Three Dimensional Measurement Device

Abstract: Provided is a three-dimensional measurement device that is capable of enhancing measurement accuracy and measurement efficiency. This three-dimensional measurement device 1 acquires, on the basis of captured interference fringe images, for each coordinate position on a workpiece W, a plurality of sets of reproduction images for prescribed positions in the optical axis direction. Next, on the basis of these reproduction images, the three-dimensional measurement device 1 determines optical-axis-direction focus positions at the coordinate positions and specifies orders corresponding to the optical-axis-direction focus positions as orders for the coordinate positions. Subsequently, the three-dimensional measurement device 1 acquires phase information for light at the optical-axis-direction focus positions at each coordinate position and carries out three-dimensional measurement relating to the coordinate positions on the basis of the phase information relating to the coordinate positions and the orders relating to the coordinate positions. Additionally, the three-dimensional measurement device 1 comprises an object lens 21 for emitting reference light onto a reference surface 25, an object lens 22 for emitting measurement light onto the workpiece W, and image formation lenses 30A, 30B for forming the light emitted from an interference optical system 3 into images on cameras 33A, 33B.

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