OPTICAL FIBER PREFORM MANUFACTURING APPARATUS AND OPTICAL FIBER PREFORM MANUFACTURING METHOD

BACKGROUND OF THE INVENTION

Priority is claimed on Japanese Patent Application No. 2010-173902, filed August 2, 2010, the contents of which are incorporated herein by reference.

Field of the Invention

The present invention relates to an optical fiber preform manufacturing apparatus and an optical fiber preform manufacturing method.

Description of the Related Art

As methods of manufacturing an optical fiber preform, the VAD method or the outside vapor phase deposition method is known.

FIG 7 is a vertical cross-sectional view showing the schematic configuration of a conventional optical fiber preform manufacturing apparatus using the VAD method.

As shown in FIG 7, an optical fiber preform manufacturing apparatus 101 includes a reaction chamber 110, a target member 120, a core burner 130, and a cladding burner 140.

The target member 120 is provided within the reaction chamber 110.

The core burner 130 and the cladding burner 140 deposit glass particles at the tip (lower part) of the target member 120 in the axial direction.

In addition, the related-art optical fiber preform manufacturing apparatus using the outside vapor phase deposition method is not provided with the core burner 130, and includes only the cladding burner 140.

The target member 120 is a rod-shaped member formed from, for example, quartz, extends in the vertical direction, and is provided within the reaction chamber 110.

The target member 120 is supported by a column 122 via a holding portion 121.

The column 122 is provided with a drive device (not shown in the drawings) that rotates the target member 120 around the central axis thereof and moves the target member in the direction of the central axis.

The core burner 130 is a burner that deposits glass particles used in order to form a core at the tip (lower part) of the target member 120 in the axial direction, and produces core soot S1.

The cladding burner 140 is a burner that deposits glass particles used in order to form cladding at an outer periphery of the core soot SI, and produces cladding soot S2.

By producing the core soot SI and the cladding soot S2 in the axial direction at the tip (lower part) of the target member 120, an optical fiber porous preform S (hereinafter simply referred to as a porous preform S) is manufactured.

An optical fiber preform is fabricated by subjecting the manufactured porous preform S to dehydration processing and transparent vitrification by heating.

Moreover, after deficient cladding is adjusted if needed, an optical fiber is manufactured by drawing an optical fiber preform.

It is required that as few air bubbles as possible are present inside an optical fiber preform to be manufactured.

This is required in order to prevent a situation in which air bubbles reduce the strength of the optical fiber after drawing and increases the transmission loss of light.

As a cause of the generation of air bubbles within the optical fiber preform, for example, the mixing of dust into the porous preform S during manufacture is an exemplary example.

In order to suppress generation of air bubbles, a reaction chamber is disposed inside a booth, and clean air is introduced into the booth, thereby reducing dust within the reaction chamber (for example, refer to Japanese Unexamined Patent Application, First Publication No. H7-300332).

That is, as shown in FIG 7, the optical fiber preform manufacturing apparatus 101 is provided with a booth 150 in which a reaction chamber 110 is disposed, an air supply device 160 for supplying clean air into the booth 150, and an exhaust device 180 that discharges air in the reaction chamber 110 to the outside.

In addition, the exhaust device 180 is coupled to a reaction chamber exhaust port 111 formed in the reaction chamber 110.

By operating the air supply device 160, clean air is supplied into the booth 150.

A side wall of the reaction chamber 110 is provided with an opening having a greater diameter than the diameter of the cladding burner 140, and the cladding burner 140 is fitted into the opening.

The clean air supplied into the booth 150 from a gap between the opening and the cladding burner 140 flows into the reaction chamber 110.

Since air within the reaction chamber 110 is discharged to the outside by the operation of the exhaust device 180, the clean air supplied into the booth 150 is discharged to the outside through the inside of the reaction chamber 110.

Accordingly, the optical fiber preform manufacturing apparatus 101 including the booth 150, the air supply device 160, and the exhaust device 180 can reduce the amount of dust in the reaction chamber 110.

Hence, a certain advantage that the amount of dust mixed into the porous preform S can be reduced, and air bubbles in an optical fiber preform can be suppressed is obtained.

However, since a worker enters the booth 150 and works during the maintenance of the optical fiber preform manufacturing apparatus 10, dust is generated within the booth 150.

Additionally, the glass particles that have not been deposited on the target member 120 adhere to the inside of the reaction chamber 110, or soot cracking of the porous preform S during manufacture occurs, whereby soot powder is generated.

For this reason, it is necessary to clean the reaction chamber 110 or the booth 150.

The cleaning work is also performed within the booth 150 by a worker.

Dust, such as soot powder generated during maintenance or cleaning, adheres to the inside (particularly, a floor surface 151) of the booth 150.

When manufacture of the porous preform S is again started after maintenance or cleaning, there is a possibility that the flow of air will be generated within the booth 150 by the operation of the air supply device 160, and the dust adhering to the inside of the booth 150 will be lifted.

Additionally, since the exhaust device 180 discharges air within the reaction chamber 110 via the reaction chamber exhaust port 111, the flow of air that goes into the reaction chamber 110 is generated from the inside of the booth 150.

As the lifted dust flows along such air flow, this dust enters the reaction chamber 110, and is mixed into the porous preform S during manufacture.

That is, there is a problem in that the number of air bubbles within a manufactured optical fiber preform increases after maintenance or cleaning.

Additionally, since an increase in air bubbles within the optical fiber preform is seen, manufacture cannot be resumed during a certain period of time after maintenance or cleaning is performed.

Therefore, there is a problem in that the processing capacity of the optical fiber preform manufacturing apparatus 101 declines.

SUMMARY OF THE INVENTION

The invention has been made in view of these actual circumstances of the related-art, and the object thereof is to provide an optical fiber preform manufacturing apparatus and an optical fiber manufacturing method that can discharge dust within a booth without being passed to the inside of a reaction chamber, and can suppress dust from entering into the reaction chamber, thereby suppressing the generation of air bubbles in an optical fiber preform.

An optical fiber preform manufacturing apparatus of a first aspect of the invention includes a booth, a reaction chamber disposed inside the booth, a target member disposed within the reaction chamber, a burner that deposits glass particles on the target member, a partition plate that partitions the internal space of the booth into a first space where the reaction chamber and the burner are disposed and a second space, and that has a plurality of through holes that allows the first space and the second space to communicate with each other, an air supply unit that supplies clean air into the first space, and an exhaust unit that discharges air within the second space.

In the optical fiber preform manufacturing apparatus of the first aspect of the invention, it is preferable that the first space and the second space be arranged in order toward the direction of gravitational force.

In the optical fiber preform manufacturing apparatus of the first aspect of the invention, it is preferable that an air supply port, the burner, and the partition plate be disposed such that the flow of the air be supplied to the first space through the air supply port from the air supply unit, passes through a position where the burner be arranged, passes through the plurality of through holes in the partition plate, and be introduced into the second space.

In the optical fiber preform manufacturing apparatus of the first aspect of the invention, it is preferable that the optical fiber preform manufacturing apparatus further include a plurality of the burners.

Additionally, it is preferable that a part of the burners is disposed at the partition plate via a first supporting member, and the first supporting member includes an elastic member.

In the optical fiber preform manufacturing apparatus of the first aspect of the invention, it is preferable that the optical fiber preform manufacturing apparatus further include a plurality of the burners.

Additionally, it is preferable that a part of the burners be fixed to an inner surface of the booth that form the second space via a second supporting member.

In the optical fiber preform manufacturing apparatus of the first aspect of the invention, it is preferable that the optical fiber preform manufacturing apparatus further include a plurality of the burners.

Additionally, it is preferable that a part of the burners be fixed to a rigid member disposed outside the booth via a third supporting member.

In the optical fiber preform manufacturing apparatus of the first aspect of the invention, it is preferable that the optical fiber preform manufacturing apparatus further include a plurality of the burners.

Additionally, it is preferable that a part of the burners be fixed to an outer surface of the reaction chamber via a fourth supporting member.

In an optical fiber preform manufacturing method of a second aspect of the invention, the above optical fiber preform manufacturing apparatus is used to pass the air through a position where the burner is disposed after being supplied to the first space, pass the air through the plurality of through holes in the partition plate, and manufacture an optical fiber preform while introducing the air into the second space.

When maintenance or cleaning of the optical fiber preform manufacturing apparatus is performed, a worker performs maintenance and cleaning of the reaction chamber within the booth.

Additionally, soot cracking may occur in the porous preform manufactured within the reaction chamber.

In such a case, since soot particulates, i.e., soot powder, are generated, it is necessary to clean the generated soot powder.

By maintenance and cleaning, dust, such as soot powder, is generated within the booth, and the generated dust adheres to the partition plate in the booth.

In this state, when manufacture of the porous preform is started, and clean air is supplied to the first space from the air supply device, there is a possibility that the flow of air is generated within the first space, and the dust adhering to the partition plate is lifted.

However, the partition plate in the invention is formed with the plurality of through holes.

Moreover, since the optical fiber preform manufacturing apparatus is provided with the exhaust unit that discharges air within the second space, the flow of air that goes to the second space from the first space through the plurality of through holes is generated by the operation of this exhaust unit.

That is, most of the air within the first space can be made to flow to the second space without being passed into the reaction chamber.

Even in a case where the dust adhering to the top face of the partition plate is lifted, the dust flows along with the flow of air that goes to the second space from the first space, and the dust moves to the second space through the plurality of through holes.

Accordingly, even in a case where manufacture of the porous preform is started in a state where the dust has adhered to the partition plate, the amount of dust that enters the reaction chamber, and mixing of dust into the porous preform during manufacture can be suppressed.

As described above, in an optical fiber preform obtained as transparent glass by heating the porous preform, there is an advantage in that generation of air bubbles within the optical fiber preform can be suppressed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG 1 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus using a VAD method in a first embodiment of the invention.

FIG 2 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus using an outside vapor phase deposition method in the first embodiment of the invention.

FIG 3 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus using the VAD method in a second embodiment of the invention.

FIG. 4 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus using the VAD method in a third embodiment of the invention.

FIG. 5 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus using the VAD method in a fourth embodiment of the invention.

FIG 6 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus using the VAD method in a fifth embodiment of the invention.

FIG. 7 is a vertical cross-sectional view showing the schematic configuration of a related-art optical fiber preform manufacturing apparatus using the VAD method.

DETAILED DESCRIPTION OF THE INVENTION

An optical fiber preform manufacturing apparatus and an optical fiber manufacturing method related to the invention will be described below in detail, referring to the drawings.

In addition, in the drawings to be used in the following description, chief parts may be shown in an enlarged manner for convenience sake in order to make the features of the invention easily understood.

The dimension ratios of respective constituent elements are not limited to being the same as the actual dimension ratios.

In this state, when manufacture of the porous preform S is started, and clean air is supplied to the first space 50a from the air supply device 60, there is a possibility that the flow of air is generated in the first space 50a, and the dust adhering to the partition plate 51 is lifted.

In contrast, according to the present embodiment, the partition plate 51 is i formed with the plurality of through holes 51 a.

Moreover, since the first exhaust device 70 is connected to the booth exhaust port 52, air within the second space 50b is discharged to the outside through the booth exhaust port 52 by the operation of the first exhaust device 70.

As the air within the second space 50b is discharged from the booth exhaust port 52, the flow of air that goes to the second space 50b from the first space 50a through the plurality of through holes 51a is generated.

That is, the air of the first space 50a can be made to flow to the second space 50b without being passed to the reaction chamber 10.

Even in a case where the dust adhering to the top face of the partition plate 51 is i lifted, the dust flows along the flow of air that goes to the second space 50b from the first space 50a, and the dust moves to the second space 50b through the through holes 51a.

Accordingly, even in a case where manufacture of the porous preform S is started in a state where the dust has adhered to the partition plate 51, the amount of dust that enters the reaction chamber 10, and mixing of dust into the porous preform S during l manufacture can be suppressed.

As described above, generation of air bubbles within an optical fiber preform obtained as transparent glass by heating the porous preform S can be suppressed.

Additionally, the clean air supplied from the air supply port 61 of the air supply device 60 is supplied to the first space 50a, and passes through a position where the core I burner 30 and the cladding burner 40 are disposed.

Moreover, the clean gas passes through the plurality of through holes 51a in the partition plate 51, and is introduced into the second space 50b.

That is, the air supply port 61, the core burner 30, and the cladding burner 40, and the partition plate 51 are disposed in a clean air channel.

Accordingly, the core burner 30 and the cladding burner 40 are disposed in a channel for clean air that goes to the second space 50b from the air supply port 61, and the dust generated around the core burner 30 and the cladding burner 40 can be discharged toward the second space 50b.

In addition, since the plurality of through holes 51 a are formed over the whole surface the partition plate 51, the flow of air that goes to the second space 50b from the first space 50a occurs over the whole surface of the partition plate 51.

Accordingly, the flow of air in the plurality of through holes 51a becomes a flow (laminar flow) that goes to the second space 50b from the first space 50a and is parallel to the vertical direction.

As a result, it is possible to prevent stagnation of air that may occur at a corner between a side wall and the partition plate 51 of the booth 50, around the first supporting member 31 that supports the core burner 30, or the like.

Accordingly, dust can be discharged to the second space 50b over the whole surface of the partition plate 51.

Additionally, since the flow of air that goes to the second space 50b from the first space 50a through a plurality of through holes 51a is generated, it is possible to prevent dust deposited on the bottom face 53 of the booth 50 from being lifted, and entering the first space 50a again.

Moreover, dust can be moved to the second space 50b through the plurality of through holes 51a, using the flow of air that goes to the second space 50b from the first space 50a.

Accordingly, even in a state where a large amount of dust still remains in the first space 50a after maintenance or cleaning, the dust can be quickly discharged to the second space 50b.

Hence, it is possible to shorten or eliminate a certain standby time (time for dropping dust) during which manufacture of the porous preform S cannot be started after maintenance or cleaning.

That is, the processing capacity of the porous preform S using the optical fiber preform manufacturing apparatus 1 can be improved.

By the way, in the manufacture of the porous preform S, combustion gas is produced from the core burner 30 and the cladding burner 40, and glass particles are produced by the heat of this combustion gas.

Since this combustion gas is introduced into the reaction chamber 10, the temperature of the inside of the reaction chamber 10 or the temperature of the first space 50a that communicates with the inside of the reaction chamber 10 rises.

That is, as the reaction chamber 10 and the booth 50 are heated, degradation caused by heat proceeds, there is a possibility that dust may be generated from the reaction chamber 10 or the booth 50 that has deteriorated.

Additionally, deformation or looseness may occur in the booth 50, the core burner 30, and the cladding burner 40 due to heating by the combustion gas.

Due to such deformation or looseness, the direction in which the glass particles in the core burner 30 and the cladding burner 40 are supplied may change, variations in quality and optical property or soot cracking in the porous preform S during manufacture may occur.

However, in the optical fiber preform manufacturing apparatus 1 of the present embodiment, the flow of air that goes to the second space 50b from the first space 50a where the core burner 30 and the cladding burner 40 are disposed through the plurality of through holes 51 a is generated.

Therefore, since the heat of the combustion gas can be efficiently discharged toward the second space 50b, the heat deterioration of the reaction chamber 10 and the booth 50 can be suppressed.

That is, generation of dust that is caused by the heat deterioration can be suppressed.

Additionally, since the heat of the combustion gas can be efficiently discharged toward the second space 50b, heat deformation or looseness of the booth 50, the core burner 30, and the cladding burner 40 can be suppressed.

That is, quality variation, soot cracking, or the like in the porous preform S can be prevented and suppressed.

Moreover, although a transparent member is generally used for the booth 50, a plastic plate (an acrylics plate or a vinyl chloride plate) that has high thermal resistance, but is inexpensive may be used as the material of this member.

In this case, it is possible to reduce the apparatus cost of the optical fiber preform manufacturing apparatus 1.

In addition, although the partition plate 51 in the present embodiment is disposed at the vertical lower part of the reaction chamber 10, the partition plate is not limited to such a configuration.

A configuration in which the partition plate 51 is provided at a position that is not the vertical lower part of the reaction chamber 10 may be adopted.

Even in such a configuration, if the dust adhering to the partition plate 51 can be discharged to the second space 50b from the first space 50a without passing the dust to the reaction chamber 10, the amount of dust that enters the reaction chamber 10 can be reduced, and the generation of air bubbles in a manufactured optical fiber preform can be suppressed.

Additionally, although the optical fiber preform manufacturing apparatus 1 in the present embodiment is a manufacturing apparatus using the VAD method, the invention is not limited to this method, and an optical fiber preform manufacturing apparatus using an outside vapor phase deposition method may be used.

FIG. 2 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus 1A using an outside vapor phase deposition method, in the present embodiment.

In addition, in FIG 2, the same elements as those of the optical fiber preform manufacturing apparatus 1 shown in FIG 1 will be designated by the same reference numerals, and the description thereof will be omitted.

In the optical fiber preform manufacturing apparatus 1A shown in FIG 2, the target member 20 is provided inside the reaction chamber 10.

In the outside vapor phase deposition method, glass particles are deposited around the target member 20.

The target member 20 is rod-shaped glass that is formed from a core or a part of the core and cladding, or is a dummy member that is drawn out afterward.

A plurality of the cladding burners 40 may be provided.

Additionally, a raw material for a dopant, such as germanium tetrachloride (GeC14), may be supplied to the cladding burner 40 if needed.

As described above, according to the present embodiment, there are advantages in that the dust within the booth 50 can be discharged without being passed to the reaction chamber 10, and the dust can be suppressed from entering into the reaction chamber 10, whereby the generation of air bubbles in an optical fiber preform can be suppressed.

FIG 5 is a vertical cross-sectional view showing the schematic configuration of an optical fiber preform manufacturing apparatus 1D using the VAD method, in the present embodiment.

In addition, in FIG. 5, the same elements as those of the first embodiment shown in FIG. 1 will be designated by the same reference numerals, and the description thereof will be omitted.

The core burner 30 in the present embodiment is fixed to the column 22 disposed outside the booth 50 via a third supporting member 34.

Although not shown, the third supporting member 34 is provided so as to pass through a side wall of the booth 50.

Additionally the third supporting member 34 is in non-contact with the partition plate 51.

Additionally, spacing designated by a reference numeral h is formed between the core burner 30 and the partition plate 51.

Since the third supporting member 34 is in non-contact with the partition plate 51, even in a case where the partition plate 51 vibrates, the vibration is not transmitted to the third supporting member 34.

As a result, it is possible to prevent the vibration of the core burner 30.

Hence, according to the present embodiment, there are advantages in that the vibration of the core burner 30 can be prevented, and the quality of the porous preform S is stabilized.

Additionally, since the spacing h is formed between the core burner 30 and the partition plate 51, there is an advantage in that the periphery of the core burner 30 can be easily cleaned.

Moreover, there are advantages in that stagnation in the flow of air that goes to the second space 50b from the first space 50a can be suppressed around the core burner 30, and deposition of dust around the core burner 30 can be prevented and suppressed.

In each of apparatuses shown in Table 1, after a soot preform was manufactured, the soot preform was subjected to dehydration and transparent vitrification, whereby an optical fiber preform with an external diameter of □ 100 mm and an effective length of 1000 mm was obtained.

As for a case where the standby time until manufacture is started after cleaning is set to 2 hours and a case where manufacture is started immediately after the end of cleaning, five preforms were manufactured at a time, respectively, and the average number of bubbles of the five preforms was counted.

Additionally, the number of bubbles of the preforms manufactured immediately after soot cracking occurred was counted.

The highest temperature at a side wall of the booth 50 was also measured.

Additionally, changes in MFD (Mode Field Diameter) expected when optical fibers were fabricated by attaching cladding of a set scale factor to the manufactured preforms were estimated from the test results of refractive index profiles of the preforms. j

This was calculated on the basis of Comparative Example 1.

In addition, as shown in Table 1, the amount of supply of clean air supplied from the air supply device 60 is adjusted.

This was calculated on the basis of Comparative Example 1.

Table 1

The above examples will be discussed.

When Example 1 using the apparatus of the invention is compared with Comparative Example 1 and Comparative Example 2 using the related-art apparatus, in Example 1, MFD changes do not become large even if the amount of supply of clean air is increased, and become smaller than Comparative Example 1.

Thus, the effect of counter-measures against heat is seen.

Additionally, in Example 1, air bubbles in a preform manufactured immediately after cleaning or a preform manufactured immediately after soot cracking decrease.

Thus, the effect of reduction in bubbles is also seen.

Hence, deposition of glass particles was not affected by using the apparatus of the invention, but the effect of reducing air bubbles was obtained.

Additionally, in Comparative Example 1, it was observed that a side wall of the booth 50 was distorted due to heat at the time when approximately 100 preforms were produced, and the number of bubbles of the preform also showed a tendency to increase.

When the cleanness in the booth 50 at that time was measured, the cleanness had fallen to approximately class 3500, whereas normal cleanness is less than class 1000.

On the other hand, in Example 1, even if 100 preforms were produced, the distortion of a side wall of the booth 50 and so on was not seen, and the number of bubbles did not increase.

Subsequently, Example 1, Example 2, and Example 3 will be compared with each other.

In Example 2 and Example 3, the amount of supply of clean air was set to be greater than that of Example 1.

Additionally, in Example 2 and Example 3, the opening area of the through holes 51a was configured to be wider than that of Example 1, and the amount of ventilation of clean air was increased.

Here, the ratio (aperture ratio) of the opening area of the through holes 51a to the area of the partition plate 51 used for Example 1 was 36%, whereas the aperture ratio of Example 2 and Example 3 was 74%.

Although the tendency that MFD changes become slightly large compared to Example 1 was seen in Example 2, the above tendency was not seen in Example 3 in which the elastic member 32 is installed in the first supporting member 31.

Hence, in Example 3, even if the opening area of the partition plate 51 was made large and the ventilation amount of clean air was increased, characteristic changes caused by the vibration of the core burner did not occur.

Subsequently, Example 1, Example 2, and Example 4 will be compared with each other.

In Example 4, the amount of supply of clean air and the aperture ratio were configured to be the same as those of Example 2.

Although the tendency that MFD changes become slightly large compared to Example 1 was seen in Example 2, the above tendency was not seen in Example 4 in which the core burner 30 is fixed to the bottom face 53 of the booth 50 via the second supporting member 33.

Hence, in Example 4, even if the opening area of the partition plate 51 was made large and the ventilation amount of clean air was increased, characteristic changes caused by the vibration of the core burner 30 did not occur.

According to Example 5 in which the core burner 30 is fixed to the column 22 disposed outside the booth 50 via the third supporting member 34, the bubble reducing effect was further increased.

Although the optical fiber preform manufacturing apparatus and the optical fiber preform manufacturing method have been described above, the invention is not limited thereto, and can be appropriately changed without departing from the concept of the invention.

The present invention can be widely applied to an optical fiber preform manufacturing apparatus and an optical fiber preform manufacturing method.

While preferred embodiments of the invention have been described and illustrated above, it should be understood that these are exemplary of the invention and are not to be considered as limiting.

Additions, omissions, substitutions, and other modifications can be made without departing from the scope of the present invention.

Accordingly, the invention is not to be considered as being limited by the foregoing description, and is only limited by the scope of the appended claims.

What is claimed is:

1. An optical fiber preform manufacturing apparatus comprising: a booth;

a reaction chamber disposed inside the booth; a target member disposed within the reaction chamber; a burner that deposits glass particles on the target member; a partition plate that partitions the internal space of the booth into a first space where the reaction chamber and the burner are disposed and a second space, and that has a plurality of through holes that allows the first space and the second space to communicate with each other;

an air supply unit that supplies clean air into the first space; and an exhaust unit that discharges air within the second space.

2. The optical fiber preform manufacturing apparatus according to Claim 1, wherein the first space and the second space are arranged in order toward the direction of gravitational force.

3. The optical fiber preform manufacturing apparatus according to Claim 1, wherein an air supply port, the burner, and the partition plate are disposed such that the flow of the air is supplied to the first space through the air supply port from the air supply unit, passes through a position where the burner is disposed, passes through the plurality of through holes in the partition plate, and is introduced into the second space.

4. The optical fiber preform manufacturing apparatus according to Claim 1, further comprising a plurality of the burners,

wherein a part of the burners is disposed at the partition plate via a first supporting member, and

wherein the first supporting member includes an elastic member.

5. The optical fiber preform manufacturing apparatus according to Claim 1, further comprising a plurality of the burners,

wherein a part of the burners is fixed to an inner surface of the booth that forms the second space via a second supporting member.

6. The optical fiber preform manufacturing apparatus according to Claim 1, further comprising a plurality of the burners,

wherein a part of the burners is fixed to a rigid member disposed outside the booth via a third supporting member.

7. The optical fiber preform manufacturing apparatus according to Claim 1, further comprising a plurality of the burners,

wherein a part of the burners is fixed to an outer surface of the reaction chamber via a fourth supporting member.

8. An optical fiber preform manufacturing method using the optical fiber preform manufacturing apparatus according to Claim 1, the method comprising:

passing the air through a position where the burner is disposed after being supplied to the first space; passing the air through the plurality of through holes in the partition plate; and

manufacturing an optical fiber preform while introducing the air into the second space.