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Power Semiconductor Device With An Insulated Trench Gate Electrode And Method Of Producing A Power Semiconductor Device

Abstract: A power semiconductor device (1) with a semiconductor body (2) extending in a vertical direction between an emitter side (21) with an emitter electrode (51) and a collector side (22) opposite the emitter side (21) is specified, the power semiconductor device (1) comprising: a drift layer (26) of a first conductivity type; a base layer (28) of a second conductivity type different than the first conductivity type extending between the drift layer (26) and the emitter side (21); a source region (29) of the first conductivity type arranged on a side of the base layer (28) facing away from the drift layer (26); at least one first trench (3) extending from the emitter side (21) into the drift layer (26); an insulated trench gate electrode (30) extending into the first trench (3); at least one second trench (4) extending from the emitter side (21) into the drift layer (26), the at least one second trench (4) being arranged on a side of the at least one first trench (3) facing away from the source region (29); an electrically conductive layer (41) extending into the second trench (4), the electrically conductive layer (41) being electrically insulated from the base layer (28) and the drift layer (26); wherein: a portion (281) of the base layer (28) arranged on a side of the at least one second trench (4) facing away from the at least one first trench (3) extends from the emitter side (21) at least as deep in the vertical direction towards the collector side (22) as the at least one second trench (4); and a sub-region (6) of the power semiconductor device (1) extending between the at least one first trench (3) and the at least one second trench (4) comprises a charge carrier extraction contact (61) electrically connected to the base layer (28). Furthermore, a method of producing a power semiconductor device (1) is specified.

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Notices, Deadlines & Correspondence

Patent Information

Application #
Filing Date
16 June 2023
Publication Number
39/2024
Publication Type
INA
Invention Field
ELECTRONICS
Status
Email
Parent Application

Applicants

Hitachi Energy Ltd
Brown Boveri Strasse 5, 8050 Zurich, Switzerland

Inventors

1. DE-MICHIELIS, Luca
Buchserstrasse 10 5000 Aarau
2. GUPTA, Gaurav
Martha-Ringierstrasse 7 5600 Lenzburg
3. VITALE, Wolfgang Amadeus
Aeschbachweg 12 5000 Aarau
4. BUITRAGO, Elizabeth
Hauserstrasse 2C 5210 Windisch
5. CORVASCE, Chiara
Erlenstrasse 7 8962 Bergdietikon

Specification

Documents

Application Documents

# Name Date
1 202347041035-STATEMENT OF UNDERTAKING (FORM 3) [16-06-2023(online)].pdf 2023-06-16
2 202347041035-REQUEST FOR EXAMINATION (FORM-18) [16-06-2023(online)].pdf 2023-06-16
3 202347041035-PROOF OF RIGHT [16-06-2023(online)].pdf 2023-06-16
4 202347041035-PRIORITY DOCUMENTS [16-06-2023(online)].pdf 2023-06-16
5 202347041035-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105-PCT Pamphlet) [16-06-2023(online)].pdf 2023-06-16
6 202347041035-FORM 18 [16-06-2023(online)].pdf 2023-06-16
7 202347041035-FORM 1 [16-06-2023(online)].pdf 2023-06-16
8 202347041035-DRAWINGS [16-06-2023(online)].pdf 2023-06-16
9 202347041035-DECLARATION OF INVENTORSHIP (FORM 5) [16-06-2023(online)].pdf 2023-06-16
10 202347041035-COMPLETE SPECIFICATION [16-06-2023(online)].pdf 2023-06-16
11 202347041035-FORM-26 [26-07-2023(online)].pdf 2023-07-26
12 202347041035-FORM 3 [30-11-2023(online)].pdf 2023-11-30
13 202347041035-PA [03-04-2024(online)].pdf 2024-04-03
14 202347041035-ASSIGNMENT DOCUMENTS [03-04-2024(online)].pdf 2024-04-03
15 202347041035-8(i)-Substitution-Change Of Applicant - Form 6 [03-04-2024(online)].pdf 2024-04-03
16 202347041035-FER.pdf 2025-11-11

Search Strategy

1 202347041035_SearchStrategyNew_E_SearchHistory(9)E_07-11-2025.pdf