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Methods And Apparatus For Deposition Reactors
Abstract: The invention relates to a method and an apparatus in which precursor vapor (101) is guided along at least one in-feed line (141,142) into a reaction chamber (110) of a deposition reactor, and material is deposited on surfaces of a batch of vertically placed substrates (170) by establishing a vertical flow of precursor vapor in the reaction chamber and having it enter in a vertical direction in between said vertically placed substrates (170).
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
04 November 2010
Publication Number
08/2012
Publication Type
INA
Invention Field
CHEMICAL
Status
Email
Parent Application
Patent Number
Legal Status
Grant Date
2017-09-07
Renewal Date
Applicants
PICOSUN OY
TIETOTIE 3, FI-02150 ESPOO, FINLAND,
Inventors
1. LINDFORS, SVEN
NUOTTAMIEHENTIE 8, FI-02230 ESPOO, FINLAND,
Specification
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 7830-DELNP-2010-Form-3-(13-01-2011).pdf | 2011-01-13 |
| 1 | 7830-DELNP-2010-RELEVANT DOCUMENTS [29-09-2023(online)].pdf | 2023-09-29 |
| 2 | 7830-DELNP-2010-Form-1-(13-01-2011).pdf | 2011-01-13 |
| 2 | 7830-DELNP-2010-RELEVANT DOCUMENTS [28-09-2022(online)].pdf | 2022-09-28 |
| 3 | 7830-DELNP-2010-RELEVANT DOCUMENTS [12-07-2021(online)].pdf | 2021-07-12 |
| 3 | 7830-DELNP-2010-Correspondence-Others-(13-01-2011).pdf | 2011-01-13 |
| 4 | 7830-DELNP-2010-RELEVANT DOCUMENTS [17-06-2021(online)].pdf | 2021-06-17 |
| 4 | 7830-DELNP-2010-GPA-(27-01-2011).pdf | 2011-01-27 |
| 5 | 7830-DELNP-2010-RELEVANT DOCUMENTS [30-01-2020(online)].pdf | 2020-01-30 |
| 5 | 7830-DELNP-2010-Correspondence-Others-(27-01-2011).pdf | 2011-01-27 |
| 6 | abstract.jpg | 2011-08-20 |
| 6 | 7830-DELNP-2010-RELEVANT DOCUMENTS [12-01-2019(online)].pdf | 2019-01-12 |
| 7 | 7830-DELNP-2010-RELEVANT DOCUMENTS [19-03-2018(online)].pdf | 2018-03-19 |
| 7 | 7830-delnp-2010-form-5.pdf | 2011-08-20 |
| 8 | 7830-DELNP-2010-IntimationOfGrant07-09-2017.pdf | 2017-09-07 |
| 8 | 7830-delnp-2010-form-3.pdf | 2011-08-20 |
| 9 | 7830-delnp-2010-form-2.pdf | 2011-08-20 |
| 9 | 7830-DELNP-2010-PatentCertificate07-09-2017.pdf | 2017-09-07 |
| 10 | 7830-DELNP-2010-2. Marked Copy under Rule 14(2) (MANDATORY) [05-09-2017(online)].pdf | 2017-09-05 |
| 10 | 7830-delnp-2010-form-1.pdf | 2011-08-20 |
| 11 | 7830-delnp-2010-drawings.pdf | 2011-08-20 |
| 11 | 7830-DELNP-2010-FER_SER_REPLY [05-09-2017(online)].pdf | 2017-09-05 |
| 12 | 7830-delnp-2010-description (complete).pdf | 2011-08-20 |
| 12 | 7830-DELNP-2010-OTHERS [05-09-2017(online)].pdf | 2017-09-05 |
| 13 | 7830-delnp-2010-correspondence-others.pdf | 2011-08-20 |
| 13 | 7830-DELNP-2010-Retyped Pages under Rule 14(1) (MANDATORY) [05-09-2017(online)].pdf | 2017-09-05 |
| 14 | 7830-delnp-2010-abstract.pdf | 2011-08-20 |
| 14 | 7830-DELNP-2010-FER.pdf | 2017-03-08 |
| 15 | 7830-delnp-2010-claims.pdf | 2015-10-16 |
| 15 | 7830-delnp-2010-Form-18-(14-05-2012).pdf | 2012-05-14 |
| 16 | 7830-delnp-2010-Correspondence-Others-(14-05-2012).pdf | 2012-05-14 |
| 16 | 7830-delnp-2010-PCT-210.pdf | 2015-10-16 |
| 17 | 7830-delnp-2010-PCT-304.pdf | 2015-10-16 |
| 17 | 7830-delnp-2010-Form-3-(19-02-2015).pdf | 2015-02-19 |
| 18 | 7830-delnp-2010-Correspondence Others-(19-02-2015).pdf | 2015-02-19 |
| 18 | 7830-delnp-2010-PCT-409.pdf | 2015-10-16 |
| 19 | 7830-delnp-2010-PCT-416.pdf | 2015-10-16 |
| 20 | 7830-delnp-2010-Correspondence Others-(19-02-2015).pdf | 2015-02-19 |
| 20 | 7830-delnp-2010-PCT-409.pdf | 2015-10-16 |
| 21 | 7830-delnp-2010-Form-3-(19-02-2015).pdf | 2015-02-19 |
| 21 | 7830-delnp-2010-PCT-304.pdf | 2015-10-16 |
| 22 | 7830-delnp-2010-Correspondence-Others-(14-05-2012).pdf | 2012-05-14 |
| 22 | 7830-delnp-2010-PCT-210.pdf | 2015-10-16 |
| 23 | 7830-delnp-2010-claims.pdf | 2015-10-16 |
| 23 | 7830-delnp-2010-Form-18-(14-05-2012).pdf | 2012-05-14 |
| 24 | 7830-DELNP-2010-FER.pdf | 2017-03-08 |
| 24 | 7830-delnp-2010-abstract.pdf | 2011-08-20 |
| 25 | 7830-DELNP-2010-Retyped Pages under Rule 14(1) (MANDATORY) [05-09-2017(online)].pdf | 2017-09-05 |
| 25 | 7830-delnp-2010-correspondence-others.pdf | 2011-08-20 |
| 26 | 7830-delnp-2010-description (complete).pdf | 2011-08-20 |
| 26 | 7830-DELNP-2010-OTHERS [05-09-2017(online)].pdf | 2017-09-05 |
| 27 | 7830-delnp-2010-drawings.pdf | 2011-08-20 |
| 27 | 7830-DELNP-2010-FER_SER_REPLY [05-09-2017(online)].pdf | 2017-09-05 |
| 28 | 7830-DELNP-2010-2. Marked Copy under Rule 14(2) (MANDATORY) [05-09-2017(online)].pdf | 2017-09-05 |
| 28 | 7830-delnp-2010-form-1.pdf | 2011-08-20 |
| 29 | 7830-delnp-2010-form-2.pdf | 2011-08-20 |
| 29 | 7830-DELNP-2010-PatentCertificate07-09-2017.pdf | 2017-09-07 |
| 30 | 7830-delnp-2010-form-3.pdf | 2011-08-20 |
| 30 | 7830-DELNP-2010-IntimationOfGrant07-09-2017.pdf | 2017-09-07 |
| 31 | 7830-DELNP-2010-RELEVANT DOCUMENTS [19-03-2018(online)].pdf | 2018-03-19 |
| 31 | 7830-delnp-2010-form-5.pdf | 2011-08-20 |
| 32 | abstract.jpg | 2011-08-20 |
| 32 | 7830-DELNP-2010-RELEVANT DOCUMENTS [12-01-2019(online)].pdf | 2019-01-12 |
| 33 | 7830-DELNP-2010-RELEVANT DOCUMENTS [30-01-2020(online)].pdf | 2020-01-30 |
| 33 | 7830-DELNP-2010-Correspondence-Others-(27-01-2011).pdf | 2011-01-27 |
| 34 | 7830-DELNP-2010-RELEVANT DOCUMENTS [17-06-2021(online)].pdf | 2021-06-17 |
| 34 | 7830-DELNP-2010-GPA-(27-01-2011).pdf | 2011-01-27 |
| 35 | 7830-DELNP-2010-RELEVANT DOCUMENTS [12-07-2021(online)].pdf | 2021-07-12 |
| 35 | 7830-DELNP-2010-Correspondence-Others-(13-01-2011).pdf | 2011-01-13 |
| 36 | 7830-DELNP-2010-RELEVANT DOCUMENTS [28-09-2022(online)].pdf | 2022-09-28 |
| 36 | 7830-DELNP-2010-Form-1-(13-01-2011).pdf | 2011-01-13 |
| 37 | 7830-DELNP-2010-Form-3-(13-01-2011).pdf | 2011-01-13 |
| 37 | 7830-DELNP-2010-RELEVANT DOCUMENTS [29-09-2023(online)].pdf | 2023-09-29 |
Search Strategy
| 1 | NEW41_07-03-2017.pdf |