Abstract: The present invention addresses the problem of providing a semiconductor device having stable n-type semiconductor characteristics without deterioration over time. The purpose of the present invention is to provide a semiconductor device provided with: a substrate; a source electrode a drain electrode and a gate electrode; a semiconductor layer which contacts the source electrode and the drain electrode; a gate insulation layer which insulates the semiconductor layer from the gate electrode; and a second insulation layer which contacts the semiconductor layer on a side opposite to the gate insulation layer with respect to the semiconductor layer wherein the semiconductor device is characterized in that the semiconductor layer contains carbon nanotubes the second insulation layer contains electron-donating compounds including at least any one selected from among nitrogen atoms and phosphorous atoms and the oxygen permeability of the second insulation layer is equal to or less than 4.0 cc/(m2·24h·atm).
WE CLAIM:
1. A semiconductor device, comprising:
a substrate;
a source electrode, a drain electrode, and a gate electrode;
a semiconductor layer in contact with said source electrode and said drain electrode;
a gate insulating layer insulating said semiconductor layer from said gate electrode; and
a second insulating layer in contact with said semiconductor layer on the opposite side of said semiconductor layer from said gate insulating layer;
wherein said semiconductor layer contains a carbon nanotube;
wherein said second insulating layer contains an electron-donating material having one or more selected from a nitrogen atom and a phosphorus atom; and
wherein said second insulating layer has an oxygen permeability of 4.0 cc/(m2-24h-atm) or less.
2. The semiconductor device according to claim 1, wherein said second insulating layer further comprises a polymer compound having one or more structures selected from the group consisting of a hydroxy group, cyano group, fluoro group, chloro group, and amide bond.
3. The semiconductor device according to claim 2, wherein said polymer compound is a vinyl alcohol resin.
4. The semiconductor device according to claim 1, wherein said second insulating layer comprises at least a first layer provided nearer to said semiconductor layer and a second layer provided farther from said semiconductor layer,
wherein said first layer contains said electron-donating material, and
wherein said second layer has an oxygen permeability of 4.0 cc/(m2-24h-atm) or
less.
5. The semiconductor device according to claim 4, wherein said second layer
■ comprises a polymer compound having one or more structures selected from the group consisting of a hydroxy group, cyano group, fluoro group, chloro group, and amide bond.
6. The semiconductor device according to claim 5, wherein said polymer compound contained in said second layer is a vinyl alcohol resin.
7. The semiconductor device according to any one of claims 4 to 6, wherein a difference, in absolute value, in solubility parameter between the material constituting said first layer and the material constituting said second layer is 5.0 (MPa)1/2 or more.
8. The semiconductor device according to any one of claims 1 to 7, wherein said electron-donating material is a compound having a nitrogen atom.
9. The semiconductor device according to any one of claims 1 to 8, wherein said electron-donating material is a compound containing a ring structure containing a nitrogen atom.
10. The semiconductor device according to any one of claims 1 to 9, wherein said electron-donating material is one or more compounds selected from an amidine compound and a guanidine compound.
11. The semiconductor device according to any one of claims 1 to 10, wherein said second insulating layer has a film thickness of 100 urn or less.
12. The semiconductor device according to any one of claims 1 to 11, wherein said second insulating layer has a water vapor permeability of 20 g/(m2-24h) or less.
13. The semiconductor device according to any one of claims 1 to 12, comprising a protective layer in contact with said second insulating layer on the opposite side of said second insulating layer from said gate electrode, wherein said protective layer has a water vapor permeability of 20 g/(m2-24h) or less.
14. The semiconductor device according to any one of claims 1 to 13, wherein said carbon nanotube exists as a carbon nanotube composite in which a conjugated polymer is attached to at least a part of the surface of said carbon nanotube.
15. A complementary semiconductor device, comprising: an n-type semiconductor device containing said semiconductor device according to any one of claims 1 to 14; and a p-type semiconductor device.
.16. The complementary semiconductor device according to claim 15, wherein said p-type semiconductor device comprises:
a substrate;
a source electrode, a drain electrode, and a gate electrode;
a semiconductor layer in contact with said source electrode and said drain electrode; and
a gate insulating layer insulating said semiconductor layer from said gate insulating layer;
wherein said semiconductor layer of said p-type semiconductor device contains a carbon nanotube.
17. The complementary semiconductor device according to claim 16, wherein said p-type semiconductor device comprises a second insulating layer in contact with said semiconductor layer of said p-type semiconductor device on the opposite side of said semiconductor layer of said p-type semiconductor device from said gate insulating layer of said p-type semiconductor device.
18. The complementary semiconductor device according to claim 17, wherein at least part of said second insulating layer of said p-type semiconductor device is constituted by the same material as said second layer of said second insulating layer of said n-type semiconductor device.
19. The complementary semiconductor device according to claim 17 or 18, comprising a protective layer in contact with said second insulating layer of said p-
type semiconductor device on the opposite side of said second insulating layer from said gate insulating layer, wherein the material used for said protective layer of said p-type semiconductor device is the same as used for said protective layer of said n-type semiconductor device, and wherein said protective layer of said p-type semiconductor device has a water vapor permeability of 20 g/(m2-24h) or less.
20. A method of producing said semiconductor device according to any one of claims 1 to 14, said method comprising the step of forming said second insulating layer by a coating method.
21. The method of producing a semiconductor device according to claim 20, wherein said method is a method of producing said semiconductor device according lo any one of claims 1 Lo 14, ,
wherein said second insulating layer comprises at least a first layer provided nearer to said semiconductor layer and a second layer provided farther from said semiconductor layer,
wherein said first layer contains said electron-donating material, and
wherein said second layer has an oxygen permeability of 4.0 cc/(m2-24h-atm) or less;
wherein said method comprises the steps of:
forming said first layer by a coating method; and
forming said second layer by a coating method,
wherein a drying temperature used in forming said second layer is equal to or lower than the glass transition temperature of said first layer.
22. A wireless communication device, comprising at least said semiconductor
. device according to any one of claims 1 to 14 and an antenna.
23. A wireless communication device, comprising at least said complementary semiconductor device according to any one of claims 15 to 19 and an antenna.
24. A merchandise tag, comprising said wireless communication device according
to claim 22 or 23.
| # | Name | Date |
|---|---|---|
| 1 | 201947041999.pdf | 2019-10-17 |
| 2 | 201947041999-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [17-10-2019(online)].pdf | 2019-10-17 |
| 3 | 201947041999-STATEMENT OF UNDERTAKING (FORM 3) [17-10-2019(online)].pdf | 2019-10-17 |
| 4 | 201947041999-PROOF OF RIGHT [17-10-2019(online)].pdf | 2019-10-17 |
| 5 | 201947041999-PRIORITY DOCUMENTS [17-10-2019(online)].pdf | 2019-10-17 |
| 6 | 201947041999-FORM 1 [17-10-2019(online)].pdf | 2019-10-17 |
| 7 | 201947041999-DRAWINGS [17-10-2019(online)].pdf | 2019-10-17 |
| 8 | 201947041999-DECLARATION OF INVENTORSHIP (FORM 5) [17-10-2019(online)].pdf | 2019-10-17 |
| 9 | 201947041999-COMPLETE SPECIFICATION [17-10-2019(online)].pdf | 2019-10-17 |
| 10 | 201947041999-CLAIMS UNDER RULE 1 (PROVISIO) OF RULE 20 [17-10-2019(online)].pdf | 2019-10-17 |
| 11 | 201947041999-FORM-26 [29-10-2019(online)].pdf | 2019-10-29 |
| 12 | Correspondence by Agent_Proof of Right-Form 1, GPA_30-10-2019.pdf | 2019-10-30 |
| 13 | 201947041999-FORM 3 [19-03-2020(online)].pdf | 2020-03-19 |