Specification
DESCRIPTION
Title of the invention:
MULTI-JUNCTION SOLAR CELL, COMPOUND SEMICONDUCTOR
DEVICE, PHOTOELECTRIC CONVERSION DEVICE, AND
COMPOUND-SEMICONDUCTOR-LAYER LAMINATION STRUCTURE
TECHNICAL FIELD
[OOOI] The present disclosure relates to a multi-junction (also called a
tandein-type, a stack-type, or a la~nination-type) solar cell, a cotnpound
se~niconductor device, a photoelectric conversion device, atid a
compound-semiconductor-layer lamination structure that use a compound
semicotiductor.
BACKGROUND ART
[0002] As a co~npound semiconductor configared of two or Inore types
of elenietlts, man)r types exist depending on a conlbination of the eletnents.
Also, by laminating a lot of compound senlicotiductor layers made of
different tnaterials, a conlpourtd senliconductor device having various
fntnctions and various physical properties are achievable. As an exanlple
thereof, a solar cell lnay be mentioned. Here, as a solar cell, a
silicon-based solar cell that uses silico~ia s a semiconductor, a compound
seniiconductor solar cell that uses a compound semicondc~ctor, an organic
solar cell that uses an organic material, etc. liiay be mentioned. In
particular, the conipoand senliconductor solar cell has been developed
aiming further improvement in energy conversion efficiency.
I
[0003] As a means for inlprovitig energy conversion efficiency of tlie
conlpound semicondnctor solar cell, there are provided a niethod in \vliich a
plurality of sub-cells each configured of a thin-film solar cell that is
configured of a plurality of co~iipo~uisde miconductor layers are laniinated
to form a multi-junction solar cell, a method in which an effective
con~binatioti of cotnpound semico~iductor liiaterials configaring the
conipo~und seniiconductor layers are searched, etc. Each of cotnpound
seniiconductors such as GaAs and InP has a lunique band gap, and a
~vavelengtlio f liglit to be absorbed is different depending 011 this difference
in band gap. Therefore, by laminating a plurality of types of sub-cells,
efficiency of absorption of solar light that has a \vide \~v~velengtrhan ge is
improved. In laniination, a combination of lattice constants and physical
property values (such as band gaps) of crystal structures of the cotnpound
semiconductors configuring the respective sub-cells is important.
[0004] By tlie way, most of the multi-junction solar cells under current
consideration are classified into a lattice-matched type and a
lattice-mismatched type. 111 the lattice-matched type, conipound
semiconductor layers are laminated that are made of compound
semiconductors having lattice constants that are alniost the same with one
another. In the lattice-mismatclied type, compound semico~iductor layers
are laniinated that are made of compound seniiconductors having lattice
constants that are different from one another with the use of metaniorpl~ic
growth accompanied by dislocation. However, in the tiietatnorpliic growtl~
method, undesirable lattice mismatch inevitably occurs, and tl~erefore,t here
is an issue that quality of the conipound semiconductors is significantly
2
lowered.
[0005] 011 the other liand, in recent years, there has been proposed a
method of nianufacturing a multi-junction solar cell that utilizes a substrate
bonding teclinique in junction of compound sen~iconductor layers, and a
four-junction solar cell that has a strc~ctore of
Ino 4aGao5 ~P/GaAs/InGaAsP/In5o3 Ga0.47Ah~a s been reported.
[0006] This substrate bonding technique is a technique to form
hon~ojunction or lieterojonctio~~be tween the conlpound semiconductor
layers to be joined, and niay be classified, for example, into a direct
bonding scheme in \\.hich different compo~und semiconductor layers are
bonded directly to one another (for example, see Non-patent Literature 1:
"Wafer Bonding and Layer Transfer Processes for High Efficiency Solar
Cells", NCPV and Solar Progl.am Review Meeting 2003), and a sclieme in
\\~hiclic on~pounds e~niconductorla yers are joined with a connection layer in
bet\veen. The substrate bonding technique lias an advantage tliat it is not
acconlpanied by an increase in threading dislocation. Existence of the
threading dislocation leads to a not-preferable effect on electron
perfor~nance of the compound se~niconductor layers. In particular, tlie
existence of the threading dislocation provides an easy diffusion path in the
compound semiconductor layers as with a dopant and a recombination
center, and causes a decrease in carrier demsity of tlie conipol~nd
se~nicotiductorl ayers. Also, the substrate bonding technique resolves the
issue of lattice mismatch, and further avoids epitaxial growth caused by tlie
lattice mismatch. Therefore, threading dislocation density tliat degrades
the performance of the solar cell is largely reduced. In this substrate
3
boridiiig technique, a covalent bonding is formed in an interface between
different substances, in particular, in a hetero interface. At this time, it is
important to perfort11 a substrate botidiiig process at a temperatnre by which
thermal variation does not exceed a dynamic barrier necessary for
progression in threading dislocation.
[0007] In junction by the direct bonding scheme,
se~iiicotiductor-sel~iiconductobr onding is perfor~iied ia a anclear scale.
Therefore, transparency, heat conductivity, heat resistance, and reliability
of the jutiction portion are superior than those in a case where junction is
for~iiedw ith the use of nietal paste, a glass raw illaterial (frit), etc. In this
direct bonding sche~iie, at1 integrated-type or two-terminal compound
semiconductor device is allowed to be integrated to a {nodule with
simplicity equivalent to that in a solar cell coilfigured of a single-junction
device, specifically, only by alloyiiig the respective coiiipouiid
semiconductor layers to be lamitlated.
CITATION LIST
NON-PATENT LITERATURE
[OOOS] Non-patent Literature 1: Wafer Bonding atid Layer Transfer
Processes for High Efficieiicy Solar Cells, NCPV and Solar Program Review
Meeting 2003
SUMMARY OF THE INVENTION
[0009] However, in any of the above-described inulti-junction solar
cells, contact resistatice of the jutiction portion is relatively high, and large
improvement in energy coiiversioii efficiency has not been obtained at
present.
4
[OOIO] Therefore, it is desirable to provide a ~iiulti-j~~rictsiolna r cell, a
compound se~lliconductord evice, a photoelectric conversion device, and a
compound-se~iiicoctductor-layerl aminati011 structure that reduce tlie contact
resistance of tlie junction portion and are capable of performing energy
collversioli with high efficiency.
[0011] A innlti-junction solar cell of an embodiment of the present
disclosure includes a plurality of sub-cells that are laminated, the plurality
of sub-cells each being configured of a plurality of compound
setniconductor layers that are laminated. An amorplions co~inection layer
made of an electrically-conductive niaterial is provided in at least one place
between tlie sub-cells adjacent to each other.
[0012] A compo~uid seiiiiconductor device of an embodinlent of the
present disclosure includes a plurality of a plurality of colnpoulid
se~nicoliductorl ayers that are laminated. An amorphous collliectio~il ayer
~iiadeo f an electrically-conductive lnaterial is provided in at least one place
between tlie compound semiconductor layers adjacent to each other.
[00 131 A photoelectric conversioli device of at1 elnbodi~ne~lotf the
present disclosure includes a plurality of a plurality of coml~ound
semiconductor layers that are laminated. An alnorphous connection layer
made of an electrically-cond~~ctivmea terial is provided in at least one place
between the compoutld semicot~ductorl ayers adjacent to each other.
[00 1 41 A compound-semiconductor-layer lamination structure of an
elnboditnent of tlie present disclosure includes a plurality of a pluraIity of
co~npound semiconductor layers that are laminated. An amorphous
connection layer made of an electrically-co~iductivem aterial is provided in
5
at least one place bet\veen the compound se~niconductor layers adjacent to
each other.
[0015] In the multi-junction solar cell, the compound semiconductor
device, the photoelectric conversion device, and the
cotnpound-senliconductor-law la~nillation structure of an e~nbodiment of
the present disclosure, the amorphous connection layer made of the
electrically-conductive material is provided. Therefore, contact resistance
of a junction interface of the sub-cells or the compound semiconductor
layers is reduced, and energy conversion efficiency is improved.
BRIEF DESCRIPTION OF THE DRAWINGS
[0016] [FIG. I ] (A) ant1 (B) of FIG. 1 are conceptual diagrams of
compound semiconductor layers atid the like for explaining a method of
manufacturing a multi-junction solar cell, a co~npo~uidse miconductor
device, a photoelectric conversion device, or a
compound-semicol~d~ictor-layelra mination structure in Example 1.
[FIG. 21 (A) and (B) of FIG. 2 are conceptl~al diagrams of the compound
semiconductor layers and the like for explaining the ~nethod of
~nannfacturing the multi-junction solar cell, the compound semiconductor
device, the photoelectric conversion device, or the
compound-semicondtictor-layer lalnination structare in Example 1,
followii~g( B) of FIG. 1.
[FIG. 31 FIG. 3 is a conceptual diagram of compo~untls e~nicondc~ctolary ers
and the like for explaining the method of i~lanufacturingt he mnlti-junction
solar cell, the compound se~niconductor device, the photoelectric
conversion device, or the colnpoluld-semiconductor-layer lamination
6
structure in Example 1, following (B) of FIG. 2.
[FIG. 41 (A) and (B) of FIG. 4 are conceptual diagrams of multi-junction
solar cells, compound semiconductor devices, photoelectric conversioa
devices, or co~npound-semiconductor-law lamination structures in
Example 2 and Example 3, respectively.
[FIG. 51 (A) and (B) of FIG. 5 are conceptual diagra~us of co~npou~ld
semiconductor layers and the like for explaining a method of ~ n a ~ ~ u f a c t ~ ~ r i n g
a multi-j1111ction solar cell, a co~npound semiconductor device, a
photoelectric conversion device, or a compound-semicotlductor-layer
La~~linatiosntr ucture in Example 4.
[FIG. 61 (A) and (B) of FIG. 6 are conceptual diagran~s of the compountl
seniiconductor layers and the like for explaining the tilethod of
inanufacturing the multi-junction solar cell, the compound semiconductor
device, the photoelectric collversion device, or the
compound-semiconductor-layer lamination slructure in Example 4,
followillg (B) of FIG. 5.
[FIG. 71 FIG. 7 is a conceptual diagranl of the compound se~llico~~ductor
layers and the like for explaining the neth hod of ~iianufacturing the
molti-junction solar cell, the compound semiconductor device, the
photoelectric conversion device, or the compound-semiconductor-lam
l a ~ n i ~ l a tsitoru~c~tu re in Exalllple 4, following (B) of FIG. 6.
[FIG. 81 (A) and (B) of FIG. 8 are conceptoal diagrams of compound
setnicondoctor layers and the like for explaining a ~lletllodo f manufacturing
a multi-junction solar cell, a conlpound semiconductor device, a
photoelectric collversio~l device, or a compo~ul~d-semicot~ductor-la~.er
7
lamination structure in Example 5 .
[FIG. 91 (A) and (B) of FIG. 9 are conceptual diagrams of the compound
se~niconductor layers and the like for explaining the method of
~nanufacturing the multi-junction solar cell, the compound semiconductor
device, the photoelectric conversion device, or the
compound-se~uiconductor-layer lamination structure in Exanlple 5,
follo\\~ing( B) of FIG. 8.
[FIG. 101 (A) and (B) of FIG. 10 are conceptual diagratiis of the cotnpound
seniicondnctor layers and the like for explaining tlie method of
manufacturing the multi-junction solar cell, tlie compound semiconductor
device, the photoelectric conversion device, or the
compoutld-semiconductor-layer lalnination structure in Example 5,
following (B) of FIG. 9.
[FIG. 111 FIG. 11 is a schelnatic cross-sectional view of a compound
semiconductor device, a photoelectric conversion device, and a
compound-sei~iicoaductor-layer lamination structure in Example 6.
[FIG. 121 FIG. 12 is a schenlatic cross-sectional view of a conlpound
semicondactor device, a photoelectric conversion device, and a
componnd-seilliconductor-layer lamination structure in Example 7.
[FIG. 131 (A) and (B) of FIG. 13 are conceptual diagranls of a cotnpound
semiconductor device, a photoelectric conversion device, or a
compound-semiconductor-layer lamination stracture in Esatiiple 8.
[FIG. 141 FIG. 14 is a concepti~al diagram of a modification of the
multi-junction solar cell, the compound se~niconductor device, the
photoelectric conversion device, or tlie colnpound-semico~Iductor-layer
8
laniination structure in Esaniple 1.
[FIG. 151 FIG. 15 is a characteristic diagrarii illustrating film-forming
characteristics of metal atoms.
[FIG. 161 FIG. 16 is a characteristic diagram illustrating a relationship
between a thickness of a Ti layer and light tra~~s~nittance.
[FIG. 171 (A) and (13) of FIG. 17 are photographs showing a result of an
infrared niicroscopic transmission experiment.
[FIG. 181 FIG. 18 is a graph showing a relationship bet\veen pl~otone nergy
and an absorption coefficient in each concentration of a p-type dopant in a
p-type GaAs layer.
[FIG. 191 FIG. 19 is a grapli showing a relationship between a thickness of
the p-type GaAs layer at p-type dopant concentration of 3 x 1 0 ' ~ and
transmittance of solar light at niasimum wavelength of 2.5 ptn.
[FIG. 201 FIG. 20 is a photograph of a bright-field image, of an interface
of a junction of an TnP substrate and a GaAs substrate, obtained by a
scanning transniission electron microscope.
[FIG. 211 FIG. 21 is a grapli showing variation in tlie thickness of the Ti
layer and the light trans~iiittance over titiie.
[FIG. 221 FIG. 22 is a graph showing variation in the tliickncss of tlie Ti
layer and the light transmittance over time.
[FIG. 231 FIG. 23 is a grapli slio\ving a result of quantitative analysis of
concentration of each atoni in each distance in a lamination direction of tlie
niulti-junction solar cell in Esaniple 1 based on energy dispersive X-ray
spectrometry.
[FIG. 241 FIG. 24 is a photograph of a cross-section of a bonding junction
9
interface obtained by a trans~nissiorie lectron microscope.
MODES FOR CARRYING OUT THE INVENTION
[0017] The present disclosure will be described below based on
Exaliiples referring to the drawings. I-lowever, the present disclosure is not
liniited to the ~xamples,a nd various numerical values, materials, etc. in the
Exa~nplesa re examples. It is to be noted that the description will be given
in the following order.
I . Description related to general nlatters of a molti-junction solar cell, a
compound semicondactor device, a photoelectric conversioli device, and a
colnpound-se~iiico~idtictor-1a)rer laniination structure of the present
disclosure
2. Example 1 (the multi-junction solar cell, the conlpo~ind seniiconductor
device, the photoelectric conversion device, and the
colnpound-semiconductor-layer lamination structure of the present
disclosure)
3. Exalnple 2 (a lliodification of Esaniple 1)
4. Example 3 (another ~liodificatio~ofi Exaniple 1)
5. Example 4 (another niodificatio~l of Example 1)
6. Exatiiple 5 (a modification of Example 4)
7. Exa~liple 6 (still another inodification of Exa~nple 1)
8. Example 7 (a modification of Example 6)
9. Exatilple 8 (another modification of Example 6) atid others
[0018] [Description related to general matters of a multi-junction solar
cell, a compound se~niconductor device, a photoelectric conversion device,
and a co~npound-semiconductor-layer lanlinatio~i structure of the present
10
disclosure]
In a multi-junction solar cell, a compound semiconductor device, a
photoelectric conversion device, or a compound-seniiconductor-layer
lainination structure of the present disclosure (hereinafter, inay be
collectively and simply referred to as "multi-junction solar cell and the like
of tlie present disclos~~rein" some cases), depending on lattice constants of
co~npou~tsde miconductors that configure adjacent sub-cells or adjacent
colllpoulld semiconductor layers (hereinafter, the sub-cells or the co~npound
se~nico~lductolary ers may be collectively referred to as "sub-cells and the
like" in some cases), the adjacent sub-cells and the like inay be of a
lattice-matched type or a lattice-~~iis~iiatclt~ypced. IIo\\~evcr,a s a wholc,
these lattice-matched type/ lattice-~i~isliiatclietdy pe exist in a inixed manner.
Mere, in the multi-junction solar cell and the like of tlie present disclosure,
a con~iectio~lla yer may be preferably provided between these adjacent
sub-cells and the like wIie11 the adjacent sub-cells and the like are of the
lattice-mismatched type. In the multi-junction solar cell and the like of
the present disclosure, the lattice-~iiismatclied type refers to a type in \vhich
Illisfit dislocation occurs wlie~i a compound semiconductor layer is
epitaxially grown on a certain compound semiconductor, and when the
epitasially-gro\\.l1-rot compound senliconductor layer has a thickness over a
critical film thickness. It is to be ~lotetl that, in the multi-junction solar
cell and the like of tlie present disclosure, \vhere a lattice constant of a
compound semiconductor that configures one sub-cell and the like that arc
adjacent to the connection layer is LC,, and a lattice constant of a cotnpound
se~iliconductor that configures tlie other sub-cell and the like that are
11
adjacent to the connection layer is Lc2, being the lattice-mismatcl~ed type
means, for example, being a type that satisfies:
( L C ~ - L C ~ ) Ix L1o C-~~~ ~ (A)
or
( L C ~ - L C ~ ) I L C1 0~-3~ - ~ (B)
It is to be noted that, when a value of (Lcl-Lc2)ILcl is out of the
above-described range, that is, when the value satisfies:
- ~ x l o - ~ ~ ( ~ c l - ~ c ~ ) / ~ c l < l x(Cl)o, - ~
it is tlic lattice-matched type. However, Expressioti (A), Expression (B),
and Expression (C) are only exainples. Further, in the tuulti-junction solar
cell aiid the like of the present disclosure including such a preferable mode,
it may be preferable to acllieve a for111 in \vhicli a tuntiel junction layer is
provided in a place between the adjacent sub-cells and the like in whic11 the
connection layer is not provided.
[0019] Here, as described above, the connection layer is a laycr having
a~norphous characteristics, and is configured of nletal or alloy.
Specifically, as a illaterial configuring the connection layer, it may be
preferable to use a material having oh~nicc haracteristics with respect to the
coinpoulld seti~iconductorla yer to be connected, more specifically, ~iletalo r
alloy having a work function that is smaller than a Fermi level of an 11-type
semiconductor or is larger than a Fermi lcvcl of a p-type semiconductor.
Accordingly, contact resistance is sigiiificatitly reduced, and favorable
ohmic connectio~i is achievable. It is to be noted that "amorphous
connection laper" or "connection layer having a~i~orphoucsl~ aracteristics"
lllealis a state that does not have long-tern1 orderly characteristics as in
12
crystal and that does not allow a lattice image to be observed in an image
taken by a transmission electron tnicroscope as shown in FIG. 24.
[0020] A tnetal thin fill11 (having a thickness of several nanometers or
less, for example) is typically formed based on a PVD method such as a
vacuum evaporation method and a sputtering method. IIomever, at that
time, the tlletal thin film is often formed in an island-like shape and is rarely
formed in a layer-like shape. Further, when the metal thitl film is formed
in an island-like shape, it is difficult to control the fill11 thickness wit11 high
accuracy. In forination of a nletal thin fill11 based on the vacuunl
evaporation method, often, an island is fornled after atotns and molecules
absorbed on a base have uttdergone processes sucl~ as surface diffusion,
collision arid aggregation, and desorption, and the island grows to be
combined with an adjacent island, thereby forming a continuous thin film.
At that time, formation of an island, transitioii from being amorphous to
being a crystal layer, variation in crystal aligntnent, etc. occur.
[0021] Moreover, when evaporation is performed in a case \\lhere the
thickness of the metal thin film is set to about that of a monoatomic layer, it
is considered that whether metal atoius have a two-diinensional Iaper
structure or a three-dimensional island structure depends on interaction of
binding energy between inetal atolns in an uppermost face and tnetal atotns
existing therebelow, and binding energy between the tnetal atoins and the
base. When the tnetal atolns are more stable to be combined to the nietal
atoms, the tnetal atoms have the three-ditnensiot~al island structure. 011
the other hand, when the tnetal atonls are more stable to be con~bincd\ vitl~
the base, the tnetal atoms have the two-dimensional layer structure. FIG.
13
15 illustrates analogized characteristics of binding energy between metal
atoms and metal atoms for the respective nletal atorus [binding energy
between adato~ns]a nd analogized characteristics of binding energy between
nletal atotns and the base (here, GaAs or TnP) [binding energy between
adatoni and substrate]. Metal atotns in Group (A) and Group (B) located in
an upper region of a dashed line in FIG. 15 have high binding energy with
respect to the base, and therefore, it is considered that the metal atoms are
allo~ved to have the two-diniensional layer structure. Accordingly, as the
inaterial of the connection laper, it may be preferable to use tlie nletal atoms
belonging to Group (A) or Group (B).
[0022] Therefore, it may be preferable to achieve a Corm in \vhich the
connection layer made of an electrically-conductive tnaterial, more
specifically, the connection layer configured of metal or alloy includes at
least one type of atom (nietal atom) selected from a group consisting of
titaniun? (Ti), aluniin~t~(nA l), zirconium (Zr), hafnium (Hf), tungsten (W),
tantalun~ (Ta), tnolybdetlu~ii (Mo), tiiobiu~n (Nb), and vanadium (V). It is
to be noted that, also when at0111 such as iron (Fe), chromium (Cr), nickel
(Ni), and aluminum (Al) is fnrther included in the cotitiectioll layer, the
characteristics thereof is riot influenced at all. Further, in this case, a
thickness of the amorphous connection layer map be desirably 5 nni or less:
and niay be preferably 2 nln or less. FIG. 16 shows a result of measuring a
relationship betmeen the thickness of the Ti layer and transniission
characteristics of light having wa\~elengtlis within a range fro111 450 nni to
800 nm botli inclusi\~e,f or example, and it can be seen therefrom that light
transmittance of about 80% is secured \\.hen tlie thickness is 5 nm or less.
Further, by allo~\.i~igth e tl~icknesst o be preferably 2 nln or less, light
trans~nittance of 95% or higher is secured. Alternatively, it may bc
preferable to achieve a for111 in which the connection layer is configured of
a nlaterial selected from a group co~isistingo f aluminutn-oxide-doped zinc
oxide [AZO], indio~n-zincc otnposite oxide [IZO], galliu~n-dopedz inc oxide
[GZO], indium-gallium coniposite oxide [IGO], In-GaZn04 [IGZO], and
i
india~n-tinc omposite oxide [lTO], that is, a nlaterial that is transparent and
has electric conductivity. Alternatively, it is possible to achieve a form in
which the connection laper is made of an amorplious con~pound
semiconductor, specifically, portion (to be noted, this is amorphous) of a
conlpound semiconductor layer in an interface of a co~npound
semiconductor layer and a compound setniconductor layer. In such a for~n,
the issue of lattice mismatch is avoidable by providing the portion of the
aniorphous compoand se~niconductor layer in between, and occurrence of
faults such as dislocation is avoidable. liere, the thickness of the
a~norphous connection layer configured of the above-described materials
that is transparent and has electric conductivity, or the thickness of the
amorphous connectio~l layer configured of an amorphous compound
setniconductor may be desirably 1x10.~o r less. It is to be noted that the
connection layer may be configured, for exarnple, of the above-described
lnetal atoms, and thereby, contact resistance is sufficiently reduced,
specifically, the contact resistance is allowed to satisfy p,
Documents
Application Documents
| # |
Name |
Date |
| 1 |
GPA.pdf |
2014-03-18 |
| 2 |
FORM 5.pdf |
2014-03-18 |
| 3 |
FORM 3.pdf |
2014-03-18 |
| 4 |
fORM 2.pdf |
2014-03-18 |
| 5 |
drawings.pdf |
2014-03-18 |
| 6 |
COVER PAGE.pdf |
2014-03-18 |
| 7 |
304.pdf |
2014-03-18 |
| 8 |
1984-DELNP-2014.pdf |
2014-03-21 |
| 9 |
1984-DELNP-2014-Correspondence-Others-(13-05-2014).pdf |
2014-05-13 |
| 10 |
1984-DELNP-2014-Correspondence-Others-(01-07-2014).pdf |
2014-07-01 |
| 11 |
1984-delnp-2014-Form-3-(10-07-2014).pdf |
2014-07-10 |
| 12 |
1984-delnp-2014-Correspondence-Others-(10-07-2014).pdf |
2014-07-10 |
| 13 |
1984-denp-2014-GPA-(22-08-2014).pdf |
2014-08-22 |
| 14 |
1984-denp-2014-Correspondence-Others(22-08-2014).pdf |
2014-08-22 |