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Polysiloxane, Material For Semiconductor,And Preparation Method For Semiconductor And Solar Cell

Abstract: Provided is a polysiloxane containing at least one segment selected from molecular structures shown by formula 1 below wherein in formula 1 Q is an alkyl containing an alcoholic hydroxyl and having less than 12 carbon atoms in the main chain or an alkyl containing an alcoholic hydroxyl and having less than 12 non-hydrogen atoms in the main chain and containing a heteroatom; and T is a hydroxyl an alkyl an alkyl containing an alcoholic hydroxyl and having less than 12 carbon atoms in the main chain or an alkyl containing an alcoholic hydroxyl and having less than 12 non-hydrogen atoms in the main chain and containing a heteroatom. A doped slurry and a mask material prepared by using the polysiloxane on the basis of having a good diffusivity also have a good barrier property and a small amount of diffusion in air. In addition according to a manufacturing method for a semiconductor the diffusion in air of a doped impurity in the doped slurry is further reduced so that the quality of a doping process can be further improved. fig-1

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Notices, Deadlines & Correspondence

Patent Information

Application #
Filing Date
22 March 2019
Publication Number
19/2019
Publication Type
INA
Invention Field
POLYMER TECHNOLOGY
Status
Email
patent@depenning.com
Parent Application
Patent Number
Legal Status
Grant Date
2021-10-08
Renewal Date

Applicants

TORAY INDUSTRIES, INC
1 -1, Nihonbashi-Muromachi 2-chome, Chuo-ku, Tokyo 103-8666.

Inventors

1. XU, Fangrong
No. 369 Ziyue Road, Zizhu Hi-Tech Industrial Development Zone, Minhang District Shanghai 200241
2. LI, Ping
No. 369 Ziyue Road, Zizhu Hi-Tech Industrial Development Zone, Minhang District Shanghai 200241
3. IKEDA, Takeshi
No. 369 Ziyue Road, Zizhu Hi-Tech Industrial Development Zone, Minhang District Shanghai 200241
4. SONG, Wei
No. 369 Ziyue Road, Zizhu Hi-Tech Industrial Development Zone, Minhang District Shanghai 200241
5. JIN, Guangnan
No. 369 Ziyue Road, Zizhu Hi-Tech Industrial Development Zone, Minhang District Shanghai 200241
6. UMEHARA, Masaaki
c/o Toray Industries, Inc. Plant. 1-1-1, Sonoyama Otsu, Shiga 520-0842
7. KITADA, Tsuyoshi
c/o Toray Industries, Inc. Plant. 1-1-1, Sonoyama Otsu, Shiga 520-0842

Specification

1. A polysiloxane, comprising at least one segment selected from a molecular structure shown by
formula 1,
wherein in formula 1, Q is an alkyl containing an alcoholic hydroxyl and having less than 12 carbon atoms in the main chain, or an alkyl containing an alcoholic hydroxyl and having less than 12 non-hydrogen atoms in the main chain and containing a heteroatom; and T is a hydroxyl, an alkyl, an alkyl containing an alcoholic hydroxyl and having less than 12 carbon atoms in the main chain, or an alkyl containing an alcoholic hydroxyl and having less than 12 non-hydrogen atoms in the main chain and containing a heteroatom.
2. The polysiloxane according to claim 1, wherein the Q is a structural segment shown by formula
2. ' .
HO OH
R3 R2 Formula 2 p -
i n i
wherein in formula 2, X is an alkyl having less than 7 carbon atoms, or an alkyl having less than 7 non-hydrogen atoms in the main chain and containing a heteroatom; Ri, R2, and R3 are each independently a hydrogen atom, or a substituent having less than 3 carbon atoms, or the R2 binds to a carbon atom on the X to form a cyclic substituent.
3. The polysiloxane according to claim 2, wherein the X is an alkyl having less than 7 non-hydrogen atoms in the main chain and containing a heteroatom.
4. The polysiloxane according to claim 2, wherein the Ri, R2, and R3 are each independently a hydrogen atom, or a substituent having 1 carbon atom, or the R2 binds to a carbon atom on the X to form a cyclic substituent.
5. The polysiloxane according to any one of claims 2 to 4, wherein the Ri, R2, and R3 are each independently a hydrogen atom. t "
6. The polysiloxane according to any one of claims 1 to 5, wherein the polysiloxane only comprises the molecular structure segment shown by formula 1 and the Q is formed by a molecular structure segment shown by formula 2. :: ■

8. The polysiloxane according to any one of claims 1 to 5, further comprising at least one segment
selected from a molecular structure shown by formula 3 at a molar content of 1 to 99%,

Formula 3
wherein in formula 3, XI is an alkyl having less than 8 carbon atoms, or an aryl having less than 10 carbon atoms; and Yl is a hydroxyl, an aryl having less than 10 carbon atoms, or an alkyl having less than 8 carbon atoms.
9. The polysiloxane according to claim 8, wherein a molar content of the molecular structure
segment shown by formula 3 is 1 to 50%.
10. The polysiloxane according to any one of claims 8 to 9, wherein the Yl is a hydroxyl.
11. The polysiloxane according to any one of claims 1 to 10, wherein the T is a hydroxyl, an alkyl
having less than 8 carbon atoms, or a structure shown by formula 4,
HO OH
•~Z R6 R5 Formula 4
wherein in formula 4, Z is an alkyl having less than 7 carbon atoms, or an alkyl having less than 7 non-hydrogen atoms in the main chain and containing a heteroatom; R4, R5, and R6 are each independently a hydrogen atom, or a substituent having less than 3 carbon atoms, or the R5 binds to a carbon atom on the Z to form a cyclic substituent.
12. The polysiloxane according to claim 11, wherein the Z is an alkyl having less than 7 non-hydrogen atoms in the main chain and containing a heteroatom.
13. The polysiloxane according to any one of claims 1 to 12, wherein the T is a hydroxyl.
14. The polysiloxane according to any one of claims 1 to 13, wherein the polysiloxane is free of an epoxyethane structure.
15. The polysiloxane according to any one of claims 1 to 14, wherein the polysiloxane has a weight average molecular weight of 500 to 50,000. ,, _ 11

16. The polysiloxane according to claim 15, wherein the polysiloxane has a weight average molecular weight of 1,000 to 11,000.
17. The polysiloxane according to claim 16, wherein the polysiloxane has a weight average molecular weight of 1,500 to 5,500. - .
18. A material for solar energy and a semiconductor, comprising the polysiloxane according to any one of claims 1 to 17. - '' ''"".-
19. The material for solar energy and a semiconductor according to claim 18, further comprising:
a dopant component A, ' ' ' ■
a polymer binder B, and
a solvent C. ■
20. The material for solar energy and a semiconductor according to claim 19, wherein the dopant component A is an n-type dopant component of a compound containing an element of a 5th main group, or a p-type dopant component of a compound containing an element of a 3rd main group.
21. The material for solar energy and a semiconductor according to claim 20, wherein the dopant . component A contains an inorganic boron compound component, or an inorganic phosphorus compound component.
22. The material for solar energy and a semiconductor according to claim 19, wherein a molecular structure repeating unit of the polymer binder B contains an alcoholic hydroxyl.
23. The material for solar energy and a semiconductor according to claim 22, wherein the polymer binder B has a weight average molecular weight in a range of 1,000 to 300,000.
24. The material for solar energy and a semiconductor according to claim 19, wherein the solvent
C comprises 0 to 50% water and 50 to 100% organic solvent.
11 i i i
25. The material for solar energy and a semiconductor according to claim 24, wherein the solvent
C is an organic solvent having a boiling point of 50 to 300°C.
11
26. The material for solar energy and a semiconductor according to claim 19, wherein a total addition amount of the dopant component A, the polymer binder B, the polysiloxane, and the solvent C is 2 to 30% relative to a total mass of a slurry.
27. A method for manufacturing a semiconductor unit of a semiconductor substrate, comprising following steps a to c,

a. coating the material according to any one of claims 19 to 26 on one side of each
semiconductor substrate as a first conductive type impurity diffusion composition, to form a first
conductive type impurity diffusion composition film,
b. heating the semiconductor substrate on which the first conductive type impurity |
diffusion composition film obtained in the step a is formed, to enable the first conductive type
impurity contained in the dopant component A of the material to diffuse into the semiconductor substrate, to form a first conductive type impurity diffusion layer, and
c. heating the semiconductor substrate in an atmosphere of a gas containing a second
conductive type impurity, to enable the second conductive type impurity to diffuse into the
semiconductor substrate, to form a second conductive type impurity diffusion layer,
wherein in the step b and the step c, respective sides on which the first conductive type j
impurity diffusion composition films of the semiconductor substrates with two pieces in each group are formed are oppositely placed.
28. The method for manufacturing a semiconductor unit according to claim 27, wherein the step
c is carried out using a thermal processing product of the first conductive type impurity diffusion
composition film as a mask after the step b.
I
29. The method for manufacturing a semiconductor unit according to claim 27, wherein the step c is carried out after the step b and in succession to the step b.
30. The method for manufacturing a semiconductor unit according to claim 27, wherein in the step c, a heating temperature when forming the second conductive type impurity diffusion layer is 50 to 200°C lower than a temperature when forming the first conductive type impurity diffusion layer in the step b.
M
i
31. The method for manufacturing a semiconductor unit according to claim 27, further i comprising a step d: oxidizing surface of the semiconductor substrate in an oxygen-containing atmosphere.
32. The method for manufacturing a semiconductor unit according to claim 31, wherein the step d is carried out after the step c. and in succession to the step c.

33. The method for manufacturing a semiconductor unit according to claim 27, wherein in the step b and the step c, for a plurality of groups of the semiconductor substrates with two pieces in each group, a distance between sides on which the first conductive type impurity diffusion composition films in each group are formed is Wl, a distance between sides opposite to the sides on which the first conductive type impurity diffusion composition films in adjacent two groups are formed is W2, and Wl and W2 satisfy Wl < W2. ,,
34. The method for manufacturing a semiconductor unit according to claim 33, wherein in configurations of a plurality of pieces of the semiconductor substrates in the step b and the step c, the distance between sides on which the first conductive type impurity diffusion composition films of the semiconductor substrates with two pieces in each group are formed is 0 mm.
.ii '
35. The method for manufacturing a semiconductor unit according to claim 27, wherein the step
b is carried out in an oxygen-containing atmosphere.
36. The method for manufacturing a semiconductor unit according to claim 35, wherein a ratio of nitrogen to oxygen in the atmosphere in the step b is identical to a ratio of nitrogen to oxygen in an atmosphere in the step c.
37. The method for manufacturing a semiconductor unit according to claim 27, wherein the first conductive type is a p-type, and the second conductive type is an n-type.
38. A solar cell prepared by the method for manufacturing a semiconductor unit according to any one of claims 27 to 37.

Documents

Application Documents

# Name Date
1 201947011208.pdf 2019-03-22
2 201947011208-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [22-03-2019(online)].pdf 2019-03-22
3 201947011208-STATEMENT OF UNDERTAKING (FORM 3) [22-03-2019(online)].pdf 2019-03-22
4 201947011208-PROOF OF RIGHT [22-03-2019(online)].pdf 2019-03-22
5 201947011208-PRIORITY DOCUMENTS [22-03-2019(online)].pdf 2019-03-22
6 201947011208-POWER OF AUTHORITY [22-03-2019(online)].pdf 2019-03-22
7 201947011208-FORM 1 [22-03-2019(online)].pdf 2019-03-22
8 201947011208-DRAWINGS [22-03-2019(online)].pdf 2019-03-22
9 201947011208-DECLARATION OF INVENTORSHIP (FORM 5) [22-03-2019(online)].pdf 2019-03-22
10 201947011208-COMPLETE SPECIFICATION [22-03-2019(online)].pdf 2019-03-22
11 201947011208-CLAIMS UNDER RULE 1 (PROVISIO) OF RULE 20 [22-03-2019(online)].pdf 2019-03-22
12 abstract 201947011208.jpg 2019-03-25
13 Correspondence By Agent_Form1_02-04-2019.pdf 2019-04-02
14 201947011208-FORM 3 [30-05-2019(online)].pdf 2019-05-30
15 201947011208-FORM 18 [18-05-2020(online)].pdf 2020-05-18
16 201947011208-FORM 3 [23-11-2020(online)].pdf 2020-11-23
17 201947011208-OTHERS [27-07-2021(online)].pdf 2021-07-27
18 201947011208-FORM-26 [27-07-2021(online)].pdf 2021-07-27
19 201947011208-FORM 3 [27-07-2021(online)].pdf 2021-07-27
20 201947011208-FER_SER_REPLY [27-07-2021(online)].pdf 2021-07-27
21 201947011208-CLAIMS [27-07-2021(online)].pdf 2021-07-27
22 201947011208-ABSTRACT [27-07-2021(online)].pdf 2021-07-27
23 201947011208-PatentCertificate08-10-2021.pdf 2021-10-08
24 201947011208-IntimationOfGrant08-10-2021.pdf 2021-10-08
25 201947011208-FER.pdf 2021-10-17
26 201947011208-RELEVANT DOCUMENTS [30-09-2023(online)].pdf 2023-09-30

Search Strategy

1 SEARCHSTRATEGYE_31-01-2021.pdf

ERegister / Renewals

3rd: 25 Nov 2021

From 23/08/2019 - To 23/08/2020

4th: 25 Nov 2021

From 23/08/2020 - To 23/08/2021

5th: 25 Nov 2021

From 23/08/2021 - To 23/08/2022

6th: 06 Jul 2022

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