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"Thermal Processor For Semiconductor Wafers"
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"Thermal Processor For Semiconductor Wafers"
General Electric Company
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"Thermal Processor For Semiconductor Wafers"
Abstract: NA
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Patent Information
Application #
Filing Date
28 August 1997
Publication Number
36/2016
Publication Type
INA
Invention Field
ELECTRICAL
Status
Withdrawn
Email
Parent Application
Applicants
Country: U.S.A.
GENERAL ELECTRIC COMPANY
1 RIVER ROAD, SCHENECTADY, STATE OF NEW YORK 12345 U.S.A.
Inventors
Country: U.S.A.
1. MARIO GHEZZO
404 SCHAUBER ROAD, BALLSTON LAKE, NEW YORK 12019, U.S.A.
Country: U.S.A.
2. TIMOTHY DIETRICH PAGE
844 WEST SAINT CLAIR #204, CLEVELAND, OHIO 44113, U.S.A.
Country: U.S.A.
3. THOMAS BERT GOREZYCA
3059 NEW WILLIAMSBURG DRIVE, SCHENECTADY, NEW YORK 12303, U.S.A.
Country: U.S.A.
4. ROLF SVERRE BERGMAN
3236 BERKELEY ROAD, CLEVELAND HEIGHTS, OHIO 44118, U.S.A.
Country: U.S.A.
5. HIMANSHU BACHUBHAI VAKIL
15 WASHINGTON AVENUE, SCHENECTADY, NEW YORK 12305, U.S.A.
Country: U.S.A.
6. CHARLES SAMEUL HUEY
9693 MARTINIQUE DRIVE, CONCORD, OHIO 44094, U.S.A.
Country: U.S.A.
7. SETH DAVID SILVERSTEIN
1105 ADAMS ROAD, SCHENECTADY, NEW YORK 12308, U.S.A.
Specification
NA
Documents
Application Documents
#
Name
Date
1
2453-del-1997-form-1.pdf
2011-08-21