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Monitoring Method, Monitoring Device, And Computer Storage Medium

Abstract: This monitoring method for monitoring the inside of a clean room in which a removable grating is disposed on a floor part comprises a step for detecting an opening part from which the grating has been removed, on the basis of an image of the clean room captured by an imaging module. The detecting step comprises: (A) a step for extracting, from the image of an object for detection, opening candidates which are parts corresponding to candidates for the opening part; (B) a step for removing the opening candidate corresponding to a moving body moving in the clean room on the basis of a plurality of the images arranged in time series including the image of the object for detection; and (C) a step for narrowing down the opening candidates by the color of the opening candidate in the image of the object for detection.

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Patent Information

Application #
Filing Date
03 November 2025
Publication Number
51/2025
Publication Type
INA
Invention Field
ELECTRONICS
Status
Email
Parent Application

Applicants

TOKYO ELECTRON LIMITED
3-1, Akasaka 5-chome, Minato-ku, Tokyo 1076325

Inventors

1. OGAMI, Takayuki
c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara, Koshi City, Kumamoto 8611116
2. AKADA, Hikaru
c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara, Koshi City, Kumamoto 8611116

Specification

Documents

Application Documents

# Name Date
1 202517106246-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [03-11-2025(online)].pdf 2025-11-03
2 202517106246-STATEMENT OF UNDERTAKING (FORM 3) [03-11-2025(online)].pdf 2025-11-03
3 202517106246-REQUEST FOR EXAMINATION (FORM-18) [03-11-2025(online)].pdf 2025-11-03
4 202517106246-PROOF OF RIGHT [03-11-2025(online)].pdf 2025-11-03
5 202517106246-PRIORITY DOCUMENTS [03-11-2025(online)].pdf 2025-11-03
6 202517106246-POWER OF AUTHORITY [03-11-2025(online)].pdf 2025-11-03
7 202517106246-FORM 18 [03-11-2025(online)].pdf 2025-11-03
8 202517106246-FORM 1 [03-11-2025(online)].pdf 2025-11-03
9 202517106246-DRAWINGS [03-11-2025(online)].pdf 2025-11-03
10 202517106246-DECLARATION OF INVENTORSHIP (FORM 5) [03-11-2025(online)].pdf 2025-11-03
11 202517106246-COMPLETE SPECIFICATION [03-11-2025(online)].pdf 2025-11-03
12 202517106246-MARKED COPIES OF AMENDEMENTS [20-11-2025(online)].pdf 2025-11-20
13 202517106246-FORM 13 [20-11-2025(online)].pdf 2025-11-20
14 202517106246-AMMENDED DOCUMENTS [20-11-2025(online)].pdf 2025-11-20