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Automated Polishing System
Abstract: Provided is an automated polishing system capable of achieving a constant polished film thickness throughout a polishing process. An automated polishing system comprising: a polishing tool which includes a polishing member for polishing a region to be polished, and an electric motor for driving the polishing member; a polishing robot which moves the polishing tool with respect to the region to be polished; and a polishing controller which controls the polishing tool and the polishing robot. The automated polishing system comprises: a current measurement device which measures a consumed current value of the electric motor; and a pushing force adjustment mechanism which adjusts a force for pushing the polishing member against the region to be polished. The polishing controller is configured to adjust the pushing force of the polishing member via the pushing force adjustment mechanism on the basis of the consumed current value measured by the current measurement device such that the consumed current value is substantially constant during the polishing process.
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Notices, Deadlines & Correspondence
Notices, Deadlines & Correspondence
Patent Information
Application #
Filing Date
25 May 2021
Publication Number
03/2022
Publication Type
INA
Invention Field
MECHANICAL ENGINEERING
Status
Email
patent@depenning.com
Parent Application
Patent Number
Legal Status
Grant Date
2024-03-13
Renewal Date
Applicants
TAIKISHA LTD.
17-1, Nishishinjuku 8-chome, Shinjuku-ku, Tokyo
1606129
Inventors
1. NAKAYAMA Genji
c/o TAIKISHA LTD., 17-1, Nishishinjuku 8-chome, Shinjuku-ku, Tokyo
1606129
2. HIGASHI Yoshio
c/o TAIKISHA LTD., 17-1, Nishishinjuku 8-chome, Shinjuku-ku, Tokyo
1606129
3. HAYASHI Yoshikazu
c/o TAIKISHA LTD., 17-1, Nishishinjuku 8-chome, Shinjuku-ku, Tokyo
1606129
4. SUZUKI Hiroyuki
c/o TAIKISHA LTD., 17-1, Nishishinjuku 8-chome, Shinjuku-ku, Tokyo
1606129
5. YAMASHITA Tomoo
c/o TAIKISHA LTD., 17-1, Nishishinjuku 8-chome, Shinjuku-ku, Tokyo
1606129
Specification
Documents
Application Documents
| # | Name | Date |
|---|---|---|
| 1 | 202147023221-IntimationOfGrant13-03-2024.pdf | 2024-03-13 |
| 1 | 202147023221-STATEMENT OF UNDERTAKING (FORM 3) [25-05-2021(online)].pdf | 2021-05-25 |
| 2 | 202147023221-PatentCertificate13-03-2024.pdf | 2024-03-13 |
| 2 | 202147023221-REQUEST FOR EXAMINATION (FORM-18) [25-05-2021(online)].pdf | 2021-05-25 |
| 3 | 202147023221-PROOF OF RIGHT [25-05-2021(online)].pdf | 2021-05-25 |
| 3 | 202147023221-ABSTRACT [06-01-2023(online)].pdf | 2023-01-06 |
| 4 | 202147023221-PRIORITY DOCUMENTS [25-05-2021(online)].pdf | 2021-05-25 |
| 4 | 202147023221-CLAIMS [06-01-2023(online)].pdf | 2023-01-06 |
| 5 | 202147023221-POWER OF AUTHORITY [25-05-2021(online)].pdf | 2021-05-25 |
| 5 | 202147023221-FER_SER_REPLY [06-01-2023(online)].pdf | 2023-01-06 |
| 6 | 202147023221-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105) [25-05-2021(online)].pdf | 2021-05-25 |
| 6 | 202147023221-Information under section 8(2) [06-01-2023(online)].pdf | 2023-01-06 |
| 7 | 202147023221-OTHERS [06-01-2023(online)].pdf | 2023-01-06 |
| 7 | 202147023221-FORM 18 [25-05-2021(online)].pdf | 2021-05-25 |
| 8 | 202147023221-FORM 1 [25-05-2021(online)].pdf | 2021-05-25 |
| 8 | 202147023221-FER.pdf | 2022-07-13 |
| 9 | 202147023221-Correspondence_Form-1_15-03-2022.pdf | 2022-03-15 |
| 9 | 202147023221-DRAWINGS [25-05-2021(online)].pdf | 2021-05-25 |
| 10 | 202147023221-DECLARATION OF INVENTORSHIP (FORM 5) [25-05-2021(online)].pdf | 2021-05-25 |
| 10 | 202147023221-EVIDENCE OF ELIGIBILTY RULE 24C1j [18-01-2022(online)].pdf | 2022-01-18 |
| 11 | 202147023221-COMPLETE SPECIFICATION [25-05-2021(online)].pdf | 2021-05-25 |
| 11 | 202147023221-FORM 18A [18-01-2022(online)].pdf | 2022-01-18 |
| 12 | 202147023221-FORM-26 [19-06-2021(online)].pdf | 2021-06-19 |
| 12 | 202147023221-FORM-9 [18-01-2022(online)].pdf | 2022-01-18 |
| 13 | 202147023221-AMMENDED DOCUMENTS [11-01-2022(online)].pdf | 2022-01-11 |
| 13 | 202147023221.pdf | 2021-10-18 |
| 14 | 202147023221-Correspondence And POA_22-10-2021.pdf | 2021-10-22 |
| 14 | 202147023221-FORM 13 [11-01-2022(online)].pdf | 2022-01-11 |
| 15 | 202147023221-FORM 3 [24-11-2021(online)].pdf | 2021-11-24 |
| 15 | 202147023221-MARKED COPIES OF AMENDEMENTS [11-01-2022(online)].pdf | 2022-01-11 |
| 16 | 202147023221-RELEVANT DOCUMENTS [11-01-2022(online)].pdf | 2022-01-11 |
| 17 | 202147023221-MARKED COPIES OF AMENDEMENTS [11-01-2022(online)].pdf | 2022-01-11 |
| 17 | 202147023221-FORM 3 [24-11-2021(online)].pdf | 2021-11-24 |
| 18 | 202147023221-FORM 13 [11-01-2022(online)].pdf | 2022-01-11 |
| 18 | 202147023221-Correspondence And POA_22-10-2021.pdf | 2021-10-22 |
| 19 | 202147023221-AMMENDED DOCUMENTS [11-01-2022(online)].pdf | 2022-01-11 |
| 19 | 202147023221.pdf | 2021-10-18 |
| 20 | 202147023221-FORM-26 [19-06-2021(online)].pdf | 2021-06-19 |
| 20 | 202147023221-FORM-9 [18-01-2022(online)].pdf | 2022-01-18 |
| 21 | 202147023221-COMPLETE SPECIFICATION [25-05-2021(online)].pdf | 2021-05-25 |
| 21 | 202147023221-FORM 18A [18-01-2022(online)].pdf | 2022-01-18 |
| 22 | 202147023221-DECLARATION OF INVENTORSHIP (FORM 5) [25-05-2021(online)].pdf | 2021-05-25 |
| 22 | 202147023221-EVIDENCE OF ELIGIBILTY RULE 24C1j [18-01-2022(online)].pdf | 2022-01-18 |
| 23 | 202147023221-Correspondence_Form-1_15-03-2022.pdf | 2022-03-15 |
| 23 | 202147023221-DRAWINGS [25-05-2021(online)].pdf | 2021-05-25 |
| 24 | 202147023221-FORM 1 [25-05-2021(online)].pdf | 2021-05-25 |
| 24 | 202147023221-FER.pdf | 2022-07-13 |
| 25 | 202147023221-OTHERS [06-01-2023(online)].pdf | 2023-01-06 |
| 25 | 202147023221-FORM 18 [25-05-2021(online)].pdf | 2021-05-25 |
| 26 | 202147023221-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105) [25-05-2021(online)].pdf | 2021-05-25 |
| 26 | 202147023221-Information under section 8(2) [06-01-2023(online)].pdf | 2023-01-06 |
| 27 | 202147023221-POWER OF AUTHORITY [25-05-2021(online)].pdf | 2021-05-25 |
| 27 | 202147023221-FER_SER_REPLY [06-01-2023(online)].pdf | 2023-01-06 |
| 28 | 202147023221-PRIORITY DOCUMENTS [25-05-2021(online)].pdf | 2021-05-25 |
| 28 | 202147023221-CLAIMS [06-01-2023(online)].pdf | 2023-01-06 |
| 29 | 202147023221-PROOF OF RIGHT [25-05-2021(online)].pdf | 2021-05-25 |
| 29 | 202147023221-ABSTRACT [06-01-2023(online)].pdf | 2023-01-06 |
| 30 | 202147023221-REQUEST FOR EXAMINATION (FORM-18) [25-05-2021(online)].pdf | 2021-05-25 |
| 30 | 202147023221-PatentCertificate13-03-2024.pdf | 2024-03-13 |
| 31 | 202147023221-IntimationOfGrant13-03-2024.pdf | 2024-03-13 |
| 31 | 202147023221-STATEMENT OF UNDERTAKING (FORM 3) [25-05-2021(online)].pdf | 2021-05-25 |
Search Strategy
| 1 | 202147023221E_13-04-2022.pdf |