description

The present invention relates to a device having an optical structure, and webs which connect the optical structure with a supporting structure in which the optical structure is capable of a movement with respect to a reference plane auszufüh-reindeer, and also describes possible adjustments for the device.

Optical structures of curable material, such as those 102009055080 AI known for example from DE, their properties change with changing ambient temperature. Thus, a polymeric lens changes with changing temperature its extent, so that the refractive index and the curvature of the optical lens can be also changed. This can cause an optical equipment such as a camera or a projector a changing image recording and / or reproduction quality provides.

To compensate for a changing image display and / or image-recording quality, are lenses and / or lens groups, which are used in optical equipment, adjusted to compensate for thermally induced change of a focal length of the optical equipment. For this purpose, actuators such as voice coil actuators, piezo motor drives or other motor drives are ver-turns. Also find liquid lens applications that enable a change in the lens curvature. This method, however, always need an active adjustment of the focal length of the optical system.

in consequence of fluctuations in H first! 1 ungsprozess optical components vary the parameters of the components, in particular the focal length of lenses. If the components are assembled with other components to form more complex structures, can the target parameters of the assembly, such as a lens, may not be achieved. To ensure optimal function, the components have to be adjusted again after a successful assembly to ensure optimum alignment of the individual components Kom-and therefore a compensation of occurring as a result of production and joint tolerances existing inaccuracies. The main aim of the adjustment is z. B. in the optimum orientation of the image plane of a lens or a lens stack with regard to a predetermined image plane in which mostly an optoelectronic image converter, a so-called imager is.

Lenses or lens groups, for example, lenses, taken in one or more of Ge-housing parts, which has, among other external thread. In one or more housing parts, a bracket with the corresponding female threads are used, whereby a certain distance, in most cases an optimal focal position is adjusted. After the adjustment, where appropriate, a fixing of the position, for example by an adhesive, which may be designed UV curing, among other things. In this way, the entire optical structure about to be introduced separately and designed exclusively for this step additional devices is adjusted.

For the realization of the auto focus voice coil motors are used, among other things. These consist of many individual parts and can not be produced in wafer-level technology in particular.

According to a first aspect described below embodiments, an optical device is provided which is able to counteract the damage caused by changes in temperature changes optical properties self-regulating and independent of other actuators. Devices can be miniaturized and manufactured in wafer-level technology, so that a smaller size and / or lower manufacturing costs can be achieved. Devices can compensate for example, manufacturing tolerances and / or permit by inducing heat a variable focusing operation in the overall optical system, so that more focusing mechanical components are substituted in accordance with this aspect.

According to the first aspect, a device comprises an optical structure comprising at least two webs, which are formed, a movement of the optical structure with respect to a reference plane to enable. In the first aspect, a method includes the formation of webs such that they allow movement of arranged them optical structure., Which counteracts a thermally indus ed change in the optical characteristics of the optical structure.

According to the first aspect is used, that the thermally induced change can be compensated by, for example, polymeric elements of an optical structure by the simultaneously occurring in the webs of thermally induced mechanical changes are used to counteract the change in the optical characteristic of the optical structure.

According to an exemplary embodiment, the webs are constructed single-ply or. In this case, the webs may be made of the same material as the suspended at the webs optical structure, which allows a simpler manufacture. The material may have a higher temperature coefficient of expansion than the surrounding optical struc ture-bearing structure, which results in a temperature rise to a movement of the optical structure in the direction along the optical axis. The direction of movement of the optical structure is defined by a curvature of the webs, which lies in the plane which is the optical axis of the optical structure.

In an alternative embodiment, the webs are constructed in several layers or in several layers, allowing just ungewölbte execution of the webs and the combination of web materials may be independently formed from the coefficients of thermal expansion of the surrounding supporting structure on which the bars are attached, since the deflection of the webs made by the different Temperaturausdeh-expansion coefficients of the web materials. A decoupling of mechanical and optical properties of the layer materials can be achieved if the layers are arranged discontinuously and in more than two layers.

According to one embodiment intersect the longitudinal center lines of the webs, the optical axis of the optical structure and the webs are connected at the ends with the optical structure. According to an alternative embodiment not intersect the longitudinal center lines of the webs, the optical axis of the structure and the webs are connected laterally with shapings of the optical structure. The latter example allows greater longitudinal extent of the fins and thus the increase in the recoverable adjustment path opti-view structure.

Other embodiments demonstrate the possibility to arrange electric heating elements on the webs. This allows a deflection of the webs, and hence a positioning of the optical structure depending on an induced temperature and independent of the ambient temperature, which can be used, inter alia, for active focusing changing object distances, and an autofocus. By a different displacement from one another of the webs also a tilting of the optical structure or a controlled focusing of the optical structure can be obtained. It may, in particular a controller (not shown) or at least can be connected, either controls the heating elements, in order for example. A known object distance to focus Sieren, or regulates, for example dependent depending on an evaluation of one of the optical property of the optical structure signal, such as the sharpness of obtained image in an image plane, which is at least partially defined by the optical structure, such as a lens system comprising the suspended at the webs lens.

A second aspect described below embodiments refers to a concept that allows an initial position of an optical structure after adjustment easier to maintain such. B. without an array of threads or the introduction Related other mechanical components in the housing structures, so that the completion of the adjustment is facilitated, for example at the production.

According to the second aspect, a device comprises at least two webs, which connect an optical structure comprising a supporting structure and to which a ausheilbarer adhesive is arranged, cause a fixation of a predetermined alignment of the optical structure. According to the second aspect, a method comprises the formation of webs in such a way that they and a movement of a arranged on them optical structure ermögli-chen which counteracts a thermally induced change of the optical characteristic of the optical structure, disposing a ausheilbaren adhesive between the supporting structure the webs and the annealing of the adhesive to effect a predetermined orientation of the optical structure with respect to a reference plane.

According to the second aspect is exploited that the webs retained by an adhesive which is disposed between the webs and the supporting structure, a deflection of the optical structure in an initial adjustment and curing of the adhesive the set initial position after the cure of the adhesive from the optical structure becomes.

According to a third and fourth aspect described below embodiments, an object is released to provide a concept for optical devices, which is able to induce movements in a connected via webs with a frame optical structure regardless of the ambient temperature and with a large momentum can, wherein the actuators used for this purpose miniaturized and can be manufactured in wafer level technology, so that a smaller size and / or lower manufacturing costs are achieved. Devices can compensate for example, manufacturing tolerances and / or allow a variable focusing operation in the overall optical system in accordance with these aspects.

According to the third aspect, a device comprises at least two webs that connect and an electrostatic drive with a first and a second electrode, which are at least partly arranged opposite each other and the first electrode is arranged on one of the webs to an optical structure comprising a supporting structure to cause deformation of the webs in routing a electric field between the first and second electrodes. According to the third aspect, a method comprises the formation of webs in such a way that they permit a movement of a arranged on them optical structure, an arrangement of the first electrode on or in one of the webs and an arrangement of the second electrode such that it the first at least partially opposite, and an electric field between the first and second electrodes causes a deformation of the lands.

According to the third aspect below-described exemplary embodiments will be-utilized that an electrostatic actuator having a first and a second electrode can be disposed on at least one of the webs so that an application of an electric field between the first and the second electrode of the electrostatic drive a causes deformation of the web.

According to one embodiment, a first electrode of an electrostatic drive on the webs, which connect an optical structure comprising a supporting structure, and a second electrode on a molded component which is joined to the supporting structure, respectively.

According to an alternative embodiment, the second electrode of the electrostatic drive is arranged on the supporting structure, so that the arrangement of a mold member can be omitted.

According to an embodiment the first electrode is disposed on a surface of the web and spaced above an insulating layer of the second electrode. According to an alternative embodiment, the first electrode is embedded in the web so that the web material which acts simultaneously covers the first electrode as an insulating layer.

According to the fourth aspect, a device comprises at least two webs, which connect an optical structure comprising a supporting structure and an electrostatic drive with a first and a second electrode, which are at least partly arranged opposite each other and arranged, the first electrode on at least a part of the webs and this part of the web at least partially out of a plane in which the web is arranged, is deflected in the direction of the second electrode in order to cause deformation of the ribs upon application of an electric field between the first and second electrodes. According to the fourth aspect, a method comprises the formation of webs in such a way that they permit a movement of a arranged on them optic structure, the arrangement of the first electrode on or in one of the webs and an arrangement of the second electrode such that it the first at least partially opposite, and so that an electric field between the first and the second electrode causes a deflection of the first electrode toward the second electrode a deformation of the lands.

According to the fourth aspect is utilized that an electrostatic actuator having a first and a second electrode can be disposed on at least one of the webs, a molded as an inner section of the web is deflected from the plane of the rest of the web in the direction of the second electrode and that applying an electrical field between the first view and the second electrode of the electrostatic drive causes a deformation of the web.

Embodiments of the invention will be explained in more detail below. In the figures, identical or functionally identical elements have the same reference numerals.

Preferred embodiments of the present invention will be explained with reference to the accompanying drawings. Show it:

Fig. La is a cross-sectional view of a device with a lens, the two

Webs is fastened to a supporting structure,

Fig. Lb a theoretical condition of the apparatus with a lens whose optical

Characteristics are changed by thermal influences;

c moving FIG. 1 shows a state of the apparatus with an original from the position

Lens whose movement of change in the optical characteristic counteracts;

FIG. 2a-b are schematic cross-sectional views of alternative forms of lens, wherein

. Fig. 2a is a plan convex lens and Figure 2b shows a concave-convex lens;

FIG. 3 is a perspective view of single-webs with a buckle;

Fig. 4 is a schematic cross-sectional view of a device with dreischichti- gene webs;

Fig. 5a-d are schematic side views of different embodiments of two-layer lenses and ridges, where Fig. 5a the discontinuous arrangement

a second material layer on the lens, and the webs to build up a three-layered overall construction, Fig. 5b shows a device similar to FIG. 5a with webs, which comprise a discontinuous course of the thickness, Fig. 5c is a device having a one-piece second material layer that discontinuous changes in the .. comprises layer thickness, and Figure 5d is a device analogous to Fig 5c, in which the layer thicknesses in the region of the webs comprise a continuous change, shows;

Figure 6a is a schematic side view of a two-layer-collecting lens having a constant thickness of the second layer.

Figure 6b is a schematic side view of a two-layer-collecting lens with a symmetrical layer thickness profile of the first and second layers.

6c is a schematic side sectional view of a two-layer-collecting lens having a constant thickness of the first layer.

Figure 6d is a schematic side sectional view of a two-layer scattering lens, wherein the first layer is formed in the form of a positive lens and the second layer is arranged in a variable layer thickness on the first layer.

Fig. 6E is a schematic side sectional view of a two-layer scattering lens analogous to FIG. 6d. wherein the first layer is formed in the form of a plano-convex lens;

Fig 6F is a schematic side sectional view of a two-layer scattering lens, wherein the second layer is formed in the form of a concave-convex lens.

Fig. 7 is a plan view of a device with a lens and four webs, in which the

The longitudinal centerlines of the webs intersect the optical axis of the lens;

Fig. 8 is a plan view of a device with a lens and two webs, wherein the

Längsmittcllinien the webs intersect the optical axis of the lens;

Fig. 9 is arranged a top view of a device with a lens and diagonal

The steps;

a plan view of a device with a lens, and four webs, in which the longitudinal centerlines of the webs run past the optical axis of the lens;

a plan view of a device with a lens and two webs, in which the longitudinal center lines pass on the optical axis of the lens;

a plan view of a device with a lens and three webs, in which the longitudinal centerlines of the webs run past the optical axis of the lens;

a plan view of a device analogous to Fig 7, are arranged in the electrical heating elements at the webs.

a plan view of a device analogous to Figure 8, are disposed in the electrical heating elements at the webs.

a plan view of a device analogous to Figure 9, are disposed in the electrical heating elements at the webs.

a plan view of a device analogous to Fig 10, are disposed in the electrical heating elements at the webs.

. A plan view of a device similar to FIG 1 1 are arranged in the electric heating elements on the webs;

a plan view are arranged on a device similar to FIG 12 in the electrical heating elements at the webs.

a schematic plan view of an apparatus having four lenses, which are connected via four webs to the supporting structure;

a schematic plan view of a device having four lenses, which are connected via four webs to the supporting structure and the supporting structure comprises a peripheral frame from at least one material of the webs;

a plan view of a device having four lenses, which are each about four webs connected to the supporting structure, the supporting structure comprises a peripheral frame from at least one material of the webs and comprising the supporting structure furthermore recesses;

Figure 22 is a plan view of a device having four lenses, which are connected via four webs to the supporting structure and in which the supporting structure is completely formed from a peripheral frame of at least one material of the webs.

Figure 23 is a plan view of a device having four lenses, which are connected via four webs to the supporting structure, wherein the supporting structure is completely formed from a peripheral frame of at least one material of the webs and includes the load-bearing structure recesses.

Fig. 24 is a plan view of a device with a lens array, which is about eight

Webs connected to the supporting structure;

Figure 25 is a cross-sectional view of an apparatus in which a single lens is moved along with the moving lens forms a lens stack.

Figure 26 is a cross-sectional view of a device in which a two-layer co-moved with the lens moving lens forms a lens stack and the mitbe- wegte lens has a greater distance than the moving lens to a reference plane.

Figure 27 is a cross sectional view of a device in which the two-layer co-moving lens of the lens stack a short distance up to a reference plane comprises, as the moving lens.

Fig. 28 is a cross sectional view of a device with a lens stack, wherein the

Lens stack comprises an adhesive layer;

FIG. 29 is a cross-sectional view of a device in which two different .Linsenstapel are connected to the supporting structure;

FIG. 30a-b show two Qu he SCH Ni 11 Si ch t s depending on a device in which a non-moving lens is arranged on the supporting structure, Fig. 30a, the arrangement of the moving lens having a smaller distance, and FIG. 30b a greater distance from the reference plane shows;

Fig. 31 from two cross-sectional views, each with a device with a moving and a stationary lens in which to the supporting structure, a peripheral frame formed of at least one material of the webs, FIG. 31 A, the arrangement of the moving lens having a smaller distance and Fig. 31b shows a greater distance to the reference plane;

FIG. 32a-b show two Querschrtittansichten with one device at which the motionless lens comprises a glass layer and changes the cross-section of the supporting structure over the course of the layer stack, in which Fig. 32a, the arrangement of the moving lens with a smaller spacing, and Fig. 32b shows a greater distance to the reference plane;

Fig. 33 is a cross-sectional view of a device in which the lens is a motionless

Glass layer includes and the moving lens and peripherally arranged spacer structure made of the same material;

Figure 34 is a cross sectional view of a device in which the stationary lens is located on a glass layer, the areas around the optical function surface of the fixed lens around are discontinuously formed and of eventful lens and the peripherally arranged spacer structure consist of the same material.

Fig. 35 is a cross-sectional view of a device with a mobile and two fixed lenses, in which the stationary lenses each have a glass layer comprise continuously salient areas around the optical function surface of the fixed lens around and terstrukturen between the lens layers spacers are formed of materials other than the optical function surfaces ;

Fig. 36 is a Qucrschn it tan t si ch a device having a movable and two stationary lenses, in which each comprise the non-moving lenses, a glass layer and, discontinuously formed areas around the optical function surface of the fixed lens around;

Figure 37 is a cross sectional view of a device in which the movable lens and the webs arranged thereon are integrally formed from a material and in the rest of the device solely other materials are formed.

a cross-sectional view of a device are grooved in which individual parts of the supporting structure with an adhesive layer;

a cross-sectional view of a device with a movable and two, each comprising a glass layer, non-moving lenses in which the supporting structure includes an adhesive layer;

a cross-sectional view of a device similar to FIG 30 having a movable lens, arranged thereon comoved lens and a stationary lens with short webs which is arranged without a glass layer to the supporting structure.

a cross-sectional view of a device analogous to Fig 40, in which the non-moving lens continuously arranged thereon salient regions and the supporting structure laterally of the stationary lens and the continuously distinct areas comprise a glass layer.

. A cross-sectional view of a device analogous to Fig 40 in which the supporting structure in the region between the moving and the still lens comprises an adhesive layer;

a cross-sectional view of a device analogous to Fig 41, in which the supporting structure, similar to FIG 42 comprises an adhesive layer..;

a cross-sectional view of a device analogous to Fig 42, wherein the moving and the lens is moved along connecting structures include an adhesive layer.

a cross-sectional view of a device analogous to Fig 44, in which the non-moving lens comprises a glass layer, similar to FIG 43 and the moving and connecting the co-moving lens structures include an adhesive layer..;

a cross-sectional view of a device analogous to Fig 44, in which an additional, internal frame is similar to FIG 31 are also arranged from at least one material of the webs and joined by an adhesive layer..;

Figure 47a shows a block diagram of the method for fixing an initial position of the lens by adhesive.

Figure 47b is a cross sectional view of a device during the process of fixing a new initial position by a method shown in FIG 47a..;

Figure 47c is a cross-sectional view showing the step of disposing adhesive between the webs and the supporting structure.

Fig. 48 is a plan view of a device with a lens, and four webs, in which arranged on the webs glue;

Figure 49 is a perspective view of a device with a lens and webs, wherein the webs have a concave konve s cross-section.

FIG. 50a-c cross sectional views of a device with a lens and lands as well as a supporting structure which is formed such that adhesive can be disposed on it, in which Fig. 50a is a convex-convex lens, FIG. 50b is a plano-convex lens, and Fig. 50c has a convex-concave lens shows;

Fig. 51 from cross-sectional views of a device with a lens stack and docks as well as a supporting structure which is formed such that adhesive can be disposed on it, in which Fig. 51a, the arrangement of the moving lens of the stack with a smaller spacing, and Fig. 51b a greater distance from the reference plane shows;

FIG. 52a-b show cross-sectional views of a device with a lens stack and docks as well as a supporting structure, which is designed as an alternative that also adhesive can be disposed on it, wherein FIG. 52A, the arrangement of the moving lens of the stack with a smaller spacing, and Fig. 52b shows a greater distance to the reference plane;

53 is a cross-sectional view of a device with two lens stacks and docks as well as a supporting structure which is designed such that with respect to adhesive can be disposed on their both lens stack.

FIG. 54a cross-sectional views of a supporting structure formed with different widths ,, a stationary lens on a glass substrate, wherein the supporting structure consists of the same material as the motionless lens to the glass support and a movable lens arranged on webs;

Fig. 54b is a cross-sectional view of an assembly of two structures analogous to FIG. 54a adjacent to each other, wherein the supporting structure in the regions between the

Superstructures positioned consistently on the glass substrate;

Fig. 54c is a cross sectional view of an assembly of two structures, analogous to FIG 54a adjacent to each other, wherein the supporting structure is interrupted in the areas between the structures and areas on the glass substrate are made, which are not covered by the supporting structure.

FIG. 55a-b show cross-sectional views of a device with a supporting structure which comprises a plurality of latitudes and a glass wafer having two optical structures, the apparatus in Fig. 55a is a single lens, and the moving

. Device in Figure 55b a two-layer moving lens includes;

FIG. 56a-b show cross-sectional views of a device with a supporting structure which comprises two glass wafer and a lens integrally made with webs, wherein a portion of the supporting structure adjacent to the fins in Fig. 56a in two pieces and of a different material than the bridges and in integral and formed from the same material as the webs Figure 56b.

Figure 57a is a cross sectional view of an apparatus with electrostatic actuators, in which an insulation layer on a second electrode is disposed in the joined state.

Fig. 57b is a cross-sectional view of the unjoined portion of devices the device of FIG 57a.

Fig. 57c, the arrangement of a ausheilbaren adhesive between the mold member and the supporting structure

Figure 58 is a cross-sectional view of a device in which the insulating layer is arranged at the first electrode.

Figure 59 is a cross-sectional view of a device in which an electrical voltage is applied to the electrodes of the electrostatic drive.

Figure 60a a plan view of a device with a lens, and four webs, in which are arranged on the lands and the supporting structure electrodes.

Figure 60b is a plan view of a mold member with an insulation layer, are arranged below the electrodes.

Figure 61 a is a cross-sectional view of a device with two webs and an optical array in the form of a plurality of adjacent lenses in diameter.

Fig. 61b is a cross sectional view of a device analogous to FIG. 61 a, in which the optical

Array sections of lenses includes;

Figure 61 c is formed a cross-sectional view of a shaped component whose inner diameter smaller than the diameter of the optical array according to Fig 61a and 61b..;

FIG. 62a is a cross sectional view of a device with two juxtaposed

Cells that each include a movable lens and peripheral structures;

Fig. 62b is a cross-sectional view of a form member which is adapted to the

to be assembled device of Figure 62a.

. Fig. 62c is a sectional view of a device of the device according to FIG 62a and the molded component according to FIG 62b in gefügtem state, with two cells, each with a movable lens and two electrostatic actuators.

Figure 63 a is a cross-sectional view of a curved shape on both sides of the component, are arranged on shaft chem electrodes.

Figure 63b is a cross-sectional view of a device 63a are joined at the two part devices on both sides over the curved shape of the component and Fig are in the joined two sections of a supporting structure on the shaped component..;

Figure 64 is a cross-sectional view of a device in which the shaped component and the supporting structure are integrally formed.

a plan view of a device similar to FIG 7 with rectangular arranged on the webs formed electrodes.

a plan view of a device analogous to Fig 65, with triangular ridges formed on the electrodes.

a plan view of a device similar to FIG 65 with free shape formed on the webs electrodes.

. A plan view of a device analogous to Figure 1 1, whose outer edges are formed with electrodes on the webs parallel to the web edges;

a plan view of a device similar to FIG 8 with triangular ridges formed on the electrodes.

a plan view of a device analogous to Figure 9 with triangular ridges formed on the electrodes.

a plan view of a device similar to FIG 1 1 with free shape formed on the webs electrodes.

a plan view of a device similar to FIG 12 with free shape formed on the webs electrodes.

grouted a cross-sectional view of a device in which a lens stack is moved through an electrostatic drive and of the lens stack over a moving lens and a co-moved

a cross-sectional view of a device in which a movable lens is moved by electrostatic drives against a stationary lens, the stationary lens is formed on a glass plate;

a cross-sectional view of two partial devices, which are joined via an adhesive layer so that the optical axes of all the lenses are substantially coincident;

Figure 76 is a Quers chni ttans i CHT a device in which a lens is moved by an electrostatic drive with respect to a glass wafer, which comprises on a surface a single lens.

FIG. 77 is a cross-sectional view of a device with a plurality of juxtaposed lenses that can be moved separately from one another with respect to a glass wafer;

Figure 78 is a cross-sectional view of a device in which an image sensor is arranged on the supporting structure.

Fig. 79 is a cross-sectional view of a device in which two lenses can be moved against a respective glass wafer and an image converter separated from each other;

Figure 80 is a cross-sectional view of a device in which an electrode is embedded in a web.

Fig. 81 is a plan view of a device with a lens and two webs, wherein

Recesses an inner portion of the ridges forming in the webs;

Figure 82a is a cross sectional view of a device with a lens and in the direction of the static electrode deflected cantilever electrodes, wherein the static electrode are arranged on a transparent molded component.

Fig. 82b is a cross-sectional view analogous to FIG 82a, in which the lens undergoes a deflection.

FIG. 83a is a cross sectional view of a device analogous to FIG 82a, in which the mold member is formed as an opaque body with a material recess.

Fig. 83b is a cross-sectional view of a deflected lens analogous to FIG. 82b with a

Formbauteil analog Fig. 83a;

FIG. 84a-c are plan views of an apparatus having a lens and a bridge and different expressions of the inner portions of the webs, wherein the shaping in Fig 84a rectangular, in Figure 84b is triangular and in Figure 84c a trapezoidal shape...;

85a a plan view of part of a device with a lens and a web, wherein the inner part similar to FIG 84a is formed Fig..;

Fig. 85b is a plan view of a device analogous to FIG 85a, in which the inner part is smaller and spaced formed by the lens.

Fig. 85c is a plan view of a device analogous to FIG 85a, in which the inner part is smaller and formed adjacent to the lens.

Fig. 85d is a plan view of a device, wherein the web has an inner portion analogous

. Fig. 85b and an inner portion analogous to FIG 85c includes;

Fig. 85e a plan view of a device, wherein the web comprises an inner part whose end connected with the webs extending parallel along the direction of the supporting structure towards the lens;

Figure 86a is a cross-sectional view of the unjoined part of devices of an overall apparatus with a lens and two webs to a supporting structure as well as one molded component with NEM stationary electrodes arranged thereon.

Fig. 86b is a cross-sectional view of the sub-assemblies similar to FIG 86b, with disposed on the supporting structural adhesive.

Figure 86c is a cross-sectional view of a part of the devices analog Figs 86a and 86b by means of adhesive joined overall apparatus with electrostatic actuators, each comprising a cantilever electrode..;

FIG. 87a-b show cross-sectional views of a device with a lens similar to FIG. 86c over to the webs arranged cantilever electrodes of an electrostatic

Drive with respect to a glass plate configured as a mold member is moved, said non-moving lenses are arranged on the mold member 87b in Fig.

FIG. 88a-b show cross-sectional views of a device with a lens, see the above electrostatic actuators that have cantilever electrode, opposite an opaque

Mold component with Materi al is moved from savings, said the material - recess in Figure 88b includes an optical effective area.

Figure 89 is a cross-sectional views of a device in which partial devices with moving lenses, non-moving lenses and optical active surfaces are joined together via an adhesive layer and electrostatic actuators are formed with boom electrodes.

FIG. 90a cross-sectional views of a device with two adjacent cells similar to FIG 87, wherein the cells each include grooves.

Fig. 90b is a cross-sectional view of a mold member with two sections, each

Section a mold member having an optical effective area includes;

Figure 90c is a cross sectional view of an apparatus comprising the device of Figure 90a with a thereto joined by an adhesive form component according to Figure 90b...;

FIG. 91a is a cross sectional view of a device analogous to FIG 61a, in which the electrostatic actuators include cantilever electrodes.

Fig. 91b is a cross-sectional view of a device analogous to FIG 61b, in which the electrostatic actuators include cantilever electrodes.

Fig 91 c is a cross-sectional view of a mold member, similar to FIG 61 C, which is planar..;

FIG. 92a is a plan view of a device with a lens and four webs analogous to FIG.

7, are arranged on the webs and parts of the supporting structure of electrodes formed rectangular having an inner portion;

Fig. 92b comprises a plan view of a device analogous to FIG 92a, in which the load-bearing structure of a peripheral frame of at least one material of the webs.

. Fig. 93 is a plan view of a device similar to FIG 7 are formed at their webs electrodes whose inner portion is a trapezoidal shape;

. Fig. 94 is a plan view of a device analogous to FIG 8 at their webs electrodes are formed, of which the inner part is trapezoidal;

. A plan view of a device similar to FIG 10 are formed on the webs electrodes whose inner part is rectangular in shape;

. A plan view of a device similar to FIG 9 are formed at their webs electrodes whose inner portion is a trapezoidal shape;

. A plan view of a device similar to FIG 1 1 are formed at their webs electrodes whose inner portion is a trapezoidal shape;

. A plan view of a device similar to FIG 12 are formed on the webs electrodes whose inner portion is a trapezoidal shape;

Cross-sectional views of a device in which a mold member having an optical effective surface is joined via grooves and springs on the supporting structure and the electrostatic actuators include a boom electrode;

Cross-sectional views of a device in which a lens is with respect to a glass moved by electrostatic drives, comprising a cantilever electrode, wafer, on which a motionless lens is arranged and the joining zone between the bearing structure of the moving lens and the counter electrode comprehensive structure as a groove and spring is pronounced;

Cross-sectional views of a whole apparatus, which consists of two partial devices, the component devices are joined together via an adhesive layer and match the optical axes of motion, co-moving and non-moving lenses and the optical effective surface is substantially and include the electrostatic drives a cantilever electrode, and the joining zones is designed as a tongue and groove where adhesive is arranged to connect the sub-assemblies;

Cross-sectional views of a device in which the supporting structure is formed of a polymeric material and the lens is moved relative to a glass wafer, comprising on one surface a non-moving lens;

FIG. 103 cross-sectional views of a device with two cells which each comprise a means of electrostatic drive against a glass wafer movable lens and the electrostatic actuators include a boom electrode;

FIG. 104 Quersch ittansichten a device in which a lens is moved by means of electrostatic actuators with respect to a glass wafer and an image converter, and include the electrostatic actuators boom electrodes;

FIG. 105 is a cross-sectional view of a device, the two juxtaposed

Comprising cells each move a lens to a glass wafer and a image converter by means of electrostatic actuators and comprise electrostatic actuators boom electrodes.

Fig. 1 a shows a cross-sectional view of a device 10 according to an embodiment of the explanation. The apparatus comprises a lens 12, which is connected via two webs 14a and 14b, secured to a supporting structure 16, for example a frame and is disposed with a spacing 22 to a reference plane 18 which is shown schematically in Fig. 1 is-provided. The lens 12 and the webs 14a and 14b are arranged in a common plane position 26th The reference plane 18 may for example be an image plane in which an image sensor is arranged, which comprises the apparatus 10th The distance 22 is chosen according to the focal length of the lens 12th The webs 14 are constructed in a single layer of a material comprising a larger coefficient of thermal expansion than the carrying structure can 16. In the event of a temperature increase, the webs extend thus in particular along the direction of supporting structure 16 to the lens 12 from more than the supporting structure, and thus cause a deflection of the lens from its original position. The direction of movement is independent of the materials, eg. Via a buckle, as explained in Fig. 3, defined.

Fig. Lb shows the lens shown in Fig. La 12 in the event of a rise in temperature, eg. As the ambient temperature. The increase in temperature causes a deformation of the lens 12, which thus causes a change in lens curvature and in addition a change in the refractive indices of a changed focal length of the lens 12th In Fig. Lb is indicated by the dashed line 24, the original shape of the lens 12. As indicated, the increase in temperature has caused a thickening of the lens, and in addition a reduction in the refractive indices, which on the one hand the distance 22 between the lens 12 and the reference plane 18 is reduced and due to the altered surface curvature and the simultaneous change in the refractive indices to a changed focal length of the lens 12 leads. This causes the resulting focus of the lens, which is indicated by the dashed line 22a, is out of the reference plane 18th

A caused by an increase of the ambient temperature change in the optical characteristic of the lens 12, as described in the introductory part of the present application, is compensated in that the webs are designed such that by the temperature rise, a movement of the webs 14a and 14b and thus the lens 12 is effected, which counteracts the change in the optical characteristic. In the exemplary embodiment from that described in the Fig. L, the webs 14a and 14b cause a movement of the lens 12 away from the reference plane 18, so that the original position of the focus of the lens 12 is maintained regardless of the temperature change. The webs 14a and 14b are configured such that a change in temperature, for example, a temperature rise, 14a and 14b, leads to a deformation of the webs, which in turn leads to a movement or a thermally influenced position of the lens 12th The thermally induced change in length of the webs 14a and 14b, leads to a movement of the lens 12 in the direction away from the original position of plane 26 along the optical axis 28 of the lens 12. A suitable dimensioning of the webs 14a and 14b will cause the lens 12 is moved in such a way that the inappropriate focus-ized focal length of the lens 12 is again focused on the reference plane 18th Thus a Athermisierung the apparatus 10 is achieved.

Exemplary embodiments for the design of the webs 14a and 14b are described in detail, allow the compensation of the optical characteristic of the lens 12th It should be noted that the above and subsequent versions are associated with a rise in temperature, the described approach but applies equally to a drop in temperature.

Fig. 2 shows a first embodiment for the design of the webs 14a and 14b as single-layer or single-layer structure. The lens 12 is attached via the webs 14a and 14b to the supporting structure sixteenth Due to the single layer embodiment of the webs 14a and 14b is a one-piece design of the webs 14a, 14b and the lens 12 is possible. Fig. 2a shows a plan-convex lens 12 and Fig. 2b is a concave-convex lens 12. The lens may have any conceivable configuration, such as concave, convex, biconcave, biconvex, concave-convex, convex-concave or a flat side.

Fig. 3 shows the apparatus of Fig. 1 in a perspective view. The single-layered webs 14a and 14b have a curvature along its geometry in the plane 32 that contains the optical axis 28 of the lens 1 second If the temperature rises, and the lens 1 2 and the webs are heated 14a and 14b, so the curvature of the webs 14a and 14b defined in the present embodiment, a movement of the lens along the optical axis 28 away from the reference plane 1 8, wherein the lens their orientation to the reference plane 18

maintains. Had the webs 14a and 14b being performed, the movement direction of the lens 12 would be undefined in the case of a temperature change. A in the case of a temperature increase to the reference plane 18 pointing towards the direction of movement of the lens can be achieved 14a and 14b 12 by changing the formation of the curvature of the webs. The advantage of this embodiment is the formation of the lens 12 and the webs 14a and 14b of a material in which the training can be carried out in one piece. A one-piece design can result in a significant simplification of the manufacturing process of the lens 12 and the webs 14a and 14b, there is no need for addition of different components. Such an arrangement can be manufactured in a multiple repeat on wafer level and enables significant cost reduction.

Fig. 4 shows an embodiment for the design of the webs 14a and 14b as a three-day or two-layer structure. The ridge 14a is formed of a first layer 34a and a second layer 36a. The ridge 14b is formed of a first layer 34b and a second layer 36b. The second material layers 36a and 36b are formed discontinuously on the first material layers 34a and 34b and both spaced apart from the lens 12 as well as the supporting structure of the sixteenth However, they can also be formed over the whole of the first material layers 34a and 34b and be arranged on the lens 12 or the supporting structure of the sixteenth A discontinuous layer structure ER permits a matching of the mechanical properties of the second material layers 36a and 36b, with respect to the deflection of the webs with a temperature change. Also, the thermal expansion coefficients of the materials from which the webs 14 are formed, may be formed independently of the coefficient of thermal expansion of the supporting structure 16, since the amplitude and direction of movement through the unterschiedli-chen temperature expansion coefficients of the layers of material are defined 34 and 36 and the material layers 34, and 36 expand differently when the temperature rises. On the ridges also more layers of material 37a can; 37b be arranged that extend the functionality of the webs 14th

FIGS. 5a-d show a device 20 in which both the webs 14a and 14b and the lens 12 comprise two layers of material and forming two layers of material, both the webs and the lens. Fig. Figure 5a shows an arrangement of the second material layers 36a and 36b, 34a to the first material layers and 34b in analogy to FIG. 4, wherein the material layers 34a, 34b and 34c, a first position of the assembly and the material layers 36a and 36b, a second layer of form arrangement. The layers of material 34a and 34b are the lens 12 up to the end facing away from the webs 14a and 14b covered with the second layer of material 36a and 36b. The lens 12 is also formed of a first-matc rialschicht 34c and a discontinuously attached second material layer 36c, the material layer 36c extends in a region of the webs 14a and 14b. The layer of material 36c is disposed on one of the layers 36a and 36b side facing away from the layers of material 34a, 34b and 34c, thereby providing a third layer of the overall structure. By the discontinuous arrangement of the additional web layers 36a, 36b and the additional lens material 36c as well as the three-layered structure, optical properties of the lens 12 is decoupled from the mechanical properties of the webs are defined 14a and 14b.

In Fig. 5b, the layers 34a and 34b of the ribs 14a and 14b have a discontinuous magnification-WATERING the layer thickness. To the so reinforced areas of the layers 34a and 34b, the second material layers 36a and 36b are arranged, and take a mechanical function was. In contrast to FIG. 5a, the third layer is the structure-forming layer 36c is formed only in the field of lens 12, whereby the deformation of the webs only by the web materials 34a, 34b, 36a and 36b is defined.

In Fig. 5c, the layers of material 36a, 36b and 36c integrally formed and disposed on the material layers 34a, 34b and 34c, thus forming a two-layer structure overall. The layers 34a, 34b, 36a and 36b have a discontinuous change in the layer thickness, which can have, for example, mechanical reasons.

FIG. 5d shows a device according to Fig. 5c, in which 14a and 14b change the thicknesses of the layers 34a, 34b, 36a and 36b over a region of the webs continuously and facing away in another, the lens 12 area, have a constant layer thickness ,

Fig. 6 illustrates different embodiments represent two-ply webs 14a and 14b and two-layered lenses 12, Figs 6a-c show each. A converging lens 12 and Figs. 6d-f a diverging lens. The ratio of the thickness of the first layer 34a-c to the second layer 36a-c is arbitrary. Thus, one of the two layers 34a-c and 36a-c has a constant thickness, such as layer 34a-c in Fig. 6c, or a variable thickness as layer 36a-c in FIG. 6. exhibit. The layers 34a-c and 36a-c may each comprise one another, a constant ratio of the thicknesses, as shown in Figure 6b, where the ratio is 1:. 1.

Fig. 7 shows a plan view of a device 30, with an embodiment in which the lens 12 four webs 14a-d is connected via a load-bearing structure 16. The webs 14a-d are arranged such that their longitudinal center lines 38a-d intersect the optical axis 28 of lens 12 and that the webs 14a-d in pairs opposite each other and the angles 42a-d at a right angle between two adjacent longitudinal center lines 38a-d form. In this embodiment, the webs 14a-d open into a right angle in the formed with a flat surface-bearing structure 16, so that the angle 44a-d between the outer edge of the webs 14a-d and the supporting structure 16 as well as between the longitudinal center lines 46a- d and the supporting structure 16 are each a right angle is formed.

Fig. 8 shows an embodiment in accordance with Fig. 7, in which only two webs 14a and 14b are disposed opposite to each other and the lens 12 with the supporting structure 16. In this case, the longitudinal center lines form an angle of 42 180 degrees to-each other.

Fig. 9 shows an embodiment according to FIG. 8, in which the webs 14a and 14b are arranged diagonally to the supporting structure 16 and each open into two surfaces of the supporting structure, whereby the angle 46a, 46b, 48a and 48b a different by 90 degrees Win-angle form.

Fig. 10 shows an alternative to Figs. 7 and 8 embodiment, in which the webs 14a-d arranged so as to obliquely flow into the supporting structure 16, so that the angle 44a-d and 46a-d a of 90 degrees form different angles and their longitudinal center lines 38a-d on the optical axis 28 of lens 12 run over. The webs 14a-d have at their, the lens 12 facing end formations 48a-d that connect the ribs 14a-d to the lens 12th

Compared to the Fig. 7-9 embodiment permits such a larger Längsausdeh-tion of the webs 14. The larger longitudinal expansion can be used to achieve a greater achievable travel of the webs 14, since the amplitude of the deflection of the webs 14 are secured to the lens 12 along the optical axis 28 of the length of the webs 14 depend.

Fig. 1 1 shows a to Fig. 10 an alternative embodiment in which only two offset parallel to one another webs 14a and 14b, the lens 12 via protrusions 48a and 48b connect with the supporting structure.

Fig. 12 shows a further Ausführangsform shown in FIGS. 10 and 11, in which three sym-metrically arranged around the lens 12 webs 14a-c with protrusions 48a-c, the lens 12 with the supporting structure.

The number of webs and their arrangement can be arbitrary in principle for the use of the lands 14th It should be noted that although previous and subsequent embodiments describe a straight shape of the ridges 14 along the length of the supporting structure 16 to the lens 12, and another, for example, in the lateral direction, ie respectively in a projection along the layer thickness direction curved shape is possible. the optical axis. In this case, the angles 44 and 46 can assume values ​​different from each other. Even a rectangular respectively square formation of the layout of the supporting structure 16 is shown on the reference plane 18 in all versions always. However, the formation of the geometry of the bearing structure is generally desired.

Fig. Figure 13 shows the apparatus of Fig. 7, wherein the heating elements 14a-d 52a-j are arranged at one side of the webs. The heating elements 52a-j can for example be carried out electrically in the form of ohmic conductor tracks and are designed to heat the webs 14a-d locally and independent of the ambient temperature and thus a deflection of the webs 14a-d and thus a movement of the lens 12 cause. The shape of the heating elements, like the heating elements 52c and 52f are straight or have, for example, the heating element 52a has a squared off course. Alternatively, a meanderartige formation of one or more heating elements 52a-j possible. At each web 14a-d of electrically conductive bus bridge 54a-d is arranged in which arranged on one of the webs 14a-d heating elements 52a-j open. The contacting of the heating elements 52a-j is effected in this embodiment to the fixed end of the webs 14a-d and adjacent to the bearing structure 16, but it can in principle occur at any position of the electrodes. The heating elements 52a-j may be different both formed as charged with different electrical potentials and currents, so that each heating element 52a-j an individual heating power is adjustable.

Figs. 14-18 show devices similar to FIGS. 7-12, in which at one side of the webs 14 preceded described heating elements 52 and bus bars 54 are arranged. The electric heating elements are mounted 52 or chipped by a printing method or vapor deposition using a mask to the webs 14th

Fig. 19 shows a device 30 with four lenses 12a-d, which are connected via webs 14a-d, Meli, 141-1 and 14m-p with the supporting structure 16. Each of the thus 16 enclosed by the tra-lowing structural cells 56a-d provides an apparatus analogous to FIG. 7. In areas where light from lenses 12a-d, webs 14a-p or the supporting structure 16 remains unaffected, arising passage areas 58a-p. The supporting structure 16 is formed of a light absorbing material and provides for each cell 56a-d a barrier for light which is processed in a neighboring cell 56a-d from the lens located therein, is.

Fig. Figure 20 shows apparatus 30 in which the arrayed in a cell webs 14a-d, 14e-h, 14i-l and 14m-p each open into a part of the supporting structure 16, which is designed as a circumferential frame 62a-d and of at least one material from which the webs 14a-p are formed, consists. The frames 62a-d join to the light-absorbing material of the superstructure 16th This embodiment can p 14a-allow easier contact with the webs of the supporting structure, as between the Ste-gen 14a-p and the supporting structure 16, no direct material transition is executed, but the material transition between the frame 62 and the light-absorbing material is formed wherein the frame 62a-d seamlessly abuts the remaining load-bearing structure 16 and the cells are arranged side by side.

Fig. 21 shows a device similar to FIG. 20, in which the supporting structure 16 comprises recesses 64a-e, so that the cells 56a-d are connected only via formed as webs 66a-d areas of supporting structure 16 together. This allows material and thus also lead cost savings during manufacture of the apparatus and can lead to better properties in terms of stability between the cells, in particular Kgs-nen by thermal changes induced material stresses in the supporting structure 16 can be reduced. Furthermore, that can optionally be carried out in a further processing step required separating the cells 56a-d from each other time-saving, as only little material has to be cut.

Fig. 22 shows a device similar to FIG. 19, in which the supporting structure 16 is formed entirely from the frame 62a-d. Through a complete formation of the supporting structure 16 of the frame 62a-d can possibly easier or more cost-effective manufacture of the device during manufacture or greater degrees of freedom resulting in the formation of an optical forest. So may be disposed other sections of the supporting structure 16, for example along the optical axis of the lens as it is shown below, inter alia, in Figs. 38 and 39. The webs 14 can ply so monomorphic, or two layers, so bimorph as in all previous and subsequent embodiments, be performed.

Fig. 23 shows a device similar to FIG. 21, in which the supporting structure 16 is formed entirely from the frame 62a-d and are formed in the recesses 64a-e, so that the cells 56a-d only formed as webs 66a-d areas of the supporting structure 16 or the frame 62a-d are connected to each other.

Fig. Figure 24 shows a schematic plan view of a device 40 in which a lens array 68 via eight ribs 14a-h connected to the supporting structure 16 and the lens array comprises a support plane 72 and nine lenses 12a-i includes that in three rows and three columns the carrier plane are arranged 72nd The optical structure of the apparatus is executed in the present embodiment, as a combination of a plurality of optical elements, which are designed as identical lenses 12a-i. In principle, however, it is possible that an alternative to lenses aspheres, free-form surfaces, diffractive structures, mirrors, prisms, or, as shown, lens arrays, which and of several identical or unterschiedli-chen, also combinable, just listed optical elements having any number of rows columns exist. If a plurality of lenses 12 arranged in an array 68, all lenses 12 thereon can be moved jointly over the webs 14, and thus deviations in the movements of individual lenses 12 can be reduced.

In arrangements that include multiple optical structures 12, as they are 19 to 23 for example shown in FIGS., Instead of the above-described lenses and lens arrays 68, analogous to FIG. 24 may be arranged. Exemplary embodiments include lens array 68, a supporting structure 16, a peripheral frame 62 of at least one lens material of the webs 66 comprised between single cells 56, enabling easy separation of the cells at the end of a manufacturing process.

Fig. 25 Figure 6 shows a cross-sectional view of a device similar to FIG. At 74a and 74b are arranged at the webs 14a and 14b perpendicular thereto extending structures which position a co-moving lens 75 towards the lens 12 such that the co-moving lens 75 at a deformation of the webs 14a and 14b and is moved along the optical axes 28a and 28b of the lenses 12 and 75 substantially coincide. The lenses 12 and 75 form the structures 74a and 74b a lens stack 76. The structures 74a and 74b are integral in this embodiment and formed of the same material as the co-moving lens 75 and the second material layer 36a and 36b of the webs 14a and 14b. The arrangement of the co-moving lens 75 at the webs 14a and 14b, the thermally induced change in the focal length of the lenses 12 and 75 also compensates opposite of each other the lens and at the same time an additional arrangement of ridges 14 on the supporting struc-ture with a temperature change 16 omitted.

In the structures 74a and 74b may be, as shown in Fig. 25, to act webs. Alternatively or additionally, they may structures 74a and 74b in the form of an order denominated

fenden and / or contour to be formed, which is arranged in a distance from the movable lens 12 or directly adjacent to the lens 12 at the webs 14a and 14b. A circumferential contour allows accurate positioning of a co-moving lens 75 against a moving lens 12th

Fig. 26 shows a device according to FIG. 25, in which the co-moving lens 75 is double-layered and arranged further away from the reference plane 18 than the lens 12.

Fig. 27 shows a device according to FIG. 26, in which the co-moving lens 75 is located closer towards the reference plane 18 as the lens 12. The other structures 74a and 74b are made of any material, including that of the second layer 36 is formed and between the first material layer 34a respectively 34b of the webs 14a, respectively 14b and the first material layer disposed 34d of another lens 75, so that the other struc-ren are 74a and 74b formed in several pieces with the lenses 12 and 75 thereof.

Fig. 28 shows a device according to FIGS. 25-27, wherein the additional structures 74a and 74b comprise an adhesive layer 78, the sections 77a and 77b respectively 77c and 77d adds. The addition of the structures 74a and 74b via an adhesive layer 78 allows the production of the device in a plurality of separate manufacturing steps.

In principle can have any number of layers of material, both the lens 12 and the lens is moved along 75th Also, the lens stack 76 may consist of any number of lenses, which are connected to each other through other structures 74th The other struc-tures 74 may be located at any layer of the webs 14th

Fig. 29 shows a device 50 in which two mutually different lens stack 76a and 76b are connected via the webs 14a-d with the supporting structure 16 and the optical axes 28a-d of the lenses 12a, 12b, 75a and 75b substantially coincide. The direction and the adjusting path of movement of a lens stack 76a or 76b with a temperature change is dependent on the expression of the webs 14a and 14b respectively 14c and 14d, and independently of the movement of the respective other stack 76a or 76b.

The Fig. 30a shows a device from Fig. 6c, wherein the load-bearing structure 16 on the non-moving a lens 79 are arranged. The supporting structure 16 comprises a first portion 16a on which the lens 12 is arranged on the webs 14a and 14b, and to the first further portion 16a paid-up portion 16b. A diameter XI of the first portion 16a is smaller ais a diameter X2 of the second portion 16b, so that a defined by the first section 16a of space D l, in which the lens 12 and the webs 14a and 14b are disposed, is greater than the area defined by the second portion 16b gap D2 in which the non-moving lens 79 and the webs arranged thereon as executed layers 81 a and 81 b are angeord-net. Also, the non-moving lens 79 is above multi-layer webs 81 a and 81b attached to the supporting structure 16 and has substantially the same shape as the lens 12. Due to the small gap, the layers 81 a and 81b of the motionless lens 79 smaller than the webs 14a and 14b of the lens 12 so that the webs of the stationary lens 79 no or a smaller movement of the stationary lens 79 bring about with respect to the reference plane 18 at a change in temperature. Alternatively it can be mounted without the 79 layers 81a and 81b directly to the supporting structure 16 the motionless lens. Also, the lens may have a shape other than the lens 12th The diameter XI and X2 and the spaces between Dl and D2 can thus in principle any shape next round, for example oval or rectangular. The non-moving lens 79 is disposed at a greater distance to the reference plane 18 as the movable lens 12th

Fig. 30b shows one of the Fig. 30a similar device in which the non-moving lens 79 is arranged under the lens 12 and at a smaller distance than the lens 12 to the reference plane 18.

Figs. 31a and 31b show a device similar to FIGS. 30a and 30b, in which between the lens 12 and the stationary lens 79, a segment 82 is arranged a lens material in such a way on the supporting structure 16 such that a peripheral frame is produced. The segment 82 is formed of a material of which also one of the layers of the Lin-sen formed.

Fig. 32 shows a device 60 similar to the device of FIGS. 30 and 31. The immovably arranged on the supporting structure 16 motionless lens 79 is two-layer structure and adjacent to the two material layers 34 and 36 includes a glass wafer 86, between the layers of material 34 and 36 is disposed and projects into the supporting structure of the sixteenth With the glass wafer 86, the non-moving lens 79 can be both to further optical properties, for example in the form of an introduced in the glass wafer 86 diffractive grating, or other mechanical properties, for example with additional stiffeners expanded.

Fig. 33 shows a side view of a device 70 having a movable lens 12 with the webs 14a and 14b. The non-moving lens 79 is two-layer structure and includes a glass wafer 86, of th lens 79 despite arranged on their continuous layers 81 ad motionless configured and arranged between the two M ateri al s chi Want 34 and 36 of the stationary lens 79th The supporting structure 16 is formed integrally with the layers 81 a and 81b.

Fig. Figure 34 shows apparatus 70 in which the disposed on the stationary lens 79 are layers 81 ad only partially disposed on the glass wafer 86, and spaced from the supporting structure 16. The arrangement of the stationary lens 79 on the supporting structure is formed on the glass wafer 86th

Fig. 35 shows a device 80 analog device 70 of Fig. 33, 16b and 16c arranged in the other sections of the supporting structure to the device 70 which includes a glass wafer 79b and 86b with a motionless lens layers 81 anyway. The elements of the supporting structure 16b and 16c are formed of a different material than the supporting structure 16a. By a concatenation of different supporting structures 16a-c and the combination of lens 12 and stationary lenses 79a and 79b can any design optical systems are formed. Any order and number of movable, immovable and entrained disposed lenses 12, 75 and 79 can be realized.

Fig. Figure 36 shows apparatus 80 in which the lenses arranged on the fixed layers 79a and 79b are 81 ah only partially disposed on the glass wafers 86a and 86b.

It is also conceivable that only 86a and 86b, the lenses 79a and 79b disposed in the absence of layers 81 to the glass wafers.

Fig. 37 shows a device similar to FIG. 36, in which the movable lens 12 and arranged thereon lands 14a and 14b are made in one piece of a material and in the rest of the device solely other materials are formed.

Fig. 38 shows a device 70, are joined at the single parts 16a and 16b of the supporting structure 16 with an adhesive layer 92 with each other.

Fig. 39 shows a device similar to FIG. 37, wherein the individual parts 16a and 16b of the supporting structure 16 are joined with the adhesive layer 92 with each other.

The joining together of parts of a supporting structure 16 by means of adhesive layer 92 can enable construction of structures and devices whose components are formed in different sub-processes. Also, any Materialüber-

gears are formed within the supporting structure 16 when attached different parts comprise different materials or layer sequences.

Fig. 40 shows a device 90 similar to FIG. 30, in which a lens stack 76 is arranged on the supporting structure 16 instead of a lens.

Fig. Figure 41 shows apparatus 90 in which the fixedly arranged lens 79 a glass wafer 86 includes, projecting into the supporting structure 16.

Fig. 42 shows device 90 analogous to Fig. 40, in which the parts 16b and 16c of the supporting structure 16 joined with each other via the adhesive layer 92nd

Fig. 43 shows device 90 analogous to FIG. 42, in which the stationary lens 79 analogous to Fig. 41 includes a glass wafer, which projects into the supporting structure 16 and in which the parts 16b and 16c of the supporting structure 16 with each other via the adhesive layer 92 are joined.

Fig. 44 shows device 90 analogous to FIG. 42, in which the structures 74a and 74b comprise the adhesive layer 78th

Fig. 45 shows device 90 analogous to FIG. 44, in which the stationary lens 79 analogous to FIG. 43 a glass wafer 86 includes, projecting into the supporting structure 16.

Fig. 46 shows a device 90 similar to FIG. 44, are arranged in the other segments 82a-d of egg-NEM lens material between the moving lens 12 and the stationary lens 79 and form a peripheral frame 84, the segments 82a and 82b over the adhesive layer 92 are joined and the adhesive layer 92 at the same time the items adds 16b and 16c of the superstructure 16th

The above, as well as subsequently described embodiments are also applicable to cases readily in which it is not a lens, but another optical structure such. As a diffraction grating.

The embodiments described so far have focused on the creation of a possibility for a compensation of the temperature dependence of optical properties of an optical structure, such as the temperature dependence of the focal length of a lens by monomorphic or bimorph deflection of the webs, with which the lens or the optical structure is suspended so that, for example, an image plane or intermediate image plane of an optical imaging, in which the lens is involved, changes its position less due to temperature changes. Although the above embodiments always a deflection from the layer plane of the webs forming layer (s) showed that the optical structure, for example, moves in a thickness direction, it would also be possible to transfer the principle to deflections in the layer plane. This could also be achieved movements of other kind than translational movements along the optical axis or tilting. In addition, for the quasi-passive compensating effect to achieve a Athermisierung the properties of the optical construction of the superstructure previous described can be provided with heating elements, to actively and independently of the ambient temperature to bring about a movement of the optical components.

The above embodiments can be combined with the aspect described below embodiments, after ausheilbarer adhesive is used to fix an adjustment of about Stege adjustable position of an optical structure. The following embodiments are also detached from the temperature compensation effect of the above embodiments can be used.

FIG. 47a is a schematic block diagram of adjusting and fixing with respect to a new initial position of an optical structure 12 with respect to its location to the reference plane 18. Step 1 involves providing a device to be adjusted, which includes an optical structure. The providing may also include the manufacture of the device with the optical Stmktur 12 and the webs fourteenth During manufacture of the device can also already later ausheilbarer adhesive 102 are placed with in the device. If the adhesive 102 is not arranged on the device during deployment of the device, it is disposed in a second step, to the device, so that it is arranged between the webs 14 and the supporting structure of the sixteenth In a third step, the alignment of the optical structure with respect to the reference plane 18 takes place, so that a desired distance or a desired orientation of the lens 12 to the reference plane is achieved 18th For example, the desired orientation 12 comprise optimum focal position of the lens with respect to the reference plane 18th The adjustment is made by an adjusted, influence 104 12 moves the lens from its original position PI in an adjusted position P2. For example, this can be done via activation of the webs located on heating elements which initiate a deformation of the webs fourteenth Other effects are also conceivable, for example, electrostatic forces acting on the webs, and those which are produced by electrostatic actuators, as shown for example in Fig. 64 and 81,. It is also conceivable that external mechanisms to affect the structure and a

Deflection webs 14 and thus cause the attached lens 12th one or more times can be carried out in the meantime check if the desired orientation has been achieved during the adjustment. Is for adjusting a change of ambient temperature used, that is used the above-described effect of the temperature-dependent displacement of appropriately configured strips, so when adjusting a previously determined or known relationship between temperature and optical property of the optical structure is exploited in order that ensures the optimum adjustment to determine on a predetermined operational or operating temperature, is provided for the optical structure. If the Stegauslenkung obtained elsewhere during adjustment, the adjustment is carried out, for example, at the operating temperature or at an interval of allowable operating temperatures.

While maintaining the adjusted position P2 is carried out in a fourth step, a curing of the adhesive 102, which leads to a fixation of the lens 12 and the ridges 14, wherein the location of the healed adhesive 102, a new fixation of the webs 14 is formed, of a new form of movement the webs 14 defined. It may be that, after fixation of the lens 12 according to the above temperature dependency are movable in the region between the new anchor point and the lens 12 even through the deformation of the webs. This Restbewegbarkeit should be taken into account in the adjustment in the previous calibration step. For example, if the webs have been deflected by local warming of the webs according to one of the above embodiments, and the temperature was about obtaining the optimal adjustment or alignment high, it can, depending on the residual mobility be advantageous, prior to fixing the webs a bit about the optimal fulcrum out of-zulenken order then to avoid unnecessary temperature control for fine adjustment of the lens in operation in operation.

Fig. 47b shows a device in which the supporting structure 16 consists of two sections 16a and 16b. On section 16a, the lens 12 is arranged on the webs 14a and 14b. The portion 16a has a width R that is smaller than a width R2 of the ex-section 16b of the supporting structure, which paid to the first section 16a downwards. Characterized a defined by the first portion 16a of the supporting structure interspace FF1 is thus greater than a second portion 16b defined by the intermediate space FF2. By setting a new, different from the original position PI position P2 of the lens 12 from the reference plane 18 by the Adjustable Handle--generating impact 104 and annealing 106 of the adhesive 102 and removal of the adjusted, influence 104 includes the lens 12 P2 the adjusted position as new initial position. The sites of healed adhesive 102a and 1 02b define new fixed anchor points of the webs 14. A thermally, or other, for example, electrostatic, forces indus- 4 059 610

graced deformation of the lands 14 is effective in this case only in a range L2 between the lens 12 and the fixed point defined by the healed adhesive.

A residual expansion LI of the webs 14 carries, for example, only slightly at the posi-tioning of the lens 12 in the room. An old suspension 103a / 103b is replaced by a new suspension 105a / 105b of the lens 12th

Fig. 47c shows a device in which in one of FIG. 47b preliminary step adhesive 102a and 102b disposed between the webs 14a and 14b and the supporting structure in the AB section 16b. Here, the portion 16b of the supporting structure opposite the webs 14a and 14b is formed immobile, so that the webs 14a and 14b and hence the lens 12 can be adjusted relative to the reference plane 18th

Although in Fig. 47, the adhesive 102 is formed UV-curing and annealing 106 is carried out by UV irradiation, a thermally activatable adhesive, conceivable that, annealed by corresponding annealing processes, such as thermal processes are also other types of adhesive, for example. will. The adjustment 104 can, for example by activating the heating elements 52 or other external force. If the adjustment by means of temperature, either by the ambient tempera-ture, or by activating the heating elements, so a fixing by adhesive to be designed so as to both the manufacturing tolerances of the forest compensated as well as the recovery of the lands, which may appear when the-move temperature is withdrawn and back cool the webs on the regular ambient temperature. This rebound can possibly lead to renewed displacement-tion of the lens from its intended target location.

Alternatively, it is also conceivable that the adjustment is performed by electrostatic drives, the forces can act on the webs in such a way, is that the target position of the lens is reached and fixed by the adhesive. Alternatively, an external force, for example, by a gripper or other external device, are used for deflection and adjustment of the lens.

The above described and produced by the new fixation point 105 shortening the later effective in operating land length to the length L2 can both during Ready Stel-hung of the bars to be considered as well as by corresponding dimensioning of the web materials, so that the webs are designed, for example, longer, thus the bending line to a greater amplitude leads, or materials are selected which produce a stronger hub, so that the determined characteristic between displacement of the optical structure, and displacement maintaining the optical characteristic of the lens.

Fig. Figure 48 shows apparatus 30 in which a by UV radiation annealing Barer adhesive 102a-d is arranged at the webs 14a-d.

Fig. 49 shows a device 10 in which the ridges 14a and 14b having a concavo-convex cross-section have a curved geometry. This enables both a stabilization of the rest position of the lens 12 as well as a definition of the movement of the lens 12 which is disposed over single layer webs to the supporting structure of the sixteenth

Fig. 50 shows a device analogous to Fig. 1 and 2, in which the supporting structure 16 has a portion 16a 16b includes a width Rl and another portion having a width R2, and the webs 14a and 14b in the portion 16a bearing on the structure 16 are arranged. The between the webs 14a, respectively 14b and the portion 16b of the supporting structure 16 space is formed by an arrangement of a ausheilbareren adhesive 102 to allow for fixing a new initial position.

51 a shows an apparatus similar to FIG. 26, in which the portion 16b of the supporting structure 16 defines a space between the webs 14a and 14b and the supporting end structure 16 in the direction of the reference plane 18, which is formed, an arrangement of a ausheilbareren adhesive 102 for fixing a new initial position to allow.

51b shows a device similar to FIG. 27, wherein the portion 16b of the supporting structure 16 a space between the ribs 14a and 14b and the supporting structural 16 toward the reference plane 18 limits, which is designed to provide an arrangement of a ausheilbareren adhesive 102 for fixing a new initial position to allow.

52a shows a device similar to FIG. 26, wherein the portion 16b of the supporting structure 16 a space between the ribs 14a and 14b and the supporting structural 16 in the direction of co-moving lens 75 is limited, which is designed to provide an arrangement of a ausheilbareren adhesive 102 to fixing a new initial position to allow.

52b shows a device similar to FIG. 27, wherein the portion 16b of the supporting structure 16 a space between the ribs 14a and 14b and the supporting structural 16 in the direction of co-moving lens 75 is limited, which is designed to provide an arrangement of a ausheilbareren adhesive 102 to fixing a new initial position to allow.

14 059610

Fig. 53 shows a device similar to FIG. 29, in which the supporting structure 16 76a and 76b a portion 16b comprising the area between the two lens stacks, having a width R2 that is greater than the width RL of the portion 16a and a Ab-section 16c of the supporting structure 16. at the portion 16b having the width R2 76a and 76b each adhesive are placed 102 in the direction of the two lens stack, so that both lens stack 76a and 76b mithiife of the section can be adjusted 16b of the supporting structure 16 ,

FIG. 54a shows a device in which the supporting structure 16 has a portion 16a having a width R and a portion 16b having a width and the width of comprises R2 R2 is greater than the width of Rl. At a top or bottom side of the supporting structure 16 having the width R on the supporting structure 16, a movable lens 12 is arranged on the webs 14a and 14b. At the opposite upper or lower side of the structure 16 in the intermediate space F2 of the portion 16b is a motionless lens 79a is disposed above further layers 81a and 81b, wherein the motionless lens 79a and the other layers 81a and 81b made with the supporting structure 16 in one piece.

Fig. 54b shows a device which consists of two cells 56a and 56b, each of the cells 56a and 56b formed in the sense of a device from FIG. 54a. The two cells are arranged directly adjacent to each other and to each other adjacent material layers of the cells with the movable lenses 12a and 12b of the supporting structure 16 of the glass wafer 86 and the non-moving lenses 79a and 79b are each formed integrally on the course.

Fig. 54c shows a device similar to FIG. 54b, in which the cells 56a and 56b spaced from each other, are disposed on the continuous running glass wafer 86th Thus, only the glass wafer 86 is integrally formed.

FIG. 55a shows a device similar to the device of Fig. 54a, in which c in the arranged on the half 79b of the stationary lens layers 81 and 81d, a further portion is arranged 16c of the supporting structure, disposed at the end of a second glass wafer 86b is ,

Fig. 55b shows the device of Fig. 55a, in which the lens 12 is two layers.

In a device with moving and still lenses monolayer or multilayer still or lenses can be used. Likewise, it is possible to also use a plurality of glass wafer 86, in order to implement any desired characteristics along an optical axis.

FIG. 56a shows an apparatus in which the portions 16a and 16b of the supporting structure 16 formed of different materials. The section 16a is arranged on a glass wafer 86a, whereby the glass wafer at the webs 14a and 14b are arranged 86a opposite end of the section 16a. The lens 12 is remote from the main page of the glass wafer 86 includes a stationary lens 79 having disposed thereon layers 81a and 81b, wherein the non-moving lens 79 and the layers 81a and 81b formed integrally. To the layers 81 a and 81b, a portion 16b of the supporting structure is arranged, which is formed of a different material than the portion 16a. facing away from the lens of the stationary 79 end of the section 16b, a second glass wafer 86b is arranged.

Fig. 56b shows the device of Fig. 56a, at which the webs 14a and 14b and the portion 16a of the supporting structure 16 is formed integrally with the lens 12.

Depending on the desired function, for example, mechanical or thermal properties, each section may be an optical forest made of a different material. a glass wafer may be integrated between the same or different portions of material having either a stabilizing property or may be as a carrier of an optical structure, for example a lens, is formed.

In order to implement a wide dynamic range with respect to the deflection of the webs or an optical structure, it is conceivable that the use of the previous thermal Wow-flussbarkeit the webs, which is exploited using the set heating elements to an external force is expanded to the Stegen attacks and this is moved out of its position. This force can be generated for example by electrostatic fields in electrostatic actuators, as shown in the following examples. Conceivably besides mechanical holders or grasping a purely electrostatic deflection, without exploitation or presence above described temperature dependence of the deflection. The electrostatic actuators can be formed on unterschiedli-che manner. Some of the embodiments described below provide for an extension of the supporting structure to an electrode support in the sense of a partially curved shape component or a correspondingly shaped portion of the supporting structure, in which an electrode can be arranged.

Also, the electrostatic actuators can be designed with a special shaping of the webs by means of a cantilever electrode, as is the case in other embodiments described below.

The above embodiments are therefore combined with the aspect of exemplary embodiments described below, after which electrostatic actuators are used to perform a positioning of the optical structure and the ridges in operation. The following embodiments are also detached from the temperature compensation effect of the above embodiments can be used.

FIG. 57a shows a device 120 analogous to FIG. 1 having arranged on it mold component, wherein the second electrodes 126a and 126b of the first electrodes 122a and 122b are arranged to one another that they at least partially overlap each other and are at least spaced from each other by an insulator layer 128. The first electrodes 122a and 122b and the second electrodes 126a and 126b form 132a and 132b, the electrostatic actuators.

The mold member 124 has a diameter D3 approximately centrally, in which the material of the mold member 124, the electrode 126 and the insulator layer 128 are recessed and which is arranged approximately centrally with respect to the optical axis 28 of the lens 12th The mold member 124 also includes two, the supporting structure 16 facing surfaces. FF1 over a width XF1 on the molding 124 and a continuously curved surface FF2 with the width XF2. The surface FF 1 is the surface disposed opposite FT1 and the width substantially corresponds to the width XF1 XT1. The surface FF1 is flat, is formed while the surface FF2 continuously curved. A surface FF3 on the molding 124 is flat in the present embodiment, on extending the width XF3. Two second electrodes 126a and 126b are arranged on the flat surface of FF1 and FF2 of the curved surface and are at least partially covered by an insulating layer 128th

The electrostatic actuators allow the application of an electric field between the electrodes and thus applying a force to the electrodes 122 and 126. This can be used both during an initial adjustment and during operation a shift or a tilt of the optical structure to achieve. During operation, thereby a dynamic focusing of the lens is possible, which complements the compensation of thermally induced changes in lens 12 by the ribs 14 or only realized - without thermal compensation. For example, the materials of the ridges and lentils a gleichblei- for varying ambient temperatures P2014 / 059 610

bende focus position can be obtained with respect to a defined object distance. Changing object distances can be focused by means of the electrostatic actuators. It may, in particular a control system controls (not shown) or at least can be connected, either controls the electrostatic actuators, for example depending on the detected by a temperature sensor temperature to counteract the effects of the thermally induced change in the optical properties of the optical structure, or such as depending on an evaluation of a signal dependent on the optical property of the optical structure signal, such as the sharpness of obtained in an image plane of the image, which is at least partially defined by the optical structure, such as a lens system, the device suspended on the webs includes lens.

The apparatus of FIG. 57a, for example, be prepared as described below.

Fig. 57b shows the device 120 with the supporting structure 16 and the components arranged thereon, and the mold member 124 and the components arranged thereon in the unjoined state. The electrodes 122a and 126a and the electrodes 122b and 126b are formed by the addition of supporting structure 16 and mold member 124 to act each as an electrostatic drive 132a, respectively 132b with respect to a web 14a respekti -ve 14b.

FIG. 57c shows the arrangement of a ausheilbaren adhesive 134a and 134b between the surfaces FT1 and FF1, on which the mold member 124 is joined to the supporting structure 16.

Will first electrode 122 arranged on the webs and electrostatic actuators 132 used to the webs 14, and therefore the lens deflect 12, this can be done with a very large dynamic, allowing for fast focusing of the lens 12 from the reference plane and a possible to focusing object distance, allows, so that the optical overall structure in which the lens 12 may be used, can achieve a higher frame rate.

Fig. 58 shows a device alternative to Fig. 57b, in which the insulator layer 128 is disposed on the first electrodes 122a and 122b. In principle, the insulator layer 128 and so be positioned between the first electrode 122 and the second electrode 126, that it is fixed not on the respective first electrode 122a / 122b still at a second electrode 126a / b, for example, they can be used as a separate layer while inserted the joining between the supporting structure 1 6 and the mold component 124

will. In the area between a surface of FT1 of the supporting structure 16 and a planar surface FF 1 of a form member 124, only the respective first and second electrode 122a / 122b, the second electrode 126a / 126b, the insulator layer 128 as well as adhesive 134a / 134b is arranged. In this area the distance between the first electric-to 122a and 122b is minimal and increases from the supporting structure 16 in the direction of the lens 12 continuously towards.

Fig. Figure 59 shows a detail of the device 120, in which between the first electrode 122 and second electrode 126, an electric voltage U is applied. The chip voltage U leads to the formation of an electric field 136 between the two electrodes and thus to an attractive force between the two electrodes. Due to the arrangement of the molding member 124 to the supporting structure 16, the second electrode 126 is arranged with respect to the supporting structure 16 stationary. The attractive force of the electric field 136 causes the lens 12 and the web 14 to move from its gestri-smiles indicated original position toward the second electrode 126th

Depending on the polarity of the electric field also a repulsive force can be generated between the two electrodes, which leads to a movement of the web 14 and the lens 12 away from the second electrode 126 f.

FIG. 60a shows a plan view of a cell 56 of the apparatus 30 of FIG. 20 in which the first electrodes 122a-d are arranged on the webs and extending to the surface of the supporting structure 16 FT1. The optical axis 28 is located in the center of the lens 12. Fig. 60b shows a plan view of the mold member 124, on which the second electrodes shown in dashed lines 126a-d are arranged which are covered by the surface layer 128 arranged insulator. The molding member has centrally on the round recess with a diameter D3, which allows for an addition of the mold member 124 to the supporting structure 16 an unobstructed passage of light along the optical axis 28 of the lens 12th

FIG. 61a shows a device similar to FIG. 58, in which the optical structure in place of the lens 12, an optical array 138 with a plurality of juxtaposed lenses 142, 144 and 146 which are directly connected to each other and the common diameter comprise D4 and together are mounted on the lands 14 on the supporting structure 16th The lenses 142, 144 and 146 represent a the lens array 68 of FIG. 24 similar optical structure. The lenses 142, 144 and 146 may in this case comprise transparent, reflective or absorbing regions.

Fig. 61b shows a to Fig. 61 a Ausfülirungsform alternative, in which the lenses 142 and 146 comprise the optical array 138 extracts from lenses.

Fig. 61 c shows a molding member 124, to the surfaces of FF1 and FF2 the second electrodes 126a and 126b are arranged and whose diameter is D3 smaller than the diameter D4 of the optical array 138 in Figs. 61a and 61b. The diameters D3 and D4 may be dimensioned independently of each other, in particular they may be different.

According to alternative exemplary embodiments, the optical array comprise any number of lenses or cuttings therefrom, the individual components may be individually molded.

FIG. 62a shows the cross section of two adjacent cells 56a and 56b, each having a movable lens 12a and 12b, the ridges 14a-d are covered analogous device 120 of FIG. 58 to the first electrodes 122a-d and the insulator layer 128 and the supporting structure 16 grooves 148a and 148b includes.

Fig. 62b shows the cross section of the unjoined mold member 124, which is adapted to the two cells 56a and 56b of FIGS. 62a to be assembled and comprising two recesses having a diameter D3, which in the joined state according concentrically around the optical approximately axes of the lenses 28a and 28b are positioned 12a and 12b. The mold member 124 includes springs 152a and 152b, which are formed to be arranged on the grooves 148a and 148b of Fig. 62a.

Fig. 62c shows device 130 in the joined state of the form member 124 of FIG. 62b, and supporting structure 16 of Fig. 62a, the springs 152a-b in the grooves 148a-b inserted between the grooves 148a-b and the springs 152a -b adhesive 134a-d is introduced and the grooves 148a-b, the springs 152a-b and 134a-d form the adhesive, the joining zones 154a-d.

FIG. 63a shows the cross section a double-sided curved shape member 156, which is constructed symmetrically with respect to an axis of symmetry 158 and each half of the mold making portion 156 and a mold component 124 of FIG. 58 is displayable, wherein the surfaces FF3A and FF3B of the two halves of the molding member 156 are arranged congruently to each other. The double-sided curved shape member 156 thus comprises a second planar surface FFI b and a second curved surface FF2b at which further second elec-

roden 1 26c and 126d are arranged and the shaped component 156 is thus formed part of two electrostatic actuators 132a and 132b to be respectively 132c and 132d.

Alternative embodiments include a double-sided curved mold component, identify the surfaces no symmetry to each other. Particularly if they are portions of the supporting structure along the optical axes are different, the dimensions and formations on both sides curved shape components can be formed independently of each other.

Fig. 63b shows a device in which two devices analogous to FIG. 58b joined together via a double-sided curved mold member 156 such that the optical axes of the lenses 12a and 12b substantially coincide and the surfaces FTL a and FTLB of the supporting structures 16a and 16b facing each other are arranged and the shaped component 156 is part of four electrostatic actuators 132a, 132b, 132c and 132d.

Fig. 64 shows an apparatus in which the mold member 124 is formed integrally with the carrying structure 16.

Fig. 65 shows device 30 of FIG. 7, in the rectangular 16 formed first electrodes 122a-d are arranged on portions of the webs 14a-d and part of the supporting structure.

Fig. 66 shows device 30, in the 16 triangular formed first electrodes 122a-d are disposed on portions of the webs 14a-d and parts of the supporting structure, the taper of the support structure 16 to the lens 12.

Fig. 67 shows device 30 in the free form 16 formed first electrodes 122a-d are arranged on portions of the webs 14a-d and part of the supporting structure.

Fig. 68 shows a device similar to FIG. 1 1, wherein the 16 first electrodes 122a-d are arranged on portions of the webs 14a-d and Tci-len of the supporting structure, whose outer edges extend parallel to the webs 14a-d.

FIG. 69 illustrates an embodiment of FIG. 8, in which 14a and 14b and parts of the supporting structure 16 triangular formed first electrodes 122a and 122b are arranged on portions of the webs which taper from the supporting structure 16 to the lens 12.

Fig. 70 shows an embodiment of FIG. 9, in which 14a and 14b and parts of the supporting structure 16 triangular formed first electrodes 122a and 122b are arranged on portions of the webs which taper from the supporting structure 16 to the lens 12.

FIG. 71 illustrates an embodiment of FIG. 1 1, wherein 14a and 14b and parts of the supporting structure 16 freely shaped formed first electrodes 122a and 122b are arranged on portions of the webs which taper from the supporting structure to the lens 12.

FIG. 72 illustrates an embodiment of FIG. 12, in the 16 free shape formed first electrodes are arranged 122a-c on parts of the webs 14a-c and parts of the supporting structure, the taper of the supporting structure to the lens 12.

Fig. 73 shows a device 140 in accordance with device 120 of Fig. 57c, in which the ridges 14a and 14b similar to FIG. 25 is a co-moving lens 75 is arranged on additional structures 74a and 74b and the lens 12 and the co-moving lens 75 a lens stack 76 form.

Fig. 74 shows a device 150 in accordance with apparatus 70 of FIG. 34, are arranged adjacent to the webs 14a and 14b electrostatic actuators 132a and 132b in the.

Fig. 75 shows device 140, on the surface of the supporting structure 16a, which points in the direction of the reference plane 18, device 150 is joined via an adhesive layer 162 such that the optical axes 28a-d of the lenses 12a, 12b, 75 and 79 in substantially match. Generally, a desired combination and sequence of Lin-sen 12, 75 and 79 and / or preceded and explained below devices possible.

Fig. 76 shows a device 160 analogous to device 150, are formed in which only on the side facing in direction of the reference plane 18 surface of the glass wafer 86 is a non-moving lens 79 and arranged thereon layers 81 a and 81b, wherein the non-moving lens 79 and arranged thereon layers 81a and 81b are formed integrally and extending over the entire width of the glass wafer 86th The supporting structure 16 comprises a polymeric material.

Fig. 77 shows a Voirichtung according to device 130 in the absence of the grooves 148 and the springs 152, in which the lines 56a and 56b are formed respectively in the sense of the device 160 and the motionless lens 79a with the arranged thereon layers 81 a and 81b and the unmoved lens 79b and arranged thereon layers 81 c and 81 d formed in one piece.

Fig. 78 shows a device 170, the device 160 expands such that a further supporting structure is arranged 16b on the disposed on the stationary lens 79 layers 81a and 81b in the direction of the reference plane 18 and the reference plane 18, of the lens 12 facing surface an image converter respectively imager 164 is disposed along the optical axis 28 facing away from the lens 79 of the stationary side of the further supporting structure 16b.

Device 170 provides the ability optics without active prior adjusting to an imager or an image converter to place. An adjustment of an optimum focus position and hence the compensation of tolerances and / or manufacturing tolerances can be done by means of an actuation of the electrostatic actuators 132a and 132b. Next-out lends itself to this embodiment, the possibility of 12 to change an axial position of the lens by driving the electrostatic actuators 132a and 132b likewise, adapting them from an object distance dependent focal position, among other things, as it happens in an autofocus. For this purpose, may be an evaluation of an image recording, which is performed in an image sensor or imager, are performed by a trained algorithm, as is usual in an auto focus.

Fig. 79 shows a device 180 consisting of two juxtaposed cells 56a and 56b which are each formed as a device 170 and the cells 56a and 56b in terms of the apparatus 130 of FIG. 77 placed against each other, as for example the result of a manufacturing process of the device at wafer level is.

This makes it possible, a plurality of optical structures and optics in combination without previous active alignment on a wafer having a plurality of screen-learning / I lean to place and perform a wafer-level assembly. After the wafer-level assembly the individual optical modules can be separated from each other. This can take place for example by sawing. Even more optical modules can form a group of individual modules, soft remain interconnected. Thus, fields of optical modules can be created, which can be of any Ausdeh-voltage, for example, 1 x2, 2x2, 3x3 or others.

Fig. 80 shows an arrangement of the first electrode 122 within the web 14 with the first electrode 122, is the material of the web 14 on the side, which is the second electrode facing de 126 the material of the web 14 covers. In this embodiment functions the material of the web 14, which is disposed between the first electrode 122 and the second electrode 126, at the same time as the insulator layer 128th

In principle, it can be advantageous to the education and the arrangement of the first and second electrodes 122 and 126 in such a tune to one another such that a linea autho-th ratio of fitting between the electrode voltage U and the resulting deflection of the webs 14 and / or the optical structure results. Such an adjustment can be realized for example by an adapted geometry of the first or second electrode having an axial extent different widths, so that the voltage U over the axial profile of the electrode produces a variable force between the electrodes by means of a variable electric field.

Although the diameter D3 was shown to be smaller than the diameter D4, Kings-nen the two diameters D3 and D4 have any relation to each other. Also, the recesses and gaps, shown as diameter may have a different shape, for example oval or rectangular.

The mold members 124 and 156 may also be integral with the supporting structure 16 and Ge forms be generally denote portions where a second electrode 126 according to the above, a first electrode can be located, so the electrode carrier.

The implementation of electrostatic actuators can also be achieved with an alternative Out-design of the electrodes, by parts of an electrostatic drive forming webs are formed with an inner part. Subsequent embodiments provide an alternative embodiment of electrostatic actuators for webs of optical structures. The electrostatic actuators, which are described below, may each be implemented independently, but would also be combined with the just now described. In principle, illustrate embodiments described below represent only a different structure for the implementation of the electrostatic active principle. The control and the objectives of the control are identical to those as described with respect to the preceding embodiments. Au hereinafter described ei sführungsb games have a configuration of the electrodes of the electro-static actuators to the effect that locally the distance between two electrodes is minimized to each other by the formation of beams in one of the electrodes of an electrostatic drive to the voltage required to control the drive to the reduce reaching a mechanical deflection of the webs and simultaneously to refrain from a curved mold component.

Fig. 81 shows a plan view of a device 200 with a lens 12, which is mounted on two webs 14a and 14b to the supporting structure 16. The webs 14a and 14b comprise recesses 14a respectively 14b partially expose a portion 166a, respectively 166b of the bridge, which is designed, that these projects out of the plane of the web 14a, respectively 14b and having one end connected to the web 14 end.

FIG. 82a shows a side view of the device 200, in which a transparent flat member is formed form 168 arranged along the optical axis 28 of lens 12. First electrodes 172a and 172b are at the mold member 168 facing side of the webs 14a and 14b formed, so that the sections 166a and 166b of the webs 14a and 14b each form a cantilever electrode 174a and 174b. At the lens 12 side facing the mold member 168 is, two static electrodes 176a and 176b are arranged such that they cantilever electrodes 174a and 174b at least partially opposite each other and on the side facing the cantilever electrodes 174a and 174b toward surfaces of static electrodes 176a and 176b are covered by an insulating layer 128th The cantilever electrodes 174a and 174b protrude from the plane of the webs 14a and 14b and are located on the lens 12 remote from the end adjacent to the insulator layer 128th The place where the cantilever electrodes 174a and 174b contact the insulator layer 128, represents a place of minimum spacing between the cantilever electrode 174a, respectively 174b and the static electrode 176a, respectively 176b, increases continuously from which the distance in the direction of the lens 12th The ridge 14a, the boom electrode 174a, the static-see electrode 176a and the insulator layer 128 is formed as the web 14b, the boom electrode 174b, the static electrode 176b and the insulating layer per an electrostatic drive 182a respectively 182b.

Fig. 82b shows the behavior 176b of the apparatus 200 when an electrical voltage between the cantilever electrode 174a and the electrode 176a static respectively the boom electrode 174b and the static electrode. Within the electric drive 182a respectively 1 82b, an electric field 184a, respectively 184b is formed which leads to an attractive force between the cantilever electrode and the static electrode. The arrangement of the static electrodes 176a and 176b on the mold component 168 these are immobile relative to the boom electrodes 174a and 174b. Fig. 82b shows a deformation of the webs 14a and 14b and of the jib electrodes 174a and 174b by the electric fields 184a and 184b inherent forces 12 leads to a displacement of the lens 186 in the direction of the mold member 168, which

the distance between the cantilever electrode 174a, respectively 174b and the static electrode 176a, respectively 176b, at least in the area in which overlap the electrodes changes.

Depending on the polarity of the electric field and a repulsive force can be generated between the two electrodes, 12 leads to the displacement 186 of the lens away from mold component 168th With an arrangement of an electrostatic actuator 182 can be a simpler implementation of the static electrode are achieved, which enables manufacturing advantages. At the same time a flat mold component can be used instead of a curved shape 168 component 124th

In principle, it can be advantageous to the training and placement of the cantilever electrode and the static electrodes 174a b and 176a / b such coordinated with one another such that a linearized ratio of fitting between the electrode voltage U and the resulting deflection of the webs 14 and / or the optical structure results. Such an adjustment can be realized for example by an adapted geometry of the boom electrode and the static electrode having an axial extent different widths, so that the voltage U over the axial profile of the electrode produces a variable force between the electrodes by means of a variable electric field.

The electrostatic actuators allow the implementation of an initial adjustment to compensate for manufacturing tolerances as well as a dynamic focusing during operation. The operation of the electrostatic actuators can compensate for the property of the lands, tempe-in- duced changes optical characteristics of a lens automatically, carried out in terms of focusing on changing, relevant for the lens object distances.

FIG. 83a and 83b show the apparatus 200 in the mold component 168 is executed and the opaque material comprises a recess with a diameter D5, which corresponds substantially to the diameter D4 of the lens 12.

FIG. 84a shows the supporting structure 16 attached to the web 14, comprising a rectangular-shaped portion 166, whose end connected to the web 14 adjacent the lens 12 is disposed. Fig. 84b shows the fixed to the supporting structure 16 web 14, comprising a triangular shaped section 166 which tapers towards the supporting structure 1 6 now and the end connected to the web 14 adjacent to the lens 12 is arranged. Fig. 84c shows the fixed to the supporting structure 16 web 14, the 166 includes a portion in the form of an isosceles trapezoid which tapers toward the lens 12 back and positioned its connected to the web 14 to the end lens 12.

In principle, any conceivable form of embodiment of a portion 166 of the surface of a web 14 to imagine.

FIG. 85a is a to Fig. 84a identical shape of the portion 166 of the web 14. Fig. 85b shows a comparison with FIG. 85a reduced portion 166 which is positioned adjacent to the supporting structure 16 in the web 14. Fig. 85b shows a comparison with FIG. 85 a reduced portion 166 which is positioned adjacent the lens 12 in the web 14. Fig. 85d shows a fin 14, the two sections 166a and 166b includes and the portion 166a is disposed adjacent to the bearing structure 16 and the portion 166b adjacent to the lens 12 in the web 14. Fig. 85e shows a section 166, which runs parallel to the outer edge of the web 14 along the direction of the supporting structure 16 toward the lens 12 with the web 14 ver-bundenes end.

The extension, number, placement and orientation of the section 166 in the webs 14 is arbitrary for operation of the device.

FIG. 86a shows a device 210, analogous to device 120 in which the ridges 14a and 14b similarly to Fig. Are formed 82 and 83, boom electrodes 174a and 174b form and wherein the apparatus instead of the mold component 124 having the electrodes arranged thereon 126a and 126b the mold member 168 with the static electrodes 176a and 176b and the insulating layer 128 comprises.

Fig. 86b shows the arrangement of a ausheilbaren adhesive 134a and 134b adjacent to the surface FTL, via which the mold member 168 joined to the supporting structure 16. FIG. 86c shows the assembled state of the device in which the electrostatic actuators are 182a and 182b, configured such that in the area between the surface FTL and the Fonnbauteil 168 merely the respective first electrode 172a / 172b, the static electrode 176a / 176b, the insulator layer 128 and the adhesive 134a / 134b.

FIG. 87a illustrates device 210 in which the mold member is made 168 as a glass plate.

Fig. 87b shows device 210 of FIG. 80a, at the side facing away form the component on the surface facing away from the lens 12 is a single stationary lens 86a and at the opposite, the lens surface 12 a two-layer immovable

Lens 86b comprises and the optical axes 28a, 28b and 28c substantially coincide. The stationary lenses 79a and 79b thereby form a lens stack in the mold component 168th

FIG. 88a illustrates device 210 in which the mold member 168 is carried out as an opaque body with a diameter D5 and the material recess is formed around the optical axis 28 of lens 12 is substantially concentric.

Fig. 88b shows device 210 in FIG. 81 a, in which an optical effective area is placed 188 in the area of ​​diameter D5 and the optical axis 28b of the optical effective surface 188 coincides with the optical axis 28a of the lens 12 substantially. Vorliegendes embodiment, the optical effective area is as a lens, but it can be any optical structure according to previous versions.

Fig. 89 shows a device according to Fig. 88b, to the higher the adhesive layer 162 to a device 210 of FIG. 87 is arranged such that the optical axes of lenses 12a and 12b, the non-moving lenses 79a and 79b and the optical effective surface 188 in the substantially match.

FIG. 90a shows the cross section of two adjacent cells 56a and 56b, which are designed depending on the purposes of the device 210 of FIG. 86a, in which the cells 56a and 56b have the distance X3 each other and in which the supporting structure 16, analogous to FIG. 62a grooves 148a and 148b includes.

Fig. 90b shows the cross section of an unjoined mold member 192, wherein each of the two portions 196a and 196b of the mold member 168 with spaced static electrode 176, insulator layer 128 and active surface 188 of optical device 88b corresponds. The two sections 196a and 196b of the mold member 168 are integrally formed. The mold member also includes springs 152a and 152b, which are formed to be arranged on the grooves 148a and 148b.

Fig. 90c shows a device 220 that, from the cells 56a and 56b of FIG. 83a and the mold member 192 of FIG. 90b, in which the springs 152a and 152b disposed at the grooves 148a and 148b and bonded via an adhesive 134 the device four electrostatically-matic actuators 182a-d includes and the peripheral structures grooves 148a-b and springs 152a-d the joining zone between mold member 168 and supporting structure 16 define.

According to the embodiment of FIG. 90, it is possible to have multiple cells 56 to produce side by side, which may have an identical or individual for each adjacent pair of cells distance X3.

Fig. 91 shows a device similar to FIG. 61, wherein said electrostatic actuators are configured in the form of electrostatic actuators 182a and 182b.

Fig. 92a shows device 30 of FIG. 7, in which 16 rectangular formed first electrodes 172a-d are disposed on parts of the webs 14a-d and parts of the supporting structure, each comprising 84a a portion 166a-d of FIG.. Fig. 92b shows selbige device in which the ridges 14 terminate in a innliegenden frame 62 which part of the supporting structure 16 is.

Fig. 93 shows device 30 of FIG. 7, in which 16 rectangular formed first electrodes 172a-d are disposed on parts of the webs 14a-d and parts of the supporting structure, each comprising a trapezoidal formed portion 166a-d, which for itself disposed supporting structure 16 tapers and the end connected to the respective web 14a-d adjacent the lens 12th

Fig. 94 shows a disclosed embodiment of FIG. 93, in which only two opposing webs 14a-b are formed.

Fig. 95 shows a device similar to FIG. 1 1 in the 16 first electrodes 172a-d are arranged on portions of the webs 14a-d and part of the supporting structure, extending the outer edge pa-rallel to the outer edges of the webs 14a-d and the is one section each 166a-d of FIG comprise. 84a, which connected to the respective web 14a-d the end adjacent to the lens 12.

FIG. 96 illustrates an embodiment of FIG. 70, wherein the first electrode 1 72a-b each comprise a trapezoidal section 166a-b, which tapers to the supporting structure toward and its end connected to the respective web 14a and b adjacent to the lens 12 is arranged.

FIG. 97 illustrates an embodiment of FIG. 1 1, wherein the first electrodes 172a-b each comprise a trapezoidal section 166a-b, which tapers to the supporting structure toward and its end connected to the respective web 14a-d adjacent the lens 12 is arranged.

Fig. 98 shows an imple mentation according to FIG. 12, wherein the first electrodes 172a-c each comprise a trapezoidal section 166a-c, which tapers to the supporting structure toward and which with each ridge 14a-c end connected adjacent the lens 12 is arranged.

Fig. 99 shows a device 230 according to device 210 of FIG. 88b, in which the mold member 168 analogous to FIG. 90c is a groove 148, a spring 1 52 and adhesive 134 together with the supporting structure 16 and at the at the webs 14a 75 form a lens stack 76 and 14b similar to FIG. 25 is a co-moving lens 75 is arranged on additional structures 74a and 74b and the lens 12 and the lens is moved along.

Fig. 100 shows a device 240 according to device 210 of FIG. 88a, in which the mold member 168 analogous to FIG. 90c is joined via a groove 148, a spring 152 and adhesive 134 to the supporting structure 16 and facing away on the mold component 168 end of the supporting structure 16 of apparatus 70, a glass wafer 86 is arranged, to which on the facing the lens 12 and the lens 12 from the side facing each one motionless lens 79a-b are formed with arranged thereon layers 81 from, and 81 cd, wherein the layers spaced from the supporting structure 16 are arranged.

Fig. 101 shows device 230, on the surface of the supporting structure 16a, which points in the direction of the reference plane 18, device 240 is joined via an adhesive layer 162 such that the optical axes 28a-e of the lenses 12a, 12b, 75 and 79a and 79b substantially coincide. Generally, any order and combination of lenses 12, co-moving lenses 75 and stationary lens 79 and optical active-surfaces 188 and / or the devices described possible.

Fig. 102 shows an apparatus 250 similar to FIG. 81 a, in which the supporting structure 16 is formed of a polymer material and on the lens 12 facing away from the end of the supporting Stmktur 16, a glass wafer 86 is arranged, of which the lens 12 surface facing away from a motionless lens 79 includes at layers arranged 81a and 81b, which extend from the stationary lens 79 from the outer ends of the glass wafer 86th The two optical axes 28a and 28b of the lens 12 of the stationary lens 79 are essentially identical.

Fig. 103 shows a device in which two cells 56a and 56b adjacent to each other at a distance X4 each are arranged analog device 220. The two cells 56a and 56b are formed analogous device 250. The immobile lens 79a with the arranged thereon layers 81 a and 81 b, which stagnant lens 79b with it angeordne- th layers 81 c and 81 d and the parts 16a and 16b of the supporting structure 1 6 are each integrally formed.

Fig. 104 shows a device 260, the device 150 expands such that between the arranged on the stationary lens 79 layers 81 a and 81b and the reference plane 18 is a further supporting structure 16b is arranged, and the reference plane 18, of the lens 12 facing surface of the image converter respectively imager 164 is disposed along the optical axis 28 facing away from the lens 79 of the stationary side of the further supporting structure 16b.

Fig. 105 shows a device 270 which is formed of two juxtaposed devices 260 and their cells are joined in the sense of the device 220 of FIG. 97 to each other. Device 270 exemplifies the state of two adjacent cells 56 after their production in a multiple repeat at the wafer level. After manufacturing it is possible to separate the cells from one another or to leave them arranged side by side in the sense of multiple channels of an overall optical system.

The components described in the above embodiments, in particular thermally influenceable webs, heating elements for heating the webs, adhesives for fixing a new initial position and electrostatic actuators for deflection of the webs with a curved mold member or arm electrode can be combined in devices with each other.

Although in previous embodiments always adhesive films were 78 and 92 shown for joining different segments of other structures 74 and the supporting structure 16, the layers 78 and 92 in principle also comprise other mating substances or materials such as boundary layers by thermal fusion of the respective segments arise.

Lens stack 78, in addition to glass wafers 86 also comprise Spacerwafer defining a defined distance between two adjacent elements of an apparatus.

Although in previous embodiments always lenses or lens fields have been shown on the webs and / or the supporting structure, this can be, as al-ready indicated, in principle, to any form of optical structures and / or elements such as aspheres, free surfaces orm, diffractive structures , mirrors, prisms or lens arrays act. Lens array can consist of several identical or different, also combinable, just listed optical elements. Each optical element may comprise a transparent, reflecting or absorbing areas which may additionally differ in spectral regions, or the polarization effect.

Although in the previous embodiments, the first electrode 122 and the second electrode 126 were always spaced by an insulator layer 128, each spacer is possible in principle conceivable, eg. Air also.

Although in the previous embodiments, the cantilever electrodes electrodes 174 and the static electrodes were 176 always spaced from an insulator layer 128, any possible spacer is conceivable in principle, eg. Also air.

Some of the above embodiments described an apparatus which includes an optical structure and at least two webs, which in each case connect the optical structure with a supporting structure and the webs are formed to prevent movement of the optical structure with respect to a reference plane to enable.

Some embodiments showed that the movement of the webs and hence the optical structure of a thermally induced change can counteract an optical characteristic of the optical structure.

The webs are preferably polymeric optical components with integrated mechanical structures that enable a thermally induced, axial position change of the optical structure. The webs are flex assemblies monomorphic, so running a ply, or bimorph, so two layers, executed and thus analogous to effectively bimetallic strip. Here, the thermally induced motion of the webs are designed so that they will reach a likewise thermally induced change in an optical characteristic of the optical structure, for example, the focal length of a lens, and counteracts at least partly a Athermisierung. By dimensioning-tion of the lands any, deterministic travel of the webs can be achieved.

In addition, an array of heating elements on the webs to the local change in the temperature of the webs is also conceivable, possibly. In the form of electrical, ohmic resistors The heating elements can be made of printed, splintered, evaporated and electrically conductive heating structures and be straight, curved or shaped meander. In the case of lenses, by heating of the electric heating of the distance of the lenses to a fixed base, for example, the plane in which there is an image sensor of a camera, be changed and among others a vote

focusing occur, so an autofocus driving can be realized. At the same time, the heating power and thus the deflection of the individual webs can be controlled separately from each other, so that both a parallel displacement of the optical structure in space along the optical axis as well as tilting of the optical structure is possible.

The webs can connect directly to the housing material, this is not carried out preferably transparent. Alternatively, the webs may housing side in a the whole structure surrounding frame lead from the web material, the gaps adjoining the housing.

Respect to the optical structure of many identical or non-identical configurations are possible, as described in the figures. The constructions each consist of an optical structure, webs, possibly a frame and / or a housing and are arranged side by side and may be parallel, that is in the same working steps, manufactured.

The movement of the optical structure along the optical axis is achieved with single-ply webs by a differential expansion of webs and the surrounding housing with a temperature change. In a single-layer structure made the opti-see structure and the holding webs of the same material, the material having a larger thermal expansion coefficient than the surrounding housing material. If the temperature rises, the connecting material expands more than the surrounding housing. As a result of at least two-sided suspension and a predicament of the optical structure, the optical structure is moved along the optical axis.

The movement along the optical axis is achieved by differential expansion of the materials of two-ply webs in the case of two-ply webs. Here, the difference in expansion to the case is irrelevant. The deflection resulting from different coefficients of expansion, CTE, the layer materials. When the layer sequence comprises a smaller CTE below and above a greater CTE, then at a temperature change is a downward movement. Alternatively, if the layer sequence comprises below a larger CTE and above a lower CTE, so at a temperature change is an upward movement. The layer structure can be implemented continuously or intermittently. If the layer structure continuously, the optical structure with the same materials and in the same sequence can be formed, as are the webs. The choice of materials defined in this case simultaneously the mechanical and optical properties. For example, an achromatic lens, which consists of two layers, implemented, the pairing of materials is carried out in accordance with the Abbe numbers thereof follow the CTEs of the materials determine the direction of movement when the temperature increases.

Alternatively it can be implemented, a discontinuous layer structure. In this case, the optical structure and the webs of different materials, or be formed in a different sequence, and more than two layers. In this case, the choice of the material takes place after the mechanical properties, in consideration of the decoupling of the optical properties. Using the example of the above achromatic lens pairing of materials is carried out according to the Abbe numbers. From this follow the CTE of the materials. A different sequence of layers and expansion in the areas of the lands and the optical structure allows a free choice of the direction of movement when the temperature rises despite the specified CTE.

In addition, a stack of any other optical structures is possible. The corre-sponding retaining elements in the vertical direction along an optical axis, mechanically above it on the lands and / or coupled underlying cantilevered layers and perform the same movement. Alternatively, the retaining elements may also be coupled to the housing and to move independently of other layer sequences in the stack. Immobile, fixed lenses of the lens stack can have continuous glass wafer.

It is advantageous that the described arrangements generally allow thennisch influenced position of optical components made of polymeric materials. Particularly relevant are lenses that moves along the direction of the normal of the image plane who-the. With correct design, the thermally induced change in the distance of the main plane can be a lens / a lens to their / its image plane can be chosen so that it corresponds to the thermally induced change in focal length. Consequently, the image plane of the lens / lens is always at the same axial position, whereby even with a changing temperature is always a sharp picture can be realized. This allows the use field of polymer optics is substantially expanded. The assemblies can be manufactured in a multiple repeat to Wafcr- level, thus allowing a further cost reduction.

By using electric heating elements, the temperature, and therefore controlled by -bending the holding structures and ultimately the axial position of the lens independent of the ambient temperature, which can be used among other things for an active Fokussie-tion, for example in the form of an autofocus.

By specifically different deflection of the holding structures of the lenses, a tilt can be achieved.

Some of the above exemplary embodiments showed a possibility of setting a specific position and tilting of the optical structure by bending the web structures and fixing the position after adjustment by means of UV-curing adhesive. This is the compensation of manufacturing tolerances polymeric optical components and in particular the coordination of the image position of lenses, especially after a successful addition of optics and imager wafers, possible. Optionally vorhande plans additional devices, such as thermally or electrostatically influenced lands, continue to provide the thermally influenced position of optical components made of polymeric materials. Electrostatic actuators are arranged in accordance with embodiments together with heating structures for heating the webs. Furthermore deflectable with heating elements and / or electrostatic actuators thermally influenceable webs with egg-nem adhesive can be adjusted in a direction different from the original initial position position.

More of the above embodiments showed foregoing explanations that an applied voltage between the electrodes of the electrostatic actuator can be used to allow the displacement of the optical structure in space. The actuation takes place by utilizing an electrostatic field, which results from the application of an electrical voltage between the electrodes of the electrostatic actuator. If necessary, an additional electrode array can be used with, if necessary curved, continuous profile to implement an electrostatic drive to a supporting struc-ture. By minimizing the distance, respectively, of the gap between the electrodes of an electrostatic drive the voltage required for moving can be reduced.

A movement along an optical axis is achieved by changing the anlie-ing voltage between a rib and an electrode shape. In this case, each web can be subjected to a different voltage, so that for each web results in a different path and in addition to a movement of the optical structure along the optical axis, a tilting of the optical structure can be obtained.

In addition, the actuators can be used to adjust the axial position of the optical structures with respect to the imager as a function of the object distance in order to achieve the best possible picture ity torment and implement an autofocus.

After production of the described optical structures including Häusungskomponen th joining of the mold components, singly or in combination at the wafer level, the feature lens side via a curved, continuous mold. The mold components are used as an electrode support and are provided with the respective second electrode of the electrostatic on-drives. At least one of the electrodes, web or shaped electrode, is provided with an insulation layer which may be applied by evaporation or sputtering, or through an additional molding of polymers, such as the electrodes.

The presented devices can be next to each other produced in any embodiment in the form of many components and systems in wafer-level manufacturing and in high precision and connected to a plurality of components. It is especially possible to connect an optical wafer with an imager wafer and subsequently adjusted by use of the actuators in each channel, the optimum focus position.

An optimum function of the optical devices can be ensured by, be adapted to the axial positions of the optical structures, which may be designed as lenses priority after completion of assemblage of the individual lens positions by actuators, in particular thermal or electrostatic. This enables an optimal alignment of the optical structures with respect to a reference plane, and hence the compensation of the sequence occurring in manufacturing and joint tolerances resulting deviations from desired parameters may be attained.

General permit arrangements described a compensation of manufacturing tolerances polymeric optical components and in particular the dynamic coor-determination of the image position of lenses in terms of autofocus. This allows the use field of polymer optics is substantially expanded. The arrangements can be made in multiple users at the wafer level, thus allowing a further cost reduction. It can be added in particular the entire optical wafer having an imager wafer, and each individual module can be brought about by a choice of the driving voltage or driving voltages to the optimal focus position. By specifically different deflection of the webs and hence the associated optical structures also a tilting of the optical structures can be obtained.

It was explained that the webs which connect the optical structure to the supporting structure and to which an electrostatic drive is arranged, may be formed such that a portion of the webs at least partially out of the plane of the respective crosspiece in the direction of the corresponding second electrode is deflected, so as to enhance the efficiency of the electrostatic drive.

The actuators can be miniaturized and manufactured in wafer-level technology. At the same time the actuators can both compensate for manufacturing tolerances as also allow for variable focusing in the operation of the overall optical system.

claims

An apparatus comprising:

an optical structure (12);

at least two webs (14; 14a-p), each connecting the optical structure (12) with a supporting structure (16); and

and said supporting structure (16), wherein the adhesive (102) is effective after the hardening of which a predetermined alignment of the optical structure (12); a curable adhesive (102) between the webs (14a-p 14) with respect to the reference plane (18) to effect.

Device according to claim 1, wherein the webs (14; 14a-p) are formed to pass through a heating of the webs (14; 14a-p) a deformation of the webs (14; 14a-p) and a movement of the optical structure (12 ) relative to a reference plane (18) to effect.

Device according to claim 2, wherein the relative movement of the optical structure (12) to the reference plane (18) of a thermally induced change in an optical characteristic of the optical structure (12) counteracts.

Device according to claim 2 or claim 3, wherein the at least two webs (14; 14a-p) a first layer (34a: 34b) and a second layer (36a; 36b) which are relatively different from each other deflectable.

Device according to claim 4, wherein the first layer (34a; 34b) and the second layer (36a; 36b) comprise different thermal expansion coefficients.

Device according to claim 4 or claim 5, in which the first layer (34a; 34b) extends from the optical structure (12) to the supporting structure (16), and wherein the second layer (36a; 36b) of the first layer ( 34a; 34b) is partially or completely covered.

Device according to claim 6, wherein the second layer (36a; 36b); disposed partially covered, at a distance from the optical structure (12) and / or the supporting structure (16), the said first layer (34b, 34a).

include a constant or a varying thickness Device according to one of claims 4 to 7, wherein the first layer (34a;; 34b) and / or the second layer (36b 36a).

Device according to claim 8, wherein the thickness of the first layer (34a; 34b) and / or the second layer (36a; 36b) at least changes continuously over a portion of the length, or in which the thickness varies discontinuously.

comprise, relative to the first (34a; 34b) Device according to one of claims 4 to 9, wherein the at least two webs (14;; 14a-p) of at least one further layer (37b 37a) and second layers (36a; 36b ) is different deflectable.

Device according to one of claims 4 to 10, wherein the optical structure (12) a layer (34c), wherein the layer of the optical structure and the first layer (34a; 34b) of the webs (14; 14a-p) of the same material are formed.

The apparatus of claim 11, wherein the optical structure (12) a further layer (36c), said further layer (36c) of the optical structure (12) and the second layer (36a; 36b) of the webs (14; 14a- p) are formed of the same material.

Device according to claim 1 1 or claim 12, wherein the layer (34c) of the optical structure (12) and the first layer (34a; 34b) of the webs (14; 14a-p) and / or the further layer (36c) of the optical structure (12) and the second layer (36a; 36b) of the webs (14; 14a-p) are integral.

Device according to claim 1 or claim 2, wherein the at least two webs (14; 14a-p) comprise a layer which has a higher temperature coefficient of expansion than the supporting structure (16).

The apparatus of claim 14, wherein the layer has a constant or a continuously or discontinuously changing thickness.

The apparatus of claim 15, wherein the webs (14; 14a-p) are integral and the optical structure (12).

Device according to one of claims 14 to 16, wherein the optical structure (12) comprises a first layer (34c), said first layer (34c) and the layer of the webs (14; 14a-p) are formed of the same material.

The apparatus of claim 17, wherein the optical structure (12) a further layer (36c) on the first layer (34c).

Device according to one of claims 1-18, in which the longitudinal center line (38) of the webs (14; 14a-p) intersects an optical axis (28) of the optical structure (12) or on an optical axis (28) of the optical structure ( 12) runs past.

Device according to one of claims 1 to 19, comprising:

one or more heating elements (52a-j) arranged on or in the webs (14; 14a-p) are arranged.

Device according to one of claims 1 to 20, wherein the supporting structure (16) comprises a portion (62) from the web material.

Device according to one of claims 1 to 21, wherein the optical structure (12) one or more optical elements (12; 146,142;; 144).

Device according to one of claims 1 to 22, wherein said optical element has transparent, reflecting or absorbing regions (12; 146,142;; 144).

Device according to one of claims 22 or 23, wherein the optical element (12; 142; 144; 146) comprises a lens, an aspherical lens, a free-form surface, a diffractive structure, a mirror, a prism or a lens array, which or from identical non-identical cells which are each designed as a lens, aspheric, free-form surface, diffractive structure, mirror or prism, or a combination thereof.

25. Device according to one of claims 1 to 24, with at least one additional optical structure (75: 79; 188), said additional optical structure (75; 78; 188) loading delay of the optical structure (12) is arranged so that the optical axes (28) substantially coincide.

26. The device is bonded to one of claims 1 to 25, wherein a further support structure (16b) to the carrying structure (16a).

arranged on the supporting structure (16) or at the optical structure (12) 27. Device according to one of claims 1 to 26, wherein the at least one additional optical structure (75; 79;; 188) over further structures (81 78) is.

28. The apparatus of claim 27, wherein the additional structures (78; 81) are arranged on the further optical structure (12) by adhesive (78).

29. The device according to any one of claims 27-28, wherein said additional optical structure (79; 188) a glass layer (86) and at least one optical element (79a) which is mounted on the glass layer (86).

30. A method for manufacturing a device having an optical structure, comprising:

at least two webs (14; 14a-p), each of which connects the optical structure (12) with a supporting structure (16), said method comprising the step of:

Forming the webs (14; 14a-p) to a movement of the optical structure (12) to allow relative to a reference plane (18);

Positioning a curable adhesive (102) between the webs (14; 14a-p) and the supporting structure (16); and

Curing the adhesive (102) to effect a predetermined alignment of the optical structure (12) with respect to the reference plane (18).

31st The method of claim 30, wherein the step, the curing of the adhesive (102) comprises the following:

Setting a curing temperature or curing time dependent on a desired tilting or a desired distance of the optical structure (12) with respect to the reference plane (18).

A method according to claim 30 or claim 31, wherein the adhesive (102) comprises a UV-curable adhesive.

A method of deflecting an optical structure (12), which was in accordance with any one of claims 30-32 prepared from its rest position by deformation of the webs by means of

Applying the webs (14; 14a-p) deforming force on the webs (14: 14a-p) or the optical structure (12) or

Changing the ambient temperature or by heating an electrical heating element (52a-j) to the webs (14; 14a-p) and of the web material.