguishable from each other.
[0026] FIG. 4A is an illustration of a related-art method with the electron-tube oscillator capable of performing high output and one antenna. FIG. 4B and FIG. 4C are illustrations of the irradiation device for heating according to the second embodiment illustrated in FIG. 3. In FIG. 4B and FIG. 4C, the highly phase-coherent high-frequency wave generator 1 and the three antennas 3 arranged linearly are disposed. Further, in FIG. 4D, the highly phase-coherent high-frequency wave generator 1 and the five antennas 3 arranged linearly are disposed. FIG. 4B and FIG. 4D are illustrations of a case in which the lengths of the high-frequency wave supply paths 2 are adjusted to set the phases so that the power is concentrated on the specific point 6 on the object to be heated 5. Meanwhile, FIG. 4C is an illustration of a case in which the lengths of the high-frequency wave supply paths 2 are adjusted to set the phases so that the same amount of power as that in FIG. 4A in which only one antenna 3 is disposed is concentrated on the specific point 6 on the object to be heated 5. In each of FIG. 4A to FIG. 4D, the antennas 3 are each a rectangular waveguide, a center distance thereof is 0 . 9 wavelength, and a height of the antenna in the center is 1.2 wavelengths. In

FIG. 4A to FIG. 4D, total power of the high-frequency waves radiated into the reaction furnace 4 is the same.
[0027] In this case, in FIG. 4A to FIG. 4D, the efficiency of the irradiation power to the specific point 6 on the object to be heated inside the reaction furnace 4 with respect to the input power was measured. The results thereof are shown in FIG. 4E. On the horizontal axis of FIG. 4E, the specific points 6D, 6E, 6F, and 6G are indicated. On the vertical axis, power efficiency to the specific point on the object to be heated is indicated. It is understood from the bar graph of FIG. 4E that the power efficiency in the vicinity of the specific point 6 on the object to be heated 5 is larger at the specific point 6E in FIG. 4B than that at the specific point 6D in FIG. 4A, and the efficiency is improved by 1.5 times or more. In contrast, at the specific point 6F in FIG. 4C, the same power efficiency as that of the specific point 6D in FIG. 4A can be achieved. Further, it is understood that the efficiency is higher at the specific point 6E in FIG. 4B in which the number of antennas 3 is three than at the specific point 6G in FIG. 4D in which the number of antennas 3 is five. Specifically, as described above, when the arrangement is linear, it can be said that three is effective as the number of antennas 3 . A set value of the phase is only required to be appropriately selected depending on the form (for example, a gas, a liquid, or a solid) of the object to be heated 5 and the characteristics of the object to be heated 5.

[0028] As described above, the irradiation device for heating according to the second embodiment includes the high-frequency wave generator 1 serving as the electromagnetic wave generator configured to generate the electromagnetic waves (high-frequency waves) for heating, the three antennas 3 configured to irradiate the object to be heated 5 with the electromagnetic waves for heating generated in the high-frequency wave generator 1, and the reaction furnace 4, which has the flat planar upper surface onto which the irradiation ports of the antennas 3 are mounted, and the internal space for accommodating the object to be heated 5 therein, in which the three antennas are arranged linearly, and include one antenna 3 arranged so that the direction of irradiation of the electromagnetic wave for heating is oriented toward the specific point 6 on the object to be heated 5 and the other two antennas 3 arranged on both sides of the one antenna 3.
As described above, in the second embodiment, the high-frequency wave generator 1 having the high phase coherence is used so that the high-frequency waves from the three antennas 3 arranged linearly are spatially synthesized inside the reaction furnace 4 . Also in this case, the same effects as those of the first embodiment are obtained.
[0029] Third Embodiment
FIG. 5 is a view for illustrating a configuration of an irradiation device for heating according to a third embodiment of the present invention. The same or corresponding portions as those

of the irradiation device for heating according to the first embodiment illustrated in FIG. 1 are denoted by the same reference symbols in FIG. 1, and the description thereof is herein omitted.
[0030] Differences between the first embodiment and the third embodiment are now described.
As illustrated in FIG. 5, in the third embodiment, one phase shifter 51 and one amplifier 52 are disposed for each of the antennas 3 . The third embodiment differs from the first embodiment in this point. Although a configuration of the third embodiment is applied to the configuration of the first embodiment in FIG. 5, the configuration of the third embodiment may be applied to the configuration of the second embodiment.
The remaining configuration is the same as those of the first embodiment and the second embodiment, and therefore the description thereof is herein omitted.
[0031] The phase shifters 51 are mounted in the respective high-frequency wave supply paths 2. The phase shifters 51 are connected to the high-frequency wave generator 1 through intermediation of a part of the high-frequency wave supply paths 2. The phase shifters 51 control a phase amount to the antennas 3 independently of the lengths of the high-frequency wave supply paths 2. For example, a voltage control-type variable phase shifter may be appropriately selected as each of the phase shifter 51 as long as the phase shift amount can be varied.
[0032] The amplifiers 52 are mounted in the respective

high-frequency wave supply paths 2. The amplifiers 52 are each disposed between the phase shifter 51 and the antenna 3. The amplifiers 52 are connected to the phase shifters 51 and the antennas 3 through intermediation of a part of the high-frequency wave supply paths 2, respectively. The amplifiers 52 are configured to amplify the high-frequency waves to the antennas 3. For example, an amplifier made up of a semiconductor device may be appropriately selected as long as the high-frequency wave can be amplified.
[0033] Outputs at the antennas 3 can be varied by the phase shifters 51 and the amplifiers 52. Therefore, in the output to the object to be heated 5, the effects achieved by the configurations illustrated in FIG. 2B and FIG. 2C or the configurations illustrated in FIG. 4B and FIG. 4C described above can be achieved without changing the lengths of the high-frequency wave supply paths 2.
[0034] As described above, according to the third embodiment, the same effects as those of the first embodiment and the second embodiment can be obtained by disposing the phase shifters 51 and the amplifiers 52 without adjusting the lengths of the high-frequency wave supply paths 2.
[0035] Fourth Embodiment
FIG. 6 is a view for illustrating a configuration of an irradiation device for heating according to a fourth embodiment of the present invention. The same or corresponding portions as those of the irradiation device for heating according to the third embodiment illustrated in FIG. 5 are denoted by the same reference

symbols in FIG. 6, and the description thereof is herein omitted.
[003 6] Differences between the third embodiment and the fourth embodiment are now described.
As is understood from the comparison between FIG. 5 and FIG. 6, amplitude/phase acquisition units 71, an amplitude/phase monitor 72, and a high-frequency wave output control device 73 are added in the fourth embodiment.
The remaining configuration and operation are the same as those in the third embodiment.
[0037] Although positions at which the phase shifters 51 are disposed are illustrated as being shifted in a stepwise manner in FIG. 6, the positions of the phase shifters 51 are illustrated as being shifted little by little for convenience so as to illustrate a plurality of signal lines for connecting the high-frequency wave output control device 73 and the phase shifters 51 to each other. In practice, the phase shifters 51 may be arranged linearly side by side as in the case of FIG. 5.
[0038] One amplitude/phase acquisition unit 71 is disposed to each of the antennas 3. The amplitude/phase acquisition units 71 are each disposed between the antenna 3 and the amplifier 52 . The amplitude/phase acquisition units 71 acquire amplitudes and phases of the high-frequency waves to be emitted into the reaction furnace 4 and acquire amplitudes and phases of the high-frequency waves reflected from an inside of the reaction furnace 4 . In the following, the high-frequency waves to be emitted into the reaction furnace

4 are referred to as "input waves", whereas the high-frequency waves reflected from the inside of the reaction furnace 4 are referred to as "reflected waves" . As the amplitude/phase acquisition units 71, any members, for example, directional couplers, may be appropriately selected as long as both the amplitude and the phase can be acquired. Although the amplitude/phase acquisition unit 71 is described as acquiring both a set of the amplitude and the phase of the input wave and a set of the amplitude and the phase of the reflected wave in this case, the amplitude/phase acquisition unit 71 may be configured to acquire any one of the set of the amplitude and the phase of the input wave and the set of the amplitude and the phase of the reflected wave without being limited to the above-mentioned case.
[0039] The amplitude/phase monitor 72 monitors the amplitude/phase acquisition units 71. Specifically, the amplitude/phase monitor 72 acquires the amplitudes and the phases of the input waves and the amplitudes and the phases of the reflected waves acquired in the amplitude/phase acquisition units 71 as amplitude values and phase values, respectively. Although the amplitude/phase monitor 72 is made up of, for example, a network analyzer or other devices, the amplitude/phase monitor 72 may be appropriately selected without being limited to the network analyzer. Only one amplitude/phase monitor 72 is disposed for the plurality of amplitude/phase acquisition units 71. [0040] The high-frequency wave output control device 73

controls the high-frequency wave generator 1, the phase shifters 51, and the amplifiers 52 based on the amplitude values and the phase values of the input waves and the reflected waves, which are monitored in the amplitude/phase monitor 72. In FIG. 6, an illustration of signal lines for connecting the high-frequency wave output control device 73 and the amplifiers 52 to each other is omitted for simplification of the drawing.
[0041] The high-frequency wave output control device 73 is made up of, for example, a personal computer including a processor and a memory. Each of the functions of the high-frequency wave output control device 73 is implemented by a processing circuit configured to execute a program stored in the memory, such as a CPU or a system LSI. Further, a plurality of processors and a plurality of memories may cooperate with each other to execute each of the functions of the high-frequency wave output control device 73. However, the high-frequency wave output control device 73 may be appropriately selected from other pieces of hardware without being limited to the personal computer.
[0042] Next, an operation of the irradiation device for heating according to the fourth embodiment is described.
The high-frequency wave output control device 73 stores the amplitude values and the phase values of the input waves and the reflected waves, which are acquired by the amplitude/phase monitor 72, in the memory. The high-frequency wave output control device 73 controls a frequency of the high-frequency wave generator 1,

phase values of the phase shifters 51, and amplification amounts of the amplifiers 52 based on the amplitude values and the phase values stored in the memory so as to provide an optimal irradiation distribution of the high-frequency waves inside the reaction furnace 4. The high-frequency wave output control device 73 is not required to control all of the frequency of the high-frequency wave generator 1, the phase values of the phase shifters 51, and the amplification amounts of the amplifiers 52, and is only required to control at least one thereof.
[0043] The operation is now described. The amplitudes and the phases of the input waves and the reflected waves, which are obtained by the amplitude/phase acquisition units 71, are transmitted to the high-frequency wave output control device 73 via the amplitude/phase monitor 72 . When a heating condition of the object to be heated 5 changes, a variation is caused in the input waves and the output waves. Therefore, for example, by preparing lookup tables based on calculation values in advance, the high-frequency wave output control device 73 can control the high-frequency wave generator 1, the phase shifters 51, and the amplifiers 52. The lookup table is prepared for each of the high-frequency wave generator 1, the phase shifters 51, and the amplifiers 52. This is described below.
[0044] In the lookup table for the high-frequency wave generator 1, a correspondence relationship between the amplitude values and the phase values of the input waves, the amplitude values

and the phase values of the reflected waves, and the frequency of the high-frequency wave generator 1 is predefined. Therefore, an optimal frequency of the high-frequency wave generator 1 can be obtained based on the amplitude values and the phase values of the input waves and the amplitude values and the phase values of the reflected waves in accordance with the lookup table. [0045] Similarly, in the lookup table for the phase shifters 51, a correspondence relationship between the amplitude values and the phase values of the input waves, the amplitude values and the phase values of the reflected waves, and the phase values of the phase shifters 51 is predefined. Therefore, an optimal phase value of the phase shifter 51 can be obtained based on the amplitude values and the phase values of the input waves and the amplitude values and the phase values of the reflected waves in accordance with the lookup table.
[0046] Further, similarly, in the lookup table for the amplifiers 52, a correspondence relationship between the amplitude values and the phase values of the input waves, the amplitude values and the phase values of the reflected waves, and the amplification amount of the amplifiers 52 is predefined. Therefore, an optimal amplification amount of the amplifiers 52 can be obtained based on the amplitude values and the phase values of the input waves and the amplitude values and the phase values of the reflected waves in accordance with the lookup table. [0047] In this manner, the high-frequency wave control device

73 controls the high-frequency wave generator 1, the phase shifters 51, and the amplifiers 52 so that the input waves and the reflected waves can be controlled to, for example, increase the input waves and decrease the reflected waves. As a result, in the output of the high-frequency waves to the object to be heated 5, efficiency equal to that obtained from the configurations of FIG. 2B and FIG. 2C or the configurations of FIG. 4B and FIG. 4C described above can be achieved in real time in accordance with a state of the object to be heated 5.
[0048] The high-frequency wave control device 73 is not required to use all of the amplitude values and the phase values of the input waves and the amplitude values and the phase values of the reflected waves, and is only required to use at least one of those values for control.
[004 9] As described above, according to the fourth embodiment, the amplitude/phase acquisition units 71, the amplitude/phase monitor 72, and the high-frequency wave output control device 73 are disposed. Therefore, the irradiation distribution can be controlled in real time in accordance with the state of the object to be heated 5, and hence a further efficient heating effect can be obtained.
[0050] Fifth Embodiment
FIG. 7 is a view for illustrating a configuration of an irradiation device for heating according to a fifth embodiment of the present invention. The same or corresponding portions as those

of the irradiation device for heating according to the third embodiment illustrated in FIG. 5 are denoted by the same reference symbols in FIG. 7, and the description thereof is herein omitted.
[0051] Differences between the third embodiment and the fifth embodiment are now described.
As is understood from the comparison between FIG. 5 and FIG. 7, temperature acquisition units 81 configured to acquire temperatures of the object to be heated 5, a temperature monitor 82 configured to monitor the temperatures of the object to be heated 5, and the high-frequency wave output control device 73 are added. The remaining configuration and operation are the same as those in the third embodiment.
[0052] Although the positions at which the phase shifters 51 are disposed are illustrated as being shifted in a stepwise manner in FIG. 7, the positions of the phase shifters 51 are illustrated as being shifted little by little for convenience so as to illustrate the plurality of signal lines for connecting the high-frequency wave output control device 73 and the phase shifters 51 to each other. In practice, the phase shifters 51 may be arranged linearly side by side as in the case of FIG. 5.
[0053] Although a configuration of the fifth embodiment is applied to the configuration of the third embodiment in FIG. 7, the configuration of the fifth embodiment may be applied to the configuration of the fourth embodiment. In this case, the number of disposed high-frequency wave control devices 73 is not required

to be two. The high-frequency wave generator 1, the phase shifters 51, and the amplifiers 52 are controlled by the single high-frequency wave output control device 73 based on at least one of the set of the amplitude values and the phase values of the input waves, the set of the amplitude values and the phase values of the reflected waves, and the temperatures of the object to be heated 5. The high-frequency wave control device 73 is not required to control all of the frequency of the high-frequency wave generator 1, the phase values of the phase shifters 51, and the amplification amounts of the amplifiers 52, and is only required to control at least one thereof.
[0054] The temperature acquisition units 81 are disposed inside the reaction furnace 4 . The temperature acquisition units 81 measure the temperatures of the object to be heated 5 inside the reaction furnace 4. For example, a thermocouple, a thermography, or other components may be appropriately selected as each of the temperature acquisition units 81 as long as the temperature can be measured. Further, a plurality of temperature acquisition units 81 may be disposed inside the reaction furnace 4, and mounting positions thereof are not particularly limited.
[0055] The temperature monitor 82 monitors the temperature acquisition units 81. Specifically, the temperature monitor 82 acquires the temperatures acquired in the temperature acquisition units 81 as values. Although the temperature monitor 82 is made up of, for example, a data logger or other devices, the temperature

monitor 82 may be appropriately selected without being limited thereto. Only one temperature monitor 82 is disposed for the plurality of temperature acquisition units 81.
[0056] The temperatures acquired by the temperature acquisition units 81 are transmitted to the high-frequency wave output control device 73 via the temperature monitor 82. The high-frequency wave output control device 73 controls the high-frequency wave generator 1, the phase shifters 51, and the amplifiers 52 based on the temperatures monitored in the temperature monitor 82 in accordance with a temperature distribution in the object to be heated 5. In this manner, in the output of the high-frequency waves to the object to be heated 5, efficiency equal to the effect obtained from the configurations of FIG. 2B and FIG. 2C or the configurations of FIG. 4B and FIG. 4C can be achieved in real time in accordance with the state of the object to be heated 5.
[0057] As described above, according to the fifth embodiment, the temperature acquisition units 81, the temperature monitor 82, and the high-frequency wave output control device 73 are disposed. Therefore, the irradiation distribution can be controlled in real time in accordance with the state of the object to be heated 5, and hence a further efficient heating effect can be obtained.
[0058] Sixth Embodiment
FIG. 8 is a view for illustrating a configuration of an irradiation device for heating according to a sixth embodiment of

the present invention. The same or corresponding portions as those of the irradiation device for heating according to the third embodiment illustrated in FIG. 5 are denoted by the same reference symbols in FIG. 8, and the description thereof is herein omitted. [0059] Differences between the third embodiment and the sixth embodiment are now described.
As is understood from a comparison between FIG. 5 and FIG. 8, the sixth embodiment differs from the third embodiment in that a plurality of irradiation devices for heating described in the third embodiment are connected in series to construct an irradiation system for high-frequency heating as a whole. When the irradiation devices for heating are connected in series, the reaction furnaces
4 of the irradiation devices for heating are coupled in series to
form one large elongated common reaction furnace. The object to
be heated 5 is conveyed by a conveying apparatus, for example, a
belt conveyor, inside the large elongated common reaction furnace
to sequentially pass through the irradiation devices for heating.
The remaining configuration is the same as that of the third embodiment, and therefore the description thereof is herein omitted. [0060] In FIG. 8, it is assumed that the object to be heated
5 is loaded from a left side of the common reaction furnace to pass
through the plurality of irradiation devices for heating to be moved
in a direction toward the right side of the common reaction furnace.
The direction of loading and the direction of movement may be

opposite to those described above.
[0061] At this time, by changing at least one of the phase amount of the phase shifter 51 and the amplification amount of the amplifier 52 for each of the irradiation devices for heating in accordance with the heating conditions or reacting conditions of the object to be heated 5, outputs of the high-frequency waves radiated onto the object to be heated 5 can be varied for each of the reaction furnaces 4 of the irradiation devices for heating. In this manner, different conditions can be created for the respective reaction furnaces 4 in accordance with the conditions of the object to be heated 5 among the irradiation devices for heating.
[0062] Further, in this case, the frequency of the high-frequency wave generator 1 of each of the irradiation devices for heating can be varied. Therefore, the high-frequency waves can be prevented from interfering with each other between the irradiation devices for heating.
[0063] As illustrated in FIG. 8, in the sixth embodiment, the high-frequency wave generator 1, the phase shifters 51, the amplifiers 52, and the antennas 3 are disposed separately for each of the reaction furnaces 4, which construct the common reaction furnace. Therefore, the outputs of the high-frequency waves radiated from the antennas 3 can be controlled in accordance with the reaction state of the object to be heated 5 for each of the reaction furnaces 4. In this manner, the irradiation distribution

can be varied in accordance with the state of the object to be heated 5 in each of the reaction furnaces 4. Thus, the object to be heated 5 can be heated efficiently under optimal conditions. [0064] Although the case in which the configuration of the sixth embodiment is applied to the third embodiment is illustrated in FIG. 8, the configuration is not limited to this case. The configuration of the sixth embodiment may be applied to any one of the other embodiments, that is, the first to fifth embodiments described above . Further, the plurality of irradiation devices for heating to be connected in series are not all required to have the same configuration. Therefore, the plurality of configurations of any two or more of the first to fifth embodiments may be freely combined so as to be connected in series.
[0065] When the configuration of the fourth embodiment and the configuration of the fifth embodiment are used, the high-frequency wave output control device 73 is disposed, and therefore the frequency of the high-frequency wave generator 1, the phase amounts of the phase shifters 51, and the amplification amounts of the amplifiers 52 can be automatically controlled by the high-frequency wave control device 73 for each of the irradiation devices. When the configuration of another of the embodiments is used, the frequency of the high-frequency wave generator 1, the phase amounts of the phase shifters 51, and the amplification amounts of the amplifiers 52 are controlled manually by a worker. [0066] As described above, according to the sixth embodiment,

the same effects as those of the first to fifth embodiments are obtained even by connecting the irradiation devices for heating according to the first to fifth embodiments in series. In particular, when the object to be heated 5 is carried on the belt conveyor or other devices, the irradiation distribution can be varied in accordance with the state of the object to be heated 5, which is therefore effective. Further, an effect of scalable expandability can be obtained.
[0067] A free combination of the embodiments, a modification of a suitable component in each of the embodiments, or omission of a suitable component in each of the embodiments is possible in the present invention within the scope of the invention.

[Claim 1] An irradiation device for heating, comprising:
an electromagnetic wave generator, which is configured to generate electromagnetic waves for heating;
a plurality of antennas, which are configured to irradiate an object to be heated with the electromagnetic waves for heating generated in the electromagnetic wave generator; and
a reaction furnace, which has a convex portion having a curved surface as a part of an upper surface, the convex portion having a surface to which an irradiation port of each of the plurality of antennas is attached, and an internal space for accommodating the object to be heated therein,
wherein the plurality of antennas are arranged on the surface of the convex portion of the reaction furnace in a curved fashion so that a direction of irradiation from each of the plurality of antenna is oriented toward a specific point on the object to be heated.
[Claim 2] The irradiation device for heating according to claim 1, wherein the curved surface of the convex portion includes a part of a spherical surface having the specific point as a center.
[Claim 3] An irradiation device for heating, comprising:
an electromagnetic wave generator, which is configured to generate electromagnetic waves for heating;

three antennas, which are configured to irradiate an object to be heated with the electromagnetic waves for heating generated in the electromagnetic wave generator; and
a reaction furnace, which has a flat planar upper surface to which irradiation ports of the three antennas are attached, and an internal space for accommodating the object to be heated therein,
wherein the three antennas are arranged linearly, and
wherein the three antennas include one antenna arranged so that a direction of irradiation of the electromagnetic waves for heating is oriented toward a specific point on the object to be heated and other two antennas arranged on both sides of the one antenna.
[Claim 4] The irradiation device for heating according to any one of claims 1 to 3, wherein an interval at which the plurality of antennas are arranged is one wavelength or shorter of each of the electromagnetic waves for heating.
[Claim 5] The irradiation device for heating according to any one of claims 1 to 4, wherein a distance between each of the plurality of antennas and the object to be heated is five wavelengths or shorter of each of the electromagnetic waves for heating.
[Claim 6] The irradiation device for heating according to any one of claims 1 to 5, further comprising:

a phase shifter, which is disposed for each of the plurality of antennas, and is configured to control a phase amount of each of the electromagnetic waves for heating to be supplied to the each of the plurality of antennas; and
an amplifier, which is disposed for each of the plurality of antennas, and is configured to amplify each of the electromagnetic waves for heating to be supplied to the each of the plurality of antennas.
[Claim 7] The irradiation device for heating according to claim 6, further comprising:
an amplitude/phase acquisition unit, which is disposed for each of the plurality of antennas, and is configured to acquire at least any one of a set of an amplitude and a phase of each of the electromagnetic waves for heating to be radiated from the each of the plurality of antennas into the reaction furnace and a set of an amplitude and a phase of a reflected wave of each of the electromagnetic waves for heating reflected inside the reaction furnace; and
a first electromagnetic wave output control device, which is configured to control outputs of the electromagnetic waves to be radiated from the plurality of antennas to the object to be heated by controlling the electromagnetic wave generator, the phase shifters, and the amplifiers based on the set of the amplitude and the phase acquired in the amplitude/phase acquisition unit.

[Claim 8] The irradiation device for heating according to claim 6 or 7, further comprising:
a temperature acquisition unit, which is disposed for the reaction furnace, and is configured to acquire a temperature of the object to be heated in the reaction furnace; and
a second electromagnetic wave output control device, which is configured to control outputs of the electromagnetic waves for heating to be radiated from the plurality of antennas to the object to be heated by controlling the electromagnetic wave generator, the phase shifters, and the amplifiers based on the temperature of the object to be heated, which is acquired in the temperature acquisition unit.
[Claim 9] An irradiation device for heating according to any one of claims 1 to 8,
wherein the plurality of irradiation devices for heating are connected in series, and
wherein the reaction furnaces of the plurality of irradiation devices for heating are coupled in series to construct a single continuous common reaction furnace.
[Claim 10] The irradiation device for heating according to claim 9, wherein outputs of the electromagnetic waves to be radiated from the plurality of antennas to the object to be heated are variable

for each of the reaction furnaces constructing the single continuous common reaction furnace.