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Isolation Well Doping With Solid State Diffusion Sources For Finfet Architectures
Abstract: An impurity source film is formed along a portion of a non planar semiconductor fin structure. The impurity source film may serve as source of an impurity that becomes electrically active subsequent to diffusing from the source film into the semiconductor fin. In one embodiment an impurity source film is disposed adjacent to a sidewall surface of a portion of a sub fin region disposed between an active region of the fin and the substrate and is more proximate to the substrate than to the active area. In further embodiments the impurity source film may provide a source of dopant that renders the sub fin region complementarily doped relative to a region of the substrate forming a P/N junction that is at least part of an isolation structure electrically isolating the active fin region from a region of the substrate.
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
21 January 2016
Publication Number
28/2016
Publication Type
INA
Invention Field
ELECTRICAL
Status
Email
Parent Application
Patent Number
Legal Status
Grant Date
2022-09-16
Renewal Date
Applicants
INTEL CORPORATION
2200 Mission College, Boulevard,
Santa Clara, CA-95054.
Inventors
1. HAFEZ Walid M.
4060 NW Cartlton Ct.
Portland, OR 97229.
2. JAN Chia Hong
12849 NW Lorraine Dr
Portland OR 97229
3. YEH Jeng Ya D.
15115 NW Decatur Way
Portland OR 97229
4. CHANG Hsu Yu
INTEL
Hillsboro OR 97124
5. DIAS Neville
2920 NW Moda Way #836
Hillsboro OR 97124
6. MUNASINGHE Chanaka
1882 NE Ashberry Drive
Hillsboro OR 97124
Specification
SOFT COPY ATTACHED IN PDF
Documents
Orders
| Section | Controller | Decision Date |
|---|---|---|
| section 15 and 43(1) | ashlesh maurya | 2022-09-16 |
| section 15 and 43(1) | ashlesh maurya | 2022-09-16 |
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | Drawing [21-01-2016(online)].pdf | 2016-01-21 |
| 2 | Description(Complete) [21-01-2016(online)].pdf | 2016-01-21 |
| 3 | 201647002309.pdf | 2016-01-29 |
| 4 | 201647002309-Power of Attorney-100216.pdf | 2016-06-29 |
| 5 | 201647002309-Correspondence-PA-100216.pdf | 2016-06-29 |
| 6 | ABSTRACT.pdf | 2016-07-04 |
| 7 | abstract 201647002309.jpg | 2016-07-04 |
| 8 | Other Document [04-08-2016(online)].pdf | 2016-08-04 |
| 9 | Marked Copy [04-08-2016(online)].pdf | 2016-08-04 |
| 10 | Form 13 [04-08-2016(online)].pdf | 2016-08-04 |
| 11 | Description(Complete) [04-08-2016(online)].pdf | 2016-08-04 |
| 12 | Other Document [23-06-2017(online)].pdf | 2017-06-23 |
| 13 | Marked Copy [23-06-2017(online)].pdf | 2017-06-23 |
| 14 | Form 13 [23-06-2017(online)].pdf | 2017-06-23 |
| 15 | Description(Complete) [23-06-2017(online)].pdf_131.pdf | 2017-06-23 |
| 16 | Description(Complete) [23-06-2017(online)].pdf | 2017-06-23 |
| 17 | 201647002309-FORM 18 [21-08-2017(online)].pdf | 2017-08-21 |
| 18 | 201647002309-FER.pdf | 2019-10-15 |
| 19 | 201647002309-Response to office action [07-04-2020(online)].pdf | 2020-04-07 |
| 20 | 201647002309-Information under section 8(2) [07-04-2020(online)].pdf | 2020-04-07 |
| 21 | 201647002309-FORM 3 [07-04-2020(online)].pdf | 2020-04-07 |
| 22 | 201647002309-OTHERS [08-04-2020(online)].pdf | 2020-04-08 |
| 23 | 201647002309-FER_SER_REPLY [08-04-2020(online)].pdf | 2020-04-08 |
| 24 | 201647002309-CLAIMS [08-04-2020(online)].pdf | 2020-04-08 |
| 25 | 201647002309-US(14)-HearingNotice-(HearingDate-06-01-2022).pdf | 2021-12-02 |
| 26 | 201647002309-Proof of Right [16-12-2021(online)].pdf | 2021-12-16 |
| 27 | 201647002309-Correspondence to notify the Controller [16-12-2021(online)].pdf | 2021-12-16 |
| 28 | 201647002309-FORM 3 [03-01-2022(online)].pdf | 2022-01-03 |
| 29 | 201647002309-Written submissions and relevant documents [21-01-2022(online)].pdf | 2022-01-21 |
| 30 | 201647002309-PETITION UNDER RULE 137 [21-01-2022(online)].pdf | 2022-01-21 |
| 31 | 201647002309-PETITION UNDER RULE 137 [21-01-2022(online)]-2.pdf | 2022-01-21 |
| 32 | 201647002309-PETITION UNDER RULE 137 [21-01-2022(online)]-1.pdf | 2022-01-21 |
| 33 | 201647002309-PatentCertificate16-09-2022.pdf | 2022-09-16 |
| 34 | 201647002309-IntimationOfGrant16-09-2022.pdf | 2022-09-16 |
| 35 | 201647002309-POWER OF AUTHORITY [11-01-2023(online)].pdf | 2023-01-11 |
| 36 | 201647002309-FORM-16 [11-01-2023(online)].pdf | 2023-01-11 |
| 37 | 201647002309-ASSIGNMENT WITH VERIFIED COPY [11-01-2023(online)].pdf | 2023-01-11 |
| 38 | 201647002309-FORM-27 [28-09-2024(online)].pdf | 2024-09-28 |
Search Strategy
| 1 | 2019-10-1117-55-32_11-10-2019.pdf |