Plasma Cvd Device And Method Of Manufacturing Silicon Thin Film

Abstract: Disclosed is a plasma CVD device comprising a vacuum vessel that houses a discharge electrode plate and a ground electrode plate to which is attached a substrate for thin film formation. The plasma CVD device has an earth cover at an interval from and facing the aforementioned discharge electrode plate; the aforementioned discharge electrode plate has gas inlets and exhaust outlets (which expel gas introduced through said gas inlets) that are connected at one end to equipment supplying raw gas for thin film formation and that open at the other end at the bottom face of the aforementioned discharge electrode plate; the aforementioned earth cover has second gas inlets corresponding to the aforementioned gas inlets and second exhaust outlets corresponding to the aforementioned exhaust outlets.

Patent Information

Application #

Filing Date

30 May 2012

Publication Number

40/2013

Publication Type

INA

Invention Field

ELECTRICAL

Status

Email

Parent Application

Applicants

TORAY INDUSTRIES INC.

1-1 Nihonbashi-Muromachi 2-chome Chuo-ku Tokyo 103-8666

Inventors

1. KOMORI Tsunenori

c/o Shiga Plant Toray Industries Inc. 1-1 Sonoyama 1-chome Otsu-shi Shiga 520-8558

2. AMIOKA Takao

c/o Shiga Plant Toray Industries Inc. 1-1 Sonoyama 1-chome Otsu-shi Shiga 520-8558

3. SAKAMOTO Keitaro

of c/o Shiga Plant Toray Industries Inc. 1-1 Sonoyama 1-chome Otsu-shi Shiga 520-8558

Specification

please see the attachment

Documents

Application Documents

#	Name	Date
1	4755-CHENP-2012-AbandonedLetter.pdf	2018-11-16
1	Power of Authority.pdf	2012-06-07
2	Form-5.pdf	2012-06-07
2	4755-CHENP-2012-FER.pdf	2018-04-18
3	Form-3.pdf	2012-06-07
3	4755-CHENP-2012-Correspondence-F3-140316.pdf	2016-07-05
4	4755-CHENP-2012-Form 3-140316.pdf	2016-07-05
4	Form-1.pdf	2012-06-07
5	Drawings.jpg	2012-06-07
5	4755-CHENP-2012 CORRESPONDENCE OTHERS 03-08-2015.pdf	2015-08-03
6	4755-CHENP-2012 FORM-3 23-11-2012.pdf	2012-11-23
6	4755-CHENP-2012 FORM-3 03-08-2015.pdf	2015-08-03
7	4755-CHENP-2012 CORRESPONDENCE OTHERS 23-11-2012.pdf	2012-11-23
8	4755-CHENP-2012 FORM-3 23-11-2012.pdf	2012-11-23
8	4755-CHENP-2012 FORM-3 03-08-2015.pdf	2015-08-03
9	Drawings.jpg	2012-06-07
9	4755-CHENP-2012 CORRESPONDENCE OTHERS 03-08-2015.pdf	2015-08-03
10	4755-CHENP-2012-Form 3-140316.pdf	2016-07-05
10	Form-1.pdf	2012-06-07
11	4755-CHENP-2012-Correspondence-F3-140316.pdf	2016-07-05
11	Form-3.pdf	2012-06-07
12	Form-5.pdf	2012-06-07
12	4755-CHENP-2012-FER.pdf	2018-04-18
13	Power of Authority.pdf	2012-06-07
13	4755-CHENP-2012-AbandonedLetter.pdf	2018-11-16

Search Strategy

1	4755_CHENP_2012(1)_06-03-2018.pdf