Specification
PHOTOELECTRIC CONVERSION DEVICE AND METHOD FOR
MANUFACTURING THE SAME
5 TECHNICAL FIELD
The present invention relates to a photoelectric
conversion device having high conversion efficiency, and
a method for manufacturing the same.
10 BACKGROUND ART
From the viewpoint of effective utilization of
resources or protection against environmental
contamination, a solar cell for directly converting
sunlight into electrical energy has received much
15 attention in recent years and various researches and
developments of the solar cell are under progress.
Most of the solar cells use crystalline silicon or
amorphous silicon as a. material for photoelectric
conversion. The photoelectric conversion efficiency to
20 represent the property of converting light energy of
sunlight into electrical energy is higher in a
crystalline silicon solar cell compared to an amorphous
silicon solar cell. As such, the crystalline silicon
solar cell has been conventionally used more often as a
25 solar cell. However, since the crystalline silicon solar
cell required lots of energy and time for growing silicon
crystals, it has low productivity and high cost.
As compared with a crystalline silicon solar cell,
the amorphous silicon solar cell. is advantageous in that
30 it can absorb and use light with a. broader wavelength
range, a substrate made of various raw materials can be
selected, and a. cell with a large area can be easily
prepared. Further, without need for crystallization, it
can be produced at low cost with favorable productivity
compared to a crystalline silicon solar cell. However,
5 the photoelectric conversion efficiency is lower than
that of a crystalline silicon solar cell.
In addition to a solar cell in which crystalline
silicon or amorphous silicon is used, there is a dye
sensitization solar cell which uses an electrode composed
10 of a porous metal oxide semiconductor loaded with a dye.
As compared with a silicon solar cell, the dye
sensitization solar. cell is advantageous in that the raw
materials required for manufacturing the cell are less
limited in terms of resources, and the cell can be
15 manufactured by a printing system or a flow production
system, without need for a vacuum equipment and, hence,
has low manufacturing cost and equipment cost.
A common. dye sensitization solar cell includes a
working electrode composed of a porous metal oxide
20 semiconductor layer formed on a surface of a transparent
conductor layer and loaded with a dye and a counter
electrode composed of a transparent or opaque conductor
layer and/or a catalyst layer and has a configuration in
which the working electrode and counter electrode are
25 arranged to face each other while an electrolyte layer is
disposed between them. As a porous metal oxide
semiconductor layer, titanium oxide is used. As a dye, a
sensitizing dye like ruthenium complex is used. In
addition, as an electrolyte layer, an electrolyte
30 containing iodine as a major component is used.
As for the porous metal oxide semiconductor layer
2
in a dye sensitization solar cell, for example, a porous
titanium oxide layer, dispersion paste of titanium oxide
particles is generally prepared, coated on the surface of
a transparent conductor layer, and dried followed by
5 calcination at 350°C to 450°C under the purpose of
enhancing binding state among the particles and improving
electron diffusion property (see, Patent. Document 1 to be
described below, for example).
As for the dye sensitization solar cell in which a.
10 resin (polymer) is used as a base, it has been tried to
form a porous titanium oxide layer by calcination at a
low temperature at :which. the resin (polymer) is not melt
(see, Non-Patent Document. 1. to be described below, for
example). In addition, with regard to a method of
15 producing a porous metal oxide semiconductor layer in a
dye sensitization solar cell which uses a resin (polymer)
as a base, a method of pressing a metal oxide particle
layer is known as a method of preparing a porous metal
oxide semiconductor layer (see, Non-Patent Document 2 and
20 Patent Document 2).
In addition, a surface modification. method based on
plasma treatment of a porous titanium dioxide layer is
known (see, Patent Document 1 and Patent Document 3 to be
described below, for example).
25 In addition, since amount of adsorbed water and
amount of hydroxyl group on a surface of an oxide
semiconductor can be calculated by measuring pressure
change due to chemical species desorbed from the surface
of an oxide semiconductor or amount change of desorbed
30 chemical species in accordance with increasing the
temperature on a solid surface at constant rate and.
3
analyzing the adsorbed chemical. species, and also
adsorption amount, adsorption state on the surface, or
desorption process from the surface, it is established as
a thermal desorption analysis (see, Non-Patent Document 3
5 to be described below, for example).
CITATION LIST
PATENT DOCUMENTS
Patent Document 1: Japanese Patent Application Laid-Open
10 No. 2006-310134 (paragraphs 0017 to 0028)
Patent Document 2: WO 00/72373 (claim 1)
Patent Document 3: Japanese Patent Application Laid-Open
No, 2004-247104 (paragraphs 0015 to 0019)
NON-PATENT DOCUMENTS
15 Non-Patent Document 1: UCHIDA Satoshi, SEGAWA Hiroshi,
"Film type dye sensitization solar cell as flexible
device", Functional Materials, Vol. 29, No. 10, 29-35
(20009) (3. Stability of titanium oxide electrode used
for film type dye sensitization solar cell, 4. Microwave
20 calcination technique for titanium oxide electrode).
Non-Patent Document 20 H. Lindstron of al., "A New Method
for Manufacturing Nanostructured Electrodes on Plastic
Substrates", Nano lett., Vol. 1, No. 2, 97-100
(2001)(E.xperimental Section, Result and Discussion)
25 Non-Patent Document 3: HIRASHITA Norio, UCHIYAMA, Taizou,
"Quantitative analysis of gas released from materials for
semiconductor integrated circuit measured by thermal gas
desorption analysis", Analytical Chemistry, 43, 757
(1994).
30
SUMMARY OF THE INVENTION
PROBLEMS TO BE SOLVED BY THE INVENTION
According to Patent Document 1, a calcination
process at a high temperature of from 350°C to 450°C is
adopted under the purpose of enhancing binding state
5 among the particles in a porous metal oxide semiconductor
layer and improving electron diffusion property. Thus, a
usable base is limited to those made of materials with
high heat resistance, for example, glass, and therefore
production cost like raw material cost for a base used
10 for a dye sensitization solar cell or cost of energy
consumed for manufacturing the solar cell is quite high.
In addition, according to Non-Patent Document 1,
for a dye sensitization solar cell in which a resin
(polymer) is used as a base, it is tried to form a porous
15 titanium oxide layer by calcination at a low temperature
at which the resin (polymer) is not melt. However, the
conversion efficiency is low, the porous titanium oxide
layer formed by the low temperature calcination is easily
broken, and durability of a cell in which the porous
20 titanium oxide layer is used is poor. There are also
problems in that the calcination time is relatively long
for the low temperature calcination and thus it is
disadvantageous as a process for large scale production.
In addition, according to a method of producing a
25 porous metal oxide semiconductor layer by pressing the
metal oxide particle layer as described in Non-Patent
Document 2 and Patent Document 2, high pressure like
several hundred kgf/cm2 needs to be used just for
pressure treatment, Thus, a hydraulic device with high
30 pressure is required. Further, from the viewpoint that
the roll used for delivery of pressure in a continuous
5
production device like roll to roll is easily worn out or
broken and the processing speed is slow, it is an
inappropriate method for continuous production.
For forming a porous metal oxide semiconductor
5 layer to constitute a dye sensitization solar cell, a
calcination treatment at a high temperature is required.
A base and a transparent electrode consisting of a
transparent conductor layer, which are used for the cell,
are also required to have heat resistance. In this
10 regard, since a common transparent electrode like ITO has
no heat resistance, it is necessary to use fluorine-doped
tin oxide, which is a transparent electrode with
particularly excellent heat :resistance. However, the
fluorine-doped tin oxide has poor conductivity and is
15 inappropriate for use in a solar cell or the like which
requires a large area.
Further, to enhance the photoelectric conversion
efficiency of a dye sensitization solar cell, it is
important to improve characteristics of a porous metal
20 oxide semiconductor layer. Accordingly, improvements
like increasing the dye adsorption amount on a porous
metal oxide semiconductor layer, inhibiting reverse
electron process from a porous metal oxide semiconductor
layer, and increasing the interparticle or interparticle
25 electron diffusion property of the oxide particles of a
porous metal oxide semiconductor layer are required.
Further, although Patent Document 1 discloses that
the dye adsorption amount is increased by increasing a
concentration of a hydroxyl group on the surface by
30 plasma treatment of a. titanium dioxide layer and Patent
Document 3 discloses that. the conversion efficiency is
6
improved by plasma treatment of a titanium dioxide layer,
no description is given with regard to the concentration
of hydroxyl group on the surface and a concentration of
adsorbed water on a titanium dioxide layer.
5
SOLUTIONS TO PROBLEMS
The present invention is devised to solve the
problems described above, and an object of the invention
is to provide a photoelectric conversion device having
10 high conversion efficiency and a method for manufacturing
the device.
Specifically, the invention is directed to a
photoelectric conversion. device having a working
electrode on which a porous metal oxide semiconductor
15 layer is formed to support a dye (for example, the
transparent electrode 2 of the embodiments that are given
below), in which the concentration of the hydroxyl group
on the surface of the porous metal oxide semiconductor
layer is from 0.01 groups/(nm)2 to 4.0 groups/(nm)2.
20 The invention is also directed to a method for
manufacturing a photoelectric conversion device which
includes: a first step in which a porous metal oxide
semiconductor layer is formed on a surface of a working
electrode (for example, the transparent electrode 2 of
25 the embodiments that are given below); a. second step in
which the concentration of the hydroxyl group on the
surface of the porous metal oxide semiconductor layer is
controlled to be from 0.01 groups/(nm)2 to 4.0
groups/(nm)2; and a third step in which the porous metal
30 oxide semiconductor layer is caused to support a dye.
7
EFFECTS OF THE INVENTION
According to the invention, there is a working
electrode on which a porous metal oxide semiconductor
layer is formed to support a dye (for example, the
S transparent electrode 2 of the embodiments that are given
below) and the concentration of the hydroxyl group on the
surface of the porous metal oxide semiconductor layer is
from 0,01 groups/(nm)2 to 4.0 groups/(nm)2, and thus it
is possible to provide a photoelectric conversion device
10 which has higher conversion efficiency than a
photoelectric conversion device having the porous metal
oxide semiconductor layer that is formed by coating and
calcination of a solution containing dispersion of metal
oxide semiconductor particles.
15 Further, according to the invention, since there
are a first step in which a porous metal oxide
semiconductor layer is formed on a surface of a. working
electrode, a second step in which the hydroxyl group
concentration of the hydroxyl group on the surface of the
20 porous metal oxide semiconductor layer is controlled to
be from 0.01 groups/(nm)2 to 4.0 groups/(nm)2, and a
third step in which the porous metal oxide semiconductor
layer is caused to support a dye, it is possible to
provide a method for manufacturing a photoelectric
25 conversion device which has higher conversion efficiency
than a method for manufacturing a photoelectric
conversion device which has a step of forming the porous
metal oxide semiconductor layer by coating and
calcination of a solution containing dispersion of metal
30 oxide semiconductor particles.
S
BRIEF DESCRIPTION OF DRAWINGS
Fig. 1 is a diagram for explaining a configuration
of a dye sensitization photoelectric conversion device
according to an embodiment of the invention.
5 Fig. 2 is a diagram for explaining (A) a process of
forming a window electrode (working electrode) and (B) a
process of forming a counter electrode according to a
method for manufacturing the dye sensitization
photoelectric conversion device as described above.
10 Fig. 3 is a diagram for explaining the relation
between concentrations of a. hydroxyl group and adsorbed
water and the photoelectric conversion efficiency in a
titanium dioxide layer which is used for a dye
sensitization photoelectric solar cell of the examples of
15 the invention.
Fig. 4 is a diagram for explaining (A) the relation
between the concentrations of the hydroxyl group and the
photoelectric conversion efficiency, and (B) the relation
between the concentration of adsorbed water and the
20 photoelectric conversion efficiency in the titanium
dioxide layer as described above.
Fig. 5 is a diagram for explaining the relation
between the concentrations of the hydroxyl group and
adsorbed water and the photoelectric conversion
25 efficiency in the titanium dioxide layer as described
above.
Fig. 6 is a diagram for explaining the relation
between the concentration of the hydroxyl group and the
concentration of adsorbed water in the titanium dioxide
30 layer as described above.
Fig. 7 is a diagram for explaining (A) the relation
9
among an RF output, the photoelectric conversion
efficiency, the concentration of the hydroxyl group, and
the concentration of adsorbed water and (B) the relation
among the RF output, the concentration of the hydroxyl
5 group, and the concentration of adsorbed water according
to plasma treatment of the titanium dioxide layer as
described above.
Fig. 8 is a diagram for explaining (A) adsorption
of the hydroxyl group on a surface of the titanium
10 dioxide layer as described above, and (B) adsorption of
the hydroxyl group and water molecules on the surface of
the titanium dioxide layer as described above.
Fig. 9 is a diagram for explaining an example of
the thermal desorption spectrum as described above.
15
MODE FOR CARRYING OUT THE INVENTION
The photoelectric conversion device of the
invention preferably has a configuration that the
concentration of the hydroxyl group is from 0.01
20 groups/(nm)2 to 3.0 groups/(nm)2. According to such a
configuration, a photoelectric conversion device having
the photoelectric conversion efficiency of 30 or more can
be provided.
It is more preferable to have a configuration that
25 the concentration of the hydroxyl group is from 0.02
groups/(nm)2 to 2.0 groups/(nm)2. According to such a
configuration, a photoelectric conversion device having
the photoelectric conversion efficiency of 5°s or more can
be provided.
30 It is still more preferable to have a configuration
that the concentration of the hydroxyl group is from 0.05
groups/(nm)2 to 0.9 groups/(nm)2. According to such a
configuration, a photoelectric conversion device having
the photoelectric conversion efficiency of 7% or more can
be provided.
5 Further, it is preferable to have a configuration
that the concentration of the adsorbed water on the
surface of the porous metal oxide semiconductor layer is
from 0.03 pieces/(nm)2 to 4.0 pieces/(nm)2. According to
such a configuration, it is possible to provide a
10 photoelectric conversion device which has higher
conversion efficiency than a photoelectric conversion
device having the porous metal. oxide semiconductor layer
that is formed by coating and calcination of a solution
containing dispersion of metal oxide semiconductor
15 particles.
It is more preferable to have a configuration that
the concentration of the adsorbed water is from 0.03
pieces/(nm)2 to 3,5 pieces/(nm)2. According to such a
configuration, a photoelectric conversion device having
20 the photoelectric conversion efficiency of 3% or more can
be provided.
It is still more preferable to have a configuration
that the concentration of the adsorbed water is from 0.07
pieces/(nm)2 to 2.5 pieces/(nm)2.. According to such a
25 configuration, a photoelectric conversion. device having
the photoelectric conversion efficiency of 5% or more can
be provided.
It is even still more preferable to have a
configuration that the concentration of the adsorbed
30 water is from 0.2 pieces/(nm)2 to 2.0 pieces/(nm)2.
According to such a configuration, a photoelectric
conversion device having the photoelectric conversion
efficiency of 70 or more can be provided.
As for the method for manufacturing a photoelectric
conversion device of the invention, it is preferable to
5 have configuration that the concentration of the hydroxyl
group is controlled to be from 0.01 groups/(nm)2 to 3.0
groups/(nm)2. According to such a configuration, a
method for manufacturing a photoelectric conversion
device having the photoelectric conversion efficiency of
10 3% or more can be provided.
It is more preferable to have a configuration that
the concentration of the hydroxyl group is controlled to
be from 0.02 groups/(nrn)2 to 2.0 groups/(nm)2. According
to such a configuration, a method for manufacturing a
15 photoelectric conversion device having the photoelectric
conversion efficiency of 5% or more can be provided.
It is still more preferable to have a configuration
that the concentration of the hydroxyl group is
controlled to be from 0.05 groups/(nm)2 to 0.9
20 groups/(nm)2. According to such a configuration, a
method for manufacturing a photoelectric conversion
device having the photoelectric conversion efficiency of
7% or more can be provided.
Further, for the second step described above, it is
25 preferable to have a configuration that the concentration
of the adsorbed water on the surface of the porous metal
oxide semiconductor layer is controlled to be from 0.05
pieces/(nm)2 to 4,0 pieces/(nm)2. According to such a
configuration, it is possible to provide a method for
30 manufacturing a photoelectric conversion device which has
higher conversion efficiency than a. photoelectric
12
conversion device having the porous metal oxide
semiconductor layer that is formed by coating and
calcination of a solution containing dispersion of metal
oxide semiconductor particles.
5 It is more preferable to have a configuration that
the concentration of the adsorbed water is controlled to
be from 0.03 pieces/(nm)2 to 3.5 pieces/(nm)2. According
to such a configuration, a method for manufacturing a
photoelectric conversion device having the photoelectric
10 conversion efficiency of 3% or more can be provided.
It is still more preferable to have a configuration
that the concentration of the adsorbed water is
controlled to be from 0.07 pieces/(nm)2 to 2.5
pieces/(nm)2. According to such a configuration, a
15 method for manufacturing a photoelectric conversion
device having the photoelectric conversion efficiency of
5% or more can be provided.
It is even still more preferable to have a
configuration that the concentration of the adsorbed
20 water is controlled to be from 0.2 pieces/(nm)2 to 2.0
pieces/(nm)2. According to such a configuration, a
method for manufacturing a photoelectric conversion
device having the photoelectric conversion efficiency of
7% or more can be provided.
25 Regarding the second step described. above, it is
also preferable to have a configuration that the
concentration of the hydroxyl. group is controlled by
performing at least one of a plasma treatment, a UV
irradiation treatment, and a heat treatment of the
30 surface of the porous metal oxide semiconductor layer.
According to such a configuration, it is possible to
provide a method for manufacturing a. photoelectric
conversion device which has higher conversion efficiency
than a photoelectric conversion device having the porous
metal oxide semiconductor layer that is formed by coating
5 and calcination of a solution containing dispersion of
metal oxide semiconductor particles.
Further, it is preferable to have a configuration
that the plasma treatment is carried out under oxidizing
atmosphere. According to such a configuration, it is
10 possible to provide a method for manufacturing a
photoelectric conversion device which has higher
conversion efficiency than a photoelectric conversion
device having the porous metal oxide semiconductor layer
that is formed by coating and calcination of a solution
15 containing dispersion of metal oxide semiconductor
particles.
Further, it is preferable to have a constitution
that the plasma treatment is carried out by using any one
of parallel plate plasma, barrel plasma, microwave plasma,
20 ECR plasma, helicon wave plasma, hollow cathode discharge
plasma, surface wave plasma, and arc jet plasma.
According to such constitution, it is possible to provide
a method for manufacturing a photoelectric conversion
device which has higher conversion efficiency than a
25 photoelectric conversion device having a porous metal
oxide semiconductor layer that is formed by coating and
calcination of a solution containing dispersion of metal
oxide semiconductor particles.
Further, for the photoelectric conversion device
30 and the method for manufacturing the same according to
the invention, it is preferable to have a constitution
14
that the ratio a, which is defined with the concentration
of hydroxyl group and the concentration of adsorbed water,
i.e., concentration of hydroxyl group
(groups/(nm)2)/{ concentration of hydroxyl group
5 (groups/(nm)2) ± concentration of adsorbed water
(pieces/(nm)2)}, is 0.11 or more and 0.45 or less.
According to such constitution, it is possible to provide
a photoelectric conversion device which has the
photoelectric conversion efficiency of 3% or more and a
10 method for manufacturing the same.
Further, it is preferable to have a constitution
that the ratio a is 0.11 or more and 0,40 or less.
According to such constitution, it is possible to provide
a photoelectric conversion device which has the
15 photoelectric conversion efficiency of 5% or more and a
method for manufacturing the same.
Further, it is preferable to have a constitution
that the ratio a is 0.11 or more and 0.35 or less.
According to such constitution, it is possible to provide
20 a photoelectric conversion device which has the
photoelectric conversion efficiency of 7% or more and a
method for manufacturing the same.
Further, regarding the second step described above,
it is preferable to have a constitution that, by
25 controlling the concentration of hydroxyl group by
performing a plasma treatment of the surface of the
porous metal oxide semiconductor layer, the plasma power
(RF output) for the plasma treatment is 1.00 W or more and
700 W or less. According to such constitution, it is
30 possible to provide a photoelectric conversion device
which has the photoelectric conversion efficiency of 3%
15
or more and a, method for manufacturing the same.
Further, regarding the second step described above,
it is preferable to have a constitution that, by
controlling the concentration of hydroxyl group by
5 performing a plasma treatment of the surface of the
porous metal oxide semiconductor layer, the plasma power
(RF output) for the plasma treatment is 180 W or more and
660 W or less. According to such constitution, it is
possible to provide a photoelectric conversion device
10 which has the photoelectric conversion efficiency of 5%
or more and a method for manufacturing the same.
Further, regarding the second step described above,
it is preferable to have a constitution that, by
controlling the concentration of hydroxyl group by
15 performing a plasma treatment of the surface of the
porous metal oxide semiconductor layer, the plasma power
(RF output) for the plasma treatment is 300 W or more and
580 W or less. According to such constitution, it is
possible to provide a photoelectric conversion device
20 which has the photoelectric conversion efficiency of 7%
or more and a method for manufacturing the same.
Further, regarding the photoelectric conversion
device and method for manufacturing the same according to
the invention, it is preferable to have a constitution
25 that the metal oxide semiconductor particles consist of
at least one particle of titanium, zinc, tin, and niobium
oxide. According to such constitution, it is possible to
provide a photoelectric conversion device which has a
high photoelectric conversion efficiency and a method for
30 manufacturing the same.
Further, the metal oxide semiconductor particles
16
are titanium dioxide particles of brookite type or
anatase type. According to such constitution, it is
possible to provide a photoelectric conversion device
which has a high photoelectric conversion efficiency and
5 a method for manufacturing the same.
Further, it is preferable to have a constitution
that average primary particle diameter of the metal oxide
semiconductor particles is 5 nm or more and 500 nm or
less. According to such constitution, it is possible to
10 provide a photoelectric conversion device which has a
high photoelectric conversion efficiency and a method for
manufacturing the same.
Regarding the power generation characteristics of a
dye sensitization solar cell, it is very important to
15 control the amount of photosensitizing dye supported on a
porous metal oxide semiconductor layer for maximum use of
energy caused by light illumination. The most important
factor affecting the adsorption amount of a
photosensitizing dye is an amount of hydroxyl group or an
20 amount of adsorbed water on a surface of the porous metal
oxide semiconductor layer.
Kinetic energy of a gas molecule is in much lower
state than that of an electron. As such, by forming low
temperature plasma having a thermally non-equilibrium
25 state in which the electron temperature is much higher
than the ga.s temperature so that temperature of overall
system is relatively low, oxygen atom is efficiently
dissociated into an elemental nucleus (i.e., ion or
neutral radical) and electrons under oxidizing gas
30 atmosphere at low pressure, and it can stably form
oxidizing species in a low temperature region.
17
Under oxidizing gas atmosphere at reduced pressure,
according to a treatment including generating low
temperature plasma and exposing a porous metal oxide
semiconductor layer to the low temperature plasma (i.e.,
5 low temperature plasma treatment), it is possible to have
evaporation or dehydration condensation of adsorbed water
on a surface of the porous metal oxide semiconductor
layer and to control the concentrations of moisture and
hydroxyl group on a surface within a short time by using
10 a simple method.
On the other hand, when the porous metal oxide
semiconductor layer is heated under normal. atmosphere,
from the viewpoint that the latent heat of water is high
and energy for dehydration condensation between hydroxyl
15 group is very high, it is very difficult to control the
concentrations of moisture and hydroxyl group on a
surface of the porous metal oxide semiconductor layer.
In this regard, according to the invention, the
porous metal oxide semiconductor layer is subjected to
20 low temperature plasma treatment, and therefore
evaporation or dehydration condensation of adsorbed water
on a surface of the porous metal oxide semiconductor
layer can be conveniently achieved at low temperature
like temperature below heat resistant temperature of a
25 substrate such as a polymer resin without increasing the
temperature of a substrate. As such, it can be easily
applied for a dye sensitization solar cell in which a
polymer resin substrate is used as a base.
Since the dye sensitization solar cell of the
30 invention has a working electrode which consists of a
porous metal oxide semiconductor layer supported with a
dye, in which the hydroxyl group concentration on the
surface is controlled to 0.01 groups/(nm)2 to 4.0
groups/(nm)2 and the adsorbed water concentration on the
surface is controlled to 0.03 pieces/(nm)2 to 3.5
5 pieces/(nm)2 by a plasma treatment, a heat treatment, or
a UV treatment under oxidizing gas atmosphere, it has
high conversion efficiency and can be manufactured by a
low temperature process based on simple methods.
Herein below, with reference to the drawings,
10 embodiments of the invention are described in greater
detail by having a dye sensitization solar cell as an
example of a photoelectric conversion device which is
constructed to absorb light by photosensitizing dye
supported on a porous metal oxide semiconductor layer and
15 to extract the electrons of a photosensitizing dye, which
are excited by the light absorption, to outside through
the porous metal oxide semiconductor layer. However, the
invention can have any constitution which satisfies the
activity and effect described above, and it is not
20 limited to the embodiments. Further, the drawings given
below are drawn to help clear understanding of the
constitution of the invention, and the scale is not
exactly accurate.
[Embodiments]
25
Fig. 1 is a diagram for describing a configuration
of a dye sensitization photoelectric conversion device
according to an embodiment of the invention.
As illustrated in Fig. 1, the dye sensitization
30 photoelectric conversion device (dye sensitization solar
cell) 10 consists of a transparent substrate 1 such as
19
glass, the transparent electrode (negative electrode) 2
consisting of FTO (fluorine-doped tin oxide (IV) Sn02) or
the like, the porous metal oxide semiconductor layer 3
supported with a photosensitizing dye, the electrolyte
5 layer 4, the counter electrode (positive electrode) 5,
the counter substrate 6, and a. sealing agent (not
illustrated).
As for the porous metal oxide semiconductor layer 3,
a porous layer obtained by calcining microparticles of
10 titanium oxide Ti02 is generally used. On surface of the
microparticles which constitute the porous metal oxide
semiconductor layer 3, a photosensitizing dye is
supported..
The electrolyte layer, 4 is filled in a gap between
15 the porous metal oxide semiconductor layer 3 and the
counter electrode 5, and an organic electrolyte liquid
containing redox couple species such as I-/13- is used.
The counter electrode S consists of the platinum layer 5a
and is formed on top of the counter substrate 6.
20 When light enters the dye sensitization
photoelectric conversion device 10, the device 10
functions as a cell which has the counter electrode 5 as
a positive electrode and the transparent electrode 2 as a
negative electrode. Assuming that FTO is used as a
25 material of the transparent electrode 2, N719 is used as
a photosensitizing dye (not illustrated), titanium oxide
Ti02 is used as a material for the porous metal oxide
semiconductor layer 3, and redox species of I-/I3- are
used as a redox couple, and the principle of the dye
30 sensitization photoelectric conversion device 10 is
described as follows.
20
When photons transmitted the transparent substrate
1 and the transparent electrode 2 are absorbed by a
photosensitizing dye, the electrons contained in the
photosensitizing dye are excited from a ground state
5 (HOMO) to an excited state (LUMO). The electrons in an
excited state are extracted to a conduction band of the
porous metal oxide semiconductor layer 3 via an electric
bond between the photosensitizing dye and the porous
metal oxide semiconductor layer 3, and reach the
10 transparent electrode 2 through the porous metal oxide
semiconductor layer 3.
Meanwhile, the photosensitizing dye after losing
the electrons receives electrons from a reducing agent in
the electrolyte layer 4, for example, from I-! based on
15 the reactions 21- > I2 + 2e- and 12 + I > 13, and
produces an oxidizing agent, e.g, I3_ (binding product
of 12 and I-), in the electrolyte layer 4. Thus, the
produced oxidizing agent reaches the counter electrode 5
prepared by diffusion and, according to the reverse
20 reaction of the a.bove-described reaction, i.e., 11 - -> 12
+ I- and 12 + 2e. > 21-, it receives the electrons from
the counter electrode 5 and is reduced to become the
original reducing agent.
The electrons transferred from the transparent
25 electrode 2 to an external circuit complete an electric
work in the external circuit and are brought back to the
counter electrode S. As a result, the photon energy is
converted into the electric energy without leaving any
change in the photosensitizing dye or in the electrolyte
30 layer 4.
As a photosensitizing dye of the dye sensitization
21
photoelectric conversion device 10, a material capable of
absorbing light in visible light region, for example, a
bipyridine complex, a terpyridine complex, melocyanine
dye, porphyrin, and phthalocyanine, are generally used.
5 As a dye which is used singly,
cisbis(isothiocyanato)bis(2,2'--bipyridyl-4,4'-
dicarboxylic acid) ruthenium (11) 2 tetrabitylammonium
complex (common name: N719), which is one kind of a
bipyridine complex, is generally used as it has an
10 excellent photosensitizing dye performance. In addition,
cisbis(isothiocyanato)bis(2,2'-bipyridyl-4,4'-
dicarboxylic acid) ruthenium (II) (common name: N3),
which is one kind of a bi.pyridine complex, or
tris (isothiocyanato) (2, 2' :6' , 2"-terpyri-dyl-4; 4' , 4"-
15 tricarboxylic acid) ruthenium (11) 3 tetrabitylammonium
complex (common name: black dye), which is one kind of a
terpyridine complex, is generally used.
In particular, when N3 or black dye is used, a coadsorbent
is also used frequently. The co-adsorbent is a
20 molecule added for preventing association of dye
molecules on the porous metal oxide semiconductor layer 3,
and representative examples of the co-adsorbent include
kenodeoxycholic acid, taurodeoxy cholate, and 1-
decrylphosphonic acid. Those molecules have structural
25 characteristics that a carboxyl group or a phosphono
group is contained as a functional group which is easily
adsorbed onto titanium oxide of the porous metal oxide
semiconductor layer 3 and they are formed with a a bond
to prevent an interruption between dye molecules by
30 existing between dye molecules.
According to the method for manufacturing the dye
22
sensitization photoelectric conversion device (dye
sensitization solar cell) of the invention, a porous
metal oxide semiconductor layer is formed, the
concentrations of the hydroxyl group and adsorbed water
5 on a surface of the layer are controlled, and a. dye is
supported on the porous metal oxide semiconductor layer,
and thus it is possible to provide a photoelectric
conversion device and a method for manufacturing the same
which has higher conversion efficiency than a method for
10 manufacturing a photoelectric conversion device having a
porous metal oxide semiconductor layer that is formed by
coating and calcination of a solution containing
dispersion of metal oxide semiconductor particles.
By controlling that, in the porous metal oxide
15 semiconductor layer, the concentration of the hydroxyl
group is 0.05 groups/(nm)2 or more and 0.9 groups/(nm)2
or less, the concentration of adsorbed water is 0.2
pieces/(nm)2 to 2.0 pieces/(nm)2, and. ratio a is 0.11 or
more and 0.35 or less, a dye sensitization photoelectric
20 conversion device (dye sensitization solar cell) having
the photoelectric conversion efficiency of 7% or more can
be achieved. As used herein, ratio a represents
"concentration of hydroxyl group/(concentration of
hydroxyl group + concentration of adsorbed water)."
25 When a resin film is used as a base and the porous
metal oxide semiconductor layer is formed on a surface of
a transparent electrode formed on the base, the
conversion efficiency is preferably improved by heating
and calcining the porous metal oxide semiconductor layer
30 within a range in which the base is not deteriorated.
The heating within the range in which the base is not
23
deteriorated indicates the temperature of 170°C or lower
when PET is used as a base, for example. When the base
is PEN, it is 200°C or lower. Heating at the temperature
higher than that may cause a problem in production such
5 as distortion of a base.
Specific examples of the metal oxide semiconductor
particles that are used for forming the porous metal
oxide semiconductor layer include titanium oxide, tin
oxide, tungsten oxide, zinc oxide, indium oxide, niobium
10 oxide, iron oxide, nickel oxide, cobalt oxide, strontium
oxide, tantalum oxide, antimony oxide, lanthanoid oxide,
yttrium oxide, and vanadium oxide. If it can form a
porous metal oxide semiconductor layer after plasma
treatment, has electron conductivity in. a photoexcited
15 state, and can be photoelectrically converted to a
visible light and/or near infrared light region by
coupling to a. sensitizing dye, it is not limited to those
described above.
Material of the metal oxide semiconductor particles
20 may be a combination of plural metal oxides. For
sensitization of the surface of the porous metal oxide
semiconductor layer by a sensitizing dye, the conduction
band of the porous metal oxide semiconductor layer is
desirably located on a position at which it can easily
25 receive electrons from the photoexcited state of a
sensitizing dye. For such reasons, among the metal oxide
semiconductor particles, titanium oxide, tin oxide, zinc
oxide, and niobium oxide are used in particular. Further,
from the viewpoint of cost and environmental hygiene,
30 titanium oxide is used in particular. Preferably, one
type of the metal oxide semiconductor particles having
24
average particle diameter of 5 nm to 500 nm or a
combination of two or more types of them can be used.
As for the transparent conductor layer, it is not
particularly limited if it is a conductive material
5 having little light absorption in visible to near
infrared region of sunlight. However, metal oxides
having good conductivity such as ITO (indium-tin oxide),
tin oxide (including those doped with fluorine), and zinc
oxide, and carbon are preferable. Under the purpose of
10 promoting binding between the transparent electrode layer
and metal oxide particle layer, improving electron
transfer, or preventing the reverse electron process, it
is possible to have an. additional layer.
As for the transparent base, it is not particularly
15 limited if it is a material having little light
absorption in visible to near infrared region of sunlight.
It is possible to use a glass base such as quartz, a blue
plate, BK7, and lead glass and a resin base such as
polyethylene terephthalate, polyethylene naphthalate,
20 polyimide, polyester, polyethylene, polycarbonate,
polyvinyl butyrate, polypropylene, tet.raacetyl cellulose,
syndiotactic polystyrene, polyphenylene sulfide,
polyarylate, polysulfone, polyester sulfone, polyether
imide, cyclic polyolefi_n, phenoxy bromide, and vinyl
25 chloride.
The solvent used for preparing a solution which
contains a sensitizing dye used for treatment to support
the dye on metal. oxide semiconductor particles needs to
be a solvent which can dissolve the sensitizing dye and
30 mediate the dye adsorption onto the metal oxide
semiconductor particles. To dissolve the sensitizing dye,
25
it is possible to perform heating, adding a dissolution
aid, or filtering insolubles, if required.
As a solvent, a mixture of two or more types of the
solvent may be used. Examples of the solvent that can be
5 used include alcohol solvents such as ethanol, isopropyl
alcohol, and benzyl alcohol, nitrile solvents such as
acetonitrile and propionitrile, halogen solvents such as
chloroform, dichloromethane, and chlorobenzene, ether
solvents such as diethyl ether and tetrahydrofuran, ester
10 solvents such as ethyl acetate and butyl acetate, ketone
solvents such as acetone, methyl ethyl ketone, and
cyclohexanone, carbonic acid ester solvents such as
diethyl carbonate and propylene carbonate, hydrocarbonbased
solvents such as hexane, octane, toluene and xylene,
15 dimethyl formamide, dimethyl acetamide, dimethyl
sulfoxide, 1,3-dimethyl imidazolinone, N-methyl
pyrrolidone, and water, but not limited thereto.. As a
solvent, a mixture of two or more types of the solvent
may be used.
20 Film thickness of the porous metal oxide
semiconductor layer formed on a conductive surface of a
transparent base is preferably 0.5 μm or more and 200 μm
or less. If the film thickness is less than the range,
effective conversion efficiency is not obtained. On the
25 other hand, if the film thickness is thicker than the
range, it is difficult to perform the production
including that breaking or peeling occurs during film
formation and, due to the extended distance between a
surface layer of the porous metal oxide semiconductor.
30 layer and the conductive surface, generated charges may
not be effectively delivered to the conductive surface,
26
and as a result, favorable conversion efficiency is
difficult to obtain.
As for the sensitizing dye, a material which can
generally absorb light in visible light region, for
5 example, a bipyridine complex, a terpyridine complex, a
melocyanine dye, porphyrin, and phthal.ocyanine can be
used.
As a dye which is used singly,
cisbis(isothiocyanato)bis(2,2'-bipyridyl-4,4'-
10 dicarboxylic acid.) ruthenium (II) 2 tetrabitylammonium
complex (common name: N719), which is one kind of a
bipyridine complex, is generally used as it has an
excellent dye performance.
Further, examples of the sensitizing dye for
15 photoelectric conversion include azo dyes, quinacridone
dyes, diketopyrrolopyrrole dyes, squarilyum dyes, cyanine
dyes, mellocyanine dyes, tr_iphenylmethane dyes, xanthene
dyes, porphyrin dyes, chlorophyll dyes, ruthenium complex
dyes, indigo dyes, perylyene dyes, oxazine dyes,
20 anthraquinone dyes, phthalocyanine dyes, naphthal.oc_yanine
dyes, and a derivative thereof. However, if it can
absorb light and inject excited electrons to conduction
band of a porous metal oxide semiconductor layer
(electrode), it is not limited to them. When one or more
25 linking group is contained in the structure of the
sensitizing dye, it can be linked to a surface of the
porous metal oxide semiconductor layer so that the
excited electrons of photoexcited dye can be quickly
delivered to the conduction band of the porous metal
30 oxide semiconductor layer, and therefore desirable.
The electrolyte layer preferably consists of an
27
electrolyte, a medium, and additives. Preferred examples
of the electrolyte include a mixture of 12 and an iodine
compound (e.g., LiI, NaI, k(I, CsI, MgI2, CaI2, CuI,
tetraalkyl ammonium iodide, pyridinium iodide, and
5 imidazolium iodide) and a mixture of Br2 and a bromine
compound (e.g., LiBr). Of these, an electrolyte in which
LiI, pyridinium iodide, or imidazolium iodide is mixed as
a combination of 12 and an iodine compound is preferable,
but it is not limited to this type of combination.
10 Regarding the preferred electrolyte concentration,
12 is 0.01 M or more and 0.5 M or less and. the mixture of
iodine compound is 0.1 M or more and 15 M or less in the
medium.
The medium used for the electrolyte layer is
15 preferably a compound capable of exhibiting good ion
conductivity. Examples of the medium in solution state
that can be used include an ether compound such as
dioxane and diethyl ether, chain type ethers such as
ethylene glycol dialkyl ether, propylene glycol dialkyl
20 ether, polyethylene glycol. dialkyl ether, and
polypropylene glycol dialkyl ether, alcohols such as
methanol, ethanol, ethylene glycol monoalkyl ether,
propylene glycol monoalkyl ether, polyethylene glycol
monoalkyl ether, and polypropylene glycol monoalkyl ether,
25 polyhydric alcohols such as ethylene glycol, propylene
glycol, polyethylene glycol, polypropylene glycol, and
glycerin, a nitrile compound such as acetonitrile,
glutaronitrile, methxoyacetonitrile, propionitrile, and
benzonitrile, a carbonate compound such as ethylene
30 carbonate and propylene carbonate, a heterocyclic
compound such as 3-methyl-2-oxazolidinone, and an aprotic
28
polar substance such as dimethyl sulfoxide and sulfolane.
A polymer may be also included under the purpose of
using a solid phase medium (including gel phase) . For
such case, by adding a polymer such as polyacrylonitrile
5 and polyfluorovinylidene to the solution state medium
described above, a polyfunctional monomer having an
ethylenically unsaturated group is polymerized in the
solution state medium to turn the medium into a solid
phase.
10 As an electrolyte, an electrolyte which does not
require CuI, CuSCN medium, and a. hole transport material
such as 2,2',7,'7'-tetrakis(;N,N-di-pmethoxyph.
enylamine)9,9'-spi.robifluorene can be used.
The counter electrode 5 functions as a positive
15 electrode of a photoelectric conversion cell.
Specifically, as a conductive material used for a counter
electrode, a metal (for example, platinum, gold, silver,
copper, aluminum, rhodium, indium, and the like), metal
oxide (ITO (indium-tin oxide) or tin oxide (including
20 those doped with fluorine), zinc oxide), or carbon or the
like can be mentioned. Film thickness of the counter
electrode is, although not specifically limited,
preferably 5 nm or more and 100 .im or less.
By combining a window electrode (working electrode)
25 and the counter electrode 5 mediated by an electrolyte
layer, a photoelectric conversion cell is formed. If
necessary, to avoid leakage or vaporization of an
electrolyte layer, sealing is carried out on the
periphery of the photoelectric conversion cell. For
30 sealing, a thermoplastic :resin, a. photocurable resin,
glass frit, or the like can be used as a sealing material.
29
If necessary, the photoelectric conversion cell
produced by connecting photoelectric conversion cells
with small area. By combining photoelectric conversion
cells in series, the electromotive force can be increased,
By increasing the temperature of the porous metal
20 oxide semiconductor layer 3, molecular species can be
desorbed from a surface of the porous metal oxide
semiconductor layer 3 in an order of from molecular
species in weak binding state to molecular species in
strong binding state. The molecular species (fragments)
25 can be analyzed by mass spectrometer (MS), and a spectrum
in which the intensity of ions of the desired desorbed
molecular species is detected as a change in temperature
increase can be obtained (herein below, referred to as
"thermal desorption spectrum"). The analysis method is
30 also referred. to as temperature programmed desorption
(TPD) or thermal desorption gas spectroscopy (TDS).
37
An apparatus for measuring thermal desorption to
measure thermal desorption spectrum includes a heating
device for heating the porous metal oxide semiconductor
layer 3, which is placed in a vacuum chamber, and a mass
5 analyzer connected to the vacuum chamber for detecting
the molecular species that are desorbed according to
temperature increase. When the discharge rate for
discharging the vacuum chamber is sufficiently higher
than the pressure change caused by desorbed gas generated
10 from the porous metal oxide semiconductor layer 3, the
desorbed gas will never stay in the vacuum chamber, and
therefore the amount of desorbed gas at certain time
point is proportional to partial pressure of the desorbed
gas in the vacuum chamber.
15 The intensity of ions measured by mass spectrometer
is proportional to partial pressure, that is, the
intensity of ions measured is proportional to the amount
of desorbed gas. Thus, by using the area intensity
obtained by integration of intensity of ions of the
20 desired desorbed molecular species against the
temperature range from the start to the end of desorption,
the desired desorbed molecular species that are generated
from the porous metal oxide semiconductor layer 3 can be
quantitatively obtained according to the quantification
25 method to be described below (see, Non-Patent Document 3).
For example, by using a plurality of Si samples
injected with a known but different amount of it,
proportional coefficient between the hydrogen desorption
amount caused by thermal desorption and ion amount for
30 m/z = 2 (area intensity) can be experimentally obtained
in advance as an apparatus constant. For the molecular
38
species M that is generated by thermal desorption from
the porous metal oxide semiconductor layer 3, by using
the ionization difficulty, fragmentation factor, and
transmittance for the hydrogen and the molecular species
5 M, the amount of the molecular species M generated by
thermal desorption can be quantitatively obtained.
When the molecular species M is water to have m/z =
18, the water generated by thermal desorption from the
porous metal oxide semiconductor layer 3 can be
10 quantitatively detected as described above.
Next, examples relating to the dye sensitization
photoelectric conversion device are described. In the
Examples and the Comparative Examples, P25 (trade name,
manufactured by Nippon AEROSIL, specific surface area of
15 48 m2/g according to BET method, containing titanium
oxide of anatase type as a main component) was used as
titanium oxide (the surface area according to the BET
method was measured by using Belsorp device manufactured
by Bel Japan, Inc.). Further, the surface area of the
20 porous metal oxide semiconductor layer was the specific
surface area obtained according to the BET method and it
was measured by using Belsorp device manufactured by Bel
Japan, Inc.
Further, the concentrations of the adsorbed water
25 and hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured by analyzing the
thermal desorption spectrum measured under the
temperature increase rate of 30°C/min by using a thermal
desorption analyzer (trade name: WA1000S/W, manufactured
30 by ESCO Co., Ltd.). The lower detection limit for the
concentrations of the absorbed water and hydroxyl group
39
is 0.005 pieces/(nm)2.
[EXAMPLES]
First, in Example 1 to Example 6, the relation
5 between the concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer and plasma power (that is, RF output)
according to plasma treatment is described.
[Example 1]
10 A soda lime glass substrate having no absorption in
visible light range is used as the transparent substrate
1 and the transparent electrode (transparent electrode
layer) 2 having no absorption in visible light range is
formed thereon to have thickness of 100 nm according to a
15 standard sputtering method. A dispersion of titanium
dioxide was prepared, coated on a surface of the
transparent electrode 2, and subjected to a calcination
treatment to form a porous metal oxide semiconductor
layer.
20 By using titanium dioxide (anatase type) as metal
oxide semiconductor particles, the porous metal oxide
semiconductor layer (titanium dioxide layer) 3 was formed
on a surface of the transparent electrode 2 as follows.
By using a bead disperser, 5 g of titanium oxide
25 (Trade name: P25, manufactured by Nippon AEROSIL) was
dispersed in a solvent (45 g of ethanol) to prepare a
dispersion solution, which was then coated on a surface
of the transparent electrode 2 by coating method. Then,
it was calcined in an oven at 150°C for 1 hour to form a
30 porous metal oxide semiconductor layer.
The resulting porous metal oxide semiconductor
40
layer was subjected to an oxidation treatment under
oxygen atmosphere with reduced pressure by using a barrel
type apparatus for plasma treatment to control the
concentrations of the adsorbed water and hydroxyl group
5 on the surface of the porous metal oxide semiconductor
layer to a desired level.
Further, the plasma treatment was performed under
the plasma treatment condition including gas atmosphere
of oxygen (100 6), gas flow amount of 100 sccm, pressure
10 of 100 Pa, RF output of 300 W, and treatment time of 5
min.
The resulting porous metal oxide semiconductor
layer which has been prepared to have controlled
concentrations of the adsorbed water and hydroxyl group
15 as described above has the thickness of 10 μm and the
specific surface area of the porous metal. oxide
semiconductor layer was 42 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
20 semiconductor layer were measured by using a thermal
desorption analyzer. As a result, it was found out that
the hydroxyl group concentration is 1.0 groups/(nm)2 and
the adsorbed water concentration is 2.0 pieces/(nm)2, and
the concentrations of the adsorbed water and hydroxyl
25 group are controlled well on a surface of the porous
metal oxide semiconductor layer. Meanwhile, the
measurement of the concentrations of the adsorbed water
and hydroxyl group on a surface of the porous metal oxide
semiconductor layer will be described below.
30 Onto the porous metal oxide semiconductor layer
obtained after the plasma treatment, a dye was supported
41
as follows.
A dye solution in which 25 mg of a dye
(cisbis(isothiocyanato)bis(2,2'-bipyridyl-4,4'-
dicarboxylic acid) ruthenium (TI) 2 tetrabitylammonium
5 complex (common name: N719)) is contained in 50 mL of
ethanol was prepared. The transparent substrate 1 on
which the porous metal oxide semiconductor layer is
formed was impregnated in the dye solution for dye
adsorption, and by washing the transparent substrate 1 on.
10 which the porous metal oxide semiconductor layer is
formed with ethanol, excess dyes were removed followed by
drying.
Next, a spacer made of a resin film (trade name:
"HIMILAN" film, manufactured by DUPONT-MITSUI
15 POLYCHEMICALS CO., LTD., those with. thickness of 25 μm
were used) was inserted to a peripheral region, and while
maintaining a gap, the counter substrate 6 on which the
counter electrode 5 is formed and the transparent
substrate 1 on which the porous metal oxide semiconductor
20 layer is formed are arranged to face each other. After
injecting an electrolyte liquid to the gap, the gap was
sealed by using an acrylic UV curable resin.
Meanwhile, the electrolyte liquid contains
methoxypropionitrile (1.5 g), sodium iodide (0.02 g), 1-
25 propyl-2,3-iododimethyl imidazolium (0.8 g), iodine (0.1
g), and 4-tert-butylpyridine (TBP) (0.05 g).
By using the porous metal oxide semiconductor layer
as prepared from the above, a dye sensitization solar
cell was then manufactured, The dye sensitization solar
30 cell was illuminated with pseudo-sunlight (AN( 1.5, 100
mw/cm2) and short circuit current, open circuit voltage,
42
fill factor (shape factor), and photoelectric conversion
efficiency were measured. The dye sensitization solar
cell was shown to have the photoelectric conversion
efficiency of 7.00. Thus, it was found. out that, by
5 using a porous metal oxide semiconductor layer in which
the concentrations of adsorbed water and hydroxyl group
are controlled by plasma treatment of a surface, the
photoelectric conversion efficiency of a dye
sensitization solar cell can be improved.
10 [Example 2]
The porous metal oxide semiconductor layer
(titanium dioxide layer) 3 that is formed on a surface of
the transparent electrode 2 in a similar manner to
Example 1 was subjected to an oxidation treatment in a
15 similar manner to Example 1 to control the concentrations
of the adsorbed water and hydroxyl group on a surface of
the porous metal oxide semiconductor layer to a desired
concentration, with the proviso that the plasma treatment
was performed under the plasma treatment condition
20 including gas atmosphere of oxygen (1000), gas flow
amount of 100 sccm, pressure of 100 Pa, RF output of 200
W, and treatment time of 5 min.
The resulting porous metal oxide semiconductor
layer which has been prepared to have controlled
25 concentrations of the adsorbed water and hydroxyl group
has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 45 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
30 semiconductor layer were measured in a similar manner to
Example 1 by using a thermal desorption analyzer. As a
4 3
result, it was found out that the hydroxyl group
concentration is 1.8 groups/(nm)2 and the adsorbed water
concentration is 2.6 pieces/(nm)2, and the concentrations
of the adsorbed water and hydroxyl group are controlled
5 well on a surface of the porous metal oxide semiconductor
layer.
Further, the dye sensitization solar cell was
manufactured in a similar manner to Example "1 by using
the porous metal oxide semiconductor layer which has
10 controlled. concentrations of the adsorbed water and
hydroxyl group according to UV irradiation treatment, and
the photoelectric conversion efficiency of the dye
sensitization solar cell was found to be 5.5%, which is a
favorable value.
15 [Example 3]
The porous metal oxide semiconductor layer
(titanium dioxide layer) 3 that is formed on a surface of
the transparent electrode 2 in a similar manner to
Example 1 was subjected to an oxidation treatment in a
20 similar manner to Example 1 to control the concentrations
of the adsorbed water and hydroxyl group on a surface of
the porous metal oxide semiconductor layer to a desired
concentration, with the proviso that the plasma treatment
was performed under the plasma treatment condition
25 including gas atmosphere of oxygen (1006), gas flow
amount of 100 seem, pressure of 100 Pa, RF output of 100
W, and treatment time of 5 min.
The resulting porous metal oxide semiconductor
layer which has been prepared to have controlled.
30 concentrations of the adsorbed water and hydroxyl group
has the thickness of 10 μm and the specific surface area
44
of the porous metal oxide semiconductor layer was 48 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in a similar manner to
5 Example 1 by using a thermal desorption analyzer. As a
result, it was found out that the hydroxyl group
concentration is 2.9 groups/(nm)2 and the adsorbed water
concentration is 3.5 pieces/(nm)2, and the concentrations
of the adsorbed water and hydroxyl group are controlled
10 well on a surface of the porous metal oxide semiconductor
layer.
Further, the dye sensitization solar cell was
manufactured in a similar manner to Example 1 by using
the porous metal oxide semiconductor layer which has
15 controlled concentrations of the adsorbed water and
hydroxyl group according to UV irradiation treatment, and
the photoelectric conversion efficiency of the dye
sensitization solar cell was found to be 3.0%, which is a
favorable value.
20 [Example 41
The porous metal oxide semiconductor layer
(titanium dioxide layer) 3 that is formed on a surface of
the transparent electrode 2 in a similar manner to
Example 1 was subjected to an oxidation treatment in. a
25 similar manner to Example 1 to control the concentrations
of the adsorbed water and hydroxyl group on a surface of
the porous metal oxide semiconductor layer to a desired
concentration, with the proviso that the plasma treatment
was performed under the plasma treatment condition
30 including gas atmosphere of oxygen (1004), gas flow
amount of 100 sccm, pressure of 100 Pa, RF output of 400
45
W, and treatment time of 5 min.
The resulting porous metal oxide semiconductor
layer which has been prepared to have controlled
concentrations of the adsorbed water and hydroxyl group
S has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 40 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in a similar manner to
10 Example J. by using a thermal desorption analyzer. As a,
result, it was found out that the hydroxyl group
concentration is 0.5 groups/(nm)Z and the adsorbed water
concentration is 1.0 pieces/(nm)2, and the concentrations
of the adsorbed water and hydroxyl group are controlled
15 well on a surface of the porous metal oxide semiconductor
layer.
Further, the dye sensitization solar cell was
manufactured in a similar manner to Example 1 by using
the porous metal oxide semiconductor layer which has
20 controlled concentrations of the adsorbed. water and
hydroxyl group according to UV irradiation treatment, and
the photoelectric conversion efficiency of the dye
sensitization solar cell was found to be 8.04, which is a
favorable value.
25 [Example 5]
The porous metal oxide semiconductor layer
(titanium dioxide layer) 3 that is formed on a surface of
the transparent electrode 2 in a similar manner to
Example 1 was subjected to an oxidation treatment in a
30 similar manner to Example 1 to control the concentrations
of the adsorbed water and hydroxyl group on a surface of
46
the porous metal oxide semiconductor layer to a desired
concentration, with the proviso that the plasma treatment
was performed under the plasma treatment condition
including gas atmosphere of oxygen (1000), gas flow
5 amount of 100 stem, pressure of 100 Pa, RF output of 500
W, and treatment time of S min.
The resulting porous metal oxide semiconductor
layer which has been prepared tohave controlled
concentrations of the adsorbed water and hydroxyl group
10 has the thickness of 10 pm and the specific surface area
of the porous metal oxide semiconductor layer was 37 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in a similar manner to
15 Example 1 by using a thermal desorption analyzer. As a
result, it was found out that the hydroxyl group
concentration is 0.1 rgoup.5 /(nm) Z and the adsorbed water
concentration is 0.5 pieces/(nm)2, and the concentrations
of the adsorbed water and hydroxyl group are controlled
20 well on a surface of the porous metal oxide semiconductor
layer.
Further, the dye sensitization solar cell was
manufactured in a similar manner to Example 1 by using
the porous metal oxide semiconductor layer which has
25 controlled concentrations of the adsorbed water and
hydroxyl group according to UV irradiation treatment, and
the photoelectric conversion efficiency of the dye
sensitization solar cell was found to be 8.0%, which is a
favorable value.
30 [Example 6]
The porous metal oxide semiconductor layer
47
(titanium dioxide layer) 3 that is formed on a surface o'E
the transparent electrode 2 in a similar manner to
Example 1 was subjected to an oxidation treatment in a
similar manner to Example 1 to control the concentrations
5 of the adsorbed water and hydroxyl group on a surface of
the porous metal oxide semiconductor layer to a desired
concentration, with the proviso that the plasma treatment
was performed under the plasma treatment condition
including gas atmosphere of oxygen (100%), gas flow
10 amount of 100 sccm, pressure of 100 Pa, RF output of 700
W, and treatment time of S min.
The resulting porous metal oxide semiconductor
layer which has been prepared to have controlled
concentrations of the adsorbed water and hydroxyl group
15 has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 36 mz/g.
The concentrations of the adsorbed water and
hydroxyl. group on a surface of the porous metal oxide
semiconductor layer were measured in a similar manner to
20 Example 1 by using a thermal desorption analyzer. As a
result, it was found out that the hydroxyl group
concentration is 0.01 groups/(nm)2 and the adsorbed water
concentration is 0.03 pieces/(nm)2, and the
concentrations of the adsorbed water and hydroxyl group
25 are controlled well on a surface of the porous metal
oxide semiconductor layer.
Further, the dye sensitization solar cell was
manufactured in a similar manner to Example 1 by using
the porous metal oxide semiconductor layer which has
30 controlled concentrations of the adsorbed water and
hydroxyl group according to UV irradiation treatment, and
48
the photoelectric conversion efficiency of the dye
sensitization solar cell was found to be 3.006, which is a
favorable value.
In Example 6, the concentrations of the adsorbed
S water and hydroxyl group on a surface of the porous metal
oxide semiconductor layer are small, and thus the number
of dyes adsorbed onto the porous metal oxide
semiconductor layer is lowered. As a result, it was
found out that total number of electrons that are excited
10 by light illumination is decreased, and thus the photo
conversion efficiency is deteriorated.
[Example 7]
The porous metal oxide semiconductor layer
(titanium dioxide layer) 3 that is formed on a. surface of
15 the transparent electrode 2 in a similar manner to
Example 1 was subjected to an atmospheric pressure plasma
treatment under atmospheric pressure condition to control
the concentrations of the adsorbed water and hydroxyl
group on a surface of the porous metal oxide
20 semiconductor layer.
Specifically, the plasma treatment was performed
for the porous metal oxide semiconductor layer. under the
plasma treatment condition including the He gas flow
amount of 2000 sccm, oxygen gas flow amount of 100 seem,
25 atmospheric pressure, RF output of 300 W, and treatment
time of 5 min.
The resulting porous metal oxide semiconductor
layer which has been prepared to have controlled
concentrations of the adsorbed water and hydroxyl group
30 has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 48 m2/g.
49
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in a similar manner to
Example 1 by using a thermal desorption analyzer. As a
5 result, it was found out that the hydroxyl group
concentration is 2.8 groups/(nm)Z and the adsorbed water
concentration is 3.8 pieces/(nm)2, and the concentrations
of the adsorbed water and hydroxyl group are controlled
well on a surface of the porous metal oxide semiconductor
10 layer.
Further, the dye sensitization solar cell was
manufactured in a similar manner to Example ]. by using
the porous metal oxide semiconductor layer which has
controlled concentrations of the adsorbed water and
15 hydroxyl group according to atmospheric pressure plasma
treatment, and the photoelectric conversion efficiency of
the dye sensitization solar cell was found to be 3.5%,
which is a favorable value.
Next, in Example 8 to Example 10 given below, a
20 method for controlling the concentrations of the adsorbed
water and hydroxyl group on a surface of the porous metal
oxide semiconductor layer that is obtained without having
a plasma treatment is explained.
[Example 8]
25 By using a bead disperser, 5 g of titanium oxide
(Trade name: P25, manufactured by Nippon AEROSIL) and an
additive (titanium ethoxide, 0.5 g) were dispersed is a
solvent (45 g of ethanol) to prepare a dispersion
solution, which was then coated on a surface of the
30 transparent electrode 2 by coating method. Then, it was
calcined in an oven at 150°C for 1 hour to form a porous
50
metal oxide semiconductor layer.
The resulting porous metal oxide semiconductor
layer was subjected to a heat treatment under ultra-high
vacuum (3.0 x 10-7 torr) at 150°C for 60 min. to control
5 the concentrations of the adsorbed water and hydroxyl
group on a surface of the porous metal oxide
semiconductor layer without having a plasma treatment.
The resulting porous metal oxide semiconductor
layer which has been prepared. to have controlled
10 concentrations of the adsorbed water and hydroxyl cjroup
has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 46 M
2 /g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
15 semiconductor layer were measured in a similar manner to
Example 1 by using a thermal desorption analyzer. As a
result, it was found out that the hydroxyl group
concentration is 2,0 groups/(nm)2 and the adsorbed water
concentration is 2.8 pieces/(nm)2, and the concentrations
20 of the adsorbed water and hydroxyl group are controlled
well on a surface of the porous metal oxide semiconductor
layer.
Further, the dye sensitization solar cell was
manufactured in a similar manner to Example 1 by using
25 the porous metal oxide semiconductor layer which has
controlled concentrations of the adsorbed water and
hydroxyl group according to the heat treatment under
ultra-high vacuum, and the photoelectric conversion
efficiency of the dye sensitization solar cell was found
30 to be 5.0°06, which is a favorable value.
[Example 9]
51
By using a bead disperser, 5 g of titanium oxide
(Trade name: P25, manufactured by Nippon AEROSIL) was
dispersed in a similar manner to Example 1 in a solvent
(45 g of ethanol) to prepare a dispersion solution, which
5 was then coated on a surface of the transparent electrode
2 by coating method. Then, it was calcined in an oven at
150°C for 1 hour to form a porous metal oxide
semiconductor layer.
The resulting porous metal oxide semiconductor
10 layer was subjected to a CST irradiation treatment using
an DV illuminator installed in a vacuum apparatus
followed by an oxidation treatment to control the
concentrations of the adsorbed water and hydroxyl group
on a surface of the porous metal oxide semiconductor
15 layer without having a plasma treatment.
The UV irradiation treatment was carried out under
the condition that the gas atmosphere is oxygen (100%),
pressure is 1x10-' torr, and time for treatment is 5 min.
The resulting porous metal oxide semiconductor
20 layer which has been prepared to have controlled
concentrations of the adsorbed water and hydroxyl group
has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 42 m2/g.
The concentrations of the adsorbed water and
25 hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in a similar manner to
Example 1 by using a thermal desorption analyzer.. As a
result, it was found out that the hydroxyl group
concentration is 1.8 groups/(nm)2 and the adsorbed water
30 concentration is 2.6 pieces/(nm)2, and the concentrations
of the adsorbed water and hydroxyl. group are controlled
52
well on a surface of the porous metal oxide semiconductor
layer.
Further, the dye sensitization solar cell was
manufactured in a si_mi_lar manner to Example 1 by using
5 the porous metal oxide semiconductor layer which has
controlled concentrations of the adsorbed water and
hydroxyl group according to the UV irradiation treatment,
and the photoelectric conversion efficiency of the dye
sensitization solar cell was found to be 5.50, which is a
10 favorable value.
[Example 101
By using a bead disperser, 5 g of titanium oxide
(Trade name: P25, manufactured by Nippon AEROSIL) was
dispersed in a similar manner to Example 1 in a solvent
15 (45 g of ethanol) to prepare a dispersion solution, which
was then coated on a surface of the transparent electrode
2 by coating method. Then, it was calcined in an oven. at
150°C for 1 hour to form a porous metal oxide
semiconductor layer.
20 The resulting porous metal oxide semiconductor
layer was subjected to a UV irradiation treatment using
an UV illuminator under atmospheric condition followed by
an oxidation treatment to control the concentrations of
the adsorbed water and hydroxyl group an a surface of the
25 porous metal oxide semiconductor layer without having a.
plasma treatment. The UV irradiation treatment was
carried out under the condition that time for UV
treatment is 5 min,
The resulting porous metal oxide semiconductor
30 layer which has been prepared to have controlled
concentrations of the adsorbed water and :hydroxyl. group
has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 48 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
5 semiconductor layer were measured in a similar manner to
Example 1 by using a thermal desorption analyzer. As a
result, it was found out that the hydroxyl group
concentration is 3.3 groups/(nm)Z and the adsorbed water
concentration is 3.7 pieces/(nm)2. Further, the
10 photoelectric conversion efficiency of the dye
sensitization solar cell which uses the above porous
metal oxide semiconductor layer was found to be 20, which
is a favorable value.
In Example 12 to Example 16 that are explained
15 below, the concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were controlled by performing a
plasma treatment under the gas with reduced pressure
other than oxygen, in which the porous metal oxide
20 semiconductor layer 3 (titanium dioxide layer) is formed
on a surface of the transparent electrode 2 in a similar
manner to Example 1.
In Example 11 to Example 15 that are explained
below, the plasma treatment was carried out for the
25 porous metal oxide semiconductor layer under the plasma
treatment condition including gas atmosphere other than
oxygen (1000), the gas flow amount of 100 sccm, pressure
of 100 Pa, RF output of 300 W, and treatment time of 5
min. The concentrations of the adsorbed water and
30 hydroxyl group on a surface of the porous meta.]. oxide
semiconductor layer were measured in a similar manner to
54
Example 1 and the photoelectric conversion efficiency of
the dye sensitization solar cell which uses the porous
metal oxide semiconductor layer was also measured.
[Example 111
5 When the gas atmosphere is carbon monoxide (CO),
the porous metal oxide semiconductor layer which has been
prepared to have controlled concentrations of the
adsorbed water and hydroxyl group by the plasma treatment
has the thickness of 10 μm and the specific surface area
10 of the porous metal oxide semiconductor layer was 45 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in a similar manner to
Example 1 by using a thermal desorption analyzer. As a
15 result, it was found out that on a surface of the porous
metal oxide semiconductor layer the hydroxyl group
concentration is 2.0 groups/(nm)2 and the adsorbed water
concentration is 2.8 pieces/(nm)2, and the photoelectric
conversion efficiency of the dye sensitization solar cell
20 using the porous metal oxide semiconductor layer was
found to be 5.0%, which is a favorable value.
[Example 12]
When the gas atmosphere is carbon dioxide (C02)
the porous metal oxide semiconductor layer which has been
25 prepared to have controlled concentrations of the
adsorbed water and hydroxyl group by the plasma treatment
has the thickness of 10 p.im and the specific surface area
of the porous metal oxide semiconductor layer was 45 m2/g.
The concentrations of the adsorbed water and
30 hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in the same manner as
55
Example 1 by using a thermal desorption analyzer. As a
result, it was found out that on a surface of the porous
metal oxide semiconductor layer, the hydroxyl group
concentration is 2.0 groups /( nm)2 and the adsorbed water
5 concentration is 2.8 pieces/(nm)2, and the photoelectric
conversion efficiency of the dye sensitization solar cell
using the porous metal oxide semiconductor layer was
found to be 5.0%, which is a favorable value.
[Example 13]
10 When the gas atmosphere is nitric monoxide (NO),
the porous metal oxide semiconductor layer which has been
prepared to have controlled concentrations of the
adsorbed water and hydroxyl group by the plasma treatment
has the thickness of 10 μm and the specific surface area
15 of the porous metal oxide semiconductor layer was 45 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in the same manner as
Example 1 by using a thermal desorption analyzer. As a
20 result , it was found out that on a surface of the porous
metal oxide semiconductor layer, the hydroxyl group
concentration i s 2.5 groups/(nm)' and the adsorbed water
concentration i s 3.2 pieces /( nm)2, and the photoelectric
conversion efficiency of the dye sensitization solar cell
25 using the porous metal oxide semiconductor layer was
found to be 4.0%, which is a. favorable value.
(Example 14]
When the gas atmosphere i s nitric dioxide (NO2),
the porous metal oxide semiconductor layer which has been
30 prepared to have controlled concentrations of the
adsorbed water and hydroxyl group by the plasma treatment
56
has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 45 m`/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
5 semiconductor layer were measured in the same manner as
Example 1 by using a thermal desorption analyzer. As a
result, it was found out that on a surface of the porous
metal oxide semiconductor layer, the hydroxyl group
concentration is 2.5 groups/(nm)2 and the adsorbed water
10 concentration is 3.2 pieces /(nm) 2 and the photoelectric
conversion efficiency of the dye sensitization solar cell
using the porous metal oxide semiconductor layer was
found to be 4.0%, which is a favorable value.
[Example 15]
15 When the gas atmosphere is nitrogen dioxide (N20),
the porous metal. oxide semiconductor layer which has been
prepared to have controlled concentrations of the
adsorbed water and hydroxyl group by the plasma treatment
has the thickness of 10 [.lm and the specific surface area
20 of the porous metal oxide semiconductor layer was 45 m2/g.
The concentrations of the adsorbed water and
hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in the same manner as
Example 1 by using a thermal desorption analyzer. As a
25 result, it was found out that on a surface of the porous
metal oxide semiconductor layer, the hydroxyl group
concentration is 2.5 groups/(nm)2 and the adsorbed water
concentration is 3,2 pieces/(nm)2, and the photoelectric
conversion efficiency of the dye sensitization solar cell
30 using the porous metal oxide semiconductor layer was
found to be 4.0°06, which is a favorable value.
57
[Example 16]
In Example 1 to Example 15, the oxidation treatment
of the porous metal oxide semiconductor layer was
performed by using a barrel type plasma treatment
5 apparatus. However, in Example 16, the oxidation
treatment of the porous metal oxide semiconductor layer
(titanium dioxide layer) 3, which has been formed on a
surface of the transparent electrode 2 in the same manner
as Example 1, was performed by using a. parallel plate
10 type plasma treatment apparatus under oxygen atmosphere
with reduced pressure to control the concentrations of
adsorbed water and hydroxyl group on a surface of the
porous metal oxide semiconductor layer.
Further, with the plasma generated by parallel
15 plate anode couple method. (frequency of 13.56 MHz), the
plasma treatment was carried out under the plasma
treatment condition including gas atmosphere of oxygen.
(100%), the gas flow amount of 100 sccm, pressure of 100
Pa, RF output of 300 W, and treatment time of 5 min.
20 As a result, the porous metal oxide semiconductor
layer which has been prepared to have controlled
concentrations of the adsorbed water and hydroxyl group
has the thickness of 10 μm and the specific surface area
of the porous metal oxide semiconductor layer was 43 m2/g.
25 Further, the concentrations of the adsorbed water
and hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in the same manner as
Example 1 and the photoelectric conversion efficiency of
the dye sensitization solar cell. which uses the porous
30 metal oxide semiconductor layer were also measured. As a
result, it was found out that concentrations of the
58
adsorbed water and hydroxyl group on a. surface of the
porous metal oxide semiconductor layer were 2.8
pieces/(nm)2 and 2.0 groups/(nm)2, respectively, and the
photoelectric conversion efficiency was found to be 5.0%,
5 which is a favorable value,
[Comparative Example 1]
The porous metal oxide semiconductor layer of
Comparative Example 1 is the same as the porous metal
oxide semiconductor layer of Example 1 except that it is
10 in a state before performing an oxidation trea.tmen. using
a barrel type plasma treatment apparatus. Specifically,
by using a bead disperser, 5 g of titanium oxide (Trade
name: P25, manufactured by Nippon AEROSIL) was dispersed
in the same manner as Example 1 in a solvent (45 g of
15 ethanol) to prepare a dispersion solution, which was then
coated on a surface of the transparent electrode 2 by a
coating method. Then, it was calcined in an oven at
150°C for 1 hour to form a. porous metal oxide
semiconductor layer.
20 The resulting porous metal oxide semiconductor
layer has the thickness of 10 lLm and the specific surface
area of the porous metal oxide semiconductor layer was 50
m2/g•
The concentrations of the adsorbed water and
25 hydroxyl group on a surface of the porous metal oxide
semiconductor layer were measured in the same manner as
Example 1 by using a thermal desorption analyzer. As a
result, it was found out that the concentrations of the
hydroxyl group and adsorbed water were 4.5 groups/(nm)2
30 and 4.5 pieces/(nm)2, respectively.
Further, the dye sensitization solar cell that is
59
manufactured by using the porous metal oxide
semiconductor layer which has been supported with a dye
in the same manner as Example 1 was tested for short
circuit current, open circuit voltage, fill factor (shape
5 factor), and photoelectric conversion efficiency in the
same manner as Example 1. As a. result, the photoelectric
conversion efficiency was found to be 1.0%.
Results of the Examples that are explained in the
10 above are given below.
Fig. 3 is a drawing for explaining the condition
for forming the titanium dioxide layer used for the dye
sensitization solar cell of the Examples of the invention,
and the relation among the hydroxyl group concentration,
20 the adsorbed water concentration, and the photoelectric
conversion efficiency in the titanium dioxide layer. The
condition for forming the layer only as illustrated in
Fig. 3 represents an outline of the method for forming
the titanium dioxide electrode layer that is explained in
25 each example described above.
Fig. 4 is a drawing for explaining the relation
between concentrations of hydroxyl group and adsorbed
water on a surface of the titanium dioxide layer of the
Examples of the invention and photoelectric conversion
30 efficiency.
Fig. 4(A) illustrates a smooth curve obtained from
60
plotting of the relation between the hydroxyl group
concentration and photoelectric conversion efficiency
that is illustrated in Fig. 3, in which the horizontal
axis represents the concentration of hydroxyl group
5 (groups/(nm)2) and the vertical axis represents the
photoelectric conversion efficiency (a).
Fig. 4(B) illustrates a smooth curve obtained from
plotting of the relation between the adsorbed water
concentration and the photoelectric conversion efficiency
10 that is illustrated in Fig. 3, in which the horizontal
axis represents the concentration of adsorbed water
(pieces/(nm)2) and the vertical axis represents the
photoelectric conversion efficiency (%).
As illustrated in Fig. 3 and Fig, 4, the
15 photoelectric conversion efficiency of the dye
sensitization solar cell is higher in every Example
compared to Comparative Example 1.
As illustrated in Fig. 4(A), the photoelectric
conversion efficiency increases to the maximum in
20 accordance with the increase in hydroxyl group
concentration an a surface of the titanium dioxide
electrode layer (porous metal oxide semiconductor layer),
and as the hydroxyl group concentration is further
increased, the photoelectric conversion efficiency starts
25 to decrease.
The maximum value obtained for the photoelectric
conversion efficiency when the hydroxyl group
concentration on a surface of the titanium dioxide
electrode layer is changed indicates that, as described
30 in Patent Document 1, it is impossible to increase the
photoelectric conversion efficiency to its maximum and
61
have it in a desirable state only by increasing the
adsorption amount of a dye based on increased hydroxyl
group concentration on a surface by plasma treatment of a
titanium dioxide layer, and thus to have the
5 photoelectric conversion efficiency equal to or larger
than a certain value, there is a desirable hydroxyl group
concentration range.
As illustrated in Fig. 4(A), when the hydroxyl
group concentration on a surface of the titanium dioxide
10 electrode layer (porous metal oxide semiconductor Layer)
is controlled to 0.01. groups/(nm)2 to 4.0 groups/(nm)2, a
dye sensitization solar cell having higher photoelectric
conversion efficiency than Comparative Example 1 can be
achieved.
15 Further, when the hydroxyl group concentration on a
surface of the titanium dioxide electrode layer (porous
metal oxide semiconductor layer) is controlled to 0.01
groups/(nm)2 to 3.0 groups/ (:am) 2 , a dye sensitization
solar cell having photoelectric conversion efficiency
20 equal to or higher than 3% can be achieved.
Further, when the hydroxyl group concentration on a
surface of the titanium dioxide electrode layer (porous
metal oxide semiconductor layer) is controlled to 0.02
groups/(nm)2 to 2.0 groups/(nm)2, a dye sensitization
25 solar cell having photoelectric conversion efficiency
equal to or higher than 5o can be achieved.
Still further, when the hydroxyl group
concentration on a surface of the titanium dioxide
electrode layer (porous metal oxide semiconductor layer)
30 is controlled to 0.05 groups/(nm)2 to 0.9 groups/(nm)2, a
dye sensitization solar cell having photoelectric
62
conversion efficiency equal to or higher than 796 can be
achieved.
As illustrated in Fig. 4(B), the photoelectric
conversion efficiency increases to the maximum in
5 accordance with the increase in adsorbed water
concentration on a surface of the titanium dioxide
electrode layer (porous metal oxide semiconductor layer),
and as the adsorbed water concentration is further
increased, the photoelectric conversion efficiency starts
10 to decrease.
As illustrated in Fig. 4(B), when the adsorbed
water concentration on a surface of the titanium dioxide
electrode layer (porous metal oxide semiconductor layer)
is controlled to 0.03 pieces/(nm)2 to 4.0 pieces/(nm)2, a
15 dye sensitization solar cell having higher photoelectric
conversion efficiency than Comparative Example 1 can be
achieved.
Further, when the adsorbed water concentration on a
surface of the titanium dioxide electrode layer (porous
20 metal oxide semiconductor layer) is controlled to 0.03
pieces/(nm)2 to 3.5 pieces/(nm)2, a dye sensitization
solar cell having photoelectric conversion efficiency
equal to or higher than 3% can be achieved.
Further, when the adsorbed water concentration on a
25 surface of the titanium dioxide electrode layer (porous
metal oxide semiconductor layer) is controlled to 0.07
pieces/(nm)2 to 2.5 pieces/(nm)2, a dye sensitization
solar cell having photoelectric conversion efficiency
equal to or higher than 5% can be achieved.
30 Still further, when the adsorbed water
concentration on a surface of the titanium dioxide
63
electrode layer (porous metal oxide semiconductor layer)
is controlled to 0.2 pieces/(nm)2 to 2.0 pieces/(nm)2, a
dye sensitization solar cell having photoelectric
conversion efficiency equal to or higher than 7% can be
5 achieved.
Fig. 5 is a drawing for explaining the relation
between the concentrations of hydroxyl group and adsorbed
water on a surface of the titanium dioxide layer of the
Examples of the invention and photoelectric conversion
10 efficiency.
In Fig. 5, the horizontal axis represents
[concentration of hydroxyl group
(groups! (nm) 2)]! [(concentration of hydroxyl group
(groups/(nm)2)) + (concentration of adsorbed water
15 (pieces/(nm)2))]} and the vertical axis represents the
photoelectric conversion efficiency (%) . In the
explanations given below, the ratio defined by
{[concentration of hydroxyl group
(groups! (nm) 2)] / [(concentration of hydroxyl group
20 (groups/(nm)2)) + (concentration of adsorbed water
(pieces/(nm)2))]} is taken as a. Fig. 5 illustrates a
smooth curve obtained from result of plotting the
photoelectric conversion efficiency against a calculated
from the results of Fig, 3. In Fig. 5, the result
25 corresponding to Example 6 is outside the illustrated
curve, as it has a small adsorbed water concentration and
a large measurement error.
As illustrated in Fig. 5, when the concentrations
of the hydroxyl group and adsorbed water on a surface of
30 the titanium dioxide electrode layer (porous meta]. oxide
semiconductor layer) are controlled such that the ratio a
64
is 0.11 or more and 0.45 or less, a dye sensitization
solar cell having photoelectric conversion efficiency
equal to or higher than 3% and also a method for
manufacturing the dye sensitization solar cell can be
5 provided.
Further, when the concentrations of the hydroxyl
group and adsorbed water on a surface of the titanium
dioxide electrode layer (porous metal oxide semiconductor
layer) are controlled such that the ratio a is 0.11 or
10 more and 0.40 or less, a dye sensitization solar cull
having photoelectric conversion efficiency equal to or
higher than 5% and also a method for manufacturing the
dye sensitization solar cell can be provided.
Still further, when the concentrations of the
15 hydroxyl group and adsorbed water on a surface of the
titanium dioxide electrode layer (porous metal oxide
semiconductor layer) are controlled such that the ratio a
is 0.11 or more and 0.35 or less, a dye sensitization
solar cell having photoelectric conversion efficiency
20 equal to or higher than 76 and also a method for
manufacturing the dye sensitization solar cell can be
provided.
Fig. 6 is a drawing for explaining the relation
between the concentration of the hydroxyl group and the
25 concentration of the adsorbed water on a surface of the
titanium dioxide layer of the Examples of the invention.
In Fig. 6, the horizontal axis represents the
concentration of hydroxyl group (groups/ (11M) 2) and the
vertical axis represents the concentration of adsorbed
30 water (pieces/(nm)2).
As illustrated. in Fig. 6, the hydroxyl group
65
concentration and the adsorbed water concentration on a
surface of the titanium dioxide layer have approximately
linear relation, indicating that the adsorbed water
concentration increases in accordance with an increase in
5 the hydroxyl group concentration on a surface of the
titanium dioxide layer. Further, in Fig. 6, the result
corresponding to Example 6 is outside the illustrated
curve, as it has small concentrations of hydroxyl group
and adsorbed water and a large measurement error.
10 Fig. 7 is a drawing in which the results of Fig. 3
are illustrated as a graph, explaining the relation
between RF output (plasma power) according to plasma
treatment of the titanium dioxide layer and photoelectric
conversion efficiency and the relation among.; the RF
15 output and the concentration of hydroxyl group and the
concentration of adsorbed water on a surface of the
titanium dioxide layer as described in the Examples of
the invention. Specifically, Fig. 7(A) is a linear plot
for representing the relation among the R.F output, the
20 photoelectric conversion efficiency, the concentration of
hydroxyl group, and the concentration of adsorbed water
according to the plasma treatment and Fig. 7(B) is a.
semi-log plot for representing the relation among the RF
output according to the plasma treatment, the
25 concentration of hydroxyl group, and the concentration of
adsorbed water.
In Fig. 7(A), the horizontal axis represents R)-
output according to the plasma treatment, the left
vertical axis represents the photoelectric conversion
30 efficiency (o), and the right vertical axis represents
the concentrations of hydroxyl. group and adsorbed water
66
(pieces/(nm)2). In Fig. '7(B), the horizontal axis
represents theRF output according to the plasma
treatment, the left vertical axis represents the
concentrations of hydroxyl group and adsorbed water
5 (pieces/ (nut )2).
As illustrated in Fig. 7(A) and Fig. 7(B), the
concentrations of both the hydroxyl group and adsorbed
water on a surface of the titanium dioxide layer decrease
in accordance with the increase in RF output, and as the
10 RF output according to the plasma treatment increases,
the photoelectric conversion efficiency is increased to
the maximum and then starts to decrease. These results
suggest that the concentration of hydroxyl group and
adsorbed water can be controlled according to the
15 progress of evaporation or dehydration condensation of
adsorbed water on a surface of the porous metal oxide
semiconductor layer (titanium dioxide layer) by
controlling the RF output according to a plasma treatment,
and therefore it becomes possible to enhance the
20 photoelectric conversion efficiency of a dye
sensitization solar cell.
As illustrated in Fig. 7(A), when the plasma power
(RF output) for the plasma treatment is controlled to 100
W to 700 W, a photoelectric conversion device having
25 photoelectric conversion efficiency equal to or higher
than 3o and also a method for manufacturing the device
can be provided.
Further, when the plasma power (RF output)
according to the plasma treatment is controlled to 180 W
30 to 660 W, a. photoelectric conversion device having
photoelectric conversion efficiency equal to or higher
67
than 54 and also a method for manufacturing the device
can be provided.
Still further, when the plasma power (RF output)
according to the plasma treatment is controlled to 300 W
5 to 580 W, a photoelectric conversion. device having
photoelectric conversion efficiency equal to or higher
than 7% and also a method for manufacturing the device
can be provided.
As it is evident from the results illustrated in
10 Fig. 3 to Fig. 7, Comparative Example 1 has higher
concentrations of hydroxyl group and adsorbed water than
any of the Examples, while it has low photoelectric
conversion efficiency. Thus, it is clearly shown that,
the concentrations of the hydroxyl group and.' adsorbed
15 water on a surface of the porous metal oxide
semiconductor layer (titanium dioxide layer) are one of
the most important factors for determining the
photoelectric conversion efficiency of a photoelectric
conversion device (dye sensitization solar cell).
20 In this regard, it is believed that the amount
(number of molecules) of the dye which is bonded and
supported onto a surface of the porous metal oxide
semiconductor layer is greatly affected by the
concentrations of the hydroxyl group and adsorbed water
25 on a surface of the porous metal oxide semiconductor
layer and the amount (number of molecules) of supported
dye and the state of dye supported on the surface have a
huge influence on the photoelectric conversion efficiency
of a photoelectric conversion device (dye sensitization
30 solar cell).
Fig, 8 is a drawing for explaining the adsorption
68
of hydroxyl group and adsorbed water on a surface of the
titanium dioxide layer of the Examples of the invention.
Specifically, Fig. 8(A) diagrammatically represents
adsorption of the hydroxyl group on a surface of the
5 titanium dioxide layer and Fig. 8(B) diagrammatically
represents adsorption of the hydroxyl group and adsorbed
water on a surface of the titanium dioxide layer.
As illustrated in Fig. 8(A), it is believed that
the hydroxyl groups (chemically adsorbed water) including
10 terminal hydroxyl group (i.e., hydroxyl. group (-OH) bound
to titanium atom) 15 and the bridge hydroxyl group (i.e.,
hydroxyl group (-OH) bound to adjacent two titanium
atoms) 13 are present on a surface of the titanium
dioxide layer 11. Further, as illustrated in Fig. 8 (B) ,
15 it is believed that water (physically adsorbed water) is
adsorbed to the hydroxyl groups via. hydrogen bond.
As illustrated. in Fig. 8(B), water molecules bind
to the hydroxyl group 13 and 15 on a surface of the
titanium dioxide layer 11 via hydrogen bond 17, yielding
20 the water molecule layer (physically adsorbed layer) 19
prepared by physical adsorption. As a type of hydrogen
bond, the hydrogen bond between the hydrogen (H) atom in
Ti-OH and the oxygen (0) atom in water molecule H2O (that
is, first type), and the hydrogen bond between the oxygen
25 (0) atom in Ti-OH and the hydrogen (H) atom in water
molecule H2O (that is, second type) can be considered.
However, only the first type is illustrated in Fig. 8(B).
Generally, in order for the photosensitizing dye
used for a dye sensitization solar cell to have an
30 activity of binding and adsorbing of a dye onto a surface
of a porous metal oxide semiconductor layer, and to form
69
a bond between porous metal oxide semiconductor layer for
promoting electron transfer between the dye excited by
light illumination and conduction band of a porous oxide
semiconductor layer, it contains an interlock group such
5 as a carboxyl group, an alkoxy group, a hydroxyl group, a
hydroxyalkyl group, a sulfon.ic acid group, an ester group,
a mercapto group, and a phosphonyl group in. the molecular
structure of a dye.
In accordance with a binding reaction between a
10 hydroxyl group on a surface of a porous metal oxide
semiconductor layer such as a titanium dioxide layer and
an interlock group of a dye, stable binding and
adsorption onto a surface of the porous meta]. oxide
semiconductor layer are achieved. For such reasons, the
15 hydroxyl group concentration on a surface of the porous
metal oxide semiconductor layer is an important parameter
which determines the adsorption amount of a
photosensitizing dye. Since the adsorption amount of a
photosensitizing dye increases as the hydroxyl group
20 concentration on a surface of the porous metal oxide
semiconductor layer is increased, the number of electrons
that are generated as a result of excitation of an
adsorbed photosensitizing dye by light (sunlight)
illumination increases, and thus photoelectric conversion
25 efficiency of the dye sensitization solar cell is
improved.
However, when the hydroxyl group concentration on a
surface of the porous metal oxide semiconductor layer is
excessively high, multi-molecular adsorption of the
30 photosensitizing dye onto a. surface of the porous metal
oxide semiconductor layer occurs. Even when only one
70
photosensitizing dye among multi-molecularly adsorbed
molecules is excited to generate electrons, they are
absorbed by other photosensitizing dye of the multimolecularly
adsorbed molecules, and as a result, it
5 cannot reach the photosensitizing dye which is adsorbed
on a site at which electrons can efficiently move in the
porous metal oxide semiconductor layer. Consequently, it
cannot efficiently contribute to generation of
electromotive force.
10 Further, when the hydroxyl group concentration on a
surface of the porous metal oxide semiconductor layer
increases, hydrophilicity is improved, and as a result,
water molecules bind to the hydroxyl group via hydrogen
bond and, prepared by physical adsorption, physically
15 adsorbed water layer is formed to have increased
concentration of adsorbed water which is physically
adsorbed as illustrated in Fig. 3(U). Since the
photosensitizing dye can bind to adsorbed water of the
physically adsorbed layer via hydrogen bond, multi-
20 molecular adsorption of the photosensitizing dye is
promoted more as the adsorbed water concentration on the
surface increases.
Even when the photosensitizing dye which binds to
the physically adsorbed water via hydrogen bond is
2S excited by light illumination to generate electrons, they
move toward the porous metal oxide semiconductor layer
through the physically adsorbed layer, and thus it cannot
efficiently contribute to generation of electromotive
force.
30 According to the invention, hyd.roxyl group
concentration on a surface of the porous metal oxide
71
semiconductor layer to which the photosensitizing dye of
a single-molecular layer is supported is controlled to
the concentration range in which the electrons excited
and generated from the photosensitizing dye by light
5 illumination can move efficiently toward the porous metal
oxide semiconductor layer and can efficiently contribute
to generation of an electromotive force.
As described before, evaporation or dehydration
condensation of adsorbed water on a surface of the porous
10 metal oxide semiconductor layer can be promoted by plasma
treatment of a surface of the porous metal oxide
semiconductor layer, and therefore the hydroxyl group
concentration on a surface of the porous metal oxide
semiconductor layer can be controlled to a desired range
15 according to plasma condition or the like required for
the plasma treatment. In addition, it is desirable to
figure out in advance the relations between the hydroxyl
group concentration on a surface of the porous metal
oxide semiconductor layer and the plasma condition or the
20 like required for the plasma treatment.
Next, examples of thermal desorption spectrum will
be described.
Fig. 9 is a diagram for explaining an example of
the thermal desorption spectrum for mass charge ratio m/z
25 = 18 as described in Example 1 of the invention. In Fig.
9, the horizontal axis indicates the temperature (°C) and
the vertical axis represents intensity of ions (arbitrary
unit) for m/z = 18.
According to the example illustrated in Fig. 9, the
30 thermal desorption spectrum exhibits a bimodal curve.
After separating the bimodal curve into two curves, that
72
is, curve (a) and curve (b), area strength is obtained
for each curve. It is believed that the curve (b) is
based on ionization of water, which is desorbed from
adsorbed water bonded to a titanium oxide layer based on
5 hydrogen bond 17 as described before in view of Fig. 8,
and according to the quantification method described
before, the concentration of adsorbed water is
quantitatively obtained. It is also believed that the
curve (a) is based on ionization of water, which is
10 desorbed from a. titanium oxide layer based on dehydration
condensation of (2Ti-OH 3 'Ti-OH + H2O) hydroxyl group (-
OH) 13 and 15 which bind to Ti. atom as illustrated in Fig.
8, and water concentration is quantitatively obtained by
the quantification method described before and the result
15 is converted into the concentration of hydroxyl group.
As described above, according to the invention, the
concentration of hydroxyl group and the concentration of
adsorbed water on a surface of the porous metal oxide
semiconductor layer are controlled to enhance the
20 photoelectric conversion efficiency of a photoelectric
conversion device such as a dye sensitization solar cell.
Accordingly, the amount of dye which is supported and
bind to a surface of the porous metal oxide semiconductor
layer can be controlled and the energy generated by light
25 illumination can be utilized to maximum level as an
electromotive force. As a result, the porous metal oxide
semiconductor layer of the present invention has better
characteristics than a porous metal oxide semiconductor
layer which is formed by coating and calcination of a
30 solution containing dispersion of metal oxide
semiconductor particles.
73
While the aspects of the present invention have
been described above, the invention is not limited to
them. Instead, it should be understood that various
modifications can be made based on the technical idea. of
5 the invention.
INDUSTRIAL APPLICABILITY
According to the invention, a photoelectric
conversion device having high conversion efficiency and a
10 method for manufacturing the same can be provided.
REFERENCE SIGNS LIST
1 Transparent substrate
2 Transparent electrode
15 3 Porous metal oxide semiconductor layer supported
with photosensitizing dye
4 Electrolyte layer
5 Counter electrode
Sa Platinum layer
20 Sb Transparent conductor layer
6 Counter substrate
10 Dye sensitization photoelectric conversion device
11 Titanium dioxide layer
13 Bridge hydroxyl group
25 15 Terminal hydroxyl group
17 Hydrogen bond
19 Layer of water molecules prepared by physical
adsorption
74
CLAIMS
1. A photoelectric conversion device comprising:
a working electrode on which a porous metal oxide
5 semiconductor layer is formed to support a dye„
wherein a concentration of hydroxyl group on a
surface of the porous metal oxide semiconductor layer is
0.01 groups/(nm)2 or more and 4.0 groups/(nm)2 or less.
10 2. The photoelectric conversion device according to
claim 1, wherein the concentration of hydroxyl group is
0.01 groups/(nm)2 or more and 3.0 groups/(nm)2 or less.
3. The photoelectric conversion device according to
15 claim 1, wherein the concentration of hydroxyl group is
0.02 groups/(nm)2 or more and 2.0 groups/(nm)2 or less.
4. The photoelectric conversion device according to
claim 1, wherein the concentration of hydroxyl group is
20 0.05 groups/(nm)2 or more and 0.9 groups/ (nm)2 or less.
5. The photoelectric conversion device according to
claim 1, wherein the concentration of adsorbed water on
the surface of the porous metal oxide semiconductor layer
25 is 0.03 pieces/(nm)2 or more and 4.0 pieces/(nm)2 or less.
6. The photoelectric conversion device according to
claim 1, wherein the concentration of adsorbed water is
0.03 pieces/(nm)2 or more and 3.5 pieces/(nm)2 or less.
30
7. The photoelectric conversion device according to
75
claim 1, wherein the concentration of adsorbed water is
0.07 pieces/(nm)2 or more and 2.5 pieces/(nm)2 or less.
8. The photoelectric conversion device according to
5 claim 1, wherein the concentration of adsorbed water is
0,2 pieces/(nm)2 or more and 2.0 pieces/(nm)2 or less.
9. A method for manufacturing a photoelectric
conversion device, the method comprising:
10 a first step of forming a porous metal oxide
semiconductor layer on a surface of a working electrode;
a second step of controlling a concentration of
hydroxyl group on a. surface of the porous metal oxide
semiconductor layer to be 0.01 groups/(nm)2 or more and
15 4.0 groups/(nm)2 or less; and
a third step of supporting a dye in the porous
metal oxide semiconductor layer.
10. The method for manufacturing a photoelectric
20 conversion device according to claim 9, wherein the
concentration of hydroxyl group is controlled to be 0.01
groups/(nm)2 or more and 3.0 groups/(nm)2 or less.
11. The method for manufacturing a photoelectric
25 conversion device according to claim 9, wherein the
concentration of hydroxyl group is controlled to be 0.02
groups/(nm)2 or more and 2.0 groups/(nm)2 or less.
12. The method for manufacturing a photoelectric
30 conversion. device according to claim 9, wherein the
concentration of hydroxyl group is controlled to be 0.05
'7 6
groups/(nm)2 or more and 0.9 groups/(nm)2 or less.
13. The method for manufacturing a photoelectric
conversion device according to claim 9, wherein the
5 concentration of adsorbed water on the surface of the
porous metal oxide semiconductor layer is controlled to
be 0.05 pieces/(nm)2 or more and 4.0 pieces/(nm)2 or less
in the second step.
10 14. The method for manufacturing a photoelectric
conversion device according to claim 9, wherein the
concentration of adsorbed water is controlled to be 0.03
pieces/(nm)2 or more and 3.5 pieces/(nm)2 or less.
15. The method for manufacturing a photoelectric
conversion device according to claim 9, wherein the
concentration of adsorbed water is controlled to be 0.07
pieces/(nm)2 or more and 2.5 pieces/(nm)2 or less.
20 16. The method for manufacturing a photoelectric
conversion device according to claim 9, wherein the
concentration of adsorbed water is controlled to be 0.2
pieces/(nm)2 or more and 2.0 pieces/(nm)2 or less.
25 17. The method for manufacturing a photoelectric
conversion device according to claim 9, wherein the
concentration of hydroxyl group is controlled by
performing, in the second step, at least one of a plasma
treatment, a UV irradiation treatment, and a heat
30 treatment on the surface of the porous metal oxide
semiconductor layer.
77
18. The method for manufacturing a photoelectric conversion device according to claim 17, wherein the plasma treatment is performed under an oxidizing atmosphere.
19. The method for manufacturing a photoelectric conversion device according to claim 17, wherein the plasma treatment is performed by using one of parallel plate plasma, barrel plasma, microwave plasma, ECR plasma, helicon wave plasma, hollow cathode discharge plasma, surface wave plasma, and are jet plasma.