SURFACES WITH EMBEDDED SENSING AND ACTUATION NETWORKS USING COMPLEMENTARY-METAL-OXIDE- SEMICONDUCTOR (CMOS) SENSING CHIPS
BACKGROUND
[0001] Human skin is an example of a large surface for sensing and actuation. Human
skin is able to “sense” many types of signals such as temperature and pressure. Additionally,
human skin is capable of many “actuations” as well, such as sweating or goose bumps. Such
sensing and actuation has many practical applications, and models or reproductions of the skin’s
sensing and actuation capabilities have often been attempted. Among other things, sensing and
actuation surfaces can be used in medical applications, such as in bio-signal recording interfaces
for prosthetics. In any application, the types of sensing and actuation performed by the surface
are tailored to the specific needs and desires of the application.
[0002] Surfaces with sensing and actuation abilities comparable to those of skin are
difficult to achieve. In particular, human skin has a dense distribution of sensing and actuation
cells that are interconnected by a large network of nerve fibers. On the other hand, though, in
operation, each sensing and actuation cell is individually controlled by the brain. Replicating
both the density and the operation of human skin proves challenging.
SUMMARY
[0003] A device and method for area sensing and actuation is presented. The device
comprises a scalable sensing and actuation network that can control a high density of sensing and
actuation elements over a physical area.
[0004] In one example, the device comprises a flexible substrate on which is patterned an
array of horizontal and vertical wires. The device further comprises a matrix of complementarymetal-
oxide-semiconductor (CMOS) sensing chips. The CMOS sensing chips comprise a matrix
of sensing electrodes operable to receive sensed signals from and send actuation signals to
sensing elements either located on or connected to the device. Each sensing electrode is
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positioned on the substrate at an intersection of the horizontal and vertical wires to form rows
and columns of sensing electrodes. By transmitting signals to and receiving signals from the
sensing electrodes via the horizontal and vertical wires, it is possible to individually control and
sense each sensing electrode, for example. The sensing electrodes may be controlled by a
processing chip. Rows or columns of sensing electrodes can be selectively activated such that
sensed signals may be received from and/or actuation signals may be sent to each of the sensing
electrodes on the activated row or column. The processing chip receives sensed signals from and
sends actuation signals to the individual sensing electrodes so as to individually control and
sense each sensing electrode.
[0005] In another aspect, a method is presented. The method includes a processing chip
providing power to a plurality of sensing chips. The power is transmitted to each sensing chip on
a path comprising horizontal wires, vertical wires, and sensing chips. Each sensing chip
comprises a plurality of CMOS decoders, a plurality of CMOS selection transistors and a
plurality of sensing electrodes arranged in a matrix of columns and rows along the horizontal
wires and vertical wires. A CMOS decoder activates a column of sensing electrodes. One or
more CMOS selection transistors receives a digital select signal and selects one or more rows of
sensing electrodes according to the digital select signal. Each of the sensing electrodes that lies
at the intersection of the activated column and a selected row is operable to receive sensed
signals from and send actuation signals to a respective sensing element, for example. The sensed
signals are transmitted to the processing chip via the horizontal wires. Each horizontal wire
carries the sensed signal from a respective sensing electrode on the column of sensing electrodes.
The sensed signals are amplified during transmission between the sensing electrodes and the
processing chip.
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[0006] Additionally, or in place of transmission of the sensed signals, actuation signals
from the processing chip are transmitted to the sensing electrodes in the column of sensing
electrodes via the horizontal wires. Each horizontal wire carries the actuation signal to a
respective sensing electrode on the column of sensing electrodes. The actuation signals are
amplified during transmission between the processing chip and the sensing electrodes. This
method may be carried out repeatedly so as to generate a scan of the matrix of sensing
electrodes.
[0007] The foregoing summary is illustrative only and is not intended to be in any way
limiting. In addition to the illustrative aspects, embodiments, and features described above,
further aspects, embodiments, and features will become apparent by reference to the drawings
and the following detailed description.
BRIEF DESCRIPTION OF THE FIGURES
[0008] FIG. 1 depicts an example device for sensing and actuation.
[0009] FIG. 2a depicts an example complementary-metal-oxide-semiconductor (CMOS)
sensing chip.
[0010] FIG. 2b depicts a side view of an example device for sensing and actuation.
[0011] FIG. 3 depicts an example substrate for use in a device for sensing and actuation.
[0012] FIG. 4 depicts an example wiring scheme for use in a device for sensing and
actuation.
[0013] FIG. 5 depicts an example processing chip for use in a device for sensing and
actuation.
[0014] FIG. 6 is a flow chart depicting example steps for sensing and actuating using a
matrix of sensing chips.

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[0015] FIG. 7 is a flow chart depicting example steps for sensing a matrix of sensing
electrodes.
DETAILED DESCRIPTION
[0016] In the following detailed description, reference is made to the accompanying
drawings, which form a part hereof. In the drawings, similar symbols typically identify similar
components, unless context dictates otherwise. The illustrative embodiments described in the
detailed description, drawings, and claims are not meant to be limiting. Other embodiments may
be utilized, and other changes may be made, without departing from the spirit or scope of the
subject matter presented herein. It will be readily understood that the aspects of the present
disclosure, as generally described herein, and illustrated in the Figures, can be arranged,
substituted, combined, separated, and designed in a wide variety of different configurations, all
of which are explicitly contemplated herein.
[0017] Figure 1 depicts an example device for sensing and actuation 101. Device 101 is
shown including a substrate 102, horizontal wires 103, and vertical wires 104. Additionally,
device 101 is shown including a plurality of complementary-metal-oxide-semiconductor
(CMOS) sensing chips 105 (comprising sensing electrodes 106) arranged in a matrix, a plurality
of CMOS signal drivers 108, and a processing chip 109 comprising a plurality of CMOS
selection transistors 107, CMOS signal drivers 108, and CMOS decoders 110.
[0018] Any number of CMOS sensing chips 105 may be present in the device 101. The
CMOS sensing chip in the upper left hand corner of Figure 1 is denoted 1051,1 to indicate that the
CMOS sensing chip is in the first row and first column of the matrix of CMOS sensing chips.
Similarly, the CMOS sensing chip in the lower right hand corner of Figure 1 is denoted 105n,n to
indicate that that the CMOS sensing chip is in the nth row and nth column of the matrix of CMOS

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sensing chips 105. Any number of rows and any number of columns may make up the matrix of
CMOS sensing chips 105.
[0019] Similarly, any number of sensing electrodes 106 may be present in a particular
CMOS sensing chip 105. For example, CMOS sensing chip 1051,1 is shown comprising four
sensing electrodes 106 (labeled 1061,1,a – 1061,1,d), but any number of sensing electrodes is
possible.
[0020] The components of Figure 1 are shown merely by way of illustration, and more or
fewer components, both in number and type, may be present in real-world embodiments,
depending on the purpose for which the embodiment is designed. Further, the relative positions
of the components are merely illustrative unless context dictates otherwise. For example, any
number of horizontal wires 103, vertical wires 104, CMOS sensing chips 105, sensing electrodes
106, CMOS selection transistors 107, CMOS decoders 110, or CMOS signal drivers 108 may be
used, and many configurations are possible.
[0021] Device 101 is shown comprising the substrate 102. In one embodiment, the
substrate 102 may be a flexible substrate. One example of such a flexible substrate is a plastic,
such as polydimethylsiloxane (PDMS), that can be molded into a desired shape. In another
embodiment, the substrate 102 may be rigid.
[0022] Device 101 is shown further comprising horizontal wires 103 and vertical
wires 104. The horizontal wires 103 and the vertical wires 104 form an array, as shown. The
horizontal wires 103 and vertical wires 104 cross to form intersections on the device 101, and
serve to transmit signals among CMOS sensing chips 105, and between CMOS sensing
chips 105 and the processing chip 109. In one embodiment, the horizontal wires 103 and vertical
wires 104 may be printed directly onto the substrate 102. In another embodiment, the horizontal
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wires 103 and vertical wires 104 may be printed onto a separate flexible sheet that is attached to
the substrate 102.
[0023] Device 101 is shown further comprising the plurality of CMOS sensing chips 105.
Each CMOS sensing chip 105 comprises a plurality of sensing electrodes 106. Each sensing
electrode 106 is connected to a sensing element (not shown), and each sensing electrode 106 is
operable to receive sensed signals from and send actuation signals to a connected sensing
element.
[0024] The sensing elements may be included in the device 101 or may be manufactured
separately on another chip. In the embodiment where the sensing elements are manufactured
separately, the sensing elements are then bonded to the CMOS sensing chips 105 so as to
connect to the sensing electrodes 106. The sensing elements may be any known type of sensing
element such as, for example, capacitive sensors, bio-field sensors, heat sensors, pyroelectricbased
infrared sensors, gas sensors based on variable-resistance metal oxides, or another
electrical, magnetic, or optical sensor. In one embodiment, the sensing elements are capacitive
sensors, and the device 101 additionally includes an insulating layer on top of the sensing
electrodes 106. In one embodiment, sensing electrodes 106 in different regions of the device 101
may be connected to varying types of sensing elements. The sensing elements may also be used
for actuation, as described below in combination with the actuation signals. In this way,
different regions of the device 101 may be operable to sense various types of signals and provide
various types of actuation.
[0025] Sensed signals received by the sensing electrodes 106 from the sensing elements
are transmitted to the processing chip 109 by activating the appropriate vertical wire 104. The
sensed signals may be transmitted to the processing chip 109 along the horizontal wires 103
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and/or any sensing chips 105 that lay on the path to the processing chip 109. For example, a
sensed signal sensed at a sensing electrode 106 located on CMOS sensing chip 1051,1 is selected
by activating the appropriate vertical wire 104 (using CMOS decoder 1101,1 as described below),
and the selected sensed signal may be sent to the processing chip 109 via a horizontal wire 103
and CMOS sensing chips 1051,n, or one or more CMOS sensing chips connected to the horizontal
wire, but not shown.
[0026] The sensed signal is the output of a sensing element that is connected to (accessed
by) the sensing electrode 106. The sensed signals may be many types of signals depending on
the types of sensing elements. In one embodiment, the sensed signal may indicate a magnitude.
For example, the sensed signal may be a voltage that proportionally represents the capacitance or
the resistance of the sensing element. For capacitance-based sensing elements (such as
proximity detectors, touch screens, or pyroelectric-based infrared detectors), the capacitance
changes in response to the sensed event, and the capacitance may then be converted to a current
or voltage signal. The sensed signal may be this current or voltage. In another embodiment, the
sensed signal may indicate a binary yes/no or high/low based on whether the sensed magnitude is
higher than a threshold value.
[0027] In one embodiment, the sensing electrode 106 may receive the sensed signal from
a sensing element and transmit the sensed signal to the processing chip 109 via the sensing chip
105. In another embodiment, the sensing electrode 106 may receive the sensed signal from a
sensing element, the sensing chip 105 may process the sensed signal received by the sensing
electrode 106, and a processed sensed signal may be transmitted to the processing chip 109. In
one embodiment, the sensing electrode 106 may receive a magnitude from the sensing electrode,
and the sensing chip 105 may determine if the magnitude is greater than or less than a threshold.
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The sensing chip 105 may then transmit a binary high/low signal indicating whether or not the
magnitude was greater or less than a threshold.
[0028] The time duration of the sensed signal can range from a few microseconds to a
few milliseconds based on the types of sensing elements used and the desired applications. As
an example, for touch screens a time duration of a few milliseconds is acceptable, whereas for
infrared sensors much shorter time durations may be preferable. Other variations are possible as
well. In some embodiments, the sensing elements may be sensing constantly. In other
embodiments, the sensing elements may be triggered to begin sensing when desired or needed.
[0029] Actuation signals sent to the sensing elements by the sensing electrodes 106 are
transmitted from the processing chip 109 to the sensing electrodes 106 via the horizontal
wires 103 and/or sensing chips 105. For example, an actuation signal could follow the path
described above with respect to the sensed signal, but in reverse.
[0030] The actuation signal is sent from the sensing electrode 106 to a connected sensing
element. The actuation signal may be, for example, a voltage. In one embodiment, the sensing
element may comprise a microcantilever whose position may be modified according to the
received voltage. As another example, the sensing element may be a pixel on a display that is
controlled by the voltage. In another embodiment, the actuation signal may be a current pulse
used to stimulate a neuron. As another example, the actuation signal may be a current used to
heat a heating element or turn on a light emitting diode (LED). The time duration of the
actuation signals may be independent of the time duration of the sensing signals.
[0031] Actuation and sensing are two distinct aspects of the invention, and as such, in
some embodiments, a given sensing electrode 106 may be used for only one or the other. As
examples, in an embodiment involving a display, the display may comprise only electrodes 106
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used for actuation, whereas in an embodiment used for a nerve tissue interface, the electrodes
106 may be used for both sensing and actuation. In some embodiments, the sensing and
actuation signals may be transmitted using separate, but parallel, horizontal wires.
[0032] Each sensing electrode 106 is positioned on the substrate 101 at an intersection of
a given horizontal wire 103 and vertical wire 104. Additionally, each row of sensing electrodes
106 is connected to a common horizontal wire 103, and each column of sensing electrodes 106 is
connected to a common vertical wire 104.
[0033] In one embodiment, the sensing electrodes 106 are positioned on a top surface of
each CMOS sensing chip 105, and the plurality of CMOS sensing chips 105 are positioned on
the substrate 102 such that the top surfaces of the CMOS sensing chips 105 are exposed.
Alternatively, the sensing electrodes 106 may be positioned on a bottom surface of each CMOS
sensing chip 105. Still, as another example, some sensing electrodes 106 may be positioned on a
top surface of CMOS sensing chips 105, while some sensing electrodes 106 may be positioned
on a bottom surface of CMOS sensing chips 105. In another embodiment, the plurality of
CMOS sensing chips 105 are positioned on one side of the substrate 102, the sensing electrodes
106 are positioned on an opposite side of the substrate 102, and the CMOS sensing chips 105 are
connected to the sensing electrodes 106 through vias in the substrate 102.
[0034] In one embodiment, the CMOS sensing chips 105 are operable to process sensed
signals received from the sensing elements and to transmit the processed received sensed signals
to the processing chip 109 via the horizontal wires 103. As the CMOS sensing chips 105 are
manufactured in the well-known CMOS technology, the CMOS sensing chips can take
advantage of the many known uses of CMOS electronics.
[0035] Device 101 is shown further comprising the plurality of CMOS selection
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transistors 107 and CMOS decoders 110, both included in the processing chip 109. The plurality
of CMOS decoders 110 are connected to vertical wires 104. Each CMOS decoder 110 is
connected to a respective vertical wire 104 and is operable to activate the vertical wire 104 and
in turn any of the sensing electrodes 106 in the column of sensing electrodes 106 connected to
the vertical wire 104. As an example, CMOS decoder 1101,1 is operable to activate any of
sensing electrodes 1061,1,a, 1061,1,c, 106n,1,a, and 106n,1,c, as well as any other sensing electrodes
106 connected to the same vertical wire 104 as the CMOS decoder 1101,1.
[0036] The plurality of CMOS selection transistors 107 are connected to the horizontal
wires 103. Each CMOS selection transistor 107 is connected to a respective horizontal wire 103
and is operable to select any one of the sensing electrodes 106 in the row of sensing electrodes
106 connected to the horizontal wire 103. As an example, CMOS selection transistor 1071 is
operable to select any of sensing electrodes 1061,1,a, 1061,1,b, 1061,n,a, and 1061,n,b, as well as any
other sensing electrodes 106 connected to the same horizontal wire 103 as the CMOS selection
transistor 1071.
[0037] When a vertical wire 104 is activated by a CMOS decoder 110, the activated
vertical wire 104 controls connection of each sensing electrode 106 in the column of sensing
electrodes 106 connected to the vertical wire 103 to its respective horizontal wire 103. The
selection transistor 107 may then select one of the horizontal wires 103, such that a sensed signal
may be received from the sensing electrode 106 that is located at the intersection of the activated
vertical wire 104 and the selected horizontal wire 103. As an example, if CMOS decoder 1101,1
and CMOS selection transistor 1071 are activated, a sensed signal may be received from sensing
electrode 1061,1,a.
[0038] Device 101 is shown further comprising the plurality of CMOS signal
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drivers 108. The CMOS signal drivers 108 are included on the CMOS sensing chips 105 and in
the processing chip 109. Each of the horizontal wires 103 is connected to a CMOS signal driver
108 on a CMOS sensing chip 105, and each of the vertical wires 104 is connected to one of the
CMOS signal drivers 108 in the processing chip 109. Each CMOS signal driver 108 connected
to a horizontal wire 103 is operable to amplify signals transmitted between adjacent CMOS
sensing chips 105 via the horizontal wires 103. These signals may include sensed and actuation
signals sent between CMOS sensing chips 105 and the processing chip 109 via one or more
CMOS sensing chips 105. In one embodiment, each CMOS signal driver 108 connected to a
horizontal wire 103 is further operable to receive, amplify, and transmit digital select signals sent
from the processing chip 109. In one embodiment, each CMOS signal driver 108 comprises an
analog buffer for the sensed and actuation signals.
[0039] Device 101 is shown further including the processing chip 109. In one
embodiment, however, the processing chip 109 may not be located on the device 101, but may
instead be printed onto a separate flexible sheet connected to the device 101. This separate
flexible sheet may also include the array of horizontal wires 103 and vertical wires 104. In
another embodiment, the processing chip 109 is printed on a separate printed circuit board and
connected to the array of horizontal wires 103 and vertical wires 104. In any case, the
processing chip 109 is operable to receive sensed signals from and send actuation signals to the
sensing electrodes 106 via the horizontal wires 103 and one or more CMOS sensing chips 105.
[0040] Additionally, the processing chip 109 is operable to control operation of the
CMOS selection transistors 107 and CMOS decoders 110. In particular, the processing chip 109
may send signals to the CMOS decoders 110 to activate a column of sensing elements, and to the
CMOS selection transistors 107 to activate a row of sensing elements in order to receive sensed
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signals from particular sensing electrodes 106, as described above.
[0041] Further, the processing chip 109 provides power to each CMOS sensing chip 105.
In one embodiment, the processing chip 109 and the CMOS sensing chips 105 are designed
using different CMOS technologies. For example, the processing chip 109 may be designed in a
130nm or smaller CMOS technology, while the CMOS sensing chips 105 may be designed in an
older CMOS process such as a 350nm or 1μm CMOS technology.
[0042] Figure 2a depicts an example CMOS sensing chip 201, bounded by the dotted
line. The CMOS sensing chip 201 is shown comprising an array of horizontal wires 202 and
vertical wires 203. The array of horizontal wires 202 and vertical wires 203 may be positioned
on a first plane. The CMOS sensing chip 201 is shown further comprising a plurality of CMOS
sensing electrodes 205, and a plurality of CMOS signal drivers 206 connected to the horizontal
wires 202. The CMOS sensing electrodes 205, and CMOS signal drivers 206 may be positioned
on a second plane. The first plane and the second plane are shown parallel to one another. The
first plane and the second plane may, in some examples, be the same plane. Outside the CMOS
sensing chip 201 is shown a plurality of CMOS decoders 207 and a plurality of CMOS selection
transistors 204. Each of the CMOS decoders 207 is connected to a respective vertical wire, and
each of the CMOS selection transistors 204 is connected to a respective horizontal wire. The
CMOS decoders 207 and the CMOS transistors 204 may be included in a processing chip (not
shown). The processing chip may further include other CMOS signal drivers 206 connected to
the vertical wires 203.
[0043] The CMOS sensing chip 201 may be one of a plurality of CMOS sensing chips
located on a sensing and actuation device, such as, for example, the sensing and actuation
device 101 described in Figure 1. The CMOS sensing chip 201 can be interconnected by a
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wiring mesh with other similar CMOS sensing chips in order to form a matrix of CMOS sensing
chips such as that shown on the device 101 of Figure 1. An interconnected CMOS sensing chip
can receive signals from other CMOS sensing chips. Because each CMOS sensing chip 201
comprises active electronics, the received signal can be restored and/or preserved before being
transmitting to another CMOS sensing chip or a processing chip. In this way, signals from the
CMOS sensing chips 201 may be transmitted over large distances with little or no degradation.
[0044] CMOS sensing chip 201 is shown comprising the plurality of sensing
electrodes 205. Each sensing electrode 205 is connected to a sensing element and is operable to
receive sensed signals from and send actuation signals to the sensing element. Each sensing
electrode 205 may then transmit the sensed signals to a processing chip. Each sensing electrode
205 is positioned at an intersection of the horizontal wires 202 and vertical wires 203. This
positioning of the sensing electrodes 205 forms rows and columns of sensing electrodes 205. A
row of sensing electrodes 205 is connected by a common horizontal wire 202. As an example,
the top row shown in Figure 2a includes sensing electrode 2051,1 and sensing electrode 2051,n.
Sensing electrode 2051,1 and sensing electrode 2051,n share a common horizontal wire 2021.
While Figure 2a shows these two sensing electrodes on the top row, any number of sensing
electrodes may be present between sensing electrode 2051,1 and sensing electrode 2051,n, as
illustrated by the ellipses on the horizontal wire 2021.
[0045] Similarly, a column of sensing electrodes 205 is connected by a common vertical
wire 203. As an example, the leftmost column shown in Figure 2a includes sensing electrode
2051,1, sensing electrode 2052,1, and sensing electrode 205n,1. Sensing electrodes 2051,1, sensing
electrode 2052,1, and sensing electrode 205n,1 share a common vertical wire 2031. While
Figure 2a shows these three sensing electrodes in the leftmost column, any number of sensing
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electrodes may be present between sensing electrode 2052,1 and sensing electrode 205n,1, as
illustrated by the ellipses on the vertical wire 2031.
[0046] In general, any number of sensing electrodes 205 may be present in the CMOS
sensing chip 201. The sensing electrode in the upper left hand corner of Figure 2a is
denoted 2051,1 to indicate that the sensing electrode is in the first row and first column of the
matrix of sensing electrodes on the CMOS sensing chip 201. Similarly, the sensing electrode in
the lower right hand corner of Figure 2a is denoted 205n,n to indicate that that the sensing
electrode is in the nth row and nth column of the matrix of sensing electrodes 205 on the CMOS
sensing chip 201. Any number of rows and any number of columns may make up the matrix of
sensing electrodes 205 on the CMOS sensing chip 201. Note that the matrix shown in Figure 2a
is a matrix of sensing electrodes 205, which differs from the matrix of CMOS sensing chips 105
shown in Figure 1. Rather, each device 101, as shown in Figure 1, may comprise a matrix of
CMOS sensing chips 105. Further, each CMOS sensing chip, such as, for example, CMOS
sensing chip 201 as shown in Figure 2a, may comprise a matrix of sensing electrodes 205. In
this manner, a high density of sensing electrodes may be present on a single device.
[0047] The CMOS sensing chip 201 is shown further comprising the plurality of CMOS
signal drivers 206. Each of the horizontal wires 202 is connected to one of the CMOS signal
drivers 206. Each CMOS signal driver 206 is operable to receive, amplify, and transmit signals
via the horizontal wires 202. These signals may include sensed signals, actuation signals, and/or
digital select signals. In one embodiment, the CMOS sensing chip 201 is part of a matrix of
CMOS sensing chips and the CMOS signal drivers 206 are operable to receive signals from other
CMOS sensing chips or a processing chip, amplify the signals, and transmit the amplified
received signals to another CMOS sensing chip or the processing chip.
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[0048] The CMOS sensing chip 201 may further comprise sensing electronics 208 and
actuation electronics 209. The sensing electronics 208 are operable to transmit sensed signals
from the sensing electrodes 205 to the horizontal wires 202. The actuation electronics 209 are
operable to transmit actuation signals from the horizontal wires 202 to the sensing electrodes
205. In one embodiment, each sensing electrode 205 is connected to its own set of sensing
electronics 208 and actuation electronics 209. For example, Figure 2a depicts sensing electrode
2051,1 connected to its own set of sensing electronics 2081,1 and actuation electronics 2091,1. In
one embodiment, the sensing electronics 208 comprise a filter, a programmable gain amplifier,
and a line driver. In one embodiment, the actuation electronics 209 comprise a line driver.
[0049] The CMOS sensing chip 201 may further comprise a processing chip, of which
only the CMOS selection transistors 204 and the CMOS decoders 207 are shown. The
processing chip may be operable to receive sensed signals from and send actuation signals to the
sensing electrodes 205 via the horizontal wires 202. The processing chip may be operable to
control operation of the CMOS selection transistors 204 and the CMOS decoders 207.
Additionally, the processing chip may provide power to the sensing chip 201.
[0050] Each CMOS selection transistor 204 is shown connected to a respective
horizontal wire 202. As an example, CMOS selection transistor 2041 is shown connected to
horizontal wire 2021. Each CMOS selection transistor 204 is operable to select a row of sensing
electrodes 205 connected by the respective horizontal wire 202. As an example, CMOS
selection transistor 2041 is operable to select the row of sensing electrodes connected to
horizontal wire 2021 (including sensing electrode 2051,1 and sensing electrode 2051,n).
[0051] Similarly, each CMOS decoder 207 is shown connected to a respective vertical
wire 203. As an example, CMOS decoder 2071 is shown connected to vertical wire 2031. Each
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CMOS decoder 207 is operable to activate a column of sensing electrodes 205 connected by the
respective vertical wire 203 by controlling connection of the horizontal wire 202 to the vertical
wires 203. As an example, CMOS decoder 2071 is operable to activate the column of sensing
electrodes connected to vertical wire 2031 (including sensing electrode 2051,1, sensing electrode
2052,1, and sensing electrode 205n,1). When vertical wire 2031 is activated, the CMOS decoder
2071 controls connection of each of the sensing electrodes in the column connected to the
vertical wire 2031 (that is, 2051,1, 2052,1, and 205n,1) to its respective horizontal wire (that is,
2021, 2022, and 202n, respectively).
[0052] When a vertical wire 203 is activated, and a horizontal wire 202 is selected by a
CMOS selection transistor 204, either a sensed signal may be sent to, or an actuation signal may
be received from, the sensing electrode 205 located at the intersection of the horizontal wire 202
and the vertical wire 203. As an example, when vertical wire 2031 is activated, and horizontal
wire 2021 is selected by CMOS selection transistor 2041, either a sensed signal may be sent to, or
an actuation signal may be received from, the sensing electrode 2051,1.
[0053] In one embodiment, a CMOS decoder 207 may activate a column of sensing
electrodes 205. One or more CMOS selection transistors 204 may then select one or more rows
in response to receiving a digital select signal. In one embodiment, the CMOS selection
transistors 204 are controlled by a processing chip. The processing chip may transmit a digital
select signal to activate a CMOS selection transistor 204. This digital select signal may be, for
example, a voltage that is greater than the turn-on voltage of the CMOS selection transistor.
[0054] For example, the processing chip may transmit a digital select signal to turn on
CMOS selection transistor 2041. When the CMOS selection transistor 2041 is turned on, the
sensing electrodes 2051,1 – 2051,n connected to the horizontal wire 2021 are selected, and a sensed
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signal from one of the sensing electrodes is transmitted to the processing chip. In one
embodiment, the processing chip may determine which sensing electrode of the sensing
electrodes 2051,1 – 2051,n transmitted the sensed signal based on which vertical wire is activated.
The processing chip thus knows which vertical wire was activated (2031) as well as which
horizontal wire (2021) was selected and used to transmit the sensed signal. With this
information, the processing chip may determine that the sensed signal was sent from the sensing
electrode located at the intersection of horizontal wire 2021 and vertical wire 2031, namely
sensing electrode 2051,1.
[0055] Figure 2b depicts a side view of an example device for sensing and actuation.
The side view depicted in Figure 2b may be a side view of the CMOS sensing chip shown in
Figure 2a cut along the line A-A as shown in Figure 2a. Device 214 is shown comprising a
substrate 210, sensing electrodes 2111, 2112, and 2113, an insulating layer 212, and sensing
elements 2131, 2132, and 2133. The sensing electrodes 2111, 2112, and 2113 are shown embedded
in the substrate 210. The sensing electrodes 2111, 2112, and 2113, are part of one or more
sensing chips, such as CMOS sensing chip 201 depicted in Figure 2a.
[0056] Sensing elements 2131, 2132, and 2133 may be many types of sensing elements,
such as capacitive, bio-field, electrical, magnetic, or optical sensors. Each of the sensing
elements 2131, 2132, and 2133 is connected to one of sensing electrodes 2111, 2112, and 2113. For
example, Figure 2b shows sensing element 2131 connected to sensing electrode 2111. Sensing
electrode 2111 receives a sensed signal from sensing element 2131. In one embodiment, sensing
electrode 2111 transmits the sensed signal to a processing chip, such as processing chip 109
depicted in Figure 1. In one embodiment, the sensed signal may be processed by a sensing chip
before being transmitted to the processing chip.
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[0057] Similarly, the sensing electrodes 2111, 2112, and 2113 may receive actuation
signals from a processing chip and transmit the actuation signals to the sensing elements 2131,
2132, and 2133. For example, sensing electrode 2111 transmits an actuation signal to sensing
element 2131.
[0058] In some embodiments, the sensing elements 2131, 2132, and 2133 may be
capacitive sensors. In this example, there may be an insulating layer 212 between the sensing
electrodes 2111, 2112, and 2113 and the sensing elements 2131, 2132, and 2133. In other
embodiments, the insulating layer 212 may not be present.
[0059] Figure 3 depicts an example substrate 301 for use in a device for sensing and
actuation. The substrate 301 comprises a plurality of cavities 302. In one embodiment, CMOS
sensing chips, such as those shown in Figures 1 and 2, may be positioned on the substrate 301
within the cavities 302 of the substrate 301. In one embodiment, an array of horizontal and
vertical wires, such as those shown in Figures 1 and 2, may be included in the substrate 301. In
another embodiment, however, the array of horizontal wires and vertical wires may be printed
onto a flexible sheet. Such a flexible sheet is further described in connection with Figure 4.
[0060] Figure 4 depicts an example wiring scheme for use in a device for sensing and
actuation. Figure 4 shows a separate flexible sheet 401. The flexible sheet 401 includes an array
of horizontal wires 403 and vertical wires 404. The array of wires 403 and 404 may be printed
using a printer such as the Dimatix printer manufactured by FUJIFILM. This printer prints
material onto the flexible surface in much the same way an inkjet printer prints ink onto paper.
If such a printer is used, post-processing may be employed, such as mild heating or cooling to
ensure that the material congeals substantially homogenously.
[0061] The separate flexible sheet 401 is shown further including openings 402 through
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which CMOS sensing chips, such as those shown in Figures 1 and 2, may be positioned. In one
embodiment, the flexible sheet 401 may be attached to a substrate, such as that shown in
Figure 1, so that the openings align with CMOS sensing chips positioned on the substrate and
expose the CMOS sensing chips. In one embodiment, the separate flexible sheet 401 further
includes a processing chip, such as that described in Figure 1.
[0062] The flexible sheet 401 may be placed either on the top or the bottom of the
substrate. The CMOS sensing chips may be connected to the flexible sheet 401 using any
combination technique, such as bond wires and/or flip-chip bonding.
[0063] Figure 5 depicts an example processing chip 501 for use in a device for sensing
and actuation. The processing chip 501 is shown comprising an embedded processing/memory
502 and power management/harvesting 503. The processing chip 501 may also comprise CMOS
decoders and CMOS selection transistors as described above (not shown). The processing chip
501 is operable to provide power to a plurality of CMOS sensing chips, such as those shown in
Figure 1.
[0064] Additionally, the processing chip 501 is operable to receive signals from and send
signals to the matrix of CMOS sensing chips. The processing chip 501 may receive sensed
signals, and the processing chip 501 may send actuation signals and digital select signals. The
processing chip 501 may be manufactured in a standard CMOS process. The processing
chip 501 need not be manufactured in the same CMOS technology as the CMOS sensing chips.
[0065] The processing chip 501 may also comprise analog to digital converters
(ADCs) 5061 and 506n as well as digital to analog converters (DACs) 5071 and 507n. In one
embodiment, in a device such as that shown in Figure 1, the vertical wires carry analog signals
while the horizontal signals carry digital signals. In the processing chip 501 comprising ADCs
21
and DACs, the analog signals carried by the vertical wires may be converted back and forth
between analog and digital signals such that the vertical wires carry digital signals. In one
embodiment, there may be one ADC and one DAC for each vertical wire in an array of vertical
and horizontal wires on the device.
[0066] In some embodiments, the processing chip 501 further comprises interface
electronics 508 for interfacing to other components. These interface electronics 508 may enable
a connection that is either wired or wireless.
[0067] Figure 6 is a flow chart depicting example steps for sensing and actuating using a
matrix of sensing chips. It should be understood that the flowchart shows functionality and
operation of one possible implementation of present embodiments. In this regard, each block
may represent a module, a segment, or a portion of program code, which includes one or more
instructions executable by a processor for implementing specific logical functions or steps in the
process. The program code may be stored on any type of computer readable storage medium, for
example, such as a storage device including a disk or hard drive. In addition, each block may
represent circuitry that is wired to perform the specific logical functions in the process.
Alternative implementations are included within the scope of the example embodiments of the
present application in which functions may be executed out of order from that shown or
discussed, including substantially concurrent or in reverse order, depending on the functionality
involved, as would be understood by those reasonably skilled in the art.
[0068] Initially, at block 601, a processing chip provides power to a plurality of sensing
chips. The power is transmitted to each sensing chip on a path comprising horizontal wires,
vertical wires, and sensing chips. Each sensing chip comprises a plurality of CMOS selection
transistors, a plurality of CMOS decoders, and a plurality of sensing electrodes arranged in a
22
matrix of columns and rows along the horizontal and vertical wires.
[0069] At block 602, a CMOS decoder selectively activates a column of sensing
electrodes by sending an activation signal to the vertical wire corresponding to the column.
When the vertical wire is activated by a CMOS decoder, the activated vertical wire controls
connection of each sensing electrode in the column of sensing electrodes connected to the
vertical wire to its respective horizontal wire.
[0070] At block 603, one or more CMOS selection transistors receives a digital select
signal. The digital select signal may be received from the processing chip. In one embodiment,
the digital select signal is a voltage greater than the turn-on voltage of a particular CMOS
selection transistor. In one embodiment, such as that shown in Figure 1, each CMOS selection
transistor is connected to a horizontal wire, and connected to each horizontal wire is a row of
sensing electrodes. When the digital select signal is received by the one or more CMOS
selection transistors, one or more rows of sensing electrodes connected to one or more selected
horizontal wire may be selected. Thus one or more rows of sensing electrodes may be selected
according to the digital select signal. In another embodiment, the CMOS selection transistors
and wires may be positioned differently, such that providing the digital select signal to the
CMOS selection transistor activates a region, a column, or other defined area of the matrix of
sensing electrodes.
[0071] Some sensing electrodes will then be activated. A sensing electrode is said to be
activated if it lies on the intersection of an activated column and a selected row of sensing
electrodes.
[0072] At block 604, the sensed signals are transmitted from the activated sensing
electrodes to the processing chip via the horizontal wires. Each horizontal wire carries the
23
sensed signal from a respective sensing electrode on the activated column of sensing electrodes.
The sensed signals may be amplified during transmission between the sensing electrode and the
processing chip.
[0073] Block 605 may be performed either in addition to or instead of block 604. At
block 605, the actuation signals are transmitted from the processing chip to the sensing
electrodes in the row of sensing electrodes via the horizontal wires. Each horizontal wire carries
the actuation signal to a respective sensing electrode on the column of sensing electrodes. The
actuation signals are amplified during transmission between the processing chip and the sensing
electrode.
[0074] Both the sensed signals and the actuation signals may follow a path comprising
other CMOS sensing chips. The CMOS sensing chips are equipped with electronics to restore
and amplify the signals.
[0075] In one embodiment, the method depicted in Figure 6 is performed repeatedly.
The CMOS selection transistor may selectively activate subsequent columns of the matrix of
sensing electrodes in an iterative manner so as to generate a scan of the matrix.
[0076] Figure 7 is a flow chart depicting a method for sensing a matrix of sensing
electrodes. The dotted arrow between block 704 and 705 indicates that many steps similar to
those depicted in blocks 701-704 may be repeated for any desired number of times.
[0077] At block 701, a first column of sensing electrodes is activated. In one
embodiment, this may be the leftmost column of a matrix of sensing electrodes, such as that
depicted in Figure 1. In one embodiment, a first region of sensing electrodes may be activated.
The region may be one column. The region may also be multiple columns, every other row, or
another region such as the upper-left quarter of the matrix, or the middle third of the matrix, etc.

24
The layout of horizontal wires, vertical wires, and CMOS selection transistors may vary from
embodiment to embodiment, depending on which areas are to be isolated for receiving sensed
signals.
[0078] At block 702, sensed signals are received from the first column via the horizontal
wires. In some embodiments, the sensed signals are received by a processing chip. The
processing chip is able to discern which sensing electrode is transmitting the sensed signal by
determining which vertical wire is activated and which horizontal wire was used to transmit the
sensed signal. In some embodiments, the sensed signal is a magnitude, such as a capacitance or
a voltage. In other embodiments, the sensed signal may be a binary high/low signal.
[0079] At block 703, a second column of sensing electrodes is activated. Like the first
row, the second row may be multiple columns or may instead be a region of sensing electrodes in
the matrix. Again, the layout of horizontal wires, vertical wires, and CMOS selection transistors
may vary from embodiment to embodiment, depending on which areas are to be isolated for
receiving sensed signals.
[0080] At block 704, sensed signals are received from the second column. A processing
chip may once again be able to discern which sensing electrode is transmitting the sensed signal
by determining which vertical wire is activated and which horizontal wire was used to transmit
the sensed signal.
[0081] Between block 704 and block 705, many more columns or regions may be
activated and signals may be received from each of these columns or regions. In some
embodiments, the method continues until sensed signals have been received from each sensing
electrode in the matrix of sensing electrodes. The method may then be repeated. In one
embodiment, if sensed signals cannot be detected from a particular region of sensing electrodes,
25
then when the method is repeated this region of sensing electrodes is skipped. In some
embodiments, the number of sensing electrodes sensed may be larger than the number of sensing
electrodes actuated. Alternately, the number of sensing electrodes sensed may be smaller than
the number of sensing electrodes actuated.
[0082] At block 705, the method is ended. The method may then be repeated, either
immediately or at a later time. While the method depicted in Figure 7 describes the processing
chip receiving sensed signals from the sensing electrodes, the method may further include the
processing chip transmitting actuation signals to the sensing electrodes. In such an embodiment,
the processing chip may activate a column of sensing electrodes and then transmit an actuation
signal to one or more of the sensing electrodes in the column of sensing electrodes via the
horizontal wires. In some embodiments, a column of sensing electrodes may be activated,
sensed signals may be received from the row of sensing electrodes, and while the column of
sensing electrodes is still activated, actuation signals may be transmitted to the column of
sensing electrodes. Other combinations of sensing and actuation by row or region of sensing
electrodes are possible.
[0083] In the previously described embodiments, the processing chip has used a CMOS
decoder connected to a vertical wire to activate a column of sensing electrodes that are each
connected to the vertical wire and has discerned between the sensing electrodes by determining
which horizontal wire was selected by a CMOS selection transistor and then used transmit the
signal to or from the sensing electrode. In other embodiments, a CMOS decoder may be
connected to a horizontal wire and may be used to activate a row of sensing electrodes that are
each connected to the horizontal wire. In these embodiments, the processing chip may discern
between the sensing electrodes by determining which vertical wire was used to transmit to or
26
from the sensing electrode. Other embodiments are possible as well.
[0084] The present disclosure is not to be limited in terms of the particular embodiments
described in this application, which are intended as illustrations of various aspects. Many
modifications and variations can be made without departing from its spirit and scope, as will be
apparent to those skilled in the art. Functionally equivalent methods and apparatuses within the
scope of the disclosure, in addition to those enumerated herein, will be apparent to those skilled
in the art from the foregoing descriptions. Such modifications and variations are intended to fall
within the scope of the appended claims. The present disclosure is to be limited only by the
terms of the appended claims, along with the full scope of equivalents to which such claims are
entitled. It is to be understood that this disclosure is not limited to particular methods, reagents,
compounds compositions or biological systems, which can, of course, vary. It is also to be
understood that the terminology used herein is for the purpose of describing particular
embodiments only, and is not intended to be limiting.
[0085] With respect to the use of substantially any plural and/or singular terms herein,
those having skill in the art can translate from the plural to the singular and/or from the singular
to the plural as is appropriate to the context and/or application. The various singular/plural
permutations may be expressly set forth herein for sake of clarity.
[0086] It will be understood by those within the art that, in general, terms used herein,
and especially in the appended claims (e.g., bodies of the appended claims) are generally
intended as “open” terms (e.g., the term “including” should be interpreted as “including but not
limited to,” the term “having” should be interpreted as “having at least,” the term “includes”
should be interpreted as “includes but is not limited to,” etc.). It will be further understood by
those within the art that if a specific number of an introduced claim recitation is intended, such
27
an intent will be explicitly recited in the claim, and in the absence of such recitation no such
intent is present. For example, as an aid to understanding, the following appended claims may
contain usage of the introductory phrases "at least one" and "one or more" to introduce claim
recitations. However, the use of such phrases should not be construed to imply that the
introduction of a claim recitation by the indefinite articles "a" or "an" limits any particular claim
containing such introduced claim recitation to embodiments containing only one such recitation,
even when the same claim includes the introductory phrases "one or more" or "at least one" and
indefinite articles such as "a" or "an" (e.g., “a” and/or “an” should be interpreted to mean “at
least one” or “one or more”); the same holds true for the use of definite articles used to introduce
claim recitations. In addition, even if a specific number of an introduced claim recitation is
explicitly recited, those skilled in the art will recognize that such recitation should be interpreted
to mean at least the recited number (e.g., the bare recitation of "two recitations," without other
modifiers, means at least two recitations, or two or more recitations). Furthermore, in those
instances where a convention analogous to “at least one of A, B, and C, etc.” is used, in general
such a construction is intended in the sense one having skill in the art would understand the
convention (e.g., “ a system having at least one of A, B, and C” would include but not be limited
to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C
together, and/or A, B, and C together, etc.). In those instances where a convention analogous to
“at least one of A, B, or C, etc.” is used, in general such a construction is intended in the sense
one having skill in the art would understand the convention (e.g., “ a system having at least one
of A, B, or C” would include but not be limited to systems that have A alone, B alone, C alone,
A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). It will
be further understood by those within the art that virtually any disjunctive word and/or phrase
28
presenting two or more alternative terms, whether in the description, claims, or drawings, should
be understood to contemplate the possibilities of including one of the terms, either of the terms,
or both terms. For example, the phrase “A or B” will be understood to include the possibilities
of “A” or “B” or “A and B.”
[0087] In addition, where features or aspects of the disclosure are described in terms of
Markush groups, those skilled in the art will recognize that the disclosure is also thereby
described in terms of any individual member or subgroup of members of the Markush group.
[0088] As will be understood by one skilled in the art, for any and all purposes, such as in
terms of providing a written description, all ranges disclosed herein also encompass any and all
possible subranges and combinations of subranges thereof. Any listed range can be easily
recognized as sufficiently describing and enabling the same range being broken down into at least
equal halves, thirds, quarters, fifths, tenths, etc. As a non-limiting example, each range discussed
herein can be readily broken down into a lower third, middle third and upper third, etc. As will
also be understood by one skilled in the art all language such as “up to,” “at least,” “greater than,”
“less than,” and the like include the number recited and refer to ranges which can be subsequently
broken down into subranges as discussed above. Finally, as will be understood by one skilled in
the art, a range includes each individual member. Thus, for example, a group having 1-3 cells
refers to groups having 1, 2, or 3 cells. Similarly, a group having 1-5 cells refers to groups having
1, 2, 3, 4, or 5 cells, and so forth.
[0089] While various aspects and embodiments have been disclosed herein, other aspects
and embodiments will be apparent to those skilled in the art. The various aspects and
embodiments disclosed herein are for purposes of illustration and are not intended to be limiting,
with the true scope and spirit being indicated by the following claims.
29

CLAIMS

1. A device comprising:
a flexible substrate that includes an array of horizontal and vertical wires;
a plurality of complementary-metal-oxide-semiconductor (CMOS) sensing chips, each
CMOS sensing chip comprising a plurality of sensing electrodes, each sensing electrode being connected to a sensing element and operable to receive sensed signals from and send actuation signals to the sensing element, wherein each sensing electrode is positioned on the flexible substrate at a given intersection of the horizontal and vertical wires to form rows and columns of sensing electrodes, wherein a row of sensing electrodes is connected by a common horizontal wire and a column of sensing electrodes is connected by a common vertical wire;
a plurality of CMOS decoders, each CMOS decoder being connected to a respective
vertical wire and operable to activate the column of sensing electrodes connected by the
respective vertical wire by controlling connection of each of the sensing electrodes to the
horizontal wire on which the sensing electrode is positioned;
a plurality of CMOS selection transistors, each CMOS selection transistor being
connected to a respective horizontal wire and operable to select the row of sensing electrodes connected by the respective horizontal wire;
a plurality of CMOS signal drivers, each of the horizontal and vertical wires being
connected to one of the CMOS signal drivers, and each CMOS signal driver being operable to amplify signals transmitted between adjacent CMOS sensing chips via the horizontal and vertical wires; and
a processing chip operable to receive sensed signals from and send actuation signals to
the sensing electrodes via the horizontal wires, and the processing chip being further operable to control operation of the CMOS selection transistors, wherein the processing chip provides power to each CMOS sensing chip.

2. The device of claim 1, wherein the plurality of CMOS sensing chips are
positioned on the flexible substrate within cavities of the flexible substrate.

3. The device of claim 1, wherein the array of horizontal and vertical wires is printed
on a separate flexible sheet, the separate flexible sheet being attached to the flexible substrate and including openings through which the CMOS sensing chips are positioned.

4. The device of claim 1, wherein the CMOS sensing chips are further operable to
process the received sensed signals and to transmit the processed received sensed signals to the processing chip via the horizontal wires.

5. A complementary-metal-oxide-semiconductor (CMOS) sensing chip comprising:
on a first plane: an array of horizontal and vertical wires; and on a second plane:
a plurality of CMOS sensing electrodes, each sensing electrode being connected to a
sensing element and operable to receive sensed signals from and send actuation signals to the sensing element, wherein each sensing electrode is positioned at a given intersection of the horizontal and vertical wires to form rows and columns of sensing electrodes, and wherein a row of sensing electrodes is connected by a common horizontal wire and a column of sensing electrodes is connected by a common vertical wire;
a plurality of CMOS signal drivers, each of the horizontal and vertical wires being
connected to one of the CMOS signal drivers, each CMOS signal driver being operable to
receive, amplify, and transmit signals via the horizontal and vertical wires, wherein the signals comprise sensed signals and actuation signals;
wherein each vertical wire is connected to a CMOS decoder that is operable to activate
the column of sensing electrodes connected by the vertical wire by controlling connection of each sensing electrode to the horizontal wire on which the sensing electrode is positioned, and
wherein each horizontal wire is connected to a CMOS selection transistor that is operable to select the row of sensing electrodes connected by the horizontal wire; and
a processing chip operable to receive sensed signals from and send actuation signals to
the sensing electrodes via the vertical wires or horizontal wires, and to control operation of the CMOS selection transistors, wherein the processing chip provides power to the rest of the chip.

6. The sensing chip of claim 5, further comprising:
sensing electronics operable to transmit sensed signals from the sensing electrodes to the
horizontal wires; and
actuation electronics operable to transmit actuation signals from the horizontal wires to
the sensing electrodes.

7. The sensing chip of claim 12, wherein the sensed signals and actuation signals are
transmitted between the processing chip and the sensing electrodes, and wherein the signals received, amplified, and transmitted by the CMOS signal drivers further comprise digital select signals transmitted from the processing chip.

8. A method comprising:
a processing chip providing power to a plurality of sensing chips, wherein the power is
transmitted to each sensing chip on a path comprising horizontal wires, vertical wires, and sensing chips, and wherein each sensing chip comprises a plurality of complementary-metaloxide-semiconductor (CMOS) selection transistors and a plurality of sensing electrodes arranged in a matrix of columns and rows along the horizontal wires and vertical wires;
a CMOS decoder activating a column of sensing electrodes;
one or more CMOS selection transistors receiving a digital select signal;
the one or more CMOS selection transistors selecting one or more rows of sensing
electrodes according to the digital select signal, wherein each of the sensing electrodes that lies at the intersection of the activated column and a selected row is operable to receive sensed signals from and send actuation signals to a respective sensing element;
transmitting the sensed signals to the processing chip via the selected horizontal wires,
wherein each horizontal wire carries the sensed signal from a respective sensing electrode on the activated column of sensing electrodes, and wherein the sensed signals are amplified during transmission between the sensing electrode and the processing chip.

9. The method of claim 18, further comprising:
transmitting the actuation signals from the processing chip to the sensing electrodes in the
activated column of sensing electrodes via the horizontal wires, wherein each horizontal wire carries the actuation signal to a respective sensing electrode on the activated column of sensing electrodes, and wherein the actuation signals are amplified during transmission between the processing chip and the sensing electrode.

10. The method of claim 18, further comprising the one or more CMOS selection
transistors selectively activating subsequent rows of the matrix of sensing electrodes in an
iterative manner so as to generate a scan of the matrix.