Abstract: In at least one embodiment, the method is for producing a power semiconductor device (1) and comprises the following steps: - providing a semiconductor body (2) based on SiC, - irradiating at least a first portion (21) of a top side (20) of the semiconductor body (2) with low-energy electron radiation (E), and - producing an electrical insulation layer (3) at least in the at least one irradiated first portion (21).
| # | Name | Date |
|---|---|---|
| 1 | 202447068176-STATEMENT OF UNDERTAKING (FORM 3) [10-09-2024(online)].pdf | 2024-09-10 |
| 2 | 202447068176-REQUEST FOR EXAMINATION (FORM-18) [10-09-2024(online)].pdf | 2024-09-10 |
| 3 | 202447068176-PROOF OF RIGHT [10-09-2024(online)].pdf | 2024-09-10 |
| 4 | 202447068176-PRIORITY DOCUMENTS [10-09-2024(online)].pdf | 2024-09-10 |
| 5 | 202447068176-FORM 18 [10-09-2024(online)].pdf | 2024-09-10 |
| 6 | 202447068176-FORM 1 [10-09-2024(online)].pdf | 2024-09-10 |
| 7 | 202447068176-DRAWINGS [10-09-2024(online)].pdf | 2024-09-10 |
| 8 | 202447068176-DECLARATION OF INVENTORSHIP (FORM 5) [10-09-2024(online)].pdf | 2024-09-10 |
| 9 | 202447068176-COMPLETE SPECIFICATION [10-09-2024(online)].pdf | 2024-09-10 |
| 10 | 202447068176-FORM-26 [11-09-2024(online)].pdf | 2024-09-11 |
| 11 | 202447068176-FORM 3 [10-02-2025(online)].pdf | 2025-02-10 |