Microwave Assisted Apparatus System And Method For Deposition Of Films

Microwave Assisted Apparatus System And Method For Deposition Of Films On Substrates

Abstract: The present invention provides an apparatus for the deposition of thin films on a substrate including large substrates held preferably face down in a cartridge containing a liquid solution with at least a chemical precursor which upon being subject to a uniform microwave field transmitted through a microwave transparent window leads to the formation of a thin film on the substrate. The present invention also provides a system for launching microwaves and controlling the process for film deposition on the substrate. The present invention also provides a process for obtaining a film of uniform thickness and characteristics on a substrate or for incorporating controlled non uniformity. The present invention also provides an apparatus and method for film deposition on a series of substrates in a continuous batch process.

Patent Information

Application #

Filing Date

02 May 2022

Publication Number

27/2022

Publication Type

INA

Invention Field

CHEMICAL

Status

Email

Parent Application

Applicants

INDIAN INSTITUTE OF SCIENCE

Sir C V Raman Avenue Bengaluru 560012

INDIAN SPACE RESEARCH ORGANIZATION HEADQUARTERS

Government of India Department of Space Antariksh Bhavan New Bel Road Bengaluru 560231 Karnataka

Inventors

1. SAI Ranajit

Centre for Nano Science and Engineering (CeNSE) Indian Institute of Science Sir C V Raman Avenue Bengaluru 560012

2. SHIVSHANKAR Srinivasarao Ajjampur

Centre for Nano Science and Engineering (CeNSE) Indian Institute of Science Sir C V Raman Avenue Bengaluru 560012

3. MANISH Kumar Hooda

Semi Conductor Laboratory Department of Space Government of India Sector 72 S.A.S Nagar Punjab 160071

Specification

Documents

Application Documents

#	Name	Date
1	202247025633-STATEMENT OF UNDERTAKING (FORM 3) [02-05-2022(online)].pdf	2022-05-02
2	202247025633-REQUEST FOR EXAMINATION (FORM-18) [02-05-2022(online)].pdf	2022-05-02
3	202247025633-FORM 18 [02-05-2022(online)].pdf	2022-05-02
4	202247025633-FORM 1 [02-05-2022(online)].pdf	2022-05-02
5	202247025633-FIGURE OF ABSTRACT [02-05-2022(online)].jpg	2022-05-02
6	202247025633-DRAWINGS [02-05-2022(online)].pdf	2022-05-02
7	202247025633-DECLARATION OF INVENTORSHIP (FORM 5) [02-05-2022(online)].pdf	2022-05-02
8	202247025633-COMPLETE SPECIFICATION [02-05-2022(online)].pdf	2022-05-02
9	202247025633-FORM-26 [28-06-2022(online)].pdf	2022-06-28
10	202247025633-CERTIFIED COPIES-CERTIFICATE U-S 72 147 & UR 133-2 [28-06-2022(online)].pdf	2022-06-28
11	202247025633.pdf	2022-06-30
12	202247025633-Response to office action [04-07-2022(online)].pdf	2022-07-04
13	202247025633-Power of Attorney [13-07-2022(online)].pdf	2022-07-13
14	202247025633-Form 1 (Submitted on date of filing) [13-07-2022(online)].pdf	2022-07-13
15	202247025633-Covering Letter [13-07-2022(online)].pdf	2022-07-13
16	202247025633-CERTIFIED COPIES TRANSMISSION TO IB [13-07-2022(online)].pdf	2022-07-13
17	202247025633-FER.pdf	2022-09-15

Search Strategy

1	SEARCHSTRATEGYE_22-07-2022.pdf
2	SEARCHSTRATEGYE_13-07-2022.pdf