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Microwave Assisted Apparatus System And Method For Deposition Of Films On Substrates
Abstract: The present invention provides an apparatus for the deposition of thin films on a substrate including large substrates held preferably face down in a cartridge containing a liquid solution with at least a chemical precursor which upon being subject to a uniform microwave field transmitted through a microwave transparent window leads to the formation of a thin film on the substrate. The present invention also provides a system for launching microwaves and controlling the process for film deposition on the substrate. The present invention also provides a process for obtaining a film of uniform thickness and characteristics on a substrate or for incorporating controlled non uniformity. The present invention also provides an apparatus and method for film deposition on a series of substrates in a continuous batch process.
Notices, Deadlines & Correspondence
Patent Information
Applicants
INDIAN INSTITUTE OF SCIENCE
INDIAN SPACE RESEARCH ORGANIZATION HEADQUARTERS
Inventors
1. SAI Ranajit
2. SHIVSHANKAR Srinivasarao Ajjampur
3. MANISH Kumar Hooda
Specification
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 202247025633-FER.pdf | 2022-09-15 |
| 1 | 202247025633-STATEMENT OF UNDERTAKING (FORM 3) [02-05-2022(online)].pdf | 2022-05-02 |
| 2 | 202247025633-CERTIFIED COPIES TRANSMISSION TO IB [13-07-2022(online)].pdf | 2022-07-13 |
| 2 | 202247025633-REQUEST FOR EXAMINATION (FORM-18) [02-05-2022(online)].pdf | 2022-05-02 |
| 3 | 202247025633-FORM 18 [02-05-2022(online)].pdf | 2022-05-02 |
| 3 | 202247025633-Covering Letter [13-07-2022(online)].pdf | 2022-07-13 |
| 4 | 202247025633-FORM 1 [02-05-2022(online)].pdf | 2022-05-02 |
| 4 | 202247025633-Form 1 (Submitted on date of filing) [13-07-2022(online)].pdf | 2022-07-13 |
| 5 | 202247025633-Power of Attorney [13-07-2022(online)].pdf | 2022-07-13 |
| 5 | 202247025633-FIGURE OF ABSTRACT [02-05-2022(online)].jpg | 2022-05-02 |
| 6 | 202247025633-Response to office action [04-07-2022(online)].pdf | 2022-07-04 |
| 6 | 202247025633-DRAWINGS [02-05-2022(online)].pdf | 2022-05-02 |
| 7 | 202247025633.pdf | 2022-06-30 |
| 7 | 202247025633-DECLARATION OF INVENTORSHIP (FORM 5) [02-05-2022(online)].pdf | 2022-05-02 |
| 8 | 202247025633-CERTIFIED COPIES-CERTIFICATE U-S 72 147 & UR 133-2 [28-06-2022(online)].pdf | 2022-06-28 |
| 8 | 202247025633-COMPLETE SPECIFICATION [02-05-2022(online)].pdf | 2022-05-02 |
| 9 | 202247025633-FORM-26 [28-06-2022(online)].pdf | 2022-06-28 |
| 10 | 202247025633-COMPLETE SPECIFICATION [02-05-2022(online)].pdf | 2022-05-02 |
| 10 | 202247025633-CERTIFIED COPIES-CERTIFICATE U-S 72 147 & UR 133-2 [28-06-2022(online)].pdf | 2022-06-28 |
| 11 | 202247025633.pdf | 2022-06-30 |
| 11 | 202247025633-DECLARATION OF INVENTORSHIP (FORM 5) [02-05-2022(online)].pdf | 2022-05-02 |
| 12 | 202247025633-Response to office action [04-07-2022(online)].pdf | 2022-07-04 |
| 12 | 202247025633-DRAWINGS [02-05-2022(online)].pdf | 2022-05-02 |
| 13 | 202247025633-Power of Attorney [13-07-2022(online)].pdf | 2022-07-13 |
| 13 | 202247025633-FIGURE OF ABSTRACT [02-05-2022(online)].jpg | 2022-05-02 |
| 14 | 202247025633-FORM 1 [02-05-2022(online)].pdf | 2022-05-02 |
| 14 | 202247025633-Form 1 (Submitted on date of filing) [13-07-2022(online)].pdf | 2022-07-13 |
| 15 | 202247025633-FORM 18 [02-05-2022(online)].pdf | 2022-05-02 |
| 15 | 202247025633-Covering Letter [13-07-2022(online)].pdf | 2022-07-13 |
| 16 | 202247025633-REQUEST FOR EXAMINATION (FORM-18) [02-05-2022(online)].pdf | 2022-05-02 |
| 16 | 202247025633-CERTIFIED COPIES TRANSMISSION TO IB [13-07-2022(online)].pdf | 2022-07-13 |
| 17 | 202247025633-STATEMENT OF UNDERTAKING (FORM 3) [02-05-2022(online)].pdf | 2022-05-02 |
| 17 | 202247025633-FER.pdf | 2022-09-15 |
Search Strategy
| 1 | SEARCHSTRATEGYE_13-07-2022.pdf |
| 1 | SEARCHSTRATEGYE_22-07-2022.pdf |
| 2 | SEARCHSTRATEGYE_13-07-2022.pdf |
| 2 | SEARCHSTRATEGYE_22-07-2022.pdf |