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Atomic Layer Deposition Apparatus And Loading Methods
Abstract: The invention relates to methods and apparatus in which a plurality of ALD reactors are placed in a pattern in relation to each other, each ALD reactor being configured to receive a batch of substrates for ALD processing, and each ALD reactor comprising a reaction chamber accessible from the top. A plurality of loading sequences is performed with a loading robot. Each loading sequence comprises picking up a substrate holder carrying a batch of substrates in a storage area or shelf.and moving said substrate holder with said batch of substrates into the reaction chamber of the ALD reactor in question.
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
11 January 2011
Publication Number
02/2012
Publication Type
INA
Invention Field
CHEMICAL
Status
Email
Parent Application
Applicants
PICOSUN OY
TIETOTIE 3, FI - 02150 ESPOO, FINLAND,
Inventors
1. LINDFORS, SVEN
NUOTTAMIEHENTIE 8, FI - 02230 ESPOO, FINLAND,
2. POUTIAINEN, JUHA ALLAN KUSTAA-AADOLF
PATOMAENTIE 2 B, FI - 00640 HELSINKI, FINLAND,
Specification
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 236-DELNP-2011-AbandonedLetter.pdf | 2019-01-24 |
| 1 | 236-DELNP-2011-Form-5-(21-02-2011).pdf | 2011-02-21 |
| 2 | 236-DELNP-2011-FER.pdf | 2018-02-28 |
| 2 | 236-DELNP-2011-Form-3-(21-02-2011).pdf | 2011-02-21 |
| 3 | 236-DELNP-2011-Form-1-(21-02-2011).pdf | 2011-02-21 |
| 3 | 236-delnp-2011-Correspondence-Others-(26-08-2014).pdf | 2014-08-26 |
| 4 | 236-delnp-2011-Form-3-(26-08-2014).pdf | 2014-08-26 |
| 4 | 236-DELNP-2011-Correspondence-Others-(21-02-2011).pdf | 2011-02-21 |
| 5 | 236-delnp-2011-Form-3-(15-04-2011).pdf | 2011-04-15 |
| 5 | 236-delnp-2011-Correspondence Others-(29-11-2012).pdf | 2012-11-29 |
| 6 | 236-delnp-2011-Correspondence-Others-(18-06-2012).pdf | 2012-06-18 |
| 6 | 236-delnp-2011-Correspondence-Others-(15-04-2011).pdf | 2011-04-15 |
| 7 | 236-delnp-2011-Form-18-(18-06-2012).pdf | 2012-06-18 |
| 7 | 236-Delnp-2011-Form-1-(21-04-2011).pdf | 2011-04-21 |
| 8 | 236-Delnp-2011-Correspondence-Others-(21-04-2011).pdf | 2011-04-21 |
| 8 | 236-delnp-2011-abstract.pdf | 2011-08-21 |
| 9 | 236-delnp-2011-claims.pdf | 2011-08-21 |
| 9 | 236-DELNP-2011-GPA-(05-05-2011).pdf | 2011-05-05 |
| 10 | 236-DELNP-2011-Correspondence Others-(05-05-2011).pdf | 2011-05-05 |
| 10 | 236-delnp-2011-correspondence-others.pdf | 2011-08-21 |
| 11 | 236-delnp-2011-description (complete).pdf | 2011-08-21 |
| 11 | abstract.jpg | 2011-08-21 |
| 12 | 236-delnp-2011-drawings.pdf | 2011-08-21 |
| 12 | 236-delnp-2011-form-5.pdf | 2011-08-21 |
| 13 | 236-delnp-2011-form-1.pdf | 2011-08-21 |
| 13 | 236-delnp-2011-form-3.pdf | 2011-08-21 |
| 14 | 236-delnp-2011-form-2.pdf | 2011-08-21 |
| 15 | 236-delnp-2011-form-1.pdf | 2011-08-21 |
| 15 | 236-delnp-2011-form-3.pdf | 2011-08-21 |
| 16 | 236-delnp-2011-drawings.pdf | 2011-08-21 |
| 16 | 236-delnp-2011-form-5.pdf | 2011-08-21 |
| 17 | abstract.jpg | 2011-08-21 |
| 17 | 236-delnp-2011-description (complete).pdf | 2011-08-21 |
| 18 | 236-delnp-2011-correspondence-others.pdf | 2011-08-21 |
| 18 | 236-DELNP-2011-Correspondence Others-(05-05-2011).pdf | 2011-05-05 |
| 19 | 236-delnp-2011-claims.pdf | 2011-08-21 |
| 19 | 236-DELNP-2011-GPA-(05-05-2011).pdf | 2011-05-05 |
| 20 | 236-delnp-2011-abstract.pdf | 2011-08-21 |
| 20 | 236-Delnp-2011-Correspondence-Others-(21-04-2011).pdf | 2011-04-21 |
| 21 | 236-Delnp-2011-Form-1-(21-04-2011).pdf | 2011-04-21 |
| 21 | 236-delnp-2011-Form-18-(18-06-2012).pdf | 2012-06-18 |
| 22 | 236-delnp-2011-Correspondence-Others-(15-04-2011).pdf | 2011-04-15 |
| 22 | 236-delnp-2011-Correspondence-Others-(18-06-2012).pdf | 2012-06-18 |
| 23 | 236-delnp-2011-Correspondence Others-(29-11-2012).pdf | 2012-11-29 |
| 23 | 236-delnp-2011-Form-3-(15-04-2011).pdf | 2011-04-15 |
| 24 | 236-DELNP-2011-Correspondence-Others-(21-02-2011).pdf | 2011-02-21 |
| 24 | 236-delnp-2011-Form-3-(26-08-2014).pdf | 2014-08-26 |
| 25 | 236-DELNP-2011-Form-1-(21-02-2011).pdf | 2011-02-21 |
| 25 | 236-delnp-2011-Correspondence-Others-(26-08-2014).pdf | 2014-08-26 |
| 26 | 236-DELNP-2011-FER.pdf | 2018-02-28 |
| 27 | 236-DELNP-2011-AbandonedLetter.pdf | 2019-01-24 |
Search Strategy
| 1 | 236_DELNP_2011(1)_27-02-2018.pdf |