DESC:FIELD OF THE INVENTION
[0001] The present disclosure relates to method and device for making nano-scale films with nano-scale particles onto a substrate. In particular, it pertains to dispersion of QDs or other materials on a substrate using focused shock waves.
BACKGROUND OF THE INVENTION
[0002] Background description includes information that may be useful in understanding the present invention. It is not an admission that any of the information provided herein is prior art or relevant to the presently claimed invention, or that any publication specifically or implicitly referenced is prior art.
[0003] Semiconductor devices are made up of literally millions of discreet devices which are interconnected together to form functional circuits, such as microprocessors, memories and programmable logic devices. The semiconductor industry relies on coating technology for fabrication of products with complex, sequentially coated layers with specific chemical or physical properties. Generally in the process of surface coating or dispersion, particulate materials such as quantum dots (QDs), polymers, photoresist, phosphors are solidified on a surface of semiconductor substrate so that a nanostructured surface with identical or different chemical components is formed on the surface of the substrate.
[0004] Presently available techniques for dispersion or coating of particulate material such as quantum dots (QDs), polymers, photoresist, phosphors, etc. on substrates include Molecular Beam Epitaxy (MBE), Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), Langmuir-Blodgett technique, Spin-coating, and Drop-casting, etc. Molecular Beam Epitaxy (MBE) and CVD techniques combine both growth and dispersion, and though sophisticated, are highly expensive and time consuming. They require costly precursors, special instruments and ultra-high vacuum ambience, which makes them quite complex to use and final yield is considered to be very low. The evaporation techniques such as PVD destroy nature of quantum dots. Drop-casting is reported to be the simplest method but it produces non uniform material dispersion, which is not well-suited for semiconductor device applications. Although spin-coating method is low-cost and simple to use, it involves high wastage of base material and produces non-uniform dispersion of QDs specifically for small area substrates thus limiting their semiconductor device applications.
[0005] Furthermore, conventional techniques require relatively large quantity of material – of the order of few hundred micro-liters to milli-liters of solution to disperse particulate material, making them uneconomical and environmentally hazardous on account of unused samples.
[0006] Accordingly, there exists a need in the art for a simple, commercially viable and highly efficient device and technique for coating or dispersion of particulate materials such as quantum dots, polymers, photoresist, phosphors etc. in the solution form, onto variety of substrates including semiconductor Si or SiO2. There also exists a need for a system that is easy to operate and facilitates uniform coating or dispersion of particulate materials on a semiconductor substrate without destroying the nature of particulate coating material.
[0007] The present invention satisfies the existing needs, as well as others, and generally overcomes the deficiencies found in the prior art.
OBJECTS OF THE INVENTION
[0008] A general object of the present disclosure is to provide a method and device for coating or dispersing particulate material onto a substrate that overcome drawbacks of conventional methods and devices.
[0009] An object of the present disclosure to provide a simple and inexpensive method for dispersion of particulate material onto a substrate.
[0010] An object of the present disclosure is to provide a method for coating or dispersing particulate material based on shock waves.
[0011] Yet another object of the present disclosure to provide a manually operated device for dispersion of particulate material onto a substrate based on shock waves.
[0012] Yet another object of the present disclosure to provide a simple manually operated and hand-held device for dispersion of particulate material onto a substrate based on shock waves.
[0013] Yet another object of the present disclosure to provide a device capable of controlling dispersion or coating of particulate material onto a substrate.
[0014] Still another object of the present disclosure to provide a device that facilitates uniform dispersion of particulate material onto a substrate.
[0015] Still another object of the present disclosure to provide a device for dispersion of particulate material onto a substrate that is easy to operate and does not require special instrumentation for generating shock waves.
[0016] Still another object of the present disclosure to provide a device that requires relatively lower amount of particulate material for coating.
SUMMARY
[0017] The present disclosure relates to coating or dispersing particulate material onto a substrate. In an aspect the present disclosure provides a method and device for dispersion of particulate material such as, but not limited to, quantum dots (QDs), polymers, photoresist, phosphors etc. onto a variety of substrates such as those used for semiconductor devices.
[0018] In an aspect, the present disclosure uses a shock wave for dispersing particulate material to form a nano-layer of dispersed material over a substrate, and therefore termed as Shock wave Dispersed - Nano Beam Epitaxy (SD-NBE)". In an aspect, the shock wave is used to disperse a nanomaterial in solution form on a substrate, irrespective of its crystalline or amorphous nature. The method is simple, highly efficient and inexpensive. In another aspect, the disclosed method does not destroy the nature of QDs and ensures uniform dispersion on the substrate.
[0019] In an aspect, the disclosed method uses a shock tube configured to replicate blast waves at speeds greater than the speed of sound (supersonic and hypersonic). Liquid stream emerging under influence of the shock wave breaks in to expanding nano-spray due to breaking of the shear layer by the vortices generated at the exit of the shock tube.
[0020] In an aspect, a shock tube is adapted to disperse a solution of material by providing means to place the solution in path of the shock wave. One such means can be a converging tube at end of low pressure driven section of the shock tube. The converging tube can be adapted to hold a liquid solution of material to be dispersed such that there is an air bubble between the liquid solution and wall tip of the shock tube. Convergence in the converging tube can additionally enable increase in strength of the shock wave which in turn helps to produce higher flow speed at the exit.
[0021] In an aspect, flow emerging out of the narrow exit of converging shock tube is a diverging spherical shock wave followed by supersonic flow with vortices helping in mixing the emerging flow with the surrounding media. This phenomenon is exploited in the current invention where the microliter liquid sample containing the QDs is loaded in to the converging portion of the driven tube open to the atmosphere.
[0022] In an aspect, the present disclosure provides a method for laying a nano-layer of nano materials over a substrate by dispersing the nano material using a shock wave. The method includes step of providing a means to generate a shock wave wherein the means of generating shock wave have a converging tube at its end; preparing a liquid solution of the material to be layered over the substrate; positioning the liquid solution in the converging tube with an air bubble between the solution and tip of the converging tube; actuating the shock wave generating means thereby generating a shock wave, wherein the generated shock wave sprays the liquid solution out of the tip of the converging tube and the sprayed material is deposited evenly on a substrate positioned in path of the spray.
[0023] In an embodiment, the disclosed technique can be efficiently and effectively used for various semiconductor processes and technology manufacturing. In implementation, shock tube can be a handheld manually operated shock tube such as a ‘Reddy tube’ made out of a medical syringe specifically for small area substrates. Alternatively, the disclosed technique can be implemented using any other means to generate the shock waves and mechanizing the process to make it viable for industrial application/mass production.
[0024] Various objects, features, aspects and advantages of the inventive subject matter will become more apparent from the following detailed description of preferred embodiments, along with the accompanying drawing figures in which like numerals represent like components.
BRIEF DESCRIPTION OF THE DRAWINGS
[0025] The accompanying drawings are included to provide a further understanding of the present disclosure, and are incorporated in and constitute a part of this specification. The drawings illustrate exemplary embodiments of the present disclosure and, together with the description, serve to explain the principles of the present disclosure.
[0026] FIG. 1 illustrates schematic diagram of a typical shock tube.
[0027] FIG. 2 illustrates schematic diagram of a typical handheld manually operated shock tube based on medical syringe (Reddy tube).
[0028] FIG. 3 illustrates an exemplary schematic diagram of a handheld manually operated shock tube (Reddy tube) adapted to disperse a solution of material in accordance with a preferred embodiment of the present disclosure.
[0029] FIG. 4 illustrates an exemplary schematic diagram of a manually operated equipment to disperse a solution of material based on shockwaves in accordance with a preferred embodiment of the present disclosure.
[0030] FIG. 5A illustrates an exemplary Schlieren image showing emergence of spherical shock wave from converging tip of the proposed device in accordance with embodiments of the present disclosure.
[0031] FIG. 5B illustrates an exemplary Schlieren image showing flow of Quantum Dots (QDs) solution emerging from the converging tip of the proposed device in accordance with embodiments of the present disclosure.
[0032] FIG. 6 illustrates exemplary images of patterned and un-patterned PbS colloidal QD films deposited on SiO2 grown on Si substrate using the proposed device in accordance with embodiments of the present disclosure.
[0033] FIG. 7A and 7B illustrate exemplary luminescence photographs of shock wave deposited CdTe quantum dots under UV in accordance with embodiments of the present disclosure.
[0034] FIGs. 8A and 8B illustrate exemplary SEM images of patterned PbS CQDs on a silicon substrate in accordance with embodiments of the present disclosure.
[0035] FIG. 9 illustrates an exemplary Light Beam Induced Current (LBIC) image of patterned PbS/p-Si hetero junctions in accordance with embodiments of the present disclosure.
[0036] FIG. 10 illustrates an exemplary flow diagram for method of forming a nano-layer of nano materials over a substrate by dispersing the nano material using a shock wave in accordance with embodiments of the present disclosure.
DETAILED DESCRIPTION
[0037] The following is a detailed description of embodiments of the disclosure depicted in the accompanying drawings. The embodiments are in such detail as to clearly communicate the disclosure. However, the amount of detail offered is not intended to limit the anticipated variations of embodiments; on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the present disclosure as defined by the appended claims.
[0038] Each of the appended claims defines a separate invention, which for infringement purposes is recognized as including equivalents to the various elements or limitations specified in the claims. Depending on the context, all references below to the "invention" may in some cases refer to certain specific embodiments only. In other cases it will be recognized that references to the "invention" will refer to subject matter recited in one or more, but not necessarily all, of the claims.
[0039] Unless the context requires otherwise, throughout the specification which follow, the word “comprise” and variations thereof, such as, “comprises” and “comprising” are to be construed in an open, inclusive sense that is as “including, but not limited to.”
[0040] Reference throughout this specification to “one embodiment” or “an embodiment” means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases “in one embodiment” or “in an embodiment” in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
[0041] As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” include plural referents unless the content clearly dictates otherwise. It should also be noted that the term “or” is generally employed in its sense including “and/or” unless the content clearly dictates otherwise.
[0042] In some embodiments, the numbers expressing quantities of ingredients, properties such as concentration, reaction conditions, and so forth, used to describe and claim certain embodiments of the invention are to be understood as being modified in some instances by the term “about.” Accordingly, in some embodiments, the numerical parameters set forth in the written description are approximations that can vary depending upon the desired properties sought to be obtained by a particular embodiment. In some embodiments, the numerical parameters should be construed in light of the number of reported significant digits and by applying ordinary rounding techniques. Notwithstanding that the numerical ranges and parameters setting forth the broad scope of some embodiments of the invention are approximations, the numerical values set forth in the specific examples are reported as precisely as practicable.
[0043] The recitation of ranges of values herein is merely intended to serve as a shorthand method of referring individually to each separate value falling within the range. Unless otherwise indicated herein, each individual value is incorporated into the specification as if it were individually recited herein. All methods described herein can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context. The use of any and all examples, or exemplary language (e.g. “such as”) provided with respect to certain embodiments herein is intended merely to better illuminate the invention and does not pose a limitation on the scope of the invention otherwise claimed. No language in the specification should be construed as indicating any non-claimed element essential to the practice of the invention.
[0044] The headings and abstract of the invention provided herein are for convenience only and do not interpret the scope or meaning of the embodiments.
[0045] The following discussion provides many example embodiments of the inventive subject matter. Although each embodiment represents a single combination of inventive elements, the inventive subject matter is considered to include all possible combinations of the disclosed elements. Thus if one embodiment comprises elements A, B, and C, and a second embodiment comprises elements B and D, then the inventive subject matter is also considered to include other remaining combinations of A, B, C, or D, even if not explicitly disclosed.
[0046] Various terms as used herein are shown below. To the extent a term used in a claim is not defined below, it should be given the broadest definition persons in the pertinent art have given that term as reflected in printed publications and issued patents at the time of filing.
[0047] Embodiments explained herein relate to method and device for making nano-scale films with nano-scale particulate material such as, but not limited to, quantum dots (QDs), polymers, photoresist, phosphors etc. onto a variety of substrates such as those used for semiconductor devices. In particular, the present disclosure uses a shock wave for dispersing particulate material to form a nano-layer of dispersed material over a substrate, and therefore termed as Shock wave Dispersed - Nano Beam Epitaxy (SD-NBE)".
[0048] In an embodiment, a shock tube configured to replicate blast waves at speeds greater than the speed of sound (supersonic and hypersonic) can be used or dispersing particulate material to form a nano-layer of dispersed material over a substrate. Liquid stream emerging under influence of the shock wave breaks into expanding nano-spray due to breaking of the shear layer by the vortices generated at the exit of the shock tube.
[0049] It is to be appreciated that though embodiments of the present disclosure have been explained with reference to a hand held manually operated compression driven shock tube (Reddy tube), concept of the present disclosure can as well be implemented using any other means to generate shock waves such as by a small explosion (blast-driven) with modifications that would be evident to those skilled in the art, and all such implementations/modifications are well within the scope of the present disclosure without any limitations.
[0050] FIG. 1 illustrates schematic diagram of a typical compression driven shock tube 100.
A compression driven shock tube such as shock tube 100 shown in FIG. 1 is typically made of a constant cross section tube 102 consisting of high pressure driver section 104 and low pressure driven section 106 separated by a thin diaphragm 108. Sudden rupture of the diaphragm due to increase in gas pressure (e.g. air or inert gases like Nitrogen, Argon, Helium etc.) inside the driver section 104 generates shock waves which in turn travels into the low pressure driven section 106. When gas expands impulsively from confined high pressure area to low pressure area after the diaphragm rupture, the air molecules travel at speeds greater than the speed of sound (supersonic and hypersonic) into the low pressure driven tube 106 if the ratio of pressure is equal to or greater than 0.53. Thus, the aerodynamic processes can result in formation of shock waves followed by supersonic flow sandwiched between the driver gas and the shock front. The strength of thus produced shock waves can be measured in terms of Mach number (ratio of flow speed to the speed of sound in the medium) which shall be greater than 1 for supersonic and hypersonic waves.
[0051] FIG. 2 illustrates schematic diagram of a typical handheld manually operated compression driven shock tube 200 that is implemented based on medical syringe (Reddy tube). As shown therein a medical syringe 202 can serve as a high pressure driver section 204 (i.e. compression tube) with plunger 206 of the syringe 202 being used as a piston to build up high pressure within the high pressure driver section 204. The syringe 202 can be connected to a hypodermic needle 208 through a diaphragm 210, wherein interior of the needle 208 can serve as a low pressure driven section 212 (i.e. a shock tube). A thin plastic membrane can be used as a diaphragm 210 that separates the high pressure driver section 206 and the low pressure driven section 212. The open end of the hypodermic needle can be made circular by grinding the sharp elliptic tip.
[0052] In an aspect, a shock tube can be adapted to disperse a solution of material by providing a converging tube at end of low pressure driven section of the shock tube. The converging tube can be adapted to hold a liquid solution of material to be dispersed such that there is an air bubble between the liquid solution and wall tip of the shock tube.
[0053] FIG. 3 illustrates an exemplary schematic diagram of a handheld manually operated shock tube (Reddy tube) adapted to disperse a solution of material in accordance with a preferred embodiment of the present disclosure. As shown handheld manually operated compression driven shock tube such as shock tube 200 can be configured with a converging tube 302 at the open end of the low pressure driven section 212. The converging tube 302 can be further configured with a spray guide such as guiding cylinder 306 as shown in FIG. 3. The plunger 206 can be withdrawn to the extreme end of the high pressure driver section 204 (i.e. compression tube) before attaching the converging tube 302 with a separating diaphragm 210 such that the high pressure driver section is filled with ambient air at atmospheric pressure. The plunger 206 can travel through the high pressure driver section 204 as the plunger 206 is pressed forward manually and the pressure ahead of the distal end of the plunger 206 can increase rapidly which results in rupture of the diaphragm 210.
[0054] In alternate implementations high pressure can be generated in the driver section 204 using any other gas as driver gas. For example an inert gas such as N2, Ar, or Helium can be used as the driver gas.
[0055] In an embodiment, rupture of diaphragm 210 due to the high pressure can result in creating and driving a strong shock wave into the low pressure driven section 212. While the desired diaphragm rupture pressure in the driver section can be generated manually by pushing the plunger in the syringe as explained in above embodiment, it is possible to have any other means to generate the desired pressure to generate the shock waves and mechanize the process to make it viable for industrial application/mass production.
[0056] In an aspect, shock waves produced in the driver section 212 can converge at tip of the converging tube 302. Convergence of the shock wave at tip of the converging tube 302 essentially increases strength of the shock wave which in turn will produce higher flow speed at the exit of the tip of the converging tube 302.
[0057] In an aspect, flow emerging out of the narrow exit of converging shock tube is a diverging spherical shock wave followed by supersonic flow with vortices helping in mixing the emerging flow with the surrounding media. This phenomenon is exploited in the current invention where the microliter liquid solution containing the QDs is loaded in to the converging portion of the driven tube open to the atmosphere. The converging tube 302 can be adapted to hold a liquid solution of material 304 to be dispersed such that there is an air bubble between the liquid solution and tip of the shock tube. In an aspect, absence of the air bubble between the liquid 304 being sprayed and the tip of the shock tube can result in loss of momentum of the liquid stream immediately after emerging from the end of the shock tube which can essentially prevent mixing and spreading of the liquid stream with the surrounding air molecules.
[0058] FIG. 4 illustrates an exemplary schematic diagram of manually operated equipment 400 to disperse a solution of material based on shockwaves in accordance with a preferred embodiment of the present disclosure. As shown handheld manually operated shock tube (Reddy tube) of FIG. 3 can be mounted on a manually operated bench that additionally incorporates means to hold substrate (not visible here) and spray guiding cylinder 306 to work as spray guide so that the sprayed material is guided to the substrate. In an aspect, geometry of the spray guide can match shape of the substrate so that no material is wasted. After the converging tube 302 filled with liquid solution appropriate manner, the spray guide and the substrate are positioned, the lever 402 of the equipment can be pushed down manually to actuate the shock tube to generate a shock wave that can spray the liquid solution positioned within the converging tube 302 to the substrate to create a nanolayer of the material contained in the solution.
[0059] FIG. 5A illustrates an exemplary Schlieren image showing emergence of spherical shock wave from converging tip of the proposed device in accordance with embodiments of the present disclosure. The shock wave emerging out of the narrow exit can be a diverging spherical shock wave followed by supersonic flow with vortices helping in mixing the emerging flow with the surrounding media. Small volume such as a microliter of liquid solution containing QDs can be loaded into the converging portion of the driven tube open to the atmosphere with an air bubble between the liquid and the tip of the shock tube. Presence of air bubble between the liquid sample and the tip of the shock tube enables emergence of shock wave prior to exit of the solution.
[0060] FIG. 5B illustrates an exemplary Schlieren image showing flow of Quantum Dots (QDs) solution emerging from the converging tip of the proposed device in accordance with embodiments of the present disclosure. The emerging liquid stream can break into expanding nano-spray due to breaking of the shear layer by the vortices generated at the exit of the shock tube. Absence of air bubble between the liquid solution and tip of converging tube of the shock tube can result in loss of momentum of the liquid stream immediately after emerging from the end of the shock tube. This can prevent mixing and spreading of the liquid stream with the surrounding air molecules.
[0061] In an embodiment, expanding nano-spray emerging from tip of converging tube 302 can be used to generate different geometrical patterns of coating on a substrate such as a semiconductor substrate used for semiconductor devices. Patterns of coating can be obtained either by using a mask of required geometry on the substrate or by guiding the spray with an appropriate attachment to the tip of the converging tube 302. For example, coating a circular geometry can be done by attaching a cylindrical tube 306 to guide the spray as shown in FIG. 3.
[0062] FIG. 6 illustrates exemplary images of patterned and un-patterned PbS colloidal QD films deposited on SiO2 grown on Si substrate using the proposed device in accordance with embodiments of the present disclosure. the PbS colloidal QD film was deposited on SiO2 grown on Si substrate using the disclosed technique and only a micro-gram of PbS/CdTe QDs/photoresist were dissolved in a micro-litre of water/organic liquid. The PbS/CdTe QDs/photoresist were dispersed uniformly on Si and glass substrates (though not limited to the above materials and substrates) and their physical, electrical and optical properties were found to be highly suitable for the development of semiconductor devices.
[0063] In an aspect, the disclosed technique besides being quite inexpensive, requires only small amount of material (typically ~2000% less than quantity required in conventional methods) and thus minimizes wastage of material.
[0064] FIG. 7A and 7B illustrate exemplary luminescence photographs of shock wave deposited CdTe quantum dots under UV, the CdTe quantum dots deposited on a substrate using the disclosed device arranged in accordance with embodiments as explained above of the present disclosure.
[0065] FIGs. 8A and 8B illustrate exemplary SEM images of patterned PbS CQDs on a silicon substrate deposited using a mask along with the disclosed device arranged in accordance with embodiments as explained above of the present disclosure.
[0066] FIG. 9 illustrates an exemplary Light Beam Induced Current (LBIC) image of patterned PbS/p-Si hetero junctions in accordance with embodiments of the present disclosure.
[0067] In an aspect, the present disclosure provides a method for laying a nano-layer of particulate material such as, but not limited to, quantum dots (QDs), polymers, photoresist, phosphors etc. onto a variety of substrates such as those used for semiconductor devices by dispersing the material using a shock wave.
[0068] FIG. 10 illustrates an exemplary flow diagram for method 1000 of forming a nano-layer of a material over a substrate by dispersing the material using a shock wave in accordance with embodiments of the present disclosure. The method 1000 can include step 1002 of providing a means to generate a shock wave. In an aspect, the means to generate the shock wave can operate based on any of different known methodologies such as blast-driven (using a small explosion) or compression driven (manual such as Reddy tube as shown in FIG. 2 or mechanically driven as shown in FIG. 1). Step 1004 can be providing a converging tube at end of the means to generate the shock wave. The converging tube at end of the means to generate the shock wave can enable convergence of the generated shock wave at tip of the converging tube increasing strength of the shock wave which in turn can produce higher flow speed at the exit of the tip of the converging tube. The converging tube can further be configured to hold a liquid solution of material to be dispersed such that there is an air bubble between the liquid solution and tip of the tube. In an aspect, absence of the air bubble between the liquid being sprayed and the tip of the shock tube can result in loss of momentum of the liquid stream immediately after emerging from the end of the shock tube which can prevent mixing and spreading of the liquid stream with the surrounding air molecules. Step 1006 can be preparing a liquid solution of the material to be layered over the substrate. The prepared liquid solution can at step 1008 be positioned in the converging tube with an air bubble between the solution and tip of the converging tube. At step 1010 the shock wave generating means can be actuated thereby generating a shock wave, wherein the generated shock wave can spray the liquid solution out of the tip of the converging tube and the sprayed material can be deposited evenly on a substrate positioned in path of the spray.
[0069] In an embodiment, the disclosed method 1000 can further include step of using a mask of required geometry on the substrate to generate a desired pattern of coating. Alternatively the sprayed liquid solution can be guided using an appropriate attachment to the tip of the converging tube. For example, coating a circular geometry can be done by attaching a cylindrical tube to guide the spray.
[0070] In an embodiment, the disclosed technique can be efficiently and effectively used for various semiconductor processes and technology manufacturing. In implementation, shock tube can be a handheld manually operated shock tube such as a ‘Reddy tube’ made out of a medical syringe specifically for small area substrates.
ADVANTAGES OF THE INVENTION
[0071] The present disclosure provides a method and device for coating or dispersing particulate material onto a substrate that overcome drawbacks of conventional methods and devices.
[0072] The present disclosure provides a simple and inexpensive method for dispersion of particulate material onto a substrate.
[0073] The present disclosure provides a method for coating or dispersing particulate material based on shock waves.
[0074] The present disclosure provides a simple manually operated device for dispersion of particulate material onto a substrate based on shock waves.
[0075] The present disclosure provides a simple manually operated and hand-held device for dispersion of particulate material onto a substrate based on shock waves.
[0076] The present disclosure provides a device capable of controlling dispersion or coating of particulate material onto a substrate.
[0077] The present disclosure provides a device that facilitates uniform dispersion of particulate material onto a substrate.
[0078] The present disclosure provides a device for dispersion of particulate material onto a substrate that is easy to operate and does not require special instrumentation for generating shock waves.
,CLAIMS:1. A device for dispersing particulate material onto a substrate, the device comprising:
a means to generate shock waves; and
a means to hold liquid solution of the particulate material in path of the generated shock waves; wherein the shock wave breaks stream of the Liquid emerging under influence of the shock wave into expanding nano-spray due to breaking of the shear layer by the vortices generated at exit.

2. The device as claimed in claim 1, wherein the means to hold liquid solution of the particulate material in path of the generated shock waves is a converging tube fitted at end of the means to generate shock waves, wherein the converging tube is configured to hold liquid solution of the particulate material with an air bubble between tip of the converging tube and the liquid solution.

3. The device as claimed in claim 1, wherein the means to generate shock waves is any of blast-driven or compression driven.

4. The device as claimed in claim 3, wherein the compression driven means to generate shock waves is manually driven.

5. The device as claimed in claim 2, wherein the device further includes an attachment at the tip of the converging tube to guide sprayed liquid solution to a required geometry.

6. A method for forming a nano-layer of a material over a substrate, the method comprising steps of:
providing a means to generate a shock wave;
providing a means to hold liquid solution of the particulate material in path of the generated shock waves;

preparing a liquid solution of the material to be layered over the substrate;
positioning the prepared liquid solution of the material in the means to hold liquid solution with an air bubble between the solution and exit; and
actuating the means to generate a shock wave, wherein the generated shock wave sprays the liquid solution out of the tip of the converging tube and the sprayed material is deposited evenly on a substrate positioned in path of the spray.

7. The method as claimed in claim 6, wherein the means to the hold liquid solution of the particulate material in path of the generated shock waves is a converging tube fitted at end of the means to generate the shock wave, and wherein the conversing tube is configured to hold a liquid such that there is an air bubble between the liquid and tip of the converging tube;

8. The method as claimed in claim 6, wherein the means to generate shock waves is any of blast-driven or compression driven.

9. The method as claimed in claim 8, wherein the compression driven means to generate shock waves is manually driven.

10. The method as claimed in claim 6, wherein the further includes step of using a mask to generate a desired pattern of coating.