Technical field

[0001]

The present invention provides a 3-axis magnetic sensor used like the azimuth sensor, by implementing a three-dimensional magnetic field sensor having a three-way magnetic detection function of the X-axis Y-axis Z-axis direction on one substrate, a magnetic sensor in high sensitivity state, maintaining the basic performance such as low noise, wide measurement range, by reducing the height of the three-dimensional magnetic field sensor, to a three-dimensional magnetic field detection apparatus having a reduced cross-sectional area size.

BACKGROUND

[0002]

　3-axis magnetic sensor is for X-axis, a combination of the three magnetic sensor element and the integrated circuit of the Y-axis and Z-axis to measure the geomagnetism vector, calculates the azimuth from that value. Electronic compass, smart phones, tablet, Internet TV remote control, motion games, and motion capture, acceleration sensors have been widely used as a three-dimensional compass in combination with the vibration type gyro sensor.
Recently, even higher sensitivity of these devices, noise reduction, size reduction along with a wide range of measurement range, thinner is strongly demanded. Particularly with the thinner smart phones, the azimuth sensor height 0.6mm and 40% thinner from conventional 1.0 mm, size of conventional 2.0mm angle 1.5mm angle and more than 50% miniaturization is required. Also with respect to noise, 1 mG of the following conventional 10mG less and 10 times the performance improvement has been demanded.

[0003]

The direction sensor is a Hall element as the magnetic field detection element, MR element, MI (abbreviation of Magneto-Impedance) elements and GSR (GHz-Spin-Rotation Abbreviation) element or the like is used.
Usually, X-axis, Y-axis and Z-axis of the magnetic field vector components Hx, Hy, in order to measure the intensity of Hz, X-axis elements, is performed using three elements of the Y-axis element and the Z-axis element. If the Hall element, and detects a magnetic field in the element plane and the vertical direction, the Z-axis elements are arranged on the surface, it is necessary to assemble upright X-axis device, a Y-axis element on the sensor substrate. On the other hand, since such an MR element or MI element detects a magnetic field parallel to the element surface, X-axis element and a Y-axis element sets a Z-axis elements in the sensor substrate (Z-axis direction) and arranged on the surface, you need to assemble there is. As long as the use by assembling three elements, there is a problem that the height of the sensor is increased. For example, 3-axis magnetic sensor prefabricated discloses using MI sensor in Patent Document 1.
Note that the noise is large for the Hall element, since it is difficult to achieve performance improvement was to squeeze following MI element, the GSR device.

[0004]

　For this problem, Patent Document 2, one of the three-dimensional magnetic sensor on the substrate by placing the X-axis element and the Y-axis element integral with the Z-axis element function is disclosed.
Respectively in the X-axis direction and the Y-axis direction on the substrate surface is obtained by placing the permalloy mandrel a pair of X1-axis element and the X2-axis element and the Y1-axis element and the Y2-axis element at its center point lower arranged in a cross shape.
The three-dimensional magnetic sensor is a three-dimensional magnetic field vector, first magnetic field in the X-axis direction is detected by adding the output of the X1 axis element and the X2-axis element, the magnetic field in the Y-axis direction and the Y1 axis element Y2 detected by adding the output of the shaft element, further magnetic field in the Z-axis direction generates a deflection component in the planar direction of the Z-axis direction magnetic field by permalloy mandrel, the difference between the outputs of which the X1-axis element and the X2-axis element When it is intended to detect by adding the difference between the outputs of the Y1-axis element and the Y2-axis element.
　However, the force deflecting the Z-axis direction magnetic field by permalloy mandrel in a planar direction is very weak. Therefore long require a large Permalloy diameter, the thickness of the three-dimensional magnetic sensor was required practical than 0.5 mm.

[0005]

　Therefore, in Patent Document 3 that further improve the size MI element type, the two ends of the MI element, provided with a soft magnetic material in the lower part the other with one providing the upper soft magnetic body, the two soft magnetic material effectively detectable 3-dimensional magnetic field detection element is disclosed a magnetic field in the Z-axis direction to form a crank-shaped magnetic circuit with the element and.
　Four MI elements on a substrate plane, two arranged in the X-axis direction about the origin of the substrate, two placed on the Y-axis intersecting the X-axis, further the lower substrate of the origin and four MI by arranging the upper on the soft magnetic material of the end portion of the origin and the opposite side of the MI element of the device, and forms a magnetic circuit comprising a magnetic field detection element and the soft magnetic body. Thus the width 0.7 mm, length 0.7 mm, a three-dimensional magnetic field detection element having a thickness of 0.3mm is obtained.

[0006]

　However, recent azimuth sensor wearable computer, etc. to further miniaturization in order to be used the tip of the guide wire of medical catheters, thinning is required.
　Also, determine the X-axis magnetic field component and Y-axis magnetic field component by adding the measured values from the left and right of the magnetic field detecting element, so obtaining a Z-axis magnetic field component by subtracting the left and right of the magnetic field detection element is the same for the same direction the value must be the same value of opposite polarity relative to the opposite direction magnetic field, the symmetry of the structure is very important. A slight difference between the two as made with a high degree of accuracy is also a major problem.

CITATION

Patent Document

[0007]

Patent Document 1: WO2005 / 008 268
Patent Document 2: WO2010 / 110456
Patent Document 3: JP 2014-153309

Summary of the Invention

Problems that the Invention is to Solve

[0008]

　The present invention is, in view of the above technical background, focusing on the GSR sensors recently developed,
the arrangement of the magnetic field detecting element on the substrate surface, the arrangement of the current magnetic field structure and the soft magnetic body in the Z-axis direction magnetic field results of examining the magnitude of the time 3-dimensional magnetic field detecting element to improve magnetic field detection power consider has been made.

Means for Solving the Problems

[0009]

　The present inventor has studied a further reduction in the size of the three-dimensional magnetic field sensor described in Patent Document 3, by changing the four magnetic detecting element to the three magnetic sensing element, another in the center point of the measurement origin perpendicular to 3 first axially axially a first axial magnetic field measured by the two elements 12 and the element 13, the second axially arranged one element 14 to the origin position of the second axial the magnetic field was measured and the third axis direction to measure the magnetic field of the third axial direction to form a two crank-shaped magnetic circuit into two elements and three point symmetry in combination with soft magnetic material in the first axial direction It devised a structure.

[0010]

　X-axis magnetic field Hx was determined from the mean value of the measured value of the element 12 and the element 13. Field Hy in the Y-axis direction was determined from measurements of element 14. Field Hz in the Z-axis direction was determined from the average value of the difference between the measured value of the element 12 and the element 13. In order to realize miniaturization, based on the sensitivity of the element 14, element 12 and the element 13 as the sensitivity of the total output of the two elements is the same as element 14, it small element 12 and the element 13 length adopted elements was reduced length in the longitudinal direction. Further, by shortening the length of the element 12 and the element 13, the detection sensitivity in the Z-axis direction to match the sensitivity of the element 14 by adjusting the size of the smaller magnetic resistance of the magnetic circuit and the soft magnetic material It could be smaller at the same time the thickness direction size.
Better adopted GSR device by shortening the length of the elements of the sensitivity, it was possible to reduce the size of the entire device.

Effect of the invention

[0011]

　The present invention, high sensitivity by using a GSR device, low noise, further downsizing of the size of the three-dimensional magnetic field detection element to maintain the basic performance such as a wide measurement range, can be made thinner. Further, less expensive due to a decrease in the number of magnetic field detecting elements. Furthermore, it reduced 3-dimensional magnetic field detection device can be thinned.

BRIEF DESCRIPTION OF THE DRAWINGS

[0012]

It is a plan view of a three-dimensional magnetic field sensor according to [1] Example 1.
It is a sectional view taken along the line A-A 'in FIG. 2 a plan view of a three-dimensional magnetic field detecting device according to Example 1 (FIG. 1).
3 is a conceptual diagram of a plane showing the basic structure of the GSR device according to Example 1.
It is a conceptual diagram showing a crank-shaped magnetic circuit according to FIG. 4 Example 1.
Is an electronic circuit diagram of the magnetic field detecting element according to [5] Example 1.
6 is an electronic circuit diagram of a three-dimensional magnetic field sensor according to the first embodiment.
7 is a sectional view taken along the line B-B 'in plan view of a three-dimensional magnetic field detecting device according to Example 2 (FIG. 1).

DESCRIPTION OF THE INVENTION

[0013]

3D magnetic field detecting element of the present invention comprises a magnetic field perpendicular to the magnetic field detection element and the substrate surface to detect the magnetic field of a direction parallel to the substrate plane of a soft magnetic material for magnetic flux collector-Ho磁, measurement of the magnetic field on the substrate surface the center point as the origin of, at its origin, the first axis direction on the substrate surface, the three-axis is crossed consisting third axis direction perpendicular to the second axis direction and the substrate surface which is perpendicular to the first axis direction , the magnetic field detection element, arranged one magnetic field detection element on the first axis in the direction of two magnetic field detection element and the second axial direction about the origin to each point symmetry at the substrate, and soft magnetic material becomes disposed on the lower end opposite to the origin of two of the magnetic field detecting element of the upper pre said first axial origin, keep first axial two magnetic field detecting elements and forming a magnetic circuit consisting of three soft magnetic bodies when.

[0014]

3D magnetic field detection element is composed of three magnetic field detection element and three soft magnetic material to detect a magnetic field parallel to the substrate plane direction.
Magnetic field detecting element, the electrode pad for bonding the amorphous wire is sensitive member, a detection coil circling the amorphous wire, both ends of the terminals of the amorphous wire and the detection coil, the terminals and their terminals and external of the integrated circuit at both ends and and a wiring between the terminal and the electrode.

[0015]

The diameter of the amorphous wire is 15μm or less, preferably 10μm or less. Its outer periphery is preferably covered, for example, a glass coated with an insulating material. It is easy to insulation between the amorphous wire and the detection coil, also it is possible to diameter of the coil inner diameter to reduce the gap.
Detection coil, the coil inner diameter is preferably at 30μm or less is 20μm or less. It will improve the sensitivity by decreasing the coil inner diameter. Coil pitch is preferably at 5μm or less is 3μm or less. Thus the unit can be achieved an increase in the number of coil turns per length,
increased sensitivity can be made small by shortening the turn magnetic field detecting element.

[0016]

　Arrangement of the three magnetic field detection element on the substrate surface is performed as follows.
　On the substrate surface, the center point of the measurement of the substrate surface and the magnetic field parallel and origin. The first axis direction on the substrate surface passing through the origin (X axis direction), a second axis direction perpendicular to the first axis direction (X axis direction) (Y-axis direction) and perpendicular to the direction perpendicular to the substrate surface 3 axes of the third axis direction (Z axis direction) (X-axis, Y-axis and Z-axis) are crossed to.
　The length direction of the substrate as X-axis, around the origin placing a magnetic field detection element 12 and the magnetic field detecting element 13 in point symmetry. The width direction Y-axis, and around the origin placing a magnetic field detecting element 14 in point symmetry.
　Further, Y-axis direction of the magnetic field detection element 1 Tsutoshi a result of arranged point symmetrically, the width direction of the size of the three-dimensional magnetic field detection element can be reduced to about 1/3.

[0017]

Soft body element 12 and the element 13 disposed on the substrate and form a two crank-shaped magnetic circuit, and magnetism collecting the magnetic flux in the Z-axis direction and both sides passed it to elements inside the magnetic wire by Ho磁of a soft magnetic material, it is intended to be able to detect the intensity of the magnetic field in the Z axis direction. However, as long as by the soft magnetic member can be a magnetic circuit formation, the material of the soft magnetic material, form is not limited. Soft magnetic material is, the more high magnetic permeability, preferably greater magnetism collecting effect of the magnetic field. The shape of the soft magnetic material is preferably a shape that can effectively magnetized by the magnetic field in the Z-axis direction by reducing the demagnetizing factor.
The diameter D of the consideration of the soft magnetic material manufacturability (in the case of elliptical and diameter equivalent diameter.) The aspect ratio is determined by the height H with respect to (H / D) is 1 or less.
Incidentally, as long as it is capable of detecting a magnetic field in the Z-axis direction to form a magnetic circuit described above, one soft magnetic material of the top origin disposed below the origin, the lower end of the origin and the opposite it is also possible to two soft magnetic material that is placed on top.

[0018]

　Arrangement of soft magnetic material is preferably when placed in effectively formed easily position the magnetic circuit.
　For example, so as to reduce a magnetic circuit resistance as close as possible and the pole faces of the soft magnetic amorphous wire ends. The size of the soft magnetic material is represented by the cross-sectional area and thickness, there is a relative relationship to the length and diameter of the magnetic field detecting element, it is preferable that the magnetic field detection element increasing the thickness of the longer soft magnetic material.

[0019]

　As long as consistent with the purpose of the present invention, the arrangement of the X-axis element and the Y-axis device or soft magnetic material is preferably both axes at right angles, if you have deviated angle from a right angle that the output of the magnetic field detecting element it can be processed by making appropriate correction calculation in accordance with the angular deviation.

[0020]

Also, three-dimensional magnetic field detecting element of the present invention, the two being disposed below the end of the magnetic field detecting element of the first axial soft magnetic material of the processed end face being machined at right angles to the substrate surface characterized in that located on the surface.

[0021]

A substrate comprising a soft magnetic material at the end of the X-axis direction of the magnetic field detecting element in the lengthwise direction, by processing downwardly with respect to the substrate surface, the end portion containing no magnetic field detection element is removed
soft magnetic material is on the surface of the processed end face. This makes it possible to shorten the length of the three-dimensional magnetic field sensor. Incidentally, it is possible to increase the cross-sectional area of soft magnetic material since the about half of the magnetic material is removed leads to a decrease in magnetism collecting function. Effects on shortening the length of the three-dimensional magnetic field sensor by the elliptical shape to increase the width direction in this case is small.

[0022]

Also, three-dimensional magnetic field detecting element of the present invention, the length of 0.6mm or less, characterized by comprising the widths 0.3mm or less and thickness 0.15mm or less.

[0023]

This not only meets the expectations of the phone or wearable computers, it is possible to built example the tip of a medical catheter guide cable.

[0024]

Furthermore, 3-dimensional magnetic field detection device of the present invention is characterized that it is joined to the magnetic field detection element and the integrated circuit chip of the present invention.

[0025]

3D magnetic field detection device of the present invention, detects the magnetic field of the three axes by forming a magnetic circuit according to the Z-axis direction X-axis element is placed on a substrate a magnetic field of the Y-axis element and the X-axis element and the soft magnetic material it is intended to achieve an overall reduction in size or thinned to further bond the integrated circuit chip in addition to reduce the size and thickness of the magnetic field detecting element.
That is, the junction between the 3-dimensional magnetic field detecting element of the present invention and the integrated circuit can also be conducted by using a wire bonding, extra area and height for wire bonding is required. So to electrically joined together by a three-dimensional magnetic field detection element by laminating the integrated circuit pad bonding is desirable in order to promote a more overall downsizing or thinning.
Example

[0026]

　Explaining the embodiments given below with reference to the drawings.
[Example 1]
　The three-dimensional magnetic field detecting device 1 according to the first embodiment shown in FIG. Figure 1 is a plan view of a three-dimensional magnetic field detection element, FIG. 2 is a sectional view taken along the line A-A 'shown in FIG. Figure 3 is a plan view showing the basic structure of the GSR device.

[0027]

　3D magnetic field detection element 1 is comprised of three soft magnetic material 21, 22 having three GSR element 3 and the magnetism collecting-Ho磁function capable of detecting a minute magnetic field, such as geomagnetism.
　That is, two of the GSR device is X1 element 12 and X2 element 13 in the X-axis on the substrate surface, one is a Y element 14 in the Y-axis. X, Y, and Z axes are orthogonal to each other at the origin, X1 element 12 and X2 element 13 is in point symmetry about the origin, Y element 14 symmetrically about the origin, one It is in.
　One soft magnetic material 22 (corresponding to the top of the Y elements 14.) The top of the Home button shape is formed, the two soft magnetic material 22 element X1 and the element X2 is a longitudinal direction of both outer edges of the substrate 11 It is formed in a button shape in the substrate 11 at each end of the.

[0028]

　The basic structure of the GSR device 3 (hereinafter, referred to as the structure of the device.) To be described with reference to FIG.
　Structure of three elements 3 are at a diameter 10 [mu] m, the amorphous wire element 12 and the element 13 length 120μm for X-axis (hereinafter, wires referred.) Using a device 14 for the Y-axis length 200μm wire It is used. Place the wire 31 in the center, the inner diameter 20μm its periphery, a coil pitch 3 [mu] m, the number of turns 30 times of the detection coil respectively at both ends wire (hereinafter, the coil referred.) 32 was placed, further wire 31 detection coil 32 use terminal 33, terminal 35 is mounted coils. Wire electrode pad 34 from the wire terminal 33, with each coil electrode pad 36 from the detection coil terminal 35 corresponds to the integrated circuit terminals (not shown). The respective terminals of the respective terminals and the integrated circuit of each element 3 are electrically bonded with the electrode pads.

[0029]

　It will be described soft magnetic material 21, 22.
　Soft magnetic body 21 and the element 14 at the top of the origin of the substrate 11 is formed on the sides of the insulating coating, the diameter 30 [mu] m as an axis the Z axis, like button thickness 30 [mu] m. Its composition is a permalloy formed by plating of 45at% Ni-Fe.
　Soft magnetic material 22, the major diameter 80 [mu] m, a hole depth 40μm at elliptic minor 40μm provided on the substrate 11, in which embedded permalloy of 45at% -Fe composition there in plating element 12 and It is insulated from the element 13.
　Note that the soft magnetic material 21, 22, pure Ni, pure iron, permalloy other compositions, Sendust, it is possible to use known soft magnetic material permendule etc., also forming method using sputtering or the like it can.

[0030]

　In this embodiment, two crank-shaped magnetic circuit in the X-axis direction of the substrate 1 is formed. One is composed of a soft magnetic material 21 of the upper portion of the soft magnetic body 22 and the origin of the left arranged in the lower portion of the end portion and the X1 element 12 on the left side which is disposed on the substrate 1. Other one is composed of the right side of the soft magnetic body 22 and the origin of the upper part of the soft magnetic body 21 disposed in the lower part of its ends on the right side of the X2 element 13.
　These two crank-shaped magnetic circuit by being formed by the origin symmetrical, it is possible to effectively detect the intensity of the magnetic field in the Z axis direction.

[0031]

　The function of the crank-shaped magnetic circuit, will be described with reference to FIG. 2 (a cross-sectional view of line A-A 'in FIG. 1).
　Field Hz in the Z-axis direction magnetizes the soft magnetic body 22 at the ends of the X1 element 12 and the X2 element 13. When the lower surface of the magnetic poles of the soft magnetic body 22 to the S pole, the magnetic pole of the upper surface of the soft magnetic body 21 at the top of the origin has become a N pole, a crank-shaped magnetic circuit via the wire 31 of the element in between 4 to form. At this time, the wire 31 will flow strong magnetic field that is proportional to the magnetic field Hz in the Z-axis direction. It is possible to obtain an effectively large output by the formation of the magnetic circuit, the thickness of the soft magnetic body 21 at the top of the origin can be as thin as 0.03 mm. As a result, the height 16 of the three-dimensional magnetic field detection element 1 can be 0.13 mm.

[0032]

　The output of the three GSR element is measured individually, Hx1 the strength of the magnetic field of the X1 element 12 and the X2 element 13, and Hx2, type when the strength of the magnetic field of the Y elements 14 and Hy1 (1), the formula ( 2) and is processing by equation (3), X, Y, and Z axes of the magnetic field strength Hx, Hy and Hz are calculated. Incidentally, K of the formula (3) is a coefficient.
　= Hx
　(Hx1 + Hx2)
　(1) Hy = Hy1 (2) Hz = K (Hx1-Hx2) (3)

[0033]

　The strength of the magnetic field in the X-axis direction can be determined from the sum of both of the output of the X1 element 12 and X2 element 13. This forms a symmetrically magnetic circuit to the magnetic field component in the X-axis direction, with its magnitude is proportional to the intensity of the X-axis direction value, the sign is due to the same sign.
　The strength of the magnetic field in the Y-axis direction, it becomes a strength of the Y-axis direction since it is one output of the Y elements 14.

[0034]

　The strength of the magnetic field in the Z-axis direction can be determined from the difference between the outputs of both the X1 element 12 and X2 element 13. This, X1 element 12 and X2 element 13 forms a magnetic circuit 6 of the antisymmetric manner crank-shaped, the output of both elements, symbols proportional to the intensity of the magnetic field in the Z axis direction is the opposite According to it.

[0035]

　The electronic circuit of the three-dimensional magnetic field sensor used in this embodiment will be described with reference to FIGS.
　First, it will be described with reference to FIG. 5 the basic operation of the electronic times 5A of GSR sensors.
Electronic circuit 5A has a pulse transmission circuit (pulse generator) 51 and the signal processing circuit 52. The signal processing circuit 52, a buffer circuit 53, the detection timing adjusting circuit 54, consisting of an electronic switch 55, sample-and-hold circuit 56 and amplifier 57. Supplying a high frequency pulse current of 2GHz equivalent generated by the pulse oscillation circuit 51 to the wire 31 of the GSR device 2. Then, it acts with the magnetic field and the external magnetic field generated on the surface of the wire 31 by the pulse current, voltage corresponding to the external magnetic field is generated in the coil 32. The pulse frequency referred to herein is the inverse for convenience defined pulse frequency four times the "fall" time Δt of the pulse current as the cycle.

[0036]

　The output voltage of the coil 32 is inputted to the buffer circuit 53. The output voltage of the buffer circuit 53, the detection timing adjusting circuit 54, at a predetermined timing from the fall of the pulse current, a short time switches the electronic switch 55 - as a capacitor voltage of the sample-and-hold circuit 56 by (On Off) is held, the sampling voltage is outputted after being amplified by the amplifier 57.

[0037]

　Next, the function of the electronic circuit 5B of the present embodiment will be described with reference to FIG. 6 having three GSR element 3.
　The electronic circuit. 5B, the pulse oscillator circuit (pulse generator) 51, and a signal processing circuit 51 and digital circuitry 58. Pulse oscillation circuit (pulse generator) 51 is one, the signal processing circuit 52 comprises three to know measure the output of each element at the same time. The output from the three GSR elements (X1, X2 and Y1) enters the digital circuit 58, after being converted into digital data by the AD converter 582 sequentially using the changeover switch 581 is transferred to the arithmetic circuit 583, suitably arithmetic processing is performed Do. Where it is converted to the intensity of the three-dimensional vector. Then transferred via the central processing unit to the data communication circuit 584 that controls the system such as smartphones.

[0038]

　The size of the rectangular three-dimensional magnetic field detector according to this embodiment, the length 540Myuemu, width 250 [mu] m, a thickness of 120μm include the thickness of the upper portion of the soft magnetic material origin. This is about 1/4 of the size for the four magnetic field detection element and three 3-dimensional magnetic field detection element made of a soft magnetic material in a square shape.

[0039]

Example 2
a cross-sectional view of a three-dimensional magnetic field detecting device according to Example 2 shown in FIG.
3D magnetic field detecting element of the present embodiment, both end portions cutting and machining along the line B-B 'of Example 1 in the three-dimensional magnetic field detection element 1 (FIG. 1), in Figure 1 the state of the cut surface It shows a sectional view along line a-a 'shown in. Incidentally, soft magnetic material at both ends is made inverted cone tubular is obtained by cutting.
Soft by being processed along the line 'B-B of the central portion of the soft magnetic body 22 of the end portion of the wire and the X2 element 13' X1 of the center portion of the soft magnetic body 32 of the end portion of the element 12 B-B the end surface of the magnetic body 22 is reflected in the right and left of the three-dimensional magnetic field sensor.
This process, it is possible to shorten the length of the three-dimensional magnetic field sensor. Although it removed along with a portion of the substrate 11 by cutting the soft magnetic body 22, a crank-shaped magnetic circuit of soft magnetic material that sufficiently remains so stored affecting any of the magnetic field detection power not.

[0040]

The size of the three-dimensional magnetic field detector according to this embodiment, both ends in the length direction with respect to Example 1 from the 50μm shorter respectively, the length 440 .mu.m. The width 250μm and the thickness 120μm are the same. Therefore, it is possible to further approximately 20% smaller.

Industrial Applicability

[0041]

　3D magnetic field detecting element of the present invention, an electronic compass, a motion sensor, intended required 3D compass requires three-dimensional geomagnetic sensor such as smartphones, particularly 3-dimensional magnetic field detection device of the present invention mounting miniaturization in the direction perpendicular (the so-called Z-axis direction) in the substrate to location, is suitable for those thinning is required.
　Further three-dimensional magnetic field detection device of the micro in the future is attached to the tip of the guide wire of medical catheters, expected as a sensor for the tip portion to determine the three-dimensional position in the magnetic field space is made.

DESCRIPTION OF SYMBOLS

[0042]

1: 3-dimensional magnetic field sensor
11: substrate
12: X1 element in the X axis, 13: X2 element in the X axis, 14: Y elements in the Y-axis
21: the top of the origin soft magnetic
22: the X1 elements, and X2 element soft magnetic material of the lower end opposite to the origin
16: thickness of the three-dimensional magnetic field detection element
3: GSR device
31: amorphous wire, 32: detection coil, 33: wire terminal, 34: electrode pad 35: coil terminal, 36: electrode pad
4: crank-shaped magnetic circuit
5A: the GSR sensor electronics
51: pulse oscillation circuit (pulse generator), 52: signal processing circuit, 53: a buffer circuit, 54: detection timing adjustment circuit , 55: electronic switch, 56: sample-and-hold circuit, 57: amplifier
5B: electronic circuits of the three-dimensional magnetic field detection apparatus
58: digital circuit, 581: switching switch, 58 : AD converter, 583: arithmetic circuit 584: data communication circuit

The scope of the claims

[Requested item 1]

　In the three-dimensional magnetic field detection element made of a soft magnetic material for the magnetic flux collecting-Ho磁a magnetic field perpendicular to the magnetic field detection element and the substrate surface to detect the magnetic field of a direction parallel to the substrate plane,
　the center of the measurement of the magnetic field on the substrate surface a point as the origin,
　in the origin, the first axis direction on the substrate surface, the three axes and a third axis direction perpendicular to perpendicular to the second axis direction and the substrate surface which is perpendicular to the first axis direction intersect Te becomes,
　the magnetic field detecting elements, respectively in point symmetry with one of said magnetic field detecting element is in the first axial direction about two of the magnetic field detection element on the second axial direction the origin on the substrate placed,
　and
　the soft magnetic body is made by placing the lower end opposite to the origin of two of the magnetic field detecting element of the upper and the first axial direction of the origin,
　the second two of said magnetic field detecting element in one axial direction and 3 3D magnetic field detection element and forming a magnetic circuit of consisting of the soft magnetic body.

[Requested item 2]

　In the three-dimensional magnetic field detection element described in claim 1,
　processing the two soft magnetic material is disposed in the lower end of the magnetic field detection element is being processed in a direction perpendicular to the substrate surface 3D magnetic field sensor, characterized in that located on the surface of the end face.

[Requested item 3]

　In the three-dimensional magnetic field detection element described in claim 1 or claim 2,
　wherein the three-dimensional magnetic field sensor, the length of 0.6mm or less, characterized in that it consists of width 0.3mm or less and thickness 0.15mm or less 3D magnetic field detection element according to.

[Requested item 4]

3D magnetic field detection apparatus characterized by being joined to the 3-dimensional magnetic field detection element described an integrated circuit chip in any one of claims 1 to 3.

[Requested item 5]

Characterized in that electrically joined together by by laminating claims 1 and 3-dimensional magnetic field detection element described in any one of claims 3 and IC chip pads joined 3-dimensional magnetic field detection device.