Title of the invention: Seal state detection device and seal state detection method
Technical field
[0001]
The present invention relates to a seal state detection device for a cylinder device and a seal state detection method.
This application claims priority based on Japanese Patent Application No. 2019-175409 filed in Japan on September 26, 2019, and the contents thereof are incorporated herein by reference.
Background technology
[0002]
There is a device that detects a seal abnormality in the damper device (see, for example, Patent Document 1). Further, as a pressurized gas filling device, there is a device using a box-shaped enclosed type having an opening on one side (see, for example, Patent Document 2).
Prior art literature
Patent documents
[0003]
Patent Document 1: Japanese Patent Application Laid-Open No. 11-264780
Patent Document 2: Kunizane Kunizane No. 62-46956
Outline of the invention
Problems to be solved by the invention
[0004]
In the device that detects the seal state of the cylinder device, it is required to increase the degree of freedom in the timing of inspection.
[0005]
An object of the present invention is to provide a seal state detection device and a seal state detection method capable of increasing the degree of freedom in the timing of inspection.
Means to solve problems
[0006]
In order to achieve the above object, the present invention has adopted the following aspects.
That is, one aspect of the present invention is a cylinder having a cylinder in which a working fluid is sealed, a rod that expands and contracts from at least one end of the cylinder, and a seal member provided between the cylinder and the rod. A seal state detection device for detecting the seal state of the seal member of the device, which has a cylinder facing portion and a rod facing portion, the cylinder facing portion facing the cylinder, and the rod facing portion facing the rod. By arranging them side by side in the circumferential direction of the cylinder, a storage chamber for accommodating a part of the cylinder and a part of the rod is formed between the cylinder facing portion and the rod facing portion. The cylinder facing portion has a sealing portion that abuts on the cylinder, and the sealing portion has a convex portion at one end in the circumferential direction of the cylinder and a concave portion at the other end. When the plurality of divided case members are arranged side by side in the circumferential direction of the cylinder, the convex portion and the concave portion facing the circumferential direction of the cylinder are fitted to each other.
[0007]
Another aspect of the present invention is a seal state detection method for detecting the seal state of the seal member of the cylinder device using the seal state detection device of the above aspect, wherein the plurality of divided case members are combined with the cylinder. A storage chamber forming step of forming a storage chamber for accommodating a part of the cylinder and a part of the rod between the cylinder facing portion and the rod facing portion by arranging them side by side in the circumferential direction of the cylinder and the housing. It has a decompression step of putting the room into a depressurized state at a predetermined pressure higher than the atmospheric pressure, and an abnormality detecting step of detecting an abnormality based on the pressure in the accommodation chamber which was put into the depressurized state in the depressurizing step.
The invention's effect
[0008]
According to each of the above aspects of the present invention, it is possible to increase the degree of freedom in the timing of inspection.
A brief description of the drawing
[0009]
FIG. 1 is a diagram showing a seal state detection device and a cylinder device in which a seal state is detected by a seal state detection method according to an embodiment of the present invention, and is a vertical cross-sectional view seen in a cross section including a central axis CL. be.
FIG. 2 is a configuration diagram showing a seal state detection device of the same embodiment.
FIG. 3 is a view showing a chamber of the seal state detection device, and is a plan sectional view taken along the line AA of FIG.
FIG. 4 is a view showing a chamber of the seal state detection device, and is a plan sectional view taken along the line BB of FIG.
5 is a view showing the chamber of the seal state detection device, and is a plan sectional view taken along the line BB of FIG. 2. FIG.
FIG. 6 is a perspective view showing a cylinder seal of the seal state detection device.
FIG. 7 is a view showing the periphery of the convex portion and the concave portion of the seal portion of the seal state detection device, and is a partial vertical cross-sectional view taken along the line CC of FIG.
FIG. 8 is a diagram showing a modified example 1 of the seal state detection device, and is a plan sectional view corresponding to FIG.
FIG. 9 is a diagram showing the same modified example 1, and is a partial vertical sectional view corresponding to FIG. 7. FIG.
FIG. 10 is a diagram showing the same modified example 1, and is a partial vertical sectional view corresponding to FIG. 9.
FIG. 11 is a diagram showing a modification 2 of the seal state detection device, and is a plan sectional view corresponding to FIG.
FIG. 12 is a diagram showing the same modified example 2, and is a partial vertical sectional view corresponding to FIG. 7.
FIG. 13 is a diagram showing the same modification 2, and is a partial vertical sectional view corresponding to FIG. 12.
FIG. 14 is a diagram showing a modified example 3 of the seal state detection device, and is a plan sectional view corresponding to FIG.
FIG. 15 is a diagram showing the same modified example 3, and is a partial vertical sectional view corresponding to FIG. 7.
FIG. 16 is a diagram showing the same modified example 3, and is a partial vertical sectional view corresponding to FIG.
Embodiment for carrying out the invention
[0010]
An embodiment of the seal state detection device and the seal state detection method of the present invention and each modification will be described below with reference to the drawings.
[0011]
FIG. 1 shows a cylinder device 11 in which a seal state is detected by the seal state detection device and the seal state detection method according to the embodiment of the present invention. The cylinder device 11 is a shock absorber used in a suspension device of a vehicle such as an automobile or a railroad vehicle. The cylinder device 11 is a double-cylinder type having a cylinder 17 having a cylindrical inner cylinder 15 and a bottomed tubular outer cylinder 16 having a diameter larger than that of the inner cylinder 15 and provided on the outer peripheral side of the inner cylinder 15. It is a shock absorber. A reservoir chamber 18 is formed between the outer cylinder 16 and the inner cylinder 15. The reference numeral CL in FIG. 1 indicates the central axis of the cylinder device 11. The same applies to other figures. Each central axis described in the following description is basically coaxial with the central axis CL.
[0012]
The outer cylinder 16 is an integrally molded product made of one metal member, and has a cylindrical body portion 21, a bottom portion 22 that closes one end side of the body portion 21 in the axial direction, and a bottom portion of the body portion 21. It has an opening 23 on the opposite side of the 22. In other words, the outer cylinder 16 covers the inner cylinder 15, one end in the axial direction is closed, and the other end in the axial direction is open. The opening 23 of the outer cylinder 16 is open toward the outside of the cylinder device 11. Therefore, the opening 23 is an opening to the outside even in the cylinder 17.
[0013]
The cylinder device 11 has an annular valve body 25 fitted to the inner peripheral portion of one end in the axial direction of the inner cylinder 15 and an annular rod fitted to the inner peripheral portion of the other end in the axial direction of the inner cylinder 15. It has a guide 26 and. The valve body 25 is placed in a state of being positioned radially with respect to the bottom portion 22 of the outer cylinder 16. The rod guide 26 is fitted to the inner peripheral portion of the body portion 21 of the outer cylinder 16 and is positioned in the radial direction. Here, the valve body 25 and the bottom portion 22 communicate with each other between the inner cylinder 15 and the outer cylinder 16 via a passage groove 35 formed in the valve body 25, and the inner cylinder 15 and the outer cylinder 16 communicate with each other. The reservoir chamber 18 is configured in the same manner as between the two.
[0014]
The cylinder device 11 has an annular seal member 31. The seal member 31 is provided at a position on the rod guide 26 opposite to the side facing the bottom portion 22. The seal member 31 is also fitted to the inner peripheral portion of the body portion 21 in the same manner as the rod guide 26. A crimping portion 33 is formed at the end of the body portion 21 on the side opposite to the bottom portion 22 by plastically deforming the body portion 21 inward in the radial direction by crimping such as curling. The seal member 31 is sandwiched between the crimping portion 33 and the rod guide 26. The seal member 31 closes the cylinder 17 by closing the opening 23 of the outer cylinder 16, and is specifically an oil seal. The seal member 31 may be formed of a seal washer.
[0015]
The cylinder device 11 has a piston 40 provided in the cylinder 17. The piston 40 is slidably fitted in the inner cylinder 15. The piston 40 divides the inside of the inner cylinder 15 into two chambers, a first chamber 41 and a second chamber 42. The first chamber 41 is provided between the piston 40 in the inner cylinder 15 and the rod guide 26. The second chamber 42 is provided between the piston 40 in the inner cylinder 15 and the valve body 25. The second chamber 42 is defined as the reservoir chamber 18 by the valve body 25. The first chamber 41 and the second chamber 42 are filled with an oil liquid L as a working fluid. The reservoir chamber 18 is filled with gas G and oil liquid L as working fluids. Therefore, the working fluid is sealed in the cylinder 17.
[0016]
The cylinder device 11 has a rod 51 having one end side connected to the piston 40 and the other end side extending from the cylinder 17 to the outside through the opening 23 of the outer cylinder 16. A piston 40 is connected to the rod 51 by a nut 53. The rod 51 extends outward from the inner cylinder 15 and the outer cylinder 16 through the rod guide 26 and the seal member 31. The rod 51 is guided by the rod guide 26 and moves in the axial direction with respect to the cylinder 17. Therefore, the rod 51 projects from one end of the cylinder 17 so as to be expandable and contractible.
[0017]
The seal member 31 is provided between the opening 23 of the outer cylinder 16 of the cylinder 17 and the rod 51, and closes between them. The seal member 31 regulates the oil liquid L in the inner cylinder 15 and the gas G and the oil liquid L in the reservoir chamber 18 from leaking to the outside of the cylinder device 11.
[0018]
The piston 40 is formed with a passage 55 and a passage 56 that penetrate in the axial direction (direction along the axis CL). The passages 55 and 56 allow communication between the first room 41 and the second room 42. The cylinder device 11 has an annular disc valve 57 capable of closing the passage 55 by abutting on the piston 40 on the side of the piston 40 opposite to the side facing the bottom 22 along the axial direction. .. Further, the cylinder device 11 has an annular disc valve 58 on the bottom 22 side of the piston 40 along the axial direction, which can close the passage 56 by abutting on the piston 40. The disc valves 57 and 58 are connected to the rod 51 together with the piston 40.
[0019]
When the rod 51 moves to the contraction side that increases the amount of entry into the inner cylinder 15 and the outer cylinder 16, the piston 40 moves in the direction of narrowing the second chamber 42, and the pressure in the second chamber 42 becomes the first chamber 41. When the pressure becomes higher than a predetermined value by a predetermined value or more, the passage 55 is opened and the oil liquid L in the second chamber 42 flows into the first chamber 41. In this way, the disc valve 57 generates a damping force at that time. When the rod 51 moves to the extension side that increases the amount of protrusion from the inner cylinder 15 and the outer cylinder 16, the piston 40 moves in the direction of narrowing the first chamber 41, and the pressure in the first chamber 41 is in the second chamber 42. When the pressure is higher than the predetermined value by a predetermined value or more, the passage 56 is opened and the oil liquid L in the first chamber 41 is allowed to flow into the second chamber 42. In this way, the disc valve 58 generates a damping force at that time.
[0020]
Fixing to at least one of the piston 40 and the disc valve 57 (not shown) that allows the disc valve 57 to communicate between the first chamber 41 and the second chamber 42 via the passage 55 even when the passage 55 is most closed. An orifice is formed. Further, at least one of the piston 40 and the disc valve 58 is not shown to communicate between the first chamber 41 and the second chamber 42 via the passage 56 even when the disc valve 58 is in the state where the passage 56 is most closed. Fixed orifice is formed.
[0021]
The valve body 25 is formed with a passage 61 and a passage 62 penetrating in the axial direction. The passages 61 and 62 allow communication between the second chamber 42 and the reservoir chamber 18. An annular disc valve 65 that can close the passage 61 by abutting on the valve body 25 is provided on the bottom 22 side of the valve body 25 in the axial direction. Further, on the side opposite to the axial bottom portion 22 of the valve body 25, an annular disc valve 66 capable of closing the passage 62 by abutting on the valve body 25 is provided. Diameter of valve body 25 A fixing pin 68 is fitted in the center of the direction. The disc valves 65 and 66 are connected to the valve body 25 by the fixing pins 68.
[0022]
When the rod 51 moves to the contraction side, the piston 40 moves in the direction of narrowing the second chamber 42, and when the pressure in the second chamber 42 becomes higher than the pressure in the reservoir chamber 18 by a predetermined value or more, the passage 61 is entered. open. In this way, the disc valve 65 generates a damping force at that time. When the rod 51 moves to the extension side and the piston 40 moves to the first chamber 41 side and the pressure in the second chamber 42 becomes lower than the pressure in the reservoir chamber 18, the disc valve 66 opens the passage 62. It will be. The disc valve 66 is a suction valve that allows the oil liquid L to flow from the reservoir chamber 18 into the second chamber 42 without substantially generating a damping force at that time.
[0023]
The mounting eye 71 is fixed by welding to the end of the rod 51 on the side opposite to the side where the cylinder 17 is located. A mounting eye 72 is fixed to the outside of the bottom 22 of the outer cylinder 16, which is the end of the cylinder 17 on the side opposite to the side where the rod 51 is located, by welding. The outer diameters of these mounting eyes 71 and 72 are larger than the outer diameter of the body portion 21 of the outer cylinder 16 of the cylinder 17. In other words, the mounting eye 71 protrudes outward in the radial direction of the rod 51 from the rod 51 in a state of being mounted on the rod 51.
[0024]
In this embodiment, the cylinder device 11 in a state after the mounting eyes 71 and 72 are mounted is inspected. Specifically, the seal state detection device and the seal state detection method of the present embodiment detect the seal state of the seal member 31 that seals between the opening 23 of the outer cylinder 16 of the cylinder 17 and the rod 51. do.
[0025]
As shown in FIG. 2, the seal state detection device 101 of the present embodiment covers and seals the opening 23 side of the cylinder 17 of the cylinder device 11 and the seal member 31, and the seal member from the state inside the chamber 102. A detection device main body 103 for detecting an abnormality in the seal state by 31 is provided.
[0026]
The chamber 102 covers and seals the opening 23 side of the cylinder 17, the seal member 31, and the portion extending to the outside of the cylinder 17 from the seal member 31 of the rod 51. The chamber 102 is a split type having a plurality of, specifically two split case members 111 and 112. The two divided case members 111 and 112 have substantially the same configuration as each other.
[0027]
The split case member 111 has a metal case member main body 121, a rubber rod seal 122 that is elastically deformable and has a sealing property, and a similar rubber cylinder seal 123. Since the case member main body 121 is made of metal, it has higher rigidity than the rubber rod seal 122 and the cylinder seal 123, and is less likely to be deformed.
[0028]
The case member main body 121 of the split case member 111 includes a main wall portion 130, a pair of side wall portions 131 (only one of which is shown in the cross-sectional view in FIG. 2), and a rod facing flange portion 133. , And a cylinder facing flange portion 134.
[0029]
The main wall portion 130 has a substantially flat plate shape and is arranged so as to spread along the vertical direction. Each of the pair of side wall portions 131 has a substantially flat plate shape, and extends from the edge portions on both sides of the main wall portion 130 in the horizontal direction to the same side with respect to the main wall portion 130 along the thickness direction of the main wall portion 130. It is out.
[0030]
The rod facing flange portion 133 has a substantially flat plate shape and covers the upper portion thereof so as to connect the upper end edges of the main wall portion 130 and the pair of side wall portions 131. The rod facing flange portion 133 has a shape that covers the space surrounded by the main wall portion 130 and the pair of side wall portions 131 from above.
[0031]
The cylinder facing flange portion 134 has a substantially flat plate shape, and covers the main wall portion 130 and the lower end edges of the pair of side wall portions 131 on the lower side so as to connect them. The cylinder facing flange portion 134 has a shape that covers the space surrounded by the main wall portion 130 and the pair of side wall portions 131 from below.
[0032]
Therefore, the split case member 111 has a box shape having an opening 137 on the side opposite to the side where the main wall portion 130 is located.
[0033]
The rod facing flange portion 133 is formed with a semi-cylindrical surface-shaped rod facing surface 141 that is recessed toward the main wall portion 130 side on the opening portion 137 side. The central axis of the rod facing surface 141 extends in the vertical direction. The rod facing surface 141 has an inner diameter slightly larger than the outer diameter of the rod 51. On the opening 137 side of the rod facing flange portion 133, a rod seal fitting recess 142 is formed which is recessed outward in the radial direction of the rod facing surface 141 from the intermediate position in the axial direction of the rod facing surface 141.
[0034]
The cylinder facing flange portion 134 is formed with a semi-cylindrical surface-shaped cylinder facing surface 151 that is recessed toward the main wall portion 130 side on the opening portion 137 side. The central axis of the cylinder facing surface 151 extends along the vertical direction. As shown in FIGS. 3 to 5, the cylinder facing surface 151 has an inner diameter slightly larger than the outer diameter of the body portion 21 of the cylinder 17. Tip surfaces 152 and 153 are formed on both ends of the cylinder facing surface 151 in the circumferential direction. The tip surfaces 152 and 153 are arranged on the same plane extending parallel to the central axis of the cylinder facing surface 151. The cylinder facing surface 151 coincides with the rod facing surface 141 shown in FIG. 2 on the central axis.
[0035]
On the opening 137 side of the cylinder facing flange portion 134, a cylinder seal fitting recess 154 is formed which is recessed outward in the radial direction of the cylinder facing surface 151 from an intermediate position in the axial direction of the cylinder facing surface 151. As shown in FIG. 3, the cylinder seal fitting recess 154 is recessed outward in the radial direction of the cylinder facing surface 151 from the cylinder facing surface 151 side of each of the tip surfaces 152 and 153 in addition to the cylinder facing surface 151. There is.
[0036]
The cylinder seal fitting recess 154 has an inner wall surface 156 on the tip surface 152 side, an inner wall surface 157 on the tip surface 153 side, and end edges of the inner wall surfaces 156 and 157 on opposite sides to the tip surfaces 152 and 153. It has a back wall surface 158 to be connected. The inner wall surface 156 and the inner wall surface 157 are parallel to each other and face each other, and are perpendicular to the tip surfaces 152 and 153. The inner wall surface 156, 157 and the back wall surface 158 extend along the central axis of the cylinder facing surface 151.
[0037]
As shown in FIG. 2, the rod seal 122 of the split case member 111 is fitted in the rod seal fitting recess 142 of the rod facing flange portion 133. The rod seal 122 fitted in the rod seal fitting recess 142 has a semi-cylindrical surface-shaped rod contact surface 161 having an inner diameter equal to or smaller than the outer diameter of the rod 51 on the opening 137 side thereof. .. The rod contact surface 161 of the rod seal 122 coincides with the rod facing surface 141 of the case member main body 121 with the central axis. The rod contact surface 161 is located inside these radial directions with respect to the rod facing surface 141.
[0038]
Therefore, the rod seal 122 has an arc-shaped rod contact portion 162 that protrudes inward in the radial direction from the rod facing surface 141. A rod contact surface 161 is formed at the protruding tip of the rod contact portion 162. In the split case member 111, the rod contact portion 162 and the portion including the rod facing surface 141 on the rod facing surface 141 side of the rod facing flange portion 133 have a rod facing portion 165 facing the rod 51 from the outside in the radial direction. It is composed.
[0039]
The cylinder seal 123 of the split case member 111 is fitted in the cylinder seal fitting recess 154 of the cylinder facing flange portion 134. The cylinder seal 123 fitted in the cylinder seal fitting recess 154 has a semi-cylindrical surface-shaped cylinder contact surface 171 having an inner diameter equal to or smaller than the outer diameter of the body portion 21 on the opening 137 side. .. As shown in FIG. 3, the cylinder contact surface 171 of the cylinder seal 123 coincides with the cylinder facing surface 151 of the case member main body 121 with the central axis. The cylinder contact surface 171 is located inside these radial directions with respect to the cylinder facing surface 151.
[0040]
Therefore, the cylinder seal 123 has an arc-shaped cylinder contact portion 172 that protrudes inward in the radial direction from the cylinder facing surface 151. A cylinder contact surface 171 is formed at the protruding tip of the cylinder contact portion 172.
[0041]
As shown in FIG. 6, the cylinder seal 123 has an end contact surface 181 and an end contact surface 182, both of which are planar, at both ends in the circumferential direction of the cylinder contact surface 171. .. The end contact surface 181 and the end contact surface 182 are arranged in the same plane. The end contact surface 181 and the end contact surface 182 are arranged on the same plane including the central axis of the cylinder contact surface 171. In other words, the end contact surface 181 and the end contact surface 182 extend perpendicular to the plane orthogonal to the central axis of the cylinder contact surface 171.
[0042]
The cylinder seal 123 has a convex portion 184 projecting from one end contact surface 181 in a direction perpendicular to the end contact surface 181 and an end contact surface 182 from the other end contact surface 182. It has a recess 185 that is recessed in the direction perpendicular to the surface 182. In other words, the cylinder seal 123 is formed with a convex portion 184 at one end in the circumferential direction of the cylinder contact surface 171 and a concave portion 185 at the other end. Further, the convex portion 184 and the concave portion 185 are steps along the wall thickness direction of the cylinder seal 123, in other words, the axial direction of the cylinder 17.
[0043]
As shown in FIG. 3, in the cylinder seal 123, the end contact surface 181 and the convex portion 184 are arranged on the tip surface 152 and the inner wall surface 156 side of the cylinder facing flange portion 134. Further, the end contact surface 182 and the recess 185 are arranged on the front end surface 153 and the inner wall surface 157 side. The end contact surface 181 is arranged on the side opposite to the back wall surface 158 with respect to the front end surface 152. The end contact surface 182 is arranged on the side opposite to the back wall surface 158 with respect to the front end surface 153. The cylinder seal 123 has an end contact portion 188 that protrudes from the front end surface 152 on the side opposite to the back wall surface 158. The end contact portion 188 includes an end contact surface 181. The cylinder seal 123 has an end contact portion 189 projecting from the front end surface 153 to the side opposite to the back wall surface 158. The end contact portion 189 includes an end contact surface 182.
[0044]
As shown in FIG. 6, the convex portion 184 projects from the end contact surface 181 along the tangential direction at the position of the end contact surface 181 of the cylinder contact surface 171. The convex portion 184 is formed so as to traverse the entire end contact surface 181 in the radial direction of the cylinder contact surface 171.
[0045]
The recess 185 is recessed from the end contact surface 182 along the tangential direction at the position of the end contact surface 182 of the cylinder contact surface 171. The recess 185 is formed so as to traverse the entire end contact surface 182 in the radial direction of the cylinder contact surface 171. The extending length of the convex portion 184 is equivalent to the extending length of the concave portion 185.
[0046]
The cylinder seal 123 includes a cylinder seal main body 187 including an end contact surface 181 and 182, a concave portion 185, and a cylinder contact surface 171 and a convex portion 184 protruding from the end contact surface 181 of the cylinder seal main body 187. It consists of. The cylinder seal main body 187 includes an end contact portion 188 on the end contact surface 181 side including the end contact surface 181 and an end contact on the end contact surface 182 side including the end contact surface 182. It has a contact portion 189 and a cylinder contact portion 172 on the cylinder contact surface 171 side including the cylinder contact surface 171. The convex portion 184 projects from the end contact portion 188.
[0047]
As shown in FIG. 3, the cylinder seal main body 187 has a side surface 175 adjacent to the side opposite to the cylinder contact surface 171 of the end contact surface 181 and a cylinder contact surface of the end contact surface 182.It has a side surface 176 adjacent to the side opposite to 171 and a back surface 177 connecting the side surfaces 175 and 176 at positions opposite to the end contact surfaces 181 and 182. The sides 175,176 extend perpendicular to the end contact surfaces 181,182. The back surface 177 extends parallel to the end contact surfaces 181, 182. In the cylinder seal 123, the side surface 175 is in contact with the inner wall surface 156, the side surface 176 is in contact with the inner wall surface 157, and the back surface 177 is in contact with the back wall surface 158.
[0048]
The convex portion 184 has an upper surface 191 shown in FIGS. 3, 6 and 7, a lower surface 192 shown in FIG. 7, an inner surface 193 shown in FIGS. 3 and 6, an outer surface 194 shown in FIG. 3, and FIG. It has an inner surface surface 195 shown in FIG. 6, an outer surface surface 196 shown in FIGS. 3 and 6, and a tip surface 197 shown in FIGS. 3, 6 and 7. The upper surface 191 and the lower surface 192, the inner side surface 193, the outer surface 194, the inner surface surface 195, the outer surface surface 196, and the tip surface 197 are all flat surfaces.
[0049]
As shown in FIG. 6, the upper surface 191 is located above the convex portion 184 and faces upward. The upper surface 191 is arranged in a plane in which the boundary edge portion with the end contact surface 181 is orthogonal to the center line of the cylinder contact surface 171. As shown in FIG. 7, the lower surface 192 is located at the lower part of the convex portion 184 and faces downward. The lower surface 192 is arranged in a plane in which the boundary edge portion with the end contact surface 181 is orthogonal to the center line of the cylinder contact surface 171.
[0050]
The upper surface 191 and the lower surface 192 each extend from the edge portion on the end contact surface 181 side in a direction away from the end contact surface 181 and extend from each other as the distance from the end contact surface 181 increases. It is tilted to approach. The upper surface 191 and the lower surface 192 have the same angle with the end contact surface 181. In other words, the upper surface 191 and the lower surface 192 have an obtuse angle with the end contact surface 181.
[0051]
The tip surface 197 is located at the tip of the convex portion 184 opposite to the end contact surface 181 and faces in the same direction as the end contact surface 181. The front end surface 197 connects the end edges of the upper surface 191 and the lower surface 192 opposite to the end contact surface 181. The tip surface 197 extends so as to be parallel to the end contact surface 181. In the tip surface 197, the boundary edge portion with the upper surface 191 and the boundary edge portion with the lower surface 192 are both arranged in a plane orthogonal to the center line of the cylinder contact surface 171.
[0052]
As shown in FIG. 6, the inner side surface 193 is on the central axis side of the cylinder contact surface 171 in the convex portion 184, and faces the direction of the central axis. The inner side surface 193 extends parallel to the central axis of the cylinder contact surface 171 and extends in the tangential direction at the position of the end contact surface 181 of the cylinder contact surface 171. The inner side surface 193 is continuous with the cylinder contact surface 171. The inner surface 193 extends perpendicular to the tip surface 197.
[0053]
As shown in FIG. 3, the outer surface 194 is on the side opposite to the cylinder contact surface 171 in the convex portion 184, and faces the direction opposite to the central axis of the cylinder contact surface 171. The outer side surface 194 is parallel to the central axis of the cylinder contact surface 171 and extends parallel to the inner side surface 193. The outer side surface 194 is continuously arranged on the same plane as the side surface 175 of the cylinder seal main body portion 187. The outer side surface 194 extends perpendicular to the tip surface 197.
[0054]
The inner surface surface 195 connects the end edge portion of the inner surface surface 193 opposite to the end contact surface 181 and the end edge portion of the tip surface 197 on the cylinder contact surface 171 side. The inner surface taken surface 195 extends parallel to the central axis of the cylinder contact surface 171. The inner surface 195 is inclined at an equivalent angle with respect to the inner surface 193 and the tip surface 197.
[0055]
The outer surface surface 196 connects the end edge portion of the outer surface surface 194 opposite to the end contact surface 181 and the end edge portion of the tip end surface 197 opposite to the cylinder contact surface 171. .. The outer surface 196 extends parallel to the central axis of the cylinder contact surface 171. The outer surface 196 is inclined at an equivalent angle with respect to the outer surface 194 and the tip surface 197. The angle formed by the outer surface surface 196 and the tip surface 197 is the same as the angle formed by the inner surface surface 195 and the tip surface 197.
[0056]
The convex portions 184 are chamfered portions 201 on the inner chamfered surface 195 side including the inner chamfered surface 195 and chamfered portions on the outer chamfered surface 196 side including the outer chamfered surface 196 at both ends in the radial direction of the cylinder contact surface 171. It is equipped with 202. Further, the convex portion 184 is provided with a flat portion 205 on the inner side surface 193 side including the inner side surface 193 and a flat portion 206 on the outer surface 194 side including the outer surface 194 at both ends in the radial direction of the cylinder contact surface 171. ing.
[0057]
As shown in FIG. 7, the recess 185 has an upper inner surface 211, a lower inner surface 212, and a bottom surface 213. The upper inner surface 211, the lower inner surface 212, and the bottom surface 213 are all flat surfaces.
[0058]
The upper inner surface 211 is located above the recess 185 and faces downward. The upper inner surface 211 is arranged in a plane in which the boundary edge portion with the end contact surface 182 is orthogonal to the center line of the cylinder contact surface 171. The lower inner surface 212 is located at the lower part of the recess 185 and faces upward. The lower inner surface 212 is arranged in a plane in which the boundary edge portion with the end contact surface 182 is orthogonal to the center line of the cylinder contact surface 171. The upper inner surface 211 and the lower inner surface 212 each extend from the end edge portion on the end contact surface 182 side in a direction away from the end contact surface 182, and approach each other as the distance from the end contact surface 182 increases. It is inclined like. The upper inner surface 211 and the lower inner surface 212 have the same angle with the end contact surface 182.
[0059]
The bottom surface 213 is on the opposite side of the end contact surface 182 of the recess 185 and faces the same direction as the end contact surface 182. The bottom surface 213 connects the end edges of the upper inner surface 211 and the lower inner surface 212 on the opposite side of the end contact surface 182. The bottom surface 213 is arranged in a plane orthogonal to the center line of the cylinder contact surface 171 with both the boundary edge portion with the upper inner surface 211 and the boundary edge portion with the lower inner surface 212. The bottom surface 213 extends parallel to the end contact surface 182. The angle formed by the bottom surface 213 and the upper inner surface 211 is an obtuse angle, and the angle formed by the bottom surface 213 and the lower inner surface 212 is also an obtuse angle. The upper inner surface 211 and the lower inner surface 212 have the same angle with the bottom surface 213.
[0060]
The angle between the upper surface 191 and the portion of the end contact surface 181 connected to the upper surface 191 and the angle between the upper surface 191 and the tip surface 197, and the angle between the lower surface 192 and the portion of the end contact surface 181 connected to the lower surface 192. , The angle between the lower surface 192 and the tip surface 197, the angle between the upper inner surface 211 and the portion connected to the upper inner surface 211 of the end contact surface 182, the angle between the upper inner surface 211 and the bottom surface 213, the lower inner surface 212 and the end. The angle formed by the portion connected to the lower inner surface 212 of the portion contact surface 182 and the angle formed by the lower inner surface 212 and the bottom surface 213 are the same.
[0061]
The distance L1 between the end contact surface 182 and the bottom surface 213 is shorter than the distance L2 between the end contact surface 181 and the tip surface 197. In other words, the protrusion dimension L2 of the convex portion 184 is longer than the depth dimension L1 of the concave portion 185. The length of the tip surface 197 in the direction of the central axis of the cylinder contact surface 171 is equivalent to the length of the bottom surface 213 in the same direction.
[0062]
As shown in FIG. 3, the split case member 111 includes a cylinder contact portion 172, a portion of the cylinder facing flange portion 134 on the cylinder facing surface 151 side including the cylinder facing surface 151, an end contact portion 188, and an end. The portion contact portion 189, the convex portion 184, and the concave portion 185 form a cylinder facing portion 220 facing the body portion 21 of the cylinder 17 from the outside in the radial direction. Of the cylinder facing portions 220, the cylinder contact portion 172, the end contact portion 188, the end contact portion 189, the convex portion 184, and the concave portion 185, which are composed of the cylinder seal 123, form the cylinder 17. A seal portion 221 that abuts on the body portion 21 from the outside in the radial direction is configured. In other words, the split case member 111 has a cylinder facing portion 220 having a sealing portion 221 that abuts on the body portion 21 of the cylinder 17.
[0063]
Although not shown, on the opening 137 side of the case member main body 121 of the split case member 111 shown in FIG. 2, a pair of side wall portions 131 and a portion of the rod facing flange portion 133 excluding the rod seal fitting recess 142 are provided. A seal groove is formed at a portion of the cylinder facing flange portion 134 other than the cylinder seal fitting recess 154 so that the rod seal fitting recess 142 and the cylinder seal fitting recess 154 form a continuous shape in a rectangular annular shape. It is formed by being recessed from the tip surface on the 137 side. A case seal is also fitted in this seal groove so as to form a rectangular annular continuous shape with the rod seal 122 and the cylinder seal 123. The case seal slightly protrudes from the tip surface of the case member main body 121 on the opening 137 side.
[0064]
The split case member 112 also has the same configuration as the split case member 111, and has a case member main body 121, a rod seal 122, a cylinder seal 123, and a case seal (not shown). The split case member 112 is a split case member 111 inverted by 180 ° in a horizontal plane. Therefore, in the plurality of divided case members 111 and 112, the respective sealing portions 221 have the same shape.
[0065]
Although not shown, the seal state detection device 101 has a set unit, a first drive unit, and a second drive unit. The cylinder device 11 is fixed to the set portion so as to be vertically aligned with the mounting eye 71 facing upward. The first drive unit brings the split case member 111 arranged on one side in the radial direction closer to and away from the cylinder device 11 set in the set unit along the radial direction of the cylinder device 11. The second drive unit brings the split case member 112 arranged on the opposite side in the radial direction closer to and away from the cylinder device 11 set in the set unit along the radial direction of the cylinder device 11.
[0066]
The first drive unit is a split case member so as to move the central axis of the cylinder contact surface 171 in parallel with the central axis in the reference plane including the central axis of the body 21 of the cylinder device 11 set in the set unit. Move 111. The second drive unit also has the central axis of the cylinder contact surface 171 parallel to the central axis of the body 21 in the reference plane on the side opposite to the split case member 111 with respect to the cylinder device 11 set in the set unit. The split case member 112 is moved so as to be moved. The first drive unit and the second drive unit move the split case members 111 and 112 in height positions. The first drive unit and the second drive unit have the convex portion 184 of the split case member 111 and the concave portion 185 of the split case member 112 facing each other so as to be matable, and the concave portion 185 of the split case member 111 and the convex portion of the split case member 112. The split case members 111 and 112 are moved so as to face each other so that the portions 184 can be fitted.
[0067]
When driven by the first drive unit and the second drive unit, the split case member 111 and the split case member 112 each face the cylinder facing portion 220 with the cylinder portion 21 of the outer cylinder 16 of the cylinder 17 from the outside in the radial direction. The rod facing portion 165 is opposed to the rod 51 from the outside in the radial direction, and is arranged so as to be aligned in the circumferential direction of the cylinder 17 so as to form an annular shape as a whole.
[0068]
Then, the split case member 111 and the split case member 112 bring their respective cylinder contact portions 172 into contact with the body portion 21 from the outside in the radial direction to bring them into close contact with each other, and bring each rod contact portion 162 to the rod 51. Contact from the outside in the radial direction to bring them into close contact.
[0069]
At that time, as shown in FIGS. 3 to 5, the split case member 111 and the split case member 112 face each other in the circumferential direction of the cylinder 17, with the convex portion 184 of the split case member 111 and the concave portion 185 of the split case member 112. And are fitted and brought into close contact while being elastically deformed. In addition, the concave portion 185 of the split case member 111 and the convex portion 184 of the split case member 112 are fitted and brought into close contact with each other while being elastically deformed. The convex portion 184 and the concave portion 185 to be fitted are the upper surface 1 shown in FIG.The 91 and the upper inner surface 211 are in close contact with each other without a gap, the lower surface 192 and the lower inner surface 212 are in close contact with each other without a gap, and the front end surface 197 and the bottom surface 213 are in close contact with each other without a gap. In other words, when the split case member 111 and the split case member 112 are arranged side by side in the circumferential direction of the cylinder 17, the convex portion 184 and the concave portion 185 facing each other in the circumferential direction of the cylinder 17 are fitted to each other.
[0070]
At that time, the split case member 111 and the split case member 112 bring the end contact portion 188 of the split case member 111 shown in FIG. 3 into contact with the end contact portion 189 of the split case member 112. Make sure that they are in close contact with each other. In addition, the end contact portion 189 of the split case member 111 and the end contact portion 188 of the split case member 112 are brought into contact with each other so as to be in close contact with each other without any gap.
[0071]
That is, the split case member 111 and the split case member 112 bring the seal portions 221 into close contact with each other, and the respective seal portions 221 are brought into close contact with the body portion 21 of the cylinder 17. In this way, the split case member 111 and the split case member 112 are in close contact with the body portion 21 of the cylinder 17 without a gap by the seal portion 221 of the cylinder seal 123. At that time, the split case member 111 and the split case member 112 are brought into close contact with the rod 51 by the rod seal 122 shown in FIG. 2 without any gap over the entire circumference.
[0072]
Here, as shown in FIG. 3, the distance between the convex portion 184 of the split case member 111 and the convex portion 184 of the split case member 112 is such that the distance between the inner side surfaces 193 is larger than the outer diameter of the body portion 21. It's getting shorter. Further, the inner surface of the convex portion 184 has an angle close to the tangential direction at the contact start position of the body portion 21. Further, as shown in FIG. 3, the outer surface 194 of the convex portion 184 is arranged on the same plane as the inner wall surface 157 of the case member main body 121 adjacent to the concave portion 185 to which the convex portion 184 is fitted.
[0073]
As described above, the split case members 111 and 112 constituting the chamber 102 are, as shown in FIG. 2, a part of the cylinder 17 on the opening 23 side between the cylinder facing portion 220 and the rod facing portion 165. A storage chamber 231 for accommodating a part of the rod 51 on the cylinder 17 side is formed.
[0074]
The detection device main body 103 has a decompression unit 241 that evacuates the inside of the sealed storage chamber 231 for a predetermined vacuuming time to reduce the pressure. The decompression unit 241 is provided in a vacuum pump 242 composed of a rotary pump, a communication passage 243 for connecting the vacuum pump 242 and the inside of the accommodation chamber 231 to communicate with each other, and a communication passage 243, and is provided in the communication passage 243 to open and close the vacuum pump 242 and the accommodation chamber. It has an on-off valve 244 for switching communication with and from the inside of 231.
[0075]
The vacuum pump 242 evacuates the inside of the closed storage chamber 231 with the on-off valve 244 open. When the on-off valve 244 is closed, the communication between the inside of the accommodation chamber 231 and the vacuum pump 242 is cut off, and the inside of the accommodation chamber 231 is maintained in the above-mentioned decompression state. As the vacuum pump 242, not only a rotary pump but also a mechanical booster pump or a diffusion pump may be used.
[0076]
The detection device main body 103 has an atmosphere introduction unit 251 that introduces the atmosphere into the accommodation chamber 231. The atmosphere introduction unit 251 is connected between the accommodation chamber 231 of the communication passage 243 and the on-off valve 244, and the inside of the accommodation chamber 231 is opened to the outside air through the communication passage 243, and the atmosphere opening passage 252 and the atmosphere opening passage. It is provided in 252 and has an atmospheric release valve 253 that opens and closes the accommodation chamber 231 to the outside air and shuts off the accommodation chamber 231 to the outside air. When the air release valve 253 is opened, the inside of the accommodation chamber 231 is communicated with the outside air, and when the accommodation chamber 231 is closed, the inside of the accommodation chamber 231 is shut off from the outside air.
[0077]
The detection device main body 103 has a vacuum gauge 255 composed of a Pirani vacuum gauge that measures the pressure in the accommodation chamber 231 via the communication passage 243, and a data logger 256 that stores the detection data of the vacuum gauge 255. .. The detection device main body 103 has a control unit 258. The control unit 258 controls the operation of the vacuum pump 242, the on-off valve 244, and the atmosphere release valve 253, and the cylinder is based on the measurement result of the pressure in the accommodation chamber 231 decompressed by the decompression unit 241 by the vacuum gauge 255. The abnormality of the seal state of the seal member 31 in the device 11 is detected.
[0078]
When the seal state of the seal member 31 is detected by using the seal state detection device 101, for example, the operator manually attaches the cylinder device 11 to be measured to the set portion (not shown) of the seal state detection device 101. Perform the setting process of setting, positioning and fixing. In the setting process, the operator sets the cylinder device 11 in the setting portion so that the sealing member 31 is located at the upper part of the cylinder 17.
[0079]
After the setting process, the start button (not shown) of the seal state detection device 101 is operated. Then, the control unit 258 drives the first drive unit (not shown) to advance the split case member 111 toward the body 21 side of the cylinder 17 and stop it at a predetermined position as shown in FIGS. 3 to 4. Perform the first placement step. Then, in the middle of the split case member 111, the convex portion 184 first abuts on the body portion 21 at the chamfered portion 201, and then the flat portion 205 elastically deforms and adheres to the body portion 21. As shown in 4, the cylinder contact portion 172 is elastically deformed and comes into close contact with the body portion 21.
[0080] [0080]
Next, the control unit 258 drives the second drive unit (not shown) to advance the split case member 112 toward the body portion 21 of the cylinder 17 and stop at a predetermined position as shown in FIGS. 4 to 5. The second placement step is performed. Then, in the middle of the split case member 112, the convex portion 184 first abuts on the body portion 21 at the chamfered portion 201, and then the split case is formed at the chamfered portion 202 while elastically deforming the flat portion 205. After contacting the boundary position between the tip surface 153 and the inner wall surface 157 of the member 111, the member 111 is fitted into the recess 185 of the split case member 111. Then, as shown in FIG. 5, the split case member 112 is split while the flat portion 205 of the convex portion 184 is elastically deformed and adheres to the body portion 21, and the flat portion 206 of the convex portion 184 is elastically deformed. It is in close contact with the inner wall surface 157 of the case member 111, and the cylinder contact portion 172 is elastically deformed and is in close contact with the body portion 21.
[0081]
In parallel with this, as shown in FIGS. 4 to 5, the convex portion 184 of the split case member 111 abuts on the boundary position between the tip surface 153 of the split case member 112 and the inner wall surface 157 in the chamfered portion 202. After that, it fits into the recess 185 of the split case member 112. Then, as shown in FIG. 5, the split case member 111 comes into close contact with the inner wall surface 157 of the split case member 112 while its flat portion 206 is elastically deformed.
[0082]
In addition to these, the end contact portion 188 of the split case member 111 is in close contact with the end contact portion 189 of the split case member 112, and the end contact portion 189 of the split case member 111 is the end of the split case member 112. It comes into close contact with the contact portion 188. Further, the case seals of the divided case members 111 and 112 (not shown) are in close contact with each other.
[0083]
In this state, in the convex portions 184 and the concave portions 185 on both sides to be fitted, the upper surface 191 and the upper inner surface 211 shown in FIG. 7 are in close contact with each other without a gap, and the lower surface 192 and the lower inner surface 212 are in close contact with each other without a gap. The surface 197 and the bottom surface 213 are in close contact with each other without a gap.
[0084]
As shown in FIG. 2, the divided case members 111 and 112 of the chamber 102 are placed between the cylinder facing portion 220 and the rod facing portion 165 on the opening 23 side of the cylinder 17 by the above first placement step and the second placement step. A storage chamber 231 for accommodating a part of the rod 51 and a part of the rod 51 on the cylinder 17 side is formed. The accommodation chamber 231 is sealed except for the communication passage 243. That is, in the first arrangement step and the second arrangement step, by arranging the plurality of divided case members 111, 112 side by side in the circumferential direction of the cylinder 17, one of the cylinders 17 is placed between the cylinder facing portion 220 and the rod facing portion 165. It is a storage chamber forming step of forming a storage chamber 231 for accommodating a portion and a part of a rod 51.
[0085]
After the second arrangement step, the control unit 258 evacuates the inside of the accommodation chamber 231 by the decompression unit 241 in a state where the atmosphere release valve 253 of the atmosphere introduction unit 251 is closed for a predetermined vacuuming time to bring it into a depressurized state. Perform a depressurization step. That is, the control unit 258 drives the vacuum pump 242 for a predetermined evacuation time with the on-off valve 244 of the decompression unit 241 open, and depressurizes the inside of the accommodation chamber 231 which has been at atmospheric pressure until then.
[0086]
When the control unit 258 drives the vacuum pump 242 for a predetermined evacuation time, the on-off valve 244 is closed and the vacuum pump 242 is stopped. As a result, the pressure in the accommodation chamber 231 is reduced to a reduced pressure state.
[0087]
After the depressurization step, the control unit 258 performs a first pressure measurement step of measuring the pressure in the accommodation chamber 231 with the vacuum gauge 255 after the stabilization step of waiting for the lapse of a predetermined stabilization time. In this first pressure measuring step, the first pressure value in the accommodation chamber 231 is measured by the vacuum gauge 255 at the first time point after waiting for the lapse of a predetermined stabilization time by the stabilizing step. For example, the stabilization step is started from the end of the depressurization step, and the first pressure measurement step of measuring the first pressure value in the accommodation chamber 231 with the vacuum gauge 255 is performed at the first time when the stabilization step is completed. ..
[0088]
After the first pressure measurement step, the control unit 258 detects the presence or absence of an abnormality in the seal state of the seal member 31 based on the pressure in the accommodation chamber 231 depressurized in the depressurization step. (Abnormality detection step) is performed. In this first pressure abnormality detecting step, the presence or absence of abnormality in the sealing state of the sealing member 31 is detected based on the first pressure value measured in the first pressure measuring step. Specifically, if the first pressure value is equal to or higher than a predetermined threshold value, the control unit 258 has an abnormality in the sealing state of the sealing member 31, and the vacuuming itself cannot be normally performed. If it is less than this threshold value, the second pressure measurement step described later is performed.
[0089]
That is, if there is a large abnormality in the sealing state of the sealing member 31, gas G in a predetermined amount or more in the cylinder device 11 is sucked out into the accommodation chamber 231 in the negative pressure state during the decompression process, and the pressure in the accommodation chamber 231 is increased. Is not sufficiently decompressed. As a result, the first pressure value at the first time point becomes high, and the vacuum drawing abnormal state becomes higher than a predetermined threshold value. On the other hand, if there is no abnormality in the sealing state of the sealing member 31, or even if there is a minor abnormality, a predetermined amount or more of the gas G in the cylinder device 11 may be sucked into the accommodation chamber 231 during the depressurizing step. Instead, the first pressure value at the first time point becomes low, and the vacuum drawing normal state becomes less than a predetermined threshold value. First, as a first step, the control unit 258 detects the presence or absence of an abnormality in the sealing state of the seal member 31 based on the difference between the evacuated abnormal state and the evacuated normal state.
[0090]
In the first pressure abnormality detection step, if the first pressure value is less than a predetermined threshold value, the control unit 258 is in the accommodation chamber 231 at the second time point after the lapse of the predetermined inspection time from the first time point. A second pressure measuring step of measuring the second pressure value is performed.
[0091]
After the second pressure measurement step, the control unit 258 performs a second pressure abnormality detection step (abnormality detection step) for detecting the presence or absence of an abnormality in the seal state of the seal member 31 based on the pressure in the accommodation chamber 231. In this second pressure abnormality detection step, the presence or absence of an abnormality in the seal state of the seal member 31 is detected based on the pressure difference between the first pressure value and the second pressure value. Specifically, the control unit 258 is a value obtained by dividing the pressure difference obtained by subtracting the first pressure value from the second pressure value by a predetermined inspection time from the first time point to the second time point, that is, If the pressure increase rate per unit time in the inspection time from the first time point to the second time point is equal to or more than a predetermined threshold value, it is detected that the sealing state of the sealing member 31 is abnormal, and the pressure rise rate is less than this threshold value. If so, it is detected that there is no abnormality in the sealing state of the sealing member 31.
[0092]
That is, if there is an abnormality in the sealing state of the sealing member 31, the cylinder during the predetermined inspection time.A predetermined amount or more of the gas G in the device 11 is sucked into the accommodation chamber 231 in the negative pressure state. In that case, the pressure in the accommodation chamber 231 rises with the passage of time, and the pressure difference obtained by subtracting the first pressure value from the second pressure value divided by a predetermined inspection time becomes the threshold value or more. It becomes an abnormal state.
On the contrary, if there is no abnormality in the sealing state of the sealing member 31, the gas G in the cylinder device 11 or more will not be sucked into the storage chamber 231 in the negative pressure state during the predetermined inspection time. In that case, the increase in pressure in the accommodation chamber 231 is suppressed, and the pressure difference obtained by subtracting the first pressure value from the second pressure value divided by a predetermined inspection time does not exceed the threshold value, resulting in a normal differential pressure state. Become. As the second step, the control unit 258 detects the presence or absence of an abnormality in the seal state of the seal member 31 based on the difference between the differential pressure abnormal state and the differential pressure normal state.
[0093]
Based on the above, in the seal state detection method of the present embodiment, the split case members 111 and 112 are arranged side by side in the circumferential direction of the cylinder 17, so that the split case members 111 and 112 are arranged with a part of the cylinder 17 between the cylinder facing portion 220 and the rod facing portion 165. It includes a storage chamber forming step of forming a storage chamber 231 for accommodating a part of the rod 51, and a seal state detection step of detecting an abnormality in the seal state of the seal member 31 from the state inside the storage chamber 231. The seal state detection step includes a depressurization step of reducing the pressure inside the accommodation chamber 231 to a predetermined pressure lower than the atmospheric pressure, and a first measurement of the pressure inside the accommodation chamber 231 depressurized by this decompression step. It includes a second pressure measuring step and a first and second pressure abnormality detecting step of detecting an abnormality based on the pressure in the accommodation chamber 231.
[0094]
In the second pressure abnormality detection step, when it is detected that there is no abnormality in the seal state of the seal member 31, the control unit 258 opens the atmosphere release valve 253 of the atmosphere introduction unit 251 to open the inside of the accommodation chamber 231 to the atmosphere. Perform the process.
[0095]
In the second pressure abnormality detection step, when it is detected that there is no abnormality in the seal state of the seal member 31, after the atmosphere opening step, the control unit 258 is divided by the first drive unit and the second drive unit into the case members 111 and 112. Is radially separated from the body portion 21 of the cylinder 17.
[0096]
In the second pressure abnormality detection step, when it is detected that there is no abnormality in the seal state of the seal member 31, after the separation step, the control unit 258 has no abnormality in the seal state of the seal member 31 by the notification device (not shown). A normal notification step is performed to notify that the product is non-defective and to prompt the removal of the cylinder device 11 from the seal state detection device 101.
[0097]
Then, for example, the operator manually takes out the cylinder device 11 from the seal state detection device 101.
[0098]
Here, when there is an abnormality in the seal state of the seal member 31 in the first pressure abnormality detection step, that is, when it is determined that the vacuum drawing itself cannot be normally performed, and when it is determined in the second pressure abnormality detection step, the seal is sealed. In both cases where there is an abnormality in the seal state of the member 31, that is, when it is determined that the pressure rise rate per unit time is an abnormal differential pressure abnormal state, the control unit 258 is in the above-mentioned opening step to the atmosphere. , The depressurization step, the stabilization step, the first pressure measurement step, the first pressure abnormality detection step, the second pressure abnormality measurement step, and the second pressure abnormality detection step will be re-inspected.
[0099]
In this re-inspection flow, there are cases where an abnormality in the seal state of the seal member 31 is detected in the first pressure abnormality detection step and a case where an abnormality in the seal state of the seal member 31 is detected in the second pressure abnormality detection step. In both, the control unit 258 performs an air opening step and a separation step. After that, the control unit 258 uses a notification device (not shown) to notify that there is an abnormality in the seal state of the seal member 31 and to notify that the cylinder device 11 is to be taken out from the seal state detection device 101. Perform the process. At that time, notification is performed including whether the abnormality in the seal state of the seal member 31 is detected in the first pressure abnormality detection step or the second pressure abnormality detection step.
[0100]
Then, for example, the operator manually takes out the cylinder device 11 from the seal state detection device 101.
[0101]
In the seal abnormality detection method and device of the damper device of Patent Document 1 described above, the vacuum head is lowered by the drive of the head upper and lower cylinders and mounted around the piston rod of the damper device. By the way, in a device having such a structure, if a component protruding radially outward from the piston rod is attached to the piston rod, this component interferes and the vacuum head cannot be mounted on the damper device. .. Therefore, the degree of freedom in the timing of inspection is reduced.
[0102]
On the other hand, the seal state detection device 101 of the present embodiment has a cylinder facing portion 220 and a rod facing portion 165, and the rod facing portion 165 faces the rod 51 while the cylinder facing portion 220 faces the cylinder 17. By arranging them side by side in the circumferential direction of the cylinder 17, a plurality of storage chambers 231 for accommodating a part of the cylinder 17 and a part of the rod 51 are formed between the cylinder facing portion 220 and the rod facing portion 165. The divided case members 111 and 112 are provided. Therefore, the accommodation chamber 231 can be formed regardless of whether or not the mounting eye 71 projecting radially outward from the rod 51 is attached to the rod 51. Therefore, it is possible to increase the degree of freedom in the timing of inspecting the seal abnormality.
[0103]
Further, each of the split case members 111 and 112 has a seal portion 221 that abuts on the cylinder 17 at the cylinder facing portion 220. A convex portion 184 is formed at one end of the seal portion 221 in the circumferential direction of the cylinder 17, and a concave portion 185 is formed at the other end. Then, when the split case members 111 and 112 are arranged side by side in the circumferential direction of the cylinder 17, the convex portion 184 and the concave portion 185 facing in the circumferential direction of the cylinder 17 are fitted to each other. Therefore, it is possible to suppress a decrease in the durability of the seal portion 221.
[0104]
That is, when the seal portions 221 are brought into contact with each other, if the flat end contact portions 188 and 189 are only brought into contact with each other, the end contact portions 188 and 189 are intermediate portions in the axial direction of the cylinder 17. It contracts toward the cylinder 17 and causes stress concentration in the intermediate portion of the cylinder 17 in the axial direction, so that the cylinder 17 is easily damaged. On the other hand, when the end contact portion 188 and the end contact portion 189 are brought into contact with each other, the intermediate convex portion 184 and the concave portion 185 in the axial direction of the cylinder 17 are fitted to fit the concave portion 185 in the axial direction. It is possible to suppress the contraction toward the middle portion. Therefore, the stress concentration generated in the portion near the end contact portion 188 and the portion near the end contact portion 189 can be suppressed, and the occurrence of breakage can be suppressed. Therefore, it is possible to suppress a decrease in the durability of the seal portion 221.
[0105]
Further, since the protruding dimension L2 of the convex portion 184 is larger than the depth dimension L1 of the concave portion 185, the tip surface 197 of the convex portion 184 and the bottom surface 213 of the concave portion 185 can be reliably brought into close contact with each other. Therefore, it is possible to improve the sealing property of the fitting portion between the convex portion 184 and the concave portion 185.
[0106]
Further, since the chamfered portions 201 and 202 are provided at both ends of the convex portion 184, it is possible to suppress the entrainment of the convex portion 184 in the cylinder 17 and the cylinder seal fitting recess 154. Therefore, it is possible to suppress a decrease in the sealing property and a decrease in the durability of the sealing portion 221.
[0107]
Further, since the flat portions 205 and 206 are provided at both ends of the convex portion 184, it is possible to suppress the entanglement of the convex portion 184 into the cylinder 17 and the entanglement into the cylinder seal fitting recess 154. Therefore, it is possible to suppress a decrease in the sealing property and a decrease in the durability of the sealing portion 221.
[0108]
Further, since the respective seal portions 221 of the plurality of divided case members 111 and 112 have the same shape, the cylinder seal 123 constituting the seal portion 221 can be used as a common component. Therefore, the types of parts can be reduced, and the manufacturing cost and the management cost can be reduced.
[0109]
The seal state detection method of the present embodiment is a method of detecting the seal state of the seal member 31 of the cylinder device 11 by using the seal state detection device 101. In this seal state detection method, a plurality of divided case members 111, 112 are arranged side by side in the circumferential direction of the cylinder 17, so that a part of the cylinder 17 and one of the rods 51 are arranged between the cylinder facing portion 220 and the rod facing portion 165. A storage chamber forming step of forming a storage chamber 231 for accommodating a portion, a decompression step of depressurizing the inside of the storage chamber 231 by a predetermined pressure lower than the atmospheric pressure, and a decompression step of the accommodation chamber 231 depressurized by the decompression step. Includes an anomaly detection step of detecting anomalies based on the pressure of. Therefore, the accommodation chamber 231 can be formed regardless of whether or not the mounting eye 71 projecting radially outward from the rod 51 is attached to the rod 51. Therefore, it is possible to increase the degree of freedom in the timing of inspecting the seal abnormality.
[0110]
It is also possible to change the above embodiment as described in the following modifications 1 to 3.
[0111]
[Modification 1]
In the modified example 1 shown in FIGS. 8 to 10, each of the divided case members 111 and 112 is recessed from the intermediate position in the axial direction of the cylinder facing surface 151 on the tip surfaces 152 and 153, as shown in FIG. 301 is formed.
[0112]
The split case member 111 of the first modification is formed with one cylinder seal fitting recess 154 that is recessed from the intermediate position in the axial direction of the cylinder facing surface 151 in the inlet recess 301. The split case member 112 of the first modification is formed with two cylinder seal fitting recesses 154 that are recessed from the intermediate position in the axial direction of the cylinder facing surface 151 in the inlet recess 301. The two cylinder seal fitting recesses 154 of the split case member 112 are arranged on both sides of the one cylinder seal fitting recess 154 of the split case member 111 in the axial direction of the cylinder facing surface 151.
[0113]
In the first modification, the cylinder seal 123 having convex portions 184 formed on both sides of the cylinder contact surface 171 in the circumferential direction and having the maximum thickness of the convex portion 184 as a whole is fitted with two cylinder seals of the split case member 112. It is fitted to the joint recess 154 and the cylinder seal fitting recess 154 at one location of the split case member 111.
[0114]
In the first modification, the seal portion 221 of the split case member 111 has a convex portion 184A on the convex portion 184 side protruding from the bottom surface of the inlet concave portion 301 of the cylinder seal 123, and the space between the inlet concave portion 301 and the convex portion 184A is formed. It becomes a recess 185A. Therefore, there are two recesses 185A. As a result, the seal portion 221 of the split case member 111 is formed with one convex portion 184A and two concave portions 185A at one end, and two concave portions 185A and one convex portion 184A at the other end. ing.
[0115]
Further, in the first modification, the seal portion 221 of the split case member 112 has a concave portion 185B between the portions of the two cylinder seals 123 on the convex portion 184 side, and the convex portions 184 are provided at two locations. As a result, the seal portion 221 of the split case member 112 is formed with two convex portions 184 and one concave portion 185B at one end, and one concave portion 185B and two convex portions 184 at the other end. ing.
[0116]
Then, in the first modification, as shown in FIGS. 9 to 10, the split case member 111 fits the convex portion 184A at one end into the concave portion 185B of the split case member 112 facing the concave portion 184A, and at one end thereof. The two convex portions 184 of the split case member 112 facing the two concave portions 185A are fitted. Further, in the split case member 111, the two convex portions 184 of the split case member 112 facing the two concave portions 185A at the other end are fitted, and the convex portions 184A at the other end are fitted therein. Recess 1 of the facing split case member 112 Fit to 85B. In addition, the split case members 111 and 112 bring the cylinder contact portion 172 into contact with the body portion 21, respectively. As a result, the chamber 102 is in close contact with the body portion 21 without a gap over the entire circumference.
[0117]
[Modification 2]
In the modified example 2 shown in FIGS. 11 to 13, an inlet recess 301 and a cylinder seal fitting recess 154 similar to the modified example 1 are formed in the cylinder facing flange portion 134 of the split case member 111.
[0118]
In the second modification, the split case member 112 is not formed with the inlet recesses 301, and the cylinder seal fitting recesses 154 are recessed from the intermediate position in the axial direction of the cylinder facing surfaces 151 on the tip surfaces 152 and 153. Is formed. The two cylinder seal fitting recesses 154 of the split case member 112 are arranged on both sides of the one cylinder seal fitting recess 154 of the split case member 111 in the axial direction of the cylinder facing surface 151.
[0119]
In the second modification, the cylinder seal 123 without the protrusions 184 on both sides of the first modification is fitted in the cylinder seal fitting recess 154 of the split case member 111. Further, in the second modification, the cylinder seal 123 of the first modification is fitted into the two cylinder seal fitting recesses 154 of the split case member 112, respectively.
[0120]
In the second modification, the seal portion 221 of the split case member 111 has a convex portion 184C at a portion protruding from the inlet concave portion 301 of the cylinder seal 123, and a concave portion 185C between the inlet concave portion 301 and the convex portion 184C. Therefore, there are two recesses 185C. As a result, the seal portion 221 of the split case member 111 is formed with one convex portion 184C and two concave portions 185C at one end, and two concave portions 185C and one convex portion 184C at the other end. ing.
[0121]
Further, in the second modification, the seal portion 221 of the split case member 112 has a concave portion 185D between the convex portions 184 of the two cylinder seals 123. Therefore, there are two convex portions 184. As a result, the seal portion 221 of the split case member 112 is formed with two convex portions 184 and one concave portion 185D at one end, and one concave portion 185D and two convex portions 184 at the other end. ing.
[0122]
Then, in the second modification, as shown in FIGS. 12 to 13, the split case member 111 fits one convex portion 184C at one end into one concave portion 185D of the split case member 112 facing the convex portion 184C. At the same time, the two concave portions 185C at one end are fitted into the two convex portions 184 of the split case member 112 facing the concave portions 185C. Further, in the split case member 111, the two convex portions 184 of the split case member 112 facing the two concave portions 185C at the other end are fitted into the concave portions 185C at the other end, and the convex portions 184C at the one other end thereof are fitted. , One recess 185D of the split case member 112 facing this is fitted. In addition, the split case members 111 and 112 bring the cylinder contact portion 172 into contact with the body portion 21, respectively. As a result, the chamber 102 is in close contact with the body portion 21 without a gap over the entire circumference.
[0123]
[Modification 3]
In the modified example 3 shown in FIGS. 14 to 16, the cylinder seal 123 is formed with convex portions 184E formed on both sides of the cylinder contact surface 171 in the circumferential direction so as to be biased to the same side in the axial direction of the cylinder contact surface 171. It is fitted in the cylinder seal fitting recess 154 of each of the split case members 111 and 112. At that time, the cylinder seal 123 of the split case member 111 and the cylinder seal 123 of the split case member 112 are provided so as to arrange the convex portion 184E on the opposite side of the cylinder contact surface 171 in the axial direction.
[0124]
In the third modification, the seal portion 221 of the split case members 111 and 112 has a recess 185E between the cylinder seal fitting recess 154 and the convex portion 184E of the cylinder seal 123. As a result, the seal portion 221 of the split case member 111 is formed with a convex portion 184E and a concave portion 185E at one end, and a concave portion 185E and a convex portion 184E at the other end. The seal portion 221 of the split case member 112 is also formed with a convex portion 184E and a concave portion 185E at one end, and a concave portion 185E and a convex portion 184E at the other end.
[0125]
Then, in the third modification, as shown in FIGS. 15 to 16, the split case member 111 fits the convex portion 184E at one end into the concave portion 185E of the split case member 112 facing the convex portion 184E, and also fits the convex portion 184E at one end thereof. The concave portion 185E is fitted to the convex portion 184E of the split case member 112 facing the concave portion 185E. Further, in the split case member 111, the concave portion 185E at the other end is fitted to the convex portion 184E of the split case member 112 facing the concave portion 185E, and the convex portion 184E at the other end is fitted to the convex portion 184E of the split case member 112 facing the convex portion 184E. Fit into the recess 185E of. In addition, the split case members 111 and 112 bring the cylinder contact portion 172 into contact with the body portion 21, respectively. As a result, the chamber 102 is in close contact with the body portion 21 without a gap over the entire circumference.
[0126]
In the above embodiment, the seal state detection device 101 in which the accommodation chamber 231 is formed by the two divided case members 111 and 112 is exemplified, but the accommodation chamber is provided by arranging three or more divided case members in the circumferential direction of the cylinder 17. It may be formed.
[0127]
Further, in the above embodiment, the case of inspecting the seal state of the cylinder device 11 in which the rod 51 protrudes expandably from only one end of the cylinder 17 is illustrated, but the cylinder device in which the rod protrudes expandably from both ends of the cylinder is illustrated. Also in the case of inspection, the above technique can be applied to the inspection of the seal state of each rod protruding side. That is, the inspection target of the above technique is a cylinder device having a rod that expands and contracts from at least one end of the cylinder.
[0128]
The outline of the above embodiment is summarized below.
The first aspect is said to be a cylinder device comprising a cylinder in which a working fluid is sealed, a rod that expands and contracts from at least one end of the cylinder, and a seal member provided between the cylinder and the rod. A seal state detection device that detects the seal state of a seal member, which has a cylinder facing portion and a rod facing portion, and has the cylinder facing portion facing the cylinder and the rod facing portion facing the rod. By arranging them side by side in the circumferential direction of the cylinder, a plurality of storage chambers for accommodating a part of the cylinder and a part of the rod are formed between the cylinder facing portion and the rod facing portion. A split case member is provided, the cylinder facing portion has a seal portion that abuts on the cylinder, and the seal portion is formed with a convex portion at one end in the circumferential direction of the cylinder and a concave portion at the other end. When a plurality of split case members are arranged side by side in the circumferential direction of the cylinder, the convex portion and the concave portion facing the circumferential direction of the cylinder are fitted to each other. According to this configuration, it is possible to increase the degree of freedom in the timing of inspection.
[0129]
In the second aspect, in the first aspect, the protrusion dimension of the convex portion is larger than the depth dimension of the concave portion.
[0130]
The third aspect includes chamfered portions at both ends of the convex portion in the first aspect or the second aspect.
[0131]
The fourth aspect includes flat portions at both ends of the convex portion in any one of the first aspect to the third aspect.
[0132]
In the fifth aspect, in any one of the first aspect to the fourth aspect, the seal portions of the plurality of divided case members each have the same shape.
[0133]
A sixth aspect is a seal state detection method for detecting the seal state of the seal member of the cylinder device by using the seal state detection device according to any one of the first aspect to the fifth aspect. By arranging the plurality of divided case members side by side in the circumferential direction of the cylinder, a storage chamber for accommodating a part of the cylinder and a part of the rod is formed between the cylinder facing portion and the rod facing portion. Abnormality is detected based on the accommodating chamber forming step, the depressurizing step of depressurizing the accommodating chamber at a predetermined pressure higher than the atmospheric pressure, and the pressure in the accommodating chamber depressurized in the depressurizing step. It has an abnormality detection step. According to these steps, it is possible to increase the degree of freedom in the timing of inspection.
Industrial applicability
[0134]
According to the aspect of the present invention, it is possible to provide a seal state detection device and a seal state detection method capable of increasing the degree of freedom in the timing of inspection. Therefore, the industrial applicability is great.
Code description
[0135]
11 Cylinder device
17 cylinder
31 Seal member
51 rod
101 Seal condition detection device
111,112 split case member
165 Rod facing part
184 convex part
185 recess
201,202 Chamfering section
205,206 Flat part
220 Cylinder facing part
221 Seal part
231 containment room
The scope of the claims
[Claim 1]
The cylinder in which the working fluid is sealed and
A rod that expands and contracts from at least one end of the cylinder,
A seal member provided between the cylinder and the rod,
A seal state detection device for detecting the seal state of the seal member of the cylinder device having the above.
By having a cylinder facing portion and a rod facing portion, the cylinder facing portion faces the cylinder and the rod facing portion faces the rod, and the cylinder facing portions are arranged side by side in the circumferential direction of the cylinder. A plurality of split case members forming a storage chamber for accommodating a part of the cylinder and a part of the rod between the cylinder facing portion and the rod facing portion are provided.
The cylinder facing portion has a sealing portion that abuts on the cylinder.
The seal portion is formed with a convex portion at one end and a concave portion at the other end in the circumferential direction of the cylinder.
When the plurality of split case members are arranged side by side in the circumferential direction of the cylinder, the convex portion and the concave portion facing in the circumferential direction of the cylinder are fitted to each other.
A seal state detection device characterized by this.
[Claim 2]
The seal state detecting device according to claim 1, wherein the protruding dimension of the convex portion is larger than the depth dimension of the concave portion.
[Claim 3]
The seal state detecting device according to claim 1 or 2, wherein chamfered portions are provided at both ends of the convex portion.
[Claim 4]
The seal state detecting device according to any one of claims 1 to 3, wherein flat portions are provided at both ends of the convex portion.
[Claim 5]
The seal state detection device according to any one of claims 1 to 4, wherein the seal portions of each of the plurality of divided case members have the same shape.
[Claim 6]
A seal state detection method for detecting the seal state of the seal member of the cylinder device using the seal state detection device according to any one of claims 1 to 5.
By arranging the plurality of divided case members side by side in the circumferential direction of the cylinder, a storage chamber for accommodating a part of the cylinder and a part of the rod is formed between the cylinder facing portion and the rod facing portion. And the process of forming a storage room
A decompression step that puts the containment chamber in a decompressed state with a predetermined pressure higher than the atmospheric pressure.
Anomaly detection step of detecting anomalies based on the pressure in the accommodation chamber that was put into the decompressed state in the decompression step,
A seal state detection method comprising.