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Method For Depositing Gate Dielectric And Passivation Layers On Hemt Device And The Device Thereof

Abstract: The present disclosure relates to a method of depositing high quality gate dielectric layer and passivation layers on high electron mobility transistor (HEMT) device and the HEMT device(s) thereof.

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Patent Information

Application #
Filing Date
25 September 2024
Publication Number
41/2024
Publication Type
INA
Invention Field
ELECTRONICS
Status
Email
Parent Application

Applicants

INDIAN INSTITUTE OF SCIENCE
CV Raman Road, Bangalore, Karnataka, India-560012.

Inventors

1. Amit Bansal
Centre for Nanoscience and Engineering, Indian Institute of Science (IISc), CV Raman Road Bengaluru, Karnataka, India-560012
2. Aniruddhan Gowrisankar
Centre for Nanoscience and Engineering, Indian Institute of Science (IISc), CV Raman Road Bengaluru, Karnataka, India-560012
3. Rijo Baby
Centre for Nanoscience and Engineering, Indian Institute of Science (IISc), CV Raman Road Bengaluru, Karnataka, India-560012
4. Hareesh Chandrasekar
Agnit Semiconductors Private Limited INCeNSE Technology Business Incubator TF-08, Centre for Nano Science and Engineering Indian Institute of Science CV Raman Road, Malleshwaram Bengaluru, Karnataka, India-560012
5. Srinivasan Raghavan
Centre for Nanoscience and Engineering, Indian Institute of Science (IISc), CV Raman Road Bengaluru, Karnataka, India-560012
6. Rangarajan Muralidharan
Centre for Nanoscience and Engineering, Indian Institute of Science (IISc), CV Raman Road Bengaluru, Karnataka, India-560012
7. Digbijoy Neelim Nath
Centre for Nanoscience and Engineering, Indian Institute of Science (IISc), CV Raman Road Bengaluru, Karnataka, India-560012

Specification

Description:Please see attached , Claims:Please see attached

Documents

Application Documents

# Name Date
1 202441072637-STATEMENT OF UNDERTAKING (FORM 3) [25-09-2024(online)].pdf 2024-09-25
2 202441072637-REQUEST FOR EXAMINATION (FORM-18) [25-09-2024(online)].pdf 2024-09-25
3 202441072637-POWER OF AUTHORITY [25-09-2024(online)].pdf 2024-09-25
4 202441072637-FORM FOR SMALL ENTITY(FORM-28) [25-09-2024(online)].pdf 2024-09-25
5 202441072637-FORM 18 [25-09-2024(online)].pdf 2024-09-25
6 202441072637-FORM 1 [25-09-2024(online)].pdf 2024-09-25
7 202441072637-EVIDENCE FOR REGISTRATION UNDER SSI(FORM-28) [25-09-2024(online)].pdf 2024-09-25
8 202441072637-EVIDENCE FOR REGISTRATION UNDER SSI [25-09-2024(online)].pdf 2024-09-25
9 202441072637-EDUCATIONAL INSTITUTION(S) [25-09-2024(online)].pdf 2024-09-25
10 202441072637-DRAWINGS [25-09-2024(online)].pdf 2024-09-25
11 202441072637-DECLARATION OF INVENTORSHIP (FORM 5) [25-09-2024(online)].pdf 2024-09-25
12 202441072637-COMPLETE SPECIFICATION [25-09-2024(online)].pdf 2024-09-25
13 202441072637-FORM-9 [08-10-2024(online)].pdf 2024-10-08
14 202441072637-FORM-8 [08-10-2024(online)].pdf 2024-10-08
15 202441072637-FORM 18A [08-10-2024(online)].pdf 2024-10-08
16 202441072637-EVIDENCE OF ELIGIBILTY RULE 24C1f [08-10-2024(online)].pdf 2024-10-08
17 202441072637-FORM 3 [03-01-2025(online)].pdf 2025-01-03
18 202441072637-Proof of Right [25-02-2025(online)].pdf 2025-02-25
19 202441072637-FER.pdf 2025-10-24

Search Strategy

1 202441072637_SearchStrategyNew_E_dielectricE_28-03-2025.pdf