Description:FIELD OF INVENTION

[001] The present invention relates to a microfabrication and/or nanofabrication system and more specifically relates to a microfabrication and/or nanofabrication instrument having swappable/interchangeable modules.

BACKGROUND OF THE INVENTION

[002] Photolithography, also called optical lithography or UV lithography, is a process used in microfabrication and nanofabrication to pattern parts on a thin film or the bulk of a substrate.

[003] Enhanced research is required for systems that build smaller structures/components at micro and nanoscale, and especially devices that are comparatively low cost so that institutions such as schools, colleges, startups etc. may use the same. Such instruments are needed not only for manufacturing of small components, but also for research and to teach micro and nanoscale fabrication to others. Unfortunately, many micro and nano techniques/instruments that already exist require expensive instrumentation.

[004] Existing photolithography instruments are also very expensive due to their use of components that are necessary for nanofabrication but are not necessarily required for microfabrication. Such systems may include components such as a complex optical system required for projection lithography, motorized micrometric stage, a lamp-based illumination, a microscopy subsystem etc.

[005] Also, the existing nanofabrication and microfabrication machines only allow operation of processes with inbuilt illumination systems, optical systems and motorized stages. Optimization of the various components of such nano and micro photo lithography instruments may allow systems to function as per the requirement of user, but machine bodies of present systems make it difficult to achieve the optimization required of various components as per the requirement of users.

[006] The present nano and micro fabrication systems also require frequent manual calibrations before use of a lamp in these systems, and require significantly lower levels of ambient microparticles due to the use of complex reduction optics. However, the exposure systems that employ LEDs instead of lamps face other challenges. For instance, LED systems require users to choose wavelength for the light exposures at the time of instrument acquisition. Therefore, if the user requires a different wavelength of exposure, they would have to purchase a whole new separate instrument.

[007] Thus, it is clear from above that these nano and micro photolithography systems are complex precision instruments that are not really modelled to meet the growing requirements of schools, colleges, startups, emerging or entrant participants in this domain, etc. whose needs might begin with simple requirements from such systems, but each might take on its own complex paths in terms of requirements from the photolithography systems over time. These systems hence, create a significant barrier to entry into the domain of nano and micro photolithography.

[008] US10252463B2 discloses a device that is used as an instrument for microfabrication and/or nanofabrication featuring exchangeable module heads and multi-axis positioning of components. However, the modularity claimed in this invention concerns only the module head ([104] specified annotation), and not in other systems such as light engine assembly and stage assembly. The other limitations include limited working size and limitation in the exposure area. The system must have a viewing assembly, a load cell, or an amplifier as per the embodiment. Further, owing to the module [104] being too large in this system, this invention is not ideal for high-resolution photolithography. The primary end-goal of that invention does not support Proximity and Contact Photolithography.

[009] Therefore, keeping in view the problems associated with state of the art and to further improvise the efficiency of the prior existing photolithography systems, there is a requirement of a highly efficient and well researched nano and micro photolithography instruments, which are inexpensive, convenient to handle and easily installable.

OBJECTS OF THE INVENTION

[0010] The primary objective of the present invention is to provide a nano and micro fabrication instrument that comprises a light engine module, a base module, an optical module and a stage module that are swappable or interchangeable.

[0011] Another objective of the present invention is to provide software based identification and validation of instrument configurations after insertion or removal of modules.

[0012] Yet another objective of the present invention is to provide an affordable nano and micro fabrication instrument that is easy to handle and is reliable.

[0013] Yet another objective of the present invention is to provide means to increase flexibility in operation of nano and micro fabrication instrument.

[0014] Other objects and advantages of the present invention will become apparent from the following description taken in connection with the accompanying drawings, wherein, by way of illustration and example, the aspects of the present invention are disclosed.

SUMMARY OF THE INVENTION

[0015] The present invention relates to a nano and micro fabrication system having a modular design, i.e. having exchangeable or interchangeable modules. The fabrication system primarily includes, but is not limited to, a light engine module, a base module, an optical module, and a stage module that are swappable. The fabrication system, other than the electronic and mechanical parts, also includes a software module that allows recognition of attachments and detachments of the various modules.

[0016] The present fabrication system is especially designed and optimized for microfluidic fabrication, sub-micron resolution semiconductor devices, MEMS devices, etc. It can be used to produce up to sub-micron thick fluidic channels with unprecedented ease, reliability, and affordability.

[0017] Unlike traditional mask aligners where a lamp is used, light engine in the present invention is based upon a modern and a chromatically precise LED. Said light engine therefore, requires highly infrequent calibration, saving users great amount of time and hassle.

[0018] With µFabricate scientific exploration and commercial utilization of microfluidics, nano and micro fabrication is more accessible than ever before. And the present system sets new benchmarks for ease of use, reliability and affordability. The fabrication instrument of present invention opens doors to nano and micro fabrication for a much larger audience, such as institutes, research groups, universities and startups.

[0019] Design of present fabrication system primarily focusses on simplicity of the instrument, low cost, ease of use, and most importantly being modular while also making sure there are no performance trade-offs made.

[0020] The present fabrication system also has higher flexibility and affordability due to the swappable light engine module, swappable optical module and swappable stage module. The present system also takes care of all the data, security and complexity concerns arising in the existing systems.

BRIEF DESCRIPTION OF DRAWINGS

[0021] A complete understanding of the present invention may be obtained by reference to the accompanying drawings, when taken in conjunction with the detailed description thereof and in which:

[0022] Figure 1 illustrates an exemplary laser based direct-write light engine module accommodated within a modular interface;

[0023] Figure 2 illustrates a stage module (4S) comprising of a manual z-axis linear stage, a sensor and a protruding platform;

[0024] Figure 3 illustrates a stage module (4M) comprising of a multi-axis manual stage, a sensor and an alignment microscopy sub-system;

[0025] Figure 4 illustrates exploded views of a light engine, a stage module and a base module as per various embodiments in the present invention;

[0026] Figure 5 illustrates swappability of various modules for optical nano and micro photolithography as per the present invention;

[0027] Figure 6 illustrates swappability of various modules owing to similar interconnects therein;

[0028] Figure 7 illustrates a stage module (6R) as per an embodiment in the present invention comprising of an automatic thin film application sub-assembly, an alignment microscopy sub-system, a roll positioning system and a mask holding mechanism;

[0029] Figure 8 illustrates a light engine module comprising of a monochromatic light emitting diode, thermal management system and optical sub-system;

[0030] Figure 9 illustrates a module interface as per the present invention that allows a safe access to appropriate power and identity dependent communication;

[0031] Figure 10 illustrates a modular electronic interface that has to be shared by all compatible modules;

[0032] Figure 11 illustrates a locking mechanism for a safe and explicitly acknowledged swappability of modules;

[0033] Figure 12 illustrates a micrometric positional accuracy in the present invention through a mechanism comprised of gears, screws and absolute encoders without the use of a motorized stage;

[0034] Figure 13 illustrates an overview of insertion and removal of a module as per the present invention;

[0035] Figure 14 illustrates a detailed view of the insertion and removal of a module as per the present invention;

[0036] Figure 15 illustrates an automatic validation of instrument state and reconfiguration of operational checklist in response to modules attached;

[0037] Figure 16 illustrates a secure removal mechanism for inhibiting unsafe effects of a swappable system;

[0038] Figure 17 illustrates an operational checklist to ensure correct usage by individuals not experienced in photolithography of the present invention through enforcement of a predefined procedure, aided through instructive visual guidance.

DETAILED DESCRIPTION OF EMBODIMENTS

[0039] The following description describes various features and functions of the disclosed system and method with reference to the accompanying figures. In the figures, similar symbols identify similar components, unless context dictates otherwise. The illustrative aspects described herein are not meant to be limiting. It may be readily understood that certain aspects of the disclosed system and method can be arranged and combined in a wide variety of different configurations, all of which are contemplated herein.

[0040] Accordingly, those of ordinary skill in the art will recognize that various changes and modifications of the embodiments described herein can be made without departing from the scope of the invention. In addition, descriptions of well-known functions and constructions are omitted for clarity and conciseness.

[0041] Features that are described and/or illustrated with respect to one embodiment may be used in the same way or in a similar way in one or more other embodiments and/or in combination with or instead of the features of the other embodiments.

[0042] The terms and words used in the following description and claims are not limited to the bibliographical meanings, but, are merely used to enable a clear and consistent understanding of the invention. Accordingly, it should be apparent to those skilled in the art that the following description of exemplary embodiments of the present invention are provided for illustration purpose only and not for the purpose of limiting the invention.

[0043] It is to be understood that the singular forms “a”, “an” and “the” include plural referents unless the context clearly dictates otherwise.

[0044] It should be emphasized that the term “comprises/comprising” when used in this specification is taken to specify the presence of stated features, integers, steps or components but does not preclude the presence or addition of one or more other features, integers, steps, components or groups thereof. The equations used in the specification are only for computation purpose.

[0045] The present invention relates to a nano and micro fabrication system having exchangeable modules. The present fabrication system may comprise, but is not limited to, a base module, a light engine module, an optical module and a stage module. The light engine module, the optical module and the stage module are interchangeable or swappable with respect to the base module. The exchangeability of each of said modules with respect to the base module is explained further.

[0046] As per a preferred embodiment of the present invention, the base module forms the brain of nano micro fabrication system. The base module comprises, but is not limited to, a lens module, a dedicated aluminum extrusion profile for framework and alignment, a base PCB module, a power supply module, a User Interface (UI) module with display, a cooling fan, a vacuum pump, various power supply connectors, various module connectors and various ethernet connectors.

[0047] The lens is preferably placed within the lens module. The lens module preferably may comprise of an aspheric lens that provides a perfectly collimated light source in the centre of that lens module. A fused silica or quartz window is placed on top of the lens module which is sealed on top side on the lens opening. Another fused silica or quartz window is placed on the other side of said lens module which is sealed on bottom side on the lens opening. The lens module can be made of several parts, but after that it will be assembled as a single part.

[0048] As per an additional embodiment, the lens module can be made of different kind of metal or plastic material. The lens module allows the alignment of parts and other modules with respect to each other, allowing the lens to be positioned in straight line for a collimated light source.

[0049] To reduce the chances of damage of lens, as per a preferred embodiment, a fused silica or quartz window are provided at the top and the bottom.

[0050] Connectivity of the light engine module is provided through lens enclosure, where electrical connectors such as pogo pins and reverse connectors are placed with desired PCBs and locked in placed with magnetic force. The base module may comprise a plurality of locking mechanism for interchangeability of the light engine module and the wafer with mask holding module.

[0051] As per alternate embodiments of the present invention, instead of using glass lenses, lenses can be made of clear resin, transparent PMMA, or transparent polymers, etc. based on application and resolution it can be implemented.

[0052] As per another exemplary embodiment, Fresnel lens can also be used so that the size of the assembly can be reduced.

[0053] The locking mechanism may comprise a solenoid-based lock system to lock in position the light engine module after it is placed in correct position. Electrical connectors such as pogo pins are placed on the upper side and exposed so that connectivity of the light engine portion with that module is done. Further, magnets can be provided for even better connectivity and maintain positional accuracy of optical distance between the lens and the UV LED light. Electrical connectors such as pogo pins and magnets are either epoxy sealed with that module, or it is mounted on a dedicated PCB board.

[0054] The light engine module shape is preferably but not limited to a cylindrical body made of metal or plastic preferably but not limited to aluminium at the enclosure housing. Light engine module has a UV LED light part comprising, but not limited to, an aluminium heat sink, a cooling fan, a support pillar, a cooling fan enclosure, a main connecting part, an UV LED holding part, a light engine PCB, plurality of electrical connectors such as pogo pins, magnets, an aluminium enclosure and a latch for holding this part.

[0055] The light engine module also comprises of, but not limited to, an UV LED light source, plurality of connecting electronics parts, and a cooling module. The design of this part is usually based on the alignment of module connectivity with base module so as to provide a simple and an ease of user experience.

[0056] As per a preferred embodiment, the light engine module imparts three different wavelength types on three different modules, namely, “G” line, “H” line and “I” line, imparting 435nm, 405nm and 365nm wavelengths respectively. Each individual module construction and design are so optimized that they can easily connect with the help of a plurality of electrical connectors such as pogo pins with the base module, where an optical lens is placed and the distance between the light and the optical lens remain constrained over an infinite time of usage.

[0057] The plurality of electrical connectors such as pogo pins, magnets, UV LED light part with aluminium heat sink and light engine PCB are mounted on the back side of the main connecting and UV LED holding part. Also, the plurality of electrical connectors such as pogo pins are mounted on the PCB with the back side and the front side being exposed through the main connecting and UV LED holding part on the opening side.

[0058] Magnets are placed on the back side on the main connecting and UV LED holding part, so that the other side of the magnet do not get exposed on the opening side and that the magnetic forces remain strong.

[0059] As per an alternate embodiment, the main connecting and UV LED holding part can be made from a variety of metal or plastic material. Also, the support pillars can be made from a variety of metal or plastic material so that it can connect the main connecting and UV LED holding part with the cooling fan enclosure.

[0060] A cooling fan enclosure having the cooling fan is also placed so that the temperature of that module remains constant. Further, temperature and humidity sensors can also be present in that module so that users can continuously monitor the temperature and humidity through a User Interface (UI) in that module.

[0061] For protecting the UV LED, a fused silica or quartz window placed in front on the UV LED light part. Through this configuration, we can resist dust and turn the assembly to an enclosed module. Main connecting and UV LED holding part are optimized and designed to perfection so that the module remains perfectly aligned in one direction, with the lens module present in base module. This alignment is done using the positive slots present on the main connecting and UV LED holding part opening side which provide a smooth axially sliding motion with the guide of negative slots present on the lens module on the base module.

[0062] Plurality of electrical connectors such as pogo pins and magnets are also present on the lens module on the base module using which smooth connectivity is obtained, giving users the exact optical distance between lens and the UV LED light.

[0063] A circular slot placed at least two or more sides of the light module part on the aluminum enclosure, is provide for lock and safety mechanism using at least two or more electromagnetic solenoid switches.

[0064] As per further embodiments of present invention, multiple UV LEDs or LEDs’ array can be used instead of a single LED. High or low power lamp based filter light can also be used in place of a UV light source module. Laser based, beam expander or flat top of any wavelength can be placed on the light engine module. An f-theta lens and galvano mirror based light engine can also be placed on light engine module. That module would then comprise of a UV laser light source, an excitation circuit, a power supply, at least one galvano mirror, a proper f-theta lens, electrical connectors such as pogo pins for power connecting modules, and a proper enclosure. Alternatively, a lens module can also be replaced by an f-theta lens.

[0065] The module is also designed to support deep UV method by using deep UV light engine setup module with proper optical system inserted in the same way into the base module. The light source can be a visible spectrum one also. After inserting all the modules into the base module, it will be locked using a solenoid.

[0066] Another one of the most important modules in the present invention is stage module. It is that module where users prepare or fabricate the final intended chips. Based on application, there can be two different modules in the present invention, which are elaborated below in detailed.

[0067] The first type of module is a 4S module, which can basically use for a single layer lithography process. It comprises of a wafer and mask holding plate which can hold a 4”, 3” and 2” wafers. Both glass and silicon wafers can be placed on that. A vacuum circular base is preferably used to hold the wafer in place during operation. A Z-axis stage is placed to help adjust the distance between the wafer and the mask. To find the distance, users can use a high accuracy encoder module. The values are calibrated each time during operation and provides a sub-micron accuracy on the device feature. The distance can be controlled by the user using a scrolling knob placed on right top of the mask and wafer holding plate, with the values of the distance being preferably shown in a digital display. Some other sensors, such as an light dependent resistor, an accelerometer, can also be placed so that the accuracy of the machine is increased. The entire system is mounted on a rail so that it comes out from the module enclosure smoothly and load with the wafer and mask easily without any hassle. After placing the wafer and mask and setting the distance as per requirement of the user, the drawer like assembly goes inside using a guide rail and is aligned perfectly to the whole system. Pursuant to that, the power and light source are set, along with exposure timing and all other details so that the system runs to expose. After finishing exposure, the drawer comes out and the sample is connected safely. For a perspective point of view as per an embodiment, working area for a 4” wafer is 70mm to 75mm approximately.

[0068] The second type of module as per the present invention is a 4M module, which is basically used for multi-layer lithography process. It comprises of a wafer and mask holding plate which can hold a 4”, a 3”and a 2” wafer. Both glass and silicon wafer can be placed on the same. A vacuum circular base is again used to hold the wafer in placed during operation. A camera module is placed in an upside down position in the module to assist in manual mask and wafer alignment. The same camera module is mounted on multiple linear stages which provide movements on the X-axis and Y-axis directions. The camera may also use a monochrome sensor not limited to 5 megapixel and a 10x objective lens to focus and zoom. Light ring array is placed to provide a clear view during alignment. An XYZR-axis stage is placed and it helps to adjust the distance between the wafers and mask using a Z micro gauge. The position of the wafer and mask along the X and Y side is adjusted by using an X and Y micro gauges respectively. To find the distance, users are required to use a high accuracy encoder module. The values are calibrated each time during operation, thus providing a sub-micron accuracy on the device feature. The distance may be controlled by the user by a scrolling knob placed on right top of the mask and wafer holding plate, with the values of the distance being shown in preferably a digital display. Safety is ensured on three side opening doors using the plurality of magnet and electrical connectors such as pogo pins. Until the door is closed, the exposure is not going to start. Even during operation, if the door is opened, the exposure is designed to stop. A premium quality door torque hinge is used on the doors. Once the user sets the power and light sources, exposure timings and all other details, the system begins to expose. After finishing exposure, the doors can be opened and the sample is connected safely. For a perspective point of view as per an embodiment, working area for a 4” wafer is 70mm to 75mm approximately.

[0069] As per requirement of the user, either a 4M or a 4S module is connected on the base module using preferably a straight profile connector, which provides a stable and proper alignment between the modules. For increasing the stability as per another embodiment, the system may be designed to use a base plate which helps to place both base module and a 4S/4M module by bolts. Electrical and vacuum pipe connectivity is provided on the back side of the 4S and 4M modules with proper connectors.

[0070] As per a preferred embodiment, the 4S module comprises, but not limited to, a manual Z-axis stage, a dedicated aluminium extrusion profile for framework and alignment, a vacuum base for holding wafer, a mask holing plate for holding a 4” mask, an encoder for measuring the displacement of Z-axis stage, a digital LCD showing encoder reading, a scrolling knob for control the Z-axis stage, an light dependent resistor sensor for light intensity measurement, and an accelerometer for vibration measurement. The manual Z-axis stage, the vacuum base for holding the wafer, the mask holing plate, the encoder, the scrolling knob, the digital LCD, the light dependent resistor sensor, and the accelerometer is placed together on a sliding drawer mechanism. The drawer is placed on two linear stages which assist in sliding outside and inside the drawer. The drawer is designed in such a way so that any sort of deflection will not occur. End stops are used to set the limit of the travel. The drawer is also rigidly connected to the sliding bar on linear stage with a plurality of screws. The enclosure in that module can be made of any metal body or any plastic body. The mask holding part is designed in such a way that the handling of mask and wafer is done smoothly and correctly without any obstruction, using indications and shaped slot design cut outs. The drawer carries the wafer and mask inside the module and provides proper alignment with light path through base module. Preferably, a plurality of straight profile connectors is used for aligning the 4S module with base module. Half of the straight profile connectors are rigidly fixed on the dedicated extrusion profile inside the base module, while the other half is exposed externally for aligning 4S module by connecting on the dedicated extrusion profile inside the 4S module. Electrical and communication connectivity with base module is done by manual connection using connecting ports. Dust and other contamination is prevented by the enclosure and proper sealing of drawer.

[0071] As per another preferred embodiment, the 4M module comprises, but not limited to, a manual XYZR-axis stage, a dedicated aluminium extrusion profile for framework and alignment, a vacuum base for holding wafer, a mask holing plate for holding a 4” mask, an encoder for measuring the displacement of Z-axis stage, a digital LCD showing encoder reading, an light dependent resistor sensor for light intensity measurement, and an accelerometer for vibration measurement. Two linear rails on Y-axis and one linear rail on the X-axis are mounted on a link bar which is fixed with the Y-axis rail. On this X-axis rail, a camera module is mounted with, but not limited to, a camera sensor, a sensor enclosure, a focusing knob, an objective lens, an LED light ring, and a camera holding housing. The linear rails provide the linear X and Y axis movement of the camera module so that way users can align the mask and wafer for multiple layer lithography process. The end stops are preferably used for home positioning of the camera module so that modules do not create an interruption during exposure, while also ensuring safety while heating. The rails are controlled automatically through a UI with high accuracy. The module preferably has three opening sides. Each side having a magnetic electrical connector such as pogo pins-based system, while the doors are mounted on a friction or torque hinge that gives a stability of those doors. Exposure will not perform until all the three doors are not closed. During exposure, if suddenly any door is opened, the exposure is designed to stop immediately. The vacuum wafer holder carrying the wafer and mask is carried by the mask holder inside that module which provides proper alignment with light path through the base module. As per another preferred embodiment, plurality of straight profile connectors is used for aligning the 4M module with the base module. Out of which, half of the straight profile connectors are rigidly fixed on the dedicated extrusion profile inside the base module, while the other half section is exposed externally for aligning the 4M module by connecting on the dedicated extrusion profile inside the 4M module. Electrical and communication connectivity with base module is done preferably by manual connection with a plurality of connecting ports. Dust and other contamination is again prevented by the enclosure and proper sealing of doors.

[0072] It is clear from above that the connectivity of both 4M and 4S modules with the base module have almost been kept the same, as it is done and placed using the same technique. The camera module rails along the X and Y axis are designed to be calibrated automatically through a software. The focusing of objective lens completely depend on the focusing length of the particular objective lens, which can be adjusted manually. As per a specific embodiment, the present invention is using a 10x objective lens.

[0073] In embodiments having the XYZR stage, it would be understood by a person skilled in the art that it can only be an XYZ stage, a Z & R stage, an R stage, an X & Y stage, a 5 axis stage, a 6 axis stage, etc. and that they can be driven manually or automatically. Piezo motion stages of all verity can also be replaceable. As per the zooming and image quality, various objective lens and camera sensor can be replaced. Nano focusing element can also be attachable on the module for better focusing experience. The stage modules are preferably designed in such a way that the modules can be vacuumed during lower critical dimensional applications. Air handling units can also be present on the module and also in base modules so that the machine can operate in non-clean room environments. Roll to roll and roll to sheet nano imprint lithography processes can be implement on this system.

[0074] On the machine, preferably a touch screen colour display or LCD is placed. In this display, UI is running, which gives proper guidance to the operator/user through step by step instructions. After attaching the light engine module, the system automatically detects the particular module and gives status on the screen, and locks that through the solenoid locking system. Only through the UI, the user is able to disable the lock and pull out the modules.

[0075] The body of the base module can alternatively be made of any kind of metal or any kind of plastic body. The modules can have temperature, vibration, and humidity sensors that provide the operators with feedback for enhanced performances. The light engine module and the lens module together can come out of that base module by the same locking and snapping guide line based mechanism. Using this, the users can change the lens according to the needs. Based on the application, productivity, resolution and feature dimensions, the stage modules are replaced as per the requirements.

[0076] Another one of the most important modules in present invention is the software modules, the various operations of which are explained further in detail below.

[0077] It is understood by a person skilled in the art that different light engines in the system might have different power requirements in terms of both voltage and current. This means that if a module that uses a low amount of electrical power must not be provided with a high electric power, else it would most likely damage the module. Hence, a software system is required for identification of the module that is currently plugged in. Knowing which module is currently plugged in allows for correct voltage and current to be supplied to the module. This is achieved in the present invention through a storage EEPROM memory of a microcontroller, which stores information about its identity. The identity is stored as a binary ID which can be queried by the base module for it to correctly interact with it. This communication of identity is re-iterated each time that a module is attached (after removal) to the base module. This communication between the exchangeable module and the base module is designed to be done through, but not limited to, a serial communication protocol such as I2C, UART, etc.

[0078] Further, identification of a newly attached exchangeable or swappable module is visually confirmed through a dialog appearing on the Graphical User Interface (GUI). In case the module is not recognised or placed appropriately, a timeout event is designed to occur after leading the GUI to go into an error state. The GUI may also go into a special state if the device does not have a module present for each of the two essential swappable requirements, namely motion control and light engine. In such cases, the user is guided to install the missing module in the machine to be used appropriately.

[0079] Further, plug and play modularity leads to various undefined behaviours, for example, if the modules are detached in between operation of the machine, or if a module is operated without correct identification of the modules that are attached, or if the modules attached are incompatible with each other. Similarly, modularity further can complicate provisions of technical support for users that are using esoteric combination of modules. Hence, the present system is designed to provide solutions for each of these concerns if modularity has be achieved in a usable and reliable manner for demanding processes such as micro and nano photolithography.

[0080] Additionally, the machine uses solenoids in order to avoid detachability of exchangeable modules without explicit consent. This explicit consent is provided through a button on the GUI which must be kept pressed for the solenoid to be released. The lock is designed to be kept disengaged for the period that the GUI button is pressed on for. The solenoids lock the exchangeable module in place when they have been identified correctly. For additional reliability, this lock can only be disengaged through the GUI for the explicit period that the given button is kept pressed on for.

[0081] As per another embodiment, different modules might have within them different number of individual microcontrollers. For example, a motion control exchangeable module can be designed as one with a manual stage augmented with an encoder readout or a motorised stage. The exchangeable module containing the motorised stage may have additional microcontrollers that are responsible for driving the position of the stage. This means that some modules might have four microcontrollers that need to communicate with the base module, while other modules might have, suppose say eight microcontrollers that require to communicate to the base module. Now this is made modular in the present invention by converting the serial communication lines into the USB protocol. This allows for incorporation of USB host sub-circuits that are able to take many USB communication lines and convert them into a single USB communication line within the exchangeable module. This means that the module simply needs to output one data connection in the form of a USB communication line, which acts as a serial bus carrying all the communication lines that need to communicate with the host computer within the base module.

[0082] The USB protocol as per the present invention allows further benefits, mainly the ability to hot-plug modules and have them recognised by the operating system in a reasonably small duration. Modules being able to store and communicate their identity allows the host computer to recognise and treat each of the various communication lines with the USB connection appropriately. This is because the host computer holds a dictionary data structure, allowing it use the module ID as a way of accessing all the various serial communication lines that are expected for the given module ID. It is able to raise errors in the GUI if the expected communication lines do not appear to be present within the USB line.

[0083] The central widget in the user interface as per a preferred embodiment of the invention is a checklist which shows a step by step series of instructions on how to use the present machine. Clicking on each of the to-do items in the checklist opens a drawer in the user interface. These drawers provide button and other UI elements required to carry out that particular step in the lithography process. These drawers are also designed to feature small instruction animated videos that demonstrate to the operator the physical task in the form it is expected to be carried out in that particular step. This dramatically lowers mistakes in users and makes the device easier to use.

[0084] This checklist is preferably designed to be modular, which means that for different modules that are connected, different series of actions are expected for appropriate use of the machine. The checklist includes actions such as, but not limited to, placement of wafer and mask, and choosing of an exposure duration as well as an exposure intensity. It also further incorporates essential best practices as checklist items. These include, but not limited to, checking that the vibration the machine is experiencing is reasonable, and that the light is calibrated so that the light intensity that we set produces the expected intensity of light. These checklist items might incorporate in future further sensors in order to ensure that the micro-particulate matter in the air of the photolithography area is quantified and known before the exposure is carried out.

[0085] Calibration of modules as per the present invention require intercommunication between two exchangeable modules. This means that the light engine requires the intensity of the light to be measured by the motion control module right where the wafer is expected to be placed. This is carried out indirectly through the host computer in the base module acting as the master in this master-slave communication architecture as used in this machine.

[0086] The present invention therefore, primarily describes an affordable photolithography instrument that while giving operators the freedom of swappability of certain modules in such a complicated and expensive system, doesn’t compromise with the security, data and complexity issues therein.

[0087] Additionally as disclosed above, the present system has been designed to be affordable, so that not only industry professionals use them in their day to day activities, but even students and trainees can use such photolithography systems. However, in the quest to design an affordable system, careful consideration has been given to the fact that the present system does not at all compromise on performance of any sort.

[0088] The present system, to achieve its objectives, has been designed to incorporate all the three aspects perfectly, i.e. the electronic equipments, the mechanical parts and the software modules functioning. The three aspects have been designed in a way that they come together to form a perfectly symbiotic environment so as to reach the present photolithography system.

[0089] Figure 1 illustrates an exemplary laser-based light engine module (100) as per the present invention, accommodated within the modular interface. This depicts a laser based direct-write light engine module accommodated within the modular interface. This, even though is a comparatively complex example of a light engine module, yet it shows how it is accommodated seamlessly using the swappability provided in the system.

[0090] The laser-based light engine module (100) as per Figure 1 comprises, but is not limited to, a galvano mirror assembly (102), an actuated mirror assembly (104), a beam shaping sub-system (106), a laser source (108), a laser controller (110), a telecentric or a non-telecentric F-theta lens (112), an optical window (114), a PO (116), a mask slot (118), a substrate slot (120) and a wafer aligned optical spacer (122).

[0091] The laser source (108) is preferably placed for producing a laser beam of a required wavelength. The laser light from the laser source (108) is then passed through the beam shaping sub-system (106), which may work like a beam shaping optical device. The galvano mirror assembly (102) could consist of a single or multiple actuated mirror assemblies (104). These actuated mirrors (104) help guide the laser light to the telecentric or the non-telecentric F-theta lens (112). This F-theta lens (112) preferably projects the laser beam onto different locations on the wafer surface, allowing for a precise and maskless exposure of the wafer surface. The optical window (114) is preferably used for sealing the light engine module (100) to protect from external factors such as dust particles. The PO (116) in this case may be elaborated as an electrical and data communication connector. These types of connectors may be spring-based as well as a magnetic locking system. This is to ensure proper electrical and data communication connectivity between the modules. These (single or multiple types of the connectors) may be placed on a PCB (Printed Circuit Board), on the light engine module (100) as well as on base modules. The mask slot (118) is where the required mask should be placed, while the substrate slot (120) is where the required substrate should be placed for the lithography process. These two slots are preferably perfectly centered, along with the base module and the light engine module (100) light path.

[0092] Figure 2 illustrates a stage module (200) that may have a protruding platform, a manual linear stage and sensor modules. These types of stage modules are mainly used in the single-layer lithography process (4S). This stage module (200) comprises, but is not limited to, a central stage module controller (202), a unified power line (204), a unified serial communication line 1 (206), a serial communication line 1 (207), a serial communication line 2 (208), a motorised linear rail (210), a digital position sensor (212), a micro-metric manual z-axis linear stage (214), a vibration sensor (216), a display (218), a stage calibration mechanism (220) and a vacuum chuck (222).

[0093] The micro-metric manual z-axis linear stage (214) may be placed on the protruding platform in the stage module (200). The digital position sensor (212) is preferably connected with the micro-metric manual z-axis linear stage (214) for measuring the absolute value of the stage movement, while the stage calibration mechanism (220) may preferably be placed on the micro-metric manual z-axis linear stage (214) for manual calibration of the linear stage. The vacuum chuck (222) is preferably placed on top of the micro-metric manual z-axis linear stage (214) for vacuum holding different sizes of substrate. The display (218) is preferably placed on top of the protruding platform for displaying displacement of the absolute value of the micro-metric manual z-axis linear stage (214). The vibration sensor (216) is preferably placed on the protruding platform for measuring the whole module vibration. The protruding platform can preferably be placed on the motorised linear rail (210), which helps the protruding platform to come in and out from the stage module (4S) (200). The central stage module controller (202) is preferably placed in the module (200) where one of a unified power line (204) and a unified serial communication line (206) come out. These unified power lines (204) and unified serial communication line (206) bring connectivity in the stage module with the base module. The multiple serial communication lines 1 and 2 (207, 208) and power lines (204) are connected with the central stage module controller (202), which are responsible for connecting the sensors, sub-modules, motors, etc. within the stage module (4S) (200). In this particular exemplary embodiment, the serial communication line 1 (207) can preferably be connected with the protruding platform, while the serial communication line 2 (208) can preferably be connected with a motorized linear rail (210).

[0094] Figure 3 illustrates a stage module that may have a multi-axis manual stage, sensor and alignment microscopy sub-system, etc. These types of stage modules are used in the multi-layer lithography process (4M). This module (300) comprises, but is not limited to, a multi axis motorized and linear rail (302), a microscopy and an alignment inspection subsystem (304), a vacuum chuck (306), a micro-metric multi axis manual stage (308), a safety detector for UV leakage protection (310), a serial communication line 1 (312), a serial communication line 2 (314), a serial communication line 3 (316), a serial communication line 4 (318), a serial communication line 5 (320), a unified serial communication line (322) and a unified power line (324).

[0095] The micro-metric manual multi-axis linear and rotary stage (308) is preferable placed on the base of the stage module (4M) (300). The vacuum chuck (306) can preferably be placed on top of the micro-metric manual multi-axis linear and rotary stage (308) for vacuum holding the different sizes of substrate. The microscopy and alignment inspection subsystem (304) is also preferably present in the module (4M) (300), which can preferably be mounted on the multi axis motorized and linear rail (302). The safety detector for UV leakage protection module (310) is placed on the stage module (4M) (300) for protecting the users from the UV radiation and contamination therefrom during sudden openings of door of the stage module (300) during exposure. The stage module (4M) (300) may also comprise a central stage module controller from where the unified serial communication line (322) and the unified power line (324) come out. These lines (322, 324) are responsible for connecting the stage module (300) with the base module. The plurality of serial communication lines and power lines are also connected with the central stage module controller, which are responsible for connecting the sensors, sub-modules, motors, etc. in the stage module (4M) (300). In this example, the serial communication line 1 (312) is connected with the micro-metric manual multi-axis linear and rotary stage (308), serial communication line 2 (314) is connected with the sensors. Similarly, the serial communication line 3 (316), serial communication line 4 (318) and serial communication line 5 (320) are connected with the microscopy and an alignment inspection subsystem (304), the multi axis motorized and linear rail (302) and the safety detector for UV leakage protection (310) respectively.

[0096] Figure 4 illustrates two exploded views of exemplary embodiments (or combinations) of the light engine modules, stage modules and base modules, so as to form various configurations of the nano and micro photolithography system as per the present invention. Every combination may have a different size, shape, purpose, etc. The combination on the top of Figure 4 may comprise, but is not limited to, a light engine module (402), a base module (404), an optical subsystem within the base module (406), a stage module (408) and a rigid base (410). The combination on the bottom of Figure 4 may comprise, but is not limited to, a light engine module (412), an optical subsystem within the light engine module (416), a base module (414), a stage module (418) and a rigid base (420).

[0097] As per the top combination, the light engine module (402) will be compatible with the base module (404), while the stage module (408) will be compatible with the optical subsystem within the base module (406). Similarly, as per the bottom combination, the light engine module (412) will be compatible with the optical subsystem within the light engine module (416), while the base module (414) will be compatible with the stage module (418). The rigid instrument bases (410, 420) can be either with or without a vibration damping mechanism.

[0098] It is to be noted that the above two combinations are merely exemplary in nature and should not be construed as the only combinations available as per the present invention.

[0099] Figure 5 describes how modules are swappable (or hot-plug and playable) with each other as per the present optical nano and micro photolithography system. In the system at (502), more than one serial lines emerging from many subsystems of stage module can be seen. At (504), various independent subsystems with individual serial interfaces can be seen. The system also comprises, but is not limited to, a base module controller (506), a stage module controller (508), a power inlet (510), unified inter-connect mechanism and interfaces (512), groups of conductive elements (514) and a human-machine communication interface (516).

[00100] The human-machine communication interface (516) may essentially comprise of, but should not be construed as the only option, a display with a touch sensitive surface. The means of communication between the operator (human) and the machine as per the present invention is not limited to only a touch display surface communication, but could also be through voice enabled commands, etc.

[00101] Said groups of conductive elements (514) are placed on the light engine module and the base module, which can preferably be supported using a spring-loaded mechanism and aided with magnets for more reliable electric connection, also known as PO. The base module also have the power inlet port (510) for the entire system, and the base module controller (506) which is responsible for connecting all modules online, identifying the modules, etc. The stage modules therein have stage module controller (508), while the individual light modules would have light engine module controller on it. The stage module is connected with the base module using the unified inter-connect mechanism and interfaces (512), also known as “UN”, which preferably have spring-loaded contacts aided using magnets.

[00102] The swappability of modules in the present invention has been designed in such a way that complex issues such as problems pertaining to identification or recognition of various modules while removing and plugging in new modules of different makers faced by such systems. In the present invention, when an operator removes and plugs in different modules manufactured by different makers, the system recognises and reads said modules and then proceeds with further processing. The means to achieve this in the present invention can exemplarily be described as, but should not be taken as limiting in any way, a technology similar to the hot-swappable technology used in Universal Serial Buses (USB), which are plug-and-play devices primarily.

[00103] Figure 6 illustrates an exemplary embodiment of a stage module having the same interconnects, allowing the stage modules to be interchangeable or swappable as per the present invention. On the left side in Figure 6, we see a different stage module (602) in comparison to the right hand side stage module (604). This swappability is realised because the different modules have similar interconnects, allowing them to be interchangeable. The base module (606) in the exemplary embodiment as per Figure 6 is same, having similar interconnects, such as the identity dependent power line (608), data transmission unified interconnect (610) and power transmission interconnect (612). Both interconnects are placed accordingly, so that while the base module (606) is connected with the stage modules (602, 604), the interconnection is done smoothly.

[00104] It is to be noted that Figure 6 is merely an exemplary embodiment of the present invention that depicts different stage modules to be swappable. This should not at all be looked at as limiting in any way, as other exemplary embodiments could also exist with different swappable modules other than stage modules.

[00105] Figure 7 illustrates another exemplary embodiment of the present invention as per which a stage module (6R) (700) comprises, but not limited to, plurality of linearly actuated mask holding assemblies (702), a positional controlled rotary system (704), a multi-axis micro-metric motorized rail (706), a high viscosity liquid dispenser (708) and a thin film applicator sub assembly (710).

[00106] The positional controlled rotary system (704) in the stage module (6R) (700) is responsible for handling the thin film, while the thin film applicator sub assembly (710) flattens the liquid. The high viscosity liquid dispenser (708) is preferably present before the thin film applicator sub assembly (710) and it photo-resists chemical depositions on the thin film. The linearly actuated mask holding assemblies (702) may preferably be present for holding the required pattern mask through which the UV light passes through, and is deposited on the thin film carrying a thin layer of photo-resist chemical, for patterning. The multi-axis micro-metric motorized rail (706) preferably carries the microscopic sub-assembly which is primarily responsible for calibration and quality checking.

[00107] Figure 8 illustrates a cross sectional view of a light engine module (800) comprising, but not limited to, thermal vents (802), a handle bar (804), a plurality of thermal management systems (806), a temperature sensor (808), a light engine controller (810), a plurality of unified serial communication lines (812), module rotational alignment slot and insert (814), a data bus (816), a base module (818), an inbuilt optical system (820), a plurality or group of conductive contacts (PO) (822), an identity dependent power line (824), a locking slot (826), a plurality of power lines (828) and a light generating device (830).

[00108] The light generating device (830) may preferably be, but is not limited to, a monochromatic device which produces light. The thermal management systems (806) may have the thermal vents (802) and temperature sensor (808) to cool the light engine module (800). It may also have various ultra-quite cooling fans, heat-sinks etc. for cooling the light engine down. The unified serial communication lines (812) and power lines (828) are preferably connected with the light engine controller (810) placed on a PCB. The plurality or group of conductive contacts or elements (PO) (822) are preferably supported using spring-loaded mechanism and aided with magnets for more reliable electric connection. Some of these contact elements (822) may be connected to the identity dependent power line (824) on the base module (818) while some of the contact elements (822) may be connected to the data bus (816) on the base module (818). While on the light engine controller (810), the unified serial communication lines (812) and power lines (828) are connected with the contact elements (822). The module rotational alignment slots and inserts (814) are preferably present on the light engine module (800) and the base module (818) for proper alignment and to meet the proper constrains. For this reason, the power lines (828) present on the light engine controller (810) will only be connected with the identity dependent power line (824) on the base module (818). Similar scenario is also applicable for the data bus (816). The locking slot (826) is provided so as to enable safe locking after insertion of the light engine module (800). For helping operators remove and insert the light engine module (800) smoothly, the handle bar (804) is provided on top.

[00109] Figure 9 illustrates a light engine module (902), an exploded view of base module and a stage module (904). This figure explains how modular interface in the present invention allows safe access to appropriate power and identity dependent communication. This figure further depicts plurality of locking slots (906), a base module central controller (908), an instrument power port (910), a base module central power management system (912), plurality of electronically controlled locking mechanism (914), plurality of module rotational alignment slot and insert (916) and a plurality of conductive contacts (918).

[00110] The module rotational alignment slots and inserts (or RA) (916) are placed on the light engine module (902) and the base module for proper alignment and so as to meet the proper constraints. The electronically controlled locking mechanism (914) is provided to ensure safety of the light engine module (902) while inserting or removing using the locking slots (906) on the light engine module (902). Here also, the group or plurality of conductive contacts or elements (PO) (918) are supported using the spring-loaded mechanism and aided with magnets for more reliable electric connection. The instrument power port (910) is connected to the base module central power management system (912) in the base module. This base module central power management system (912) is the unit that provides power to the base module central controller (908), the light engine module (902) and the stage module (904) as per requirement.

[00111] Figure 10 illustrates a design of the modular electronic interface which preferably should be shared by all the modules. The design comprises, but is not limited to, plurality of sub-module serial communication lines (1002), plurality of sub-module power lines (1004), plurality of conductive contacts (1006), an identity dependent power line (1008), a unified serial communication line (1010), a base module (1012), plurality of module rotational alignment slots and inserts (1014) and a module identification sub-circuit (1016).

[00112] The group or plurality of conductive contacts or elements (PO) (1006) are designed to be preferably on the light engine modules and the base module (1012), and these are supported using the spring-loaded mechanism and aided with magnets for more reliable electric connection. These also preferably exhibit the properties of a physical layer of the light engine interface. In the light engine, the group or plurality of conductive contacts or elements (PO) (1006) are mounted on a desired PCB board, and these PCB boards have the module identification sub-circuit (1016) designed on it. It is similar in the case of the base module (1012) as well. The module rotational alignment slots and inserts (or RA) (1014) are placed on the light engine module and the base module (1012) for proper alignment and so as to meet the proper constraints. The sub-module serial communication lines (1002) and the plurality of sub-module power lines (1004) are preferably present on the light engine module and connected with light engine desired PCB board, while the unified serial communication line (1010) and the identity dependent power line (1008) are preferably present on the base module (1012) and connected with the light engine desired PCB board.

[00113] Figure 11 explains the locking mechanism for provision of safe and explicitly acknowledged swappability of modules. On the left hand side in figure, a light engine module (1100) is illustrated, which comprises, but is not limited to, plurality of locking slots (1102), a module rotational alignment slot (1104) and a plurality of electronically controller locking mechanism (1106). On the right hand side in figure, a light engine module (1120) comprises, but is not limited to, plurality of locking slots (1122), plurality of electromagnets (1124), a counteracting spring (1126), plurality of electronically controlled locking mechanisms (1128), an optical sub-assembly (1130) and a module rotational alignment slot (1132).

[00114] Both the electronically controller locking mechanisms (1106, 1128) have plurality of locking keys, electromagnets and the counteracting springs (1128) therein. This electronically controller locking mechanism (1106, 1128) provides the safety of modules by engaging the locking key with the locking slots (1102, 1122).

[00115] Figure 12 illustrates an important aspect of the present invention, as per which positional accuracy is obtained without the use of a motorized stage. This is obtained using a mechanism comprising of, but not limited to, gears, screws, and absolute encoders. The left hand side of this figure depicts a sub module present on a stage module (1200) having, but not limited to, a scroll wheel (1202), a light intensity sensor (1204), a vibration sensor (1206) and an electronic display (1208) being used for the mechanism as described above. On the right hand bottom side of the figure, other than a single or multiple axis micrometric stage (1214) and a calibration gauge (1216), we see the scroll wheel (1202) or micrometric rotating knob connected with an absolute positional encoder (1210) and some gears and scroll wheel arrangement. The right hand top side of this figure is a side view of the right hand bottom side of the figure, wherein we can clearly see the connection between the absolute positional encoder (1210) and a micrometric screw (1212).

[00116] In prior art systems’, during the lithography process, the distance between a wafer and a mask holding plate used to be set using motorized stages. This however, is an expensive affair, resulting in restriction of use of such lithography systems by trainees, students, etc. This costly affair has been mitigated by introducing the mechanism as described above in the present invention. This mechanism clearly does not require the use of costly motorised stages, but also makes sure not to compromise on results and accuracy of functioning. The present mechanism aims to give the accurate results as obtained via the motorised stages, but avoiding the use of expensive systems. The scroll wheel (1202) or micrometric rotating knob has to be manually rotated to set the distance between the wafer and mask holding plate, and the distance is made visible in the electronic display (1208) for operator ease and accuracy.

[00117] Figure 13 gives a brief overview of how insertion and removal of a module in the present nano-micro photolithography system occurs. The present nano-micro photolithography system, as explained above, has three broad aspects therein, namely the electronic connections, the mechanical parts and the software modules. These three aspects combine so as to reach the present system.

[00118] Broadly, a software user interface (UI) built in for the system detects when a module has been removed from the system. After such a detection, it puts the system in a waiting mode until the requisite modules are once again fitted by the operator in the system. Once the UI detects a new module, it recognises it through, but not limited to, the hot-swappable or plug-and-play technology (similar to USB) and after recognition validates the new module. Once the validation is done successfully, it updates an instrument and checklist data module, so that the module is registered for future preference and is locked for system usage. If the validation of module is not done successfully, the UI continues to keep the instrument in a wait mode.

[00119] Figure 14 gives a detailed overview as to how the insertion and removal of modules take place in the system. A module in the UI periodically keeps listing and checking if any new modules have been added or removed from the system. If the answer to that is in negative, the module terminates it function, only to repeat itself again later periodically. If the answer however to the above question comes out to be in affirmative, the UI puts the system in a wait mode, while simultaneously beginning the process of recognising and validating the new module in the system so as to terminate the wait mode and resume operation. A validation module in the UI detects a new hardware connection state by running through a checklist which one by one validates if all the essential modules, such as the light engine module and stage module, are available. If not, the operator is shown with an error message and prompts it to continue with module connection and eventual validation. If all the modules for example have been detected successfully, the UI software then verifies if the modules are compatible with the other modules, for example base module. Only when it gets compatible, the software moves to the next step of expecting the modules to be within the various ranges of engines and modules in the present system, for example the light engine and stage module. Once everything is an affirmative, the software proceeds to update the new instrument model. It is to be noted that if any error occurs in any of the above steps, the software lets the operator know very clearly using the custom specific error messages, via the digital screen in the system. After successful updation of new instrument module, it is checked whether the same has to be updated in the checklist or not. If yes, the data update module in the system updates the checklist with the new module configuration. After the new module model is updated and/or the checklist model is updated, the new module is locked and the system is made ready for usage.
[00120] Figure 15 illustrates an exemplary embodiment of the present invention where the UI detects that a light engine module is not detected and therefore, displays a clear error message to the operator about the same. The operator is capably led by the UI to insert the light engine module using display instructions, videos and various other means possible. Once the operator does get the module inserted into the system, the operator is made known about the successful detection and locking of said module using a display message for example. After the modules are identified correctly, the UI shows the operator a step by step checklist on the display screen, allowing the operator to not miss a single step in the photolithography process.

[00121] Figure 16 illustrates an exemplary embodiment of the present invention where the operator wishes to remove the light engine module. Similar to the insertion as explained above, the UI guides the operator through the steps of removal of a selected module via video guides, written information and prompts, etc.

[00122] Figure 17 illustrates how an operational checklist is made available to the operator using the present system, wherein the operator has to compulsorily complete all steps/tasks before being given the prompt of beginning the photolithography. Further, each step in the checklist is explained to the operator as to how it is to be successfully completed using visual aids such as informative prompts and/or graphics and videos. This operator-friendly checklist UI feature in the present system enables even a person very ordinarily skilled in the art to perform lithography without any accidental mishap that could ordinarily have occurred during the usage of a modular photolithography system as in the present invention. Further, not only are accidental mishaps avoided, but the operator-friendly checklist UI feature acts as a mechanism to ensure correct use of the present system through enforcement of a predefined usage procedure, aided very ably through instructive visual guidance and messages/prompts.

[00123] While the present invention has been described with reference to one or more preferred aspects, which aspects have been set forth in considerable detail for the purposes of making a complete disclosure of the invention, such aspects are merely exemplary and are not intended to be limiting or represent an exhaustive enumeration of all aspects of the invention. The scope of the invention, therefore, shall be defined solely by the following claims. Further, it will be apparent to those of skill in the art that numerous changes may be made in such details without departing from the principles of the invention.

Claims:We Claim:

1. A nanofabrication and microfabrication photolithography instrument comprising a light engine module, an optical module, and a stage module, wherein said modules are swappable or exchangeable.

2. The nanofabrication and microfabrication photolithography instrument as claimed in claim 1, wherein the instrument comprises a software module that allows identification and validation of instrument configuration after insertion or removal of modules.

3. The nanofabrication and microfabrication photolithography instrument as claimed in claim 1, wherein module identification is designed to provide appropriate power from a base module.

4. The nanofabrication and microfabrication photolithography instrument as claimed in claim 1, wherein a single power line and a single serial bus is used as a standard interface between the swappable modules and the base module.

5. The nanofabrication and microfabrication photolithography instrument as claimed in claim 1, wherein a software based explicit acknowledgement system is provided before every module removal.

6. The nanofabrication and microfabrication photolithography instrument as claimed in claim 1, wherein the instrument comprises a Graphic User Interface (GUI) having a checklist of steps to follow for an operator during the fabrication process.

7. The nanofabrication and microfabrication photolithography instrument as claimed in claim 6, wherein the checklist is modular and adaptable to new machine configurations.

8. A method of swapping modules in the nanofabrication and microfabrication photolithography instrument as claimed in claim 1, comprising the steps of:

a. detecting removal of a module by a software interface;
b. putting the instrument in a ‘wait mode’ until validation of a new module;
c. recognising and validating the newly inserted module; and
d. updating a data module in the software interface by registering the newly validated module for future reference.

9. The method of swapping modules as claimed in claim 8, wherein a module in the software interface periodically checks for insertion and removal of modules.

10. The method of swapping modules as claimed in claim 8, wherein a validation module in the software interface alerts user if all essential modules are not operably connected to the instrument.