Surface Inspection Device And Surface Inspection Method

Abstract: In the present invention, a magnetization unit magnetizes an object to be inspected. A magnetic powder adhesion unit causes magnetic powder to adhere to the magnetized object through the application of a magnetic powder liquid. An illumination unit illuminates, with ultraviolet light, a space which includes the object. An image capture unit: generates a first captured image by capturing an image of the surface of the object to which the magnetic powder has adhered through a first optical filter for transmitting a first wavelength, which is the wavelength of the ultraviolet light, in the space illuminated with the ultraviolet light; and generates a second captured image by capturing an image through a second optical filter for transmitting a second wavelength, which is the wavelength of excitation light from the magnetic powder having undergone excitation by the ultraviolet light. An inspection unit inspects a visible first surface property of the surface of the object on the basis of the first captured image and inspects, on the basis of the second captured image, a second surface property that can be visually identified by magnetic particle inspection on the surface of the object.

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